YaskawaNxcAligner.cs 91 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.Communications;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.YaskawaRobots;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.YaskawaAligner
  19. {
  20. public class YaskawaNxcAligner:AlignerBaseDevice,IConnection
  21. {
  22. public bool IsNeedMtrsAfterAction { get; set; }
  23. public YaskawaNxcAligner(string module,string name,string scRoot,IoSensor[] dis,IoTrigger[] dos, int alignerType = 0) :base(module,name)
  24. {
  25. isSimulatorMode = SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue<bool>("System.IsSimulatorMode") : false;
  26. _scRoot = scRoot;
  27. _address = SC.GetStringValue($"{_scRoot}.{Name}.Address");
  28. _enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
  29. UnitNumber = SC.GetValue<int>($"{_scRoot}.{Name}.UnitNumber");
  30. IsEnableCheckSum = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableCheckSum");
  31. IsEnableSeqNo = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableSeqNo");
  32. AlignerType = alignerType;
  33. _connection = new YaskawaNxcAlignerConnection(this,_address);
  34. _connection.EnableLog(_enableLog);
  35. SeqnoGenerator = new YaskawaTokenGenerator($"{_scRoot}.{Name}.CommunicationToken");
  36. if(dis!= null && dis.Length >=1)
  37. _diPreAlignerWaferOn = dis[0];
  38. if (dis != null && dis.Length >= 2)
  39. _diPreAlignerReady = dis[1];
  40. if (dis != null && dis.Length >= 3)
  41. {
  42. _diPreAlignerError = dis[2];
  43. _diPreAlignerError.OnSignalChanged += _diPreAlignerError_OnSignalChanged;
  44. }
  45. if (dis != null && dis.Length >= 4)
  46. {
  47. _diTPinUse = dis[3];
  48. _diTPinUse.OnSignalChanged += _diTPinUse_OnSignalChanged;
  49. }
  50. if (dos != null && dos.Length >= 1)
  51. {
  52. _doPreAlignerHold = dos[0];
  53. _doPreAlignerHold.SetTrigger(true, out _);
  54. }
  55. ConnectionManager.Instance.Subscribe($"{Name}", this);
  56. _thread = new PeriodicJob(100, OnTimer, $"{_scRoot}.{Name} MonitorHandler", true);
  57. ResetPropertiesAndResponses();
  58. RegisterSpecialData();
  59. //RegisterAlarm();
  60. }
  61. private void RegisterAlarm()
  62. {
  63. EV.Subscribe(new EventItem("Alarm", "AlignerError020", $"{Name} Error:Aligner Occurred Error:Secondary power off.", EventLevel.Alarm, EventType.EventUI_Notify));
  64. EV.Subscribe(new EventItem("Alarm", "AlignerError021", $"{Name} Error:Aligner Occurred Error:Secondary power on.", EventLevel.Alarm, EventType.EventUI_Notify));
  65. EV.Subscribe(new EventItem("Alarm", "AlignerError040", $"{Name} Error:Aligner Occurred Error:In TEACH Mode.", EventLevel.Alarm, EventType.EventUI_Notify));
  66. EV.Subscribe(new EventItem("Alarm", "AlignerError050", $"{Name} Error:Aligner Occurred Error:Unit is in motion.", EventLevel.Alarm, EventType.EventUI_Notify));
  67. EV.Subscribe(new EventItem("Alarm", "AlignerError051", $"{Name} Error:Aligner Occurred Error:Unable to set pitch between slots.", EventLevel.Alarm, EventType.EventUI_Notify));
  68. EV.Subscribe(new EventItem("Alarm", "AlignerError052", $"{Name} Error:Aligner Occurred Error:Unable to restart motion.", EventLevel.Alarm, EventType.EventUI_Notify));
  69. EV.Subscribe(new EventItem("Alarm", "AlignerError053", $"{Name} Error:Aligner Occurred Error:Ready position moveincomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
  70. EV.Subscribe(new EventItem("Alarm", "AlignerError054", $"{Name} Error:Aligner Occurred Error:Alignment Ready position move incomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
  71. EV.Subscribe(new EventItem("Alarm", "AlignerError055", $"{Name} Error:Aligner Occurred Error:Improper station type.", EventLevel.Alarm, EventType.EventUI_Notify));
  72. EV.Subscribe(new EventItem("Alarm", "AlignerError058", $"{Name} Error:Aligner Occurred Error:Command not supported 1-1.", EventLevel.Alarm, EventType.EventUI_Notify));
  73. EV.Subscribe(new EventItem("Alarm", "AlignerError059", $"{Name} Error:Aligner Occurred Error:Invalid transfer point.", EventLevel.Alarm, EventType.EventUI_Notify));
  74. EV.Subscribe(new EventItem("Alarm", "AlignerError05A", $"{Name} Error:Aligner Occurred Error:Linear motion failed.", EventLevel.Alarm, EventType.EventUI_Notify));
  75. EV.Subscribe(new EventItem("Alarm", "AlignerError05C", $"{Name} Error:Aligner Occurred Error:Unable to reference waferalignment result.", EventLevel.Alarm, EventType.EventUI_Notify));
  76. EV.Subscribe(new EventItem("Alarm", "AlignerError05d", $"{Name} Error:Aligner Occurred Error:Unable to perform armcalibration.", EventLevel.Alarm, EventType.EventUI_Notify));
  77. EV.Subscribe(new EventItem("Alarm", "AlignerError05E", $"{Name} Error:Aligner Occurred Error:Unable to read mapping data.", EventLevel.Alarm, EventType.EventUI_Notify));
  78. EV.Subscribe(new EventItem("Alarm", "AlignerError05F", $"{Name} Error:Aligner Occurred Error:Data Upload/Download inprogress.", EventLevel.Alarm, EventType.EventUI_Notify));
  79. EV.Subscribe(new EventItem("Alarm", "AlignerError061", $"{Name} Error:Aligner Occurred Error:Unable to motion.", EventLevel.Alarm, EventType.EventUI_Notify));
  80. EV.Subscribe(new EventItem("Alarm", "AlignerError064", $"{Name} Error:Aligner Occurred Error:Lifter interference error.", EventLevel.Alarm, EventType.EventUI_Notify));
  81. EV.Subscribe(new EventItem("Alarm", "AlignerError070", $"{Name} Error:Aligner Occurred Error:Bottom slot position recordincomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
  82. EV.Subscribe(new EventItem("Alarm", "AlignerError071", $"{Name} Error:Aligner Occurred Error:Top slot position record incomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
  83. EV.Subscribe(new EventItem("Alarm", "AlignerError088", $"{Name} Error:Aligner Occurred Error:Position generating error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  84. EV.Subscribe(new EventItem("Alarm", "AlignerError089", $"{Name} Error:Aligner Occurred Error:Position generating error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  85. EV.Subscribe(new EventItem("Alarm", "AlignerError08A", $"{Name} Error:Aligner Occurred Error:Position generating error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  86. EV.Subscribe(new EventItem("Alarm", "AlignerError08b", $"{Name} Error:Aligner Occurred Error:Position generating error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  87. EV.Subscribe(new EventItem("Alarm", "AlignerError08C", $"{Name} Error:Aligner Occurred Error:Position generating error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  88. EV.Subscribe(new EventItem("Alarm", "AlignerError08d", $"{Name} Error:Aligner Occurred Error:Position generating error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
  89. EV.Subscribe(new EventItem("Alarm", "AlignerError090", $"{Name} Error:Aligner Occurred Error:Host parameter out of range.", EventLevel.Alarm, EventType.EventUI_Notify));
  90. EV.Subscribe(new EventItem("Alarm", "AlignerError0A0", $"{Name} Error:Aligner Occurred Error:Alignment motion error.", EventLevel.Alarm, EventType.EventUI_Notify));
  91. EV.Subscribe(new EventItem("Alarm", "AlignerError0E0", $"{Name} Error:Aligner Occurred Error:Teach position adjustmentoffset amount limit error.", EventLevel.Alarm, EventType.EventUI_Notify));
  92. EV.Subscribe(new EventItem("Alarm", "AlignerError0F0", $"{Name} Error:Aligner Occurred Error:Voltage drop warning.", EventLevel.Alarm, EventType.EventUI_Notify));
  93. EV.Subscribe(new EventItem("Alarm", "AlignerError*06", $"{Name} Error:Aligner Occurred Error:Amplifier Type Mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  94. EV.Subscribe(new EventItem("Alarm", "AlignerError*07", $"{Name} Error:Aligner Occurred Error:Encoder Type Mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  95. EV.Subscribe(new EventItem("Alarm", "AlignerError*10", $"{Name} Error:Aligner Occurred Error:Overflow Current.", EventLevel.Alarm, EventType.EventUI_Notify));
  96. EV.Subscribe(new EventItem("Alarm", "AlignerError*30", $"{Name} Error:Aligner Occurred Error:Regeneration Error Detected.", EventLevel.Alarm, EventType.EventUI_Notify));
  97. EV.Subscribe(new EventItem("Alarm", "AlignerError*40", $"{Name} Error:Aligner Occurred Error:Excess Voltage (converter).", EventLevel.Alarm, EventType.EventUI_Notify));
  98. EV.Subscribe(new EventItem("Alarm", "AlignerError*41", $"{Name} Error:Aligner Occurred Error:Insufficient Voltage.", EventLevel.Alarm, EventType.EventUI_Notify));
  99. EV.Subscribe(new EventItem("Alarm", "AlignerError*45", $"{Name} Error:Aligner Occurred Error:Brake circuit error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  100. EV.Subscribe(new EventItem("Alarm", "AlignerError*46", $"{Name} Error:Aligner Occurred Error:Converter ready signal error.", EventLevel.Alarm, EventType.EventUI_Notify));
  101. EV.Subscribe(new EventItem("Alarm", "AlignerError*47", $"{Name} Error:Aligner Occurred Error:Input power error.", EventLevel.Alarm, EventType.EventUI_Notify));
  102. EV.Subscribe(new EventItem("Alarm", "AlignerError*48", $"{Name} Error:Aligner Occurred Error:Converter main circuit chargeerror.", EventLevel.Alarm, EventType.EventUI_Notify));
  103. EV.Subscribe(new EventItem("Alarm", "AlignerError*49", $"{Name} Error:Aligner Occurred Error:Amplifier ready signal error.", EventLevel.Alarm, EventType.EventUI_Notify));
  104. EV.Subscribe(new EventItem("Alarm", "AlignerError*51", $"{Name} Error:Aligner Occurred Error:Excessive Speed.", EventLevel.Alarm, EventType.EventUI_Notify));
  105. EV.Subscribe(new EventItem("Alarm", "AlignerError*71", $"{Name} Error:Aligner Occurred Error:Momentary Overload (Motor).", EventLevel.Alarm, EventType.EventUI_Notify));
  106. EV.Subscribe(new EventItem("Alarm", "AlignerError*72", $"{Name} Error:Aligner Occurred Error:Continuous Overload (Motor).", EventLevel.Alarm, EventType.EventUI_Notify));
  107. EV.Subscribe(new EventItem("Alarm", "AlignerError*78", $"{Name} Error:Aligner Occurred Error:Overload (Converter).", EventLevel.Alarm, EventType.EventUI_Notify));
  108. EV.Subscribe(new EventItem("Alarm", "AlignerError*7b", $"{Name} Error:Aligner Occurred Error:Amplifier overheat.", EventLevel.Alarm, EventType.EventUI_Notify));
  109. EV.Subscribe(new EventItem("Alarm", "AlignerError*7C", $"{Name} Error:Aligner Occurred Error:Continuous Overload(Amplifier).", EventLevel.Alarm, EventType.EventUI_Notify));
  110. EV.Subscribe(new EventItem("Alarm", "AlignerError*7d", $"{Name} Error:Aligner Occurred Error:Momentary Overload.", EventLevel.Alarm, EventType.EventUI_Notify));
  111. EV.Subscribe(new EventItem("Alarm", "AlignerError*81", $"{Name} Error:Aligner Occurred Error:Absolute Encoder Back-upError.", EventLevel.Alarm, EventType.EventUI_Notify));
  112. EV.Subscribe(new EventItem("Alarm", "AlignerError*83", $"{Name} Error:Aligner Occurred Error:Absolute Encoder Battery.", EventLevel.Alarm, EventType.EventUI_Notify));
  113. EV.Subscribe(new EventItem("Alarm", "AlignerError*84", $"{Name} Error:Aligner Occurred Error:Encoder Data Error 2-1.", EventLevel.Alarm, EventType.EventUI_Notify));
  114. EV.Subscribe(new EventItem("Alarm", "AlignerError*85", $"{Name} Error:Aligner Occurred Error:Encoder Excessive Speed.", EventLevel.Alarm, EventType.EventUI_Notify));
  115. EV.Subscribe(new EventItem("Alarm", "AlignerError*86", $"{Name} Error:Aligner Occurred Error:Encoder Overheat.", EventLevel.Alarm, EventType.EventUI_Notify));
  116. EV.Subscribe(new EventItem("Alarm", "AlignerError*88", $"{Name} Error:Aligner Occurred Error:Encoder error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  117. EV.Subscribe(new EventItem("Alarm", "AlignerError*89", $"{Name} Error:Aligner Occurred Error:Encoder Command failed.", EventLevel.Alarm, EventType.EventUI_Notify));
  118. EV.Subscribe(new EventItem("Alarm", "AlignerError*8A", $"{Name} Error:Aligner Occurred Error:Encoder multi-turn range.", EventLevel.Alarm, EventType.EventUI_Notify));
  119. EV.Subscribe(new EventItem("Alarm", "AlignerError*8C", $"{Name} Error:Aligner Occurred Error:Encoder Reset not completed.", EventLevel.Alarm, EventType.EventUI_Notify));
  120. EV.Subscribe(new EventItem("Alarm", "AlignerError*98", $"{Name} Error:Aligner Occurred Error:Servo parameter error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  121. EV.Subscribe(new EventItem("Alarm", "AlignerError*9A", $"{Name} Error:Aligner Occurred Error:Feedback Over Flow.", EventLevel.Alarm, EventType.EventUI_Notify));
  122. EV.Subscribe(new EventItem("Alarm", "AlignerError*b4", $"{Name} Error:Aligner Occurred Error:Servo Control Board Failure.", EventLevel.Alarm, EventType.EventUI_Notify));
  123. EV.Subscribe(new EventItem("Alarm", "AlignerError*bC", $"{Name} Error:Aligner Occurred Error:Encoder error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  124. EV.Subscribe(new EventItem("Alarm", "AlignerError*C1", $"{Name} Error:Aligner Occurred Error:Motor runaway detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  125. EV.Subscribe(new EventItem("Alarm", "AlignerError*C9", $"{Name} Error:Aligner Occurred Error:Encoder Communication.", EventLevel.Alarm, EventType.EventUI_Notify));
  126. EV.Subscribe(new EventItem("Alarm", "AlignerError*CE", $"{Name} Error:Aligner Occurred Error:Encoder error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  127. EV.Subscribe(new EventItem("Alarm", "AlignerError*CF", $"{Name} Error:Aligner Occurred Error:Encoder error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  128. EV.Subscribe(new EventItem("Alarm", "AlignerError*d0", $"{Name} Error:Aligner Occurred Error:Position deviation error.", EventLevel.Alarm, EventType.EventUI_Notify));
  129. EV.Subscribe(new EventItem("Alarm", "AlignerError*d1", $"{Name} Error:Aligner Occurred Error:Position deviation saturation.", EventLevel.Alarm, EventType.EventUI_Notify));
  130. EV.Subscribe(new EventItem("Alarm", "AlignerError*d2", $"{Name} Error:Aligner Occurred Error:Motor directive position error.", EventLevel.Alarm, EventType.EventUI_Notify));
  131. EV.Subscribe(new EventItem("Alarm", "AlignerError*d4", $"{Name} Error:Aligner Occurred Error:Servo Tracking Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  132. EV.Subscribe(new EventItem("Alarm", "AlignerError*F1", $"{Name} Error:Aligner Occurred Error:Phase loss.", EventLevel.Alarm, EventType.EventUI_Notify));
  133. EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*1", $"{Name} Error:Aligner Occurred Error:Positioning Timeout.", EventLevel.Alarm, EventType.EventUI_Notify));
  134. EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*d", $"{Name} Error:Aligner Occurred Error:Command not supported 1-2.", EventLevel.Alarm, EventType.EventUI_Notify));
  135. EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*E", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-1.", EventLevel.Alarm, EventType.EventUI_Notify));
  136. EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*F", $"{Name} Error:Aligner Occurred Error:Servo control board responsetimeout 1..", EventLevel.Alarm, EventType.EventUI_Notify));
  137. EV.Subscribe(new EventItem("Alarm", "AlignerError701", $"{Name} Error:Aligner Occurred Error:ROM Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  138. EV.Subscribe(new EventItem("Alarm", "AlignerError703", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-1.", EventLevel.Alarm, EventType.EventUI_Notify));
  139. EV.Subscribe(new EventItem("Alarm", "AlignerError704", $"{Name} Error:Aligner Occurred Error:Communication Error (internal controller) 2-2.", EventLevel.Alarm, EventType.EventUI_Notify));
  140. EV.Subscribe(new EventItem("Alarm", "AlignerError705", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-3.", EventLevel.Alarm, EventType.EventUI_Notify));
  141. EV.Subscribe(new EventItem("Alarm", "AlignerError706", $"{Name} Error:Aligner Occurred Error:Servo system error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  142. EV.Subscribe(new EventItem("Alarm", "AlignerError707", $"{Name} Error:Aligner Occurred Error:Servo system error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  143. EV.Subscribe(new EventItem("Alarm", "AlignerError709", $"{Name} Error:Aligner Occurred Error:Current feedback error.", EventLevel.Alarm, EventType.EventUI_Notify));
  144. EV.Subscribe(new EventItem("Alarm", "AlignerError70A", $"{Name} Error:Aligner Occurred Error:Power Lost.", EventLevel.Alarm, EventType.EventUI_Notify));
  145. EV.Subscribe(new EventItem("Alarm", "AlignerError70b", $"{Name} Error:Aligner Occurred Error:Rush Current PreventionRelay Abnormal.", EventLevel.Alarm, EventType.EventUI_Notify));
  146. EV.Subscribe(new EventItem("Alarm", "AlignerError70C", $"{Name} Error:Aligner Occurred Error:Converter mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  147. EV.Subscribe(new EventItem("Alarm", "AlignerError70F", $"{Name} Error:Aligner Occurred Error:Servo control board response timeout 2..", EventLevel.Alarm, EventType.EventUI_Notify));
  148. EV.Subscribe(new EventItem("Alarm", "AlignerError713", $"{Name} Error:Aligner Occurred Error:DB error.", EventLevel.Alarm, EventType.EventUI_Notify));
  149. EV.Subscribe(new EventItem("Alarm", "AlignerError714", $"{Name} Error:Aligner Occurred Error:Converter charge Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  150. EV.Subscribe(new EventItem("Alarm", "AlignerError715", $"{Name} Error:Aligner Occurred Error:Servo OFF Status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  151. EV.Subscribe(new EventItem("Alarm", "AlignerError716", $"{Name} Error:Aligner Occurred Error:Servo ON Status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  152. EV.Subscribe(new EventItem("Alarm", "AlignerError717", $"{Name} Error:Aligner Occurred Error:Servo OFF Status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  153. EV.Subscribe(new EventItem("Alarm", "AlignerError718", $"{Name} Error:Aligner Occurred Error:Servo ON Status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  154. EV.Subscribe(new EventItem("Alarm", "AlignerError719", $"{Name} Error:Aligner Occurred Error:Servo On Abnormal.", EventLevel.Alarm, EventType.EventUI_Notify));
  155. EV.Subscribe(new EventItem("Alarm", "AlignerError71A", $"{Name} Error:Aligner Occurred Error:Brake circuit error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  156. EV.Subscribe(new EventItem("Alarm", "AlignerError71b", $"{Name} Error:Aligner Occurred Error:Brake circuit error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  157. EV.Subscribe(new EventItem("Alarm", "AlignerError71C", $"{Name} Error:Aligner Occurred Error:Power relay error.", EventLevel.Alarm, EventType.EventUI_Notify));
  158. EV.Subscribe(new EventItem("Alarm", "AlignerError721", $"{Name} Error:Aligner Occurred Error:Servo parameter error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  159. EV.Subscribe(new EventItem("Alarm", "AlignerError722", $"{Name} Error:Aligner Occurred Error:Servo parameter error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  160. EV.Subscribe(new EventItem("Alarm", "AlignerError725", $"{Name} Error:Aligner Occurred Error:Converter Overheat.", EventLevel.Alarm, EventType.EventUI_Notify));
  161. EV.Subscribe(new EventItem("Alarm", "AlignerError726", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-4.", EventLevel.Alarm, EventType.EventUI_Notify));
  162. EV.Subscribe(new EventItem("Alarm", "AlignerError727", $"{Name} Error:Aligner Occurred Error:Command not supported 1-2.", EventLevel.Alarm, EventType.EventUI_Notify));
  163. EV.Subscribe(new EventItem("Alarm", "AlignerError728", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-5.", EventLevel.Alarm, EventType.EventUI_Notify));
  164. EV.Subscribe(new EventItem("Alarm", "AlignerError729", $"{Name} Error:Aligner Occurred Error:Servo system error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  165. EV.Subscribe(new EventItem("Alarm", "AlignerError72A", $"{Name} Error:Aligner Occurred Error:Servo system error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  166. EV.Subscribe(new EventItem("Alarm", "AlignerError72b", $"{Name} Error:Aligner Occurred Error:Servo parameter error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  167. EV.Subscribe(new EventItem("Alarm", "AlignerError730", $"{Name} Error:Aligner Occurred Error:Amp module disconnected..", EventLevel.Alarm, EventType.EventUI_Notify));
  168. EV.Subscribe(new EventItem("Alarm", "AlignerError732", $"{Name} Error:Aligner Occurred Error:Servo parameter error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  169. EV.Subscribe(new EventItem("Alarm", "AlignerError733", $"{Name} Error:Aligner Occurred Error:Servo parameter error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
  170. EV.Subscribe(new EventItem("Alarm", "AlignerError734", $"{Name} Error:Aligner Occurred Error:Servo parameter error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
  171. EV.Subscribe(new EventItem("Alarm", "AlignerError735", $"{Name} Error:Aligner Occurred Error:Servo parameter error 8.", EventLevel.Alarm, EventType.EventUI_Notify));
  172. EV.Subscribe(new EventItem("Alarm", "AlignerError73F", $"{Name} Error:Aligner Occurred Error:Undefined Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  173. EV.Subscribe(new EventItem("Alarm", "AlignerError740", $"{Name} Error:Aligner Occurred Error:Encoder Status Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  174. EV.Subscribe(new EventItem("Alarm", "AlignerError741", $"{Name} Error:Aligner Occurred Error:Servo system error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  175. EV.Subscribe(new EventItem("Alarm", "AlignerError742", $"{Name} Error:Aligner Occurred Error:Servo system error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
  176. EV.Subscribe(new EventItem("Alarm", "AlignerError743", $"{Name} Error:Aligner Occurred Error:Servo system error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
  177. EV.Subscribe(new EventItem("Alarm", "AlignerError744", $"{Name} Error:Aligner Occurred Error:Servo system error 8.", EventLevel.Alarm, EventType.EventUI_Notify));
  178. EV.Subscribe(new EventItem("Alarm", "AlignerError745", $"{Name} Error:Aligner Occurred Error:Servo system error 9.", EventLevel.Alarm, EventType.EventUI_Notify));
  179. EV.Subscribe(new EventItem("Alarm", "AlignerError746", $"{Name} Error:Aligner Occurred Error:Servo system error 10.", EventLevel.Alarm, EventType.EventUI_Notify));
  180. EV.Subscribe(new EventItem("Alarm", "AlignerError74A", $"{Name} Error:Aligner Occurred Error:Servo system error 11.", EventLevel.Alarm, EventType.EventUI_Notify));
  181. EV.Subscribe(new EventItem("Alarm", "AlignerError74b", $"{Name} Error:Aligner Occurred Error:Servo system error 12.", EventLevel.Alarm, EventType.EventUI_Notify));
  182. EV.Subscribe(new EventItem("Alarm", "AlignerError74C", $"{Name} Error:Aligner Occurred Error:Servo system error 13.", EventLevel.Alarm, EventType.EventUI_Notify));
  183. EV.Subscribe(new EventItem("Alarm", "AlignerError74d", $"{Name} Error:Aligner Occurred Error:Servo system error 14.", EventLevel.Alarm, EventType.EventUI_Notify));
  184. EV.Subscribe(new EventItem("Alarm", "AlignerError7A0", $"{Name} Error:Aligner Occurred Error:Communication Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  185. EV.Subscribe(new EventItem("Alarm", "AlignerError7A1", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 3-2.", EventLevel.Alarm, EventType.EventUI_Notify));
  186. EV.Subscribe(new EventItem("Alarm", "AlignerError7A2", $"{Name} Error:Aligner Occurred Error:Command not supported 3-1.", EventLevel.Alarm, EventType.EventUI_Notify));
  187. EV.Subscribe(new EventItem("Alarm", "AlignerError7A3", $"{Name} Error:Aligner Occurred Error:Data buffer full.", EventLevel.Alarm, EventType.EventUI_Notify));
  188. EV.Subscribe(new EventItem("Alarm", "AlignerError7A4", $"{Name} Error:Aligner Occurred Error:Command not supported 3-2.", EventLevel.Alarm, EventType.EventUI_Notify));
  189. EV.Subscribe(new EventItem("Alarm", "AlignerError7A5", $"{Name} Error:Aligner Occurred Error:Encoder data error 3-1.", EventLevel.Alarm, EventType.EventUI_Notify));
  190. EV.Subscribe(new EventItem("Alarm", "AlignerError7A6", $"{Name} Error:Aligner Occurred Error:Command not supported 3-3.", EventLevel.Alarm, EventType.EventUI_Notify));
  191. EV.Subscribe(new EventItem("Alarm", "AlignerError7AE", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-2.", EventLevel.Alarm, EventType.EventUI_Notify));
  192. EV.Subscribe(new EventItem("Alarm", "AlignerError7AF", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-3.", EventLevel.Alarm, EventType.EventUI_Notify));
  193. EV.Subscribe(new EventItem("Alarm", "AlignerError7b0", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  194. EV.Subscribe(new EventItem("Alarm", "AlignerError7b4", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  195. EV.Subscribe(new EventItem("Alarm", "AlignerError7b5", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  196. EV.Subscribe(new EventItem("Alarm", "AlignerError7C0", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  197. EV.Subscribe(new EventItem("Alarm", "AlignerError7C1", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  198. EV.Subscribe(new EventItem("Alarm", "AlignerError7C2", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  199. EV.Subscribe(new EventItem("Alarm", "AlignerError7C3", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  200. EV.Subscribe(new EventItem("Alarm", "AlignerError7CF", $"{Name} Error:Aligner Occurred Error:PAIF board disconnected.", EventLevel.Alarm, EventType.EventUI_Notify));
  201. EV.Subscribe(new EventItem("Alarm", "AlignerError7d0", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  202. EV.Subscribe(new EventItem("Alarm", "AlignerError7d1", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  203. EV.Subscribe(new EventItem("Alarm", "AlignerError", $"{Name} Error:Aligner Occurred Error:.", EventLevel.Alarm, EventType.EventUI_Notify));
  204. EV.Subscribe(new EventItem("Alarm", "AlignerError900", $"{Name} Error:Aligner Occurred Error:Character Interval Timeout.", EventLevel.Alarm, EventType.EventUI_Notify));
  205. EV.Subscribe(new EventItem("Alarm", "AlignerError910", $"{Name} Error:Aligner Occurred Error:Received Data ChecksumError.", EventLevel.Alarm, EventType.EventUI_Notify));
  206. EV.Subscribe(new EventItem("Alarm", "AlignerError920", $"{Name} Error:Aligner Occurred Error:Unit Number Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  207. EV.Subscribe(new EventItem("Alarm", "AlignerError930", $"{Name} Error:Aligner Occurred Error:Undefined CommandReceived.", EventLevel.Alarm, EventType.EventUI_Notify));
  208. EV.Subscribe(new EventItem("Alarm", "AlignerError940", $"{Name} Error:Aligner Occurred Error:Message Parameter Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  209. EV.Subscribe(new EventItem("Alarm", "AlignerError950", $"{Name} Error:Aligner Occurred Error:Receiving Time-out Error for Confirmation of Execution Completion.", EventLevel.Alarm, EventType.EventUI_Notify));
  210. EV.Subscribe(new EventItem("Alarm", "AlignerError960", $"{Name} Error:Aligner Occurred Error:Incorrect sequence number.", EventLevel.Alarm, EventType.EventUI_Notify));
  211. EV.Subscribe(new EventItem("Alarm", "AlignerError961", $"{Name} Error:Aligner Occurred Error:Duplicated message.", EventLevel.Alarm, EventType.EventUI_Notify));
  212. EV.Subscribe(new EventItem("Alarm", "AlignerError970", $"{Name} Error:Aligner Occurred Error:Delimiter error.", EventLevel.Alarm, EventType.EventUI_Notify));
  213. EV.Subscribe(new EventItem("Alarm", "AlignerError9A1", $"{Name} Error:Aligner Occurred Error:Message buffer overflow.", EventLevel.Alarm, EventType.EventUI_Notify));
  214. EV.Subscribe(new EventItem("Alarm", "AlignerError9C0", $"{Name} Error:Aligner Occurred Error:LAN device setting error.", EventLevel.Alarm, EventType.EventUI_Notify));
  215. EV.Subscribe(new EventItem("Alarm", "AlignerError9C1", $"{Name} Error:Aligner Occurred Error:IP address error.", EventLevel.Alarm, EventType.EventUI_Notify));
  216. EV.Subscribe(new EventItem("Alarm", "AlignerError9C2", $"{Name} Error:Aligner Occurred Error:Subnet mask error.", EventLevel.Alarm, EventType.EventUI_Notify));
  217. EV.Subscribe(new EventItem("Alarm", "AlignerError9C3", $"{Name} Error:Aligner Occurred Error:Default gateway error.", EventLevel.Alarm, EventType.EventUI_Notify));
  218. EV.Subscribe(new EventItem("Alarm", "AlignerError9d0", $"{Name} Error:Aligner Occurred Error:Ethernet receive error.", EventLevel.Alarm, EventType.EventUI_Notify));
  219. EV.Subscribe(new EventItem("Alarm", "AlignerError9E0", $"{Name} Error:Aligner Occurred Error:During operation themaintenance tool.", EventLevel.Alarm, EventType.EventUI_Notify));
  220. EV.Subscribe(new EventItem("Alarm", "AlignerError9E1", $"{Name} Error:Aligner Occurred Error:The data abnormal.", EventLevel.Alarm, EventType.EventUI_Notify));
  221. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA01", $"{Name} Error:Aligner Occurred Error:Re-detection of a powerSupply voltage fall.", EventLevel.Alarm, EventType.EventUI_Notify));
  222. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA10", $"{Name} Error:Aligner Occurred Error:External emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify));
  223. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA20", $"{Name} Error:Aligner Occurred Error:T.P emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify));
  224. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA21", $"{Name} Error:Aligner Occurred Error:Interlock board failure 0.", EventLevel.Alarm, EventType.EventUI_Notify));
  225. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA30", $"{Name} Error:Aligner Occurred Error:Emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify));
  226. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA40", $"{Name} Error:Aligner Occurred Error:Controller Fan 1 Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  227. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA41", $"{Name} Error:Aligner Occurred Error:Controller Fan 2 Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  228. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA42", $"{Name} Error:Aligner Occurred Error:Controller Fan 3 Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  229. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA45", $"{Name} Error:Aligner Occurred Error:Unit fan 1 error.", EventLevel.Alarm, EventType.EventUI_Notify));
  230. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA46", $"{Name} Error:Aligner Occurred Error:Unit fan 2 error.", EventLevel.Alarm, EventType.EventUI_Notify));
  231. EV.Subscribe(new EventItem("Alarm", "AlignerErrorA4F", $"{Name} Error:Aligner Occurred Error:Controller Battery Alarm.", EventLevel.Alarm, EventType.EventUI_Notify));
  232. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAC0", $"{Name} Error:Aligner Occurred Error:Safety fence signal detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  233. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAC9", $"{Name} Error:Aligner Occurred Error:Protection stop signal.", EventLevel.Alarm, EventType.EventUI_Notify));
  234. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE0", $"{Name} Error:Aligner Occurred Error:HOST Mode Switching error.", EventLevel.Alarm, EventType.EventUI_Notify));
  235. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE1", $"{Name} Error:Aligner Occurred Error:TEACH Mode Switching Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  236. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE8", $"{Name} Error:Aligner Occurred Error:Deadman switch error.", EventLevel.Alarm, EventType.EventUI_Notify));
  237. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF0", $"{Name} Error:Aligner Occurred Error:Interlock board failure 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  238. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF1", $"{Name} Error:Aligner Occurred Error:Interlock board failure 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  239. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF2", $"{Name} Error:Aligner Occurred Error:Interlock board failure 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  240. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF3", $"{Name} Error:Aligner Occurred Error:Interlock board failure 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  241. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF4", $"{Name} Error:Aligner Occurred Error:Interlock board failure 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  242. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF5", $"{Name} Error:Aligner Occurred Error:Interlock board failure 6.", EventLevel.Alarm, EventType.EventUI_Notify));
  243. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF6", $"{Name} Error:Aligner Occurred Error:Interlock board failure 7.", EventLevel.Alarm, EventType.EventUI_Notify));
  244. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF8", $"{Name} Error:Aligner Occurred Error:Input compare error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  245. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF9", $"{Name} Error:Aligner Occurred Error:Input compare error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  246. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFA", $"{Name} Error:Aligner Occurred Error:Input compare error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  247. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFb", $"{Name} Error:Aligner Occurred Error:Input compare error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  248. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFC", $"{Name} Error:Aligner Occurred Error:Input compare error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  249. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFd", $"{Name} Error:Aligner Occurred Error:Input compare error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
  250. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFE", $"{Name} Error:Aligner Occurred Error:Input compare error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
  251. EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFF", $"{Name} Error:Aligner Occurred Error:Input compare error 8.", EventLevel.Alarm, EventType.EventUI_Notify));
  252. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb10", $"{Name} Error:Aligner Occurred Error:Axis-1 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  253. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb11", $"{Name} Error:Aligner Occurred Error:Axis-2 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  254. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb12", $"{Name} Error:Aligner Occurred Error:Axis-3 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  255. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb13", $"{Name} Error:Aligner Occurred Error:Axis-4 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  256. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb14", $"{Name} Error:Aligner Occurred Error:Axis-5 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  257. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb20", $"{Name} Error:Aligner Occurred Error:Axis-1 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  258. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb21", $"{Name} Error:Aligner Occurred Error:Axis-2 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  259. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb22", $"{Name} Error:Aligner Occurred Error:Axis-3 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  260. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb23", $"{Name} Error:Aligner Occurred Error:Axis-4 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  261. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb24", $"{Name} Error:Aligner Occurred Error:Axis-5 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  262. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb28", $"{Name} Error:Aligner Occurred Error:Axis-1 Positive (+) Direction Software-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  263. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb29", $"{Name} Error:Aligner Occurred Error:Axis-2 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  264. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2A", $"{Name} Error:Aligner Occurred Error:Axis-3 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  265. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2b", $"{Name} Error:Aligner Occurred Error:Axis-4 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  266. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2C", $"{Name} Error:Aligner Occurred Error:Axis-5 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  267. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb30", $"{Name} Error:Aligner Occurred Error:Axis-1 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  268. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb31", $"{Name} Error:Aligner Occurred Error:Axis-2 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  269. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb32", $"{Name} Error:Aligner Occurred Error:Axis-3 Negative (-) Direction Software-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  270. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb33", $"{Name} Error:Aligner Occurred Error:Axis-4 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  271. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb34", $"{Name} Error:Aligner Occurred Error:Axis-5 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  272. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb38", $"{Name} Error:Aligner Occurred Error:Axis-1 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  273. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb39", $"{Name} Error:Aligner Occurred Error:Axis-2 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  274. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3A", $"{Name} Error:Aligner Occurred Error:Axis-3 Negative (-) Direction Software-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  275. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3b", $"{Name} Error:Aligner Occurred Error:Axis-4 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  276. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3C", $"{Name} Error:Aligner Occurred Error:Axis-5 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  277. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb40", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 1Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  278. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb41", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 2Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  279. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb42", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 3Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  280. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb43", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 4Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  281. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb44", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 5 Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  282. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb45", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 6Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  283. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb46", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 7Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  284. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb47", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 8Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  285. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb48", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 9Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  286. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb49", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 10 Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  287. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4A", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 11Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  288. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4b", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 12Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  289. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4C", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 13Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  290. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4d", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 14Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  291. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4E", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 15Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  292. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4F", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 16Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  293. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb60", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  294. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb61", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  295. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb62", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
  296. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb63", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
  297. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb64", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
  298. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb65", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
  299. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb66", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
  300. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb68", $"{Name} Error:Aligner Occurred Error:P/A motion permission timeout error.", EventLevel.Alarm, EventType.EventUI_Notify));
  301. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb70", $"{Name} Error:Aligner Occurred Error:SS signal detection.", EventLevel.Alarm, EventType.EventUI_Notify));
  302. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb80", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: Wafer Presence Confirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  303. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb81", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Confirmation Time- out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  304. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb82", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: Wafer Presence Confirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  305. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb83", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Confirmation Time- out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  306. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb88", $"{Name} Error:Aligner Occurred Error:Grip sensor Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  307. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb89", $"{Name} Error:Aligner Occurred Error:Grip sensor Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  308. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8A", $"{Name} Error:Aligner Occurred Error:UnGrip sensor Time-out Error1.", EventLevel.Alarm, EventType.EventUI_Notify));
  309. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8b", $"{Name} Error:Aligner Occurred Error:UnGrip sensor Time-out Error2.", EventLevel.Alarm, EventType.EventUI_Notify));
  310. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8F", $"{Name} Error:Aligner Occurred Error:Fork 1: Plunger non-operationerror.", EventLevel.Alarm, EventType.EventUI_Notify));
  311. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb90", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer Presence Confirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  312. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb91", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer AbsenceConfirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  313. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb92", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer PresenceConfirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  314. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb93", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer AbsenceConfirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  315. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb98", $"{Name} Error:Aligner Occurred Error:Lifter up sensor Time-outError 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  316. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb99", $"{Name} Error:Aligner Occurred Error:Lifter up sensor Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  317. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9A", $"{Name} Error:Aligner Occurred Error:Lifter down sensor Time-outError 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  318. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9b", $"{Name} Error:Aligner Occurred Error:Lifter down sensor Time-outError 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  319. EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9F", $"{Name} Error:Aligner Occurred Error:Fork 2: Plunger non-operationerror.", EventLevel.Alarm, EventType.EventUI_Notify));
  320. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA0", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  321. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA1", $"{Name} Error:Aligner Occurred Error:Fork 1: Sensor StatusMismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  322. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA8", $"{Name} Error:Aligner Occurred Error:Grip sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  323. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA9", $"{Name} Error:Aligner Occurred Error:Grip sensor status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  324. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAA", $"{Name} Error:Aligner Occurred Error:Ungrip sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  325. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAb", $"{Name} Error:Aligner Occurred Error:Ungrip sensor status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
  326. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAC", $"{Name} Error:Aligner Occurred Error:Grip sensor status mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  327. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAd", $"{Name} Error:Aligner Occurred Error:Lifter/Grip sensor statusmismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  328. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb0", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer Absence Error.", EventLevel.Alarm, EventType.EventUI_Notify));
  329. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb1", $"{Name} Error:Aligner Occurred Error:Fork 2: Sensor StatusMismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
  330. EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb8", $"{Name} Error:Aligner Occurred Error:Lifter up sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
  331. }
  332. public void CheckWaferPresentAndGrip()
  333. {
  334. if(IsWaferPresent(0))
  335. {
  336. if (WaferManager.Instance.CheckNoWafer(RobotModuleName, 0))
  337. {
  338. WaferManager.Instance.CreateWafer(RobotModuleName, 0, WaferStatus.Normal);
  339. EV.PostWarningLog($"{RobotModuleName}", $"System detec wafer on aligner, will create wafer automatically.");
  340. }
  341. }
  342. else
  343. {
  344. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", "1,0,0"));
  345. if (WaferManager.Instance.CheckHasWafer(RobotModuleName, 0))
  346. {
  347. EV.PostWarningLog($"{RobotModuleName}", $"System didn't detec wafer on aligner, but it has record.");
  348. }
  349. }
  350. }
  351. private void _diTPinUse_OnSignalChanged(IoSensor arg1, bool arg2)
  352. {
  353. if (!arg2)
  354. SetMaintenanceMode(true);
  355. else
  356. SetMaintenanceMode(false);
  357. }
  358. private void _diPreAlignerError_OnSignalChanged(IoSensor arg1, bool arg2)
  359. {
  360. if(!arg2)
  361. OnError("Aligner error signal");
  362. }
  363. private void RegisterSpecialData()
  364. {
  365. DATA.Subscribe($"{Module}.{Name}.CurrentArm1Position", () => CurrentArm1Position);
  366. DATA.Subscribe($"{Module}.{Name}.CurrentArm2Position", () => CurrentArm2Position);
  367. DATA.Subscribe($"{Module}.{Name}.CurrentExtensionPosition", () => CurrentExtensionPosition);
  368. DATA.Subscribe($"{Module}.{Name}.CurrentThetaPosition", () => CurrentThetaPosition);
  369. DATA.Subscribe($"{Module}.{Name}.CurrentZPosition", () => CurrentZPosition);
  370. DATA.Subscribe($"{Module}.{Name}.IsManipulatorBatteryLow", () => IsManipulatorBatteryLow);
  371. DATA.Subscribe($"{Module}.{Name}.IsCommandExecutionReady", () => IsCommandExecutionReady);
  372. DATA.Subscribe($"{Module}.{Name}.IsServoON", () => IsServoON);
  373. DATA.Subscribe($"{Module}.{Name}.IsErrorOccurred", () => IsErrorOccurred);
  374. DATA.Subscribe($"{Module}.{Name}.IsControllerBatteryLow", () => IsControllerBatteryLow);
  375. DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnFromVacuumSensorOrGripSensor", () => IsWaferPresenceOnFromVacuumSensorOrGripSensor);
  376. DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnFromCCDSensor", () => IsWaferPresenceOnFromCCDSensor);
  377. DATA.Subscribe($"{Module}.{Name}.ErrorCode", () => ErrorCode);
  378. DATA.Subscribe($"{Module}.{Name}.IsWaferHoldOnChuck", () => IsWaferHoldOnChuck);
  379. //DATA.Subscribe($"{Module}.{Name}.IsGrippedBlade2", () => IsGrippedBlade2);
  380. DATA.Subscribe($"{Module}.{Name}.IsCheckInterlockWaferPresenceAbsent", () => IsCheckInterlockWaferPresenceAbsent);
  381. DATA.Subscribe($"{Module}.{Name}.IsCheckInterlockManipulatorOperation", () => IsCheckInterlockManipulatorOperation);
  382. }
  383. private void ResetPropertiesAndResponses()
  384. {
  385. }
  386. private bool OnTimer()
  387. {
  388. try
  389. {
  390. if (!_connection.IsConnected || _connection.IsCommunicationError)
  391. {
  392. lock (_locker)
  393. {
  394. _lstHandlers.Clear();
  395. }
  396. _trigRetryConnect.CLK = !_connection.IsConnected;
  397. if (_trigRetryConnect.Q)
  398. {
  399. if (!_connection.Connect())
  400. {
  401. EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
  402. }
  403. else
  404. {
  405. //_lstHandler.AddLast(new RobotHirataR4QueryPinHandler(this, _deviceAddress));
  406. //_lstHandler.AddLast(new RobotHirataR4SetCommModeHandler(this, _deviceAddress, EnumRfPowerCommunicationMode.Host));
  407. }
  408. }
  409. return true;
  410. }
  411. HandlerBase handler = null;
  412. lock (_locker)
  413. {
  414. while (_lstHandlers.Count > 0 || _connection.IsBusy)
  415. {
  416. if (!_connection.IsBusy)
  417. {
  418. if (_lstHandlers.Count > 0)
  419. {
  420. handler = _lstHandlers.First.Value;
  421. ExecuteHandler(handler);
  422. _lstHandlers.RemoveFirst();
  423. }
  424. }
  425. else
  426. {
  427. _connection.MonitorTimeout();
  428. _trigCommunicationError.CLK = _connection.IsCommunicationError;
  429. if (_trigCommunicationError.Q)
  430. {
  431. _lstHandlers.Clear();
  432. //EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
  433. OnError($"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
  434. //_trigActionDone.CLK = true;
  435. }
  436. }
  437. }
  438. }
  439. }
  440. catch (Exception ex)
  441. {
  442. LOG.Write(ex);
  443. }
  444. return true;
  445. }
  446. private void ExecuteHandler(HandlerBase handler)
  447. {
  448. string commandstr = $"{UnitNumber}";
  449. if (IsEnableSeqNo)
  450. {
  451. CurrentSeqNo = SeqnoGenerator.create();
  452. commandstr += $"{CurrentSeqNo:D2}";
  453. SeqnoGenerator.release(CurrentSeqNo);
  454. }
  455. commandstr += $"{handler.SendText}";
  456. if (IsEnableCheckSum)
  457. {
  458. commandstr += "";
  459. commandstr += Checksum(Encoding.ASCII.GetBytes(commandstr));
  460. }
  461. handler.SendText = $"${commandstr}\r";
  462. _connection.Execute(handler);
  463. }
  464. private string Checksum(byte[] bytes)
  465. {
  466. int sum = 0;
  467. foreach (byte code in bytes)
  468. {
  469. sum += code;
  470. }
  471. string hex = String.Format("{0:X2}", sum % 256);
  472. return hex;
  473. }
  474. public int UnitNumber
  475. {
  476. get; private set;
  477. }
  478. private bool isSimulatorMode;
  479. private string _scRoot;
  480. //private string _ipaddress;
  481. public YaskawaTokenGenerator SeqnoGenerator { get; private set; }
  482. public bool IsEnableSeqNo { get; private set; }
  483. public bool IsEnableCheckSum { get; private set; }
  484. public string AlignerSystemVersion { get; private set; }
  485. public string AlignerSoftwareVersion { get; private set; }
  486. public int CurrentSeqNo { get; set; }
  487. public int AlignerType { get; private set; } //0= Edge grip, 1=Vacuum
  488. public string PortName;
  489. private string _address;
  490. private bool _enableLog;
  491. private YaskawaNxcAlignerConnection _connection;
  492. private R_TRIG _trigError = new R_TRIG();
  493. private R_TRIG _trigCommunicationError = new R_TRIG();
  494. private R_TRIG _trigRetryConnect = new R_TRIG();
  495. public string Address => _address;
  496. private PeriodicJob _thread;
  497. private object _locker = new object();
  498. private LinkedList<HandlerBase> _lstHandlers = new LinkedList<HandlerBase>();
  499. private IoSensor _diPreAlignerWaferOn = null;
  500. private IoSensor _diPreAlignerReady = null;
  501. private IoSensor _diPreAlignerError = null;
  502. private IoSensor _diTPinUse = null;
  503. private IoTrigger _doPreAlignerHold = null;
  504. public ModuleName CurrentInteractiveModule { get; private set; }
  505. public bool IsConnected => _connection.IsConnected;
  506. public bool IsWaferPresenceOnFromVacuumSensorOrGripSensor { get; private set; }
  507. public bool IsWaferPresenceOnFromCCDSensor { get; private set; }
  508. public bool IsWaferHoldOnChuck { get; private set; }
  509. //public bool IsGrippedBlade2 { get; private set; }
  510. public bool IsGripSensorOnEnd { get; private set; }
  511. public bool IsUngripSensorOnEnd { get; private set; }
  512. public bool IsLifterUpperSensorOnEnd { get; private set; }
  513. public bool IsLifterDownSensorOnEnd { get; private set; }
  514. public bool IsLifterSolenoidOnUp { get; private set; }
  515. public bool IsPermittedInterlock6 { get; private set; }
  516. public bool IsPermittedInterlock7 { get; private set; }
  517. public bool IsPermittedInterlock8 { get; private set; }
  518. public float CurrentThetaPosition { get; private set; }
  519. public float CurrentExtensionPosition { get; private set; }
  520. public float CurrentArm1Position { get; private set; }
  521. public float CurrentArm2Position { get; private set; }
  522. public float CurrentZPosition { get; private set; }
  523. public float CommandThetaPosition { get; private set; }
  524. public float CommandExtensionPosition { get; private set; }
  525. public float CommandArm1Position { get; private set; }
  526. public float CommandArm2Position { get; private set; }
  527. public float CommandZPosition { get; private set; }
  528. public int SpeedLevel { get; private set; }
  529. public string ReadMemorySpec { get; private set; }
  530. public string ReadTransferStation { get; private set; }
  531. public int ReadSlotNumber { get; private set; }
  532. public string ReadArmPosture { get; private set; }
  533. public YaskawaPositonEnum ReadPositionType { get; private set; }
  534. public float ReadThetaPosition { get; private set; }
  535. public float ReadExtensionPosition { get; private set; }
  536. public float ReadArm1Position { get; private set; }
  537. public float ReadArm2Position { get; private set; }
  538. public float ReadZPosition { get; private set; }
  539. public Dictionary<string, string> ReadStationItemValues { get; private set; } = new Dictionary<string, string>();
  540. public Dictionary<string, string> ReadStationItemContents { get; private set; } = new Dictionary<string, string>();
  541. public string ReadParameterType { get; private set; }
  542. public string ReadParameterNo { get; private set; }
  543. public string ReadParameterValue { get; private set; }
  544. public bool IsManipulatorBatteryLow { get; private set; }
  545. public bool IsCommandExecutionReady { get; private set; }
  546. public bool IsServoON { get; private set; }
  547. public bool IsErrorOccurred { get; private set; }
  548. public bool IsControllerBatteryLow { get; private set; }
  549. public bool IsCheckInterlockWaferPresenceAbsent { get; private set; }
  550. //public bool IsCheckInterlockWaferPresenceOnBlade2 { get; private set; }
  551. //public bool IsCheckInterlockPAOp { get; private set; }
  552. //public bool IsCheckInterlockPAWaferStatus { get; private set; }
  553. public bool IsCheckInterlockManipulatorOperation { get; private set; }
  554. public bool Connect()
  555. {
  556. return _connection.Connect();
  557. }
  558. public bool Disconnect()
  559. {
  560. return _connection.Disconnect();
  561. }
  562. public override bool IsReady()
  563. {
  564. if (_diPreAlignerReady != null && !_diPreAlignerReady.Value)
  565. return false;
  566. if (_diPreAlignerError != null && !_diPreAlignerError.Value)
  567. return false;
  568. if (_diTPinUse != null && !_diTPinUse.Value)
  569. return false;
  570. return IsIdle;
  571. }
  572. protected override bool fStartLiftup(object[] param)
  573. {
  574. lock (_locker)
  575. {
  576. string strpara = "2,1,0";
  577. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", strpara));
  578. }
  579. return true;
  580. }
  581. protected override bool fStartLiftdown(object[] param)
  582. {
  583. lock (_locker)
  584. {
  585. string strpara = "2,0,0";
  586. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", strpara));
  587. }
  588. return true;
  589. }
  590. protected override bool fStartAlign(object[] param)
  591. {
  592. double aligneangle = (double)param[0];
  593. int intangle = (int)(aligneangle * 100);
  594. CurrentNotch = aligneangle;
  595. lock (_locker)
  596. {
  597. string strpara = $"1{intangle:D6}";
  598. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", "A1"));
  599. if (IsNeedMtrsAfterAction)
  600. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "MTRS", "GP00ALA"));
  601. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "MALN", strpara));
  602. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", "A0"));
  603. }
  604. return true;
  605. }
  606. protected override bool fStartPrepareAccept(object[] param)
  607. {
  608. lock (_locker)
  609. {
  610. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "MTRS", "GP00ALA"));
  611. }
  612. return true;
  613. }
  614. public override bool IsNeedPrepareBeforePlaceWafer()
  615. {
  616. return IsNeedMtrsAfterAction;
  617. }
  618. protected override bool fStop(object[] param)
  619. {
  620. lock (_locker)
  621. {
  622. _lstHandlers.Clear();
  623. _connection.ForceClear();
  624. //ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CSTP", "E"));
  625. }
  626. return true;
  627. }
  628. protected override bool FsmAbort(object[] param)
  629. {
  630. lock (_locker)
  631. {
  632. _lstHandlers.Clear();
  633. _connection.ForceClear();
  634. ExecuteHandler(new YaskawaNxcAlignerMotionHandler(this, "CSTP", "H"));
  635. }
  636. return true;
  637. }
  638. protected override bool fClear(object[] param)
  639. {
  640. lock (_locker)
  641. {
  642. ExecuteHandler(new YaskawaNxcAlignerMotionHandler(this, "CCLR", "E"));
  643. }
  644. return true;
  645. }
  646. protected override bool fStartReadData(object[] param)
  647. {
  648. if (param.Length < 1) return false;
  649. string readcommand = param[0].ToString();
  650. switch (readcommand)
  651. {
  652. case "CurrentStatus":
  653. lock (_locker)
  654. {
  655. _lstHandlers.AddLast(new YaskawaNxcAlignerReadHandler(this, "RSTS"));
  656. }
  657. break;
  658. default:
  659. break;
  660. }
  661. return true;
  662. }
  663. private string _currentSetCmd;
  664. protected override bool fStartSetParameters(object[] param)
  665. {
  666. try
  667. {
  668. string strParameter;
  669. string setcommand = param[0].ToString();
  670. _currentSetCmd = setcommand;
  671. switch (setcommand)
  672. {
  673. case "MotionSpeed": // SSPD Set the motion speed
  674. string strlevel = param[1].ToString();
  675. string strspeedtype = param[2].ToString();
  676. string strAxis = param[3].ToString();
  677. uint speeddata = Convert.ToUInt32(param[4]);
  678. if (!"0123".Contains(strlevel))
  679. {
  680. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strlevel);
  681. return false;
  682. }
  683. if (!"HMLOB".Contains(strspeedtype))
  684. {
  685. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strspeedtype);
  686. return false;
  687. }
  688. if (!"SAHIZRG".Contains(strAxis))
  689. {
  690. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strAxis);
  691. return false;
  692. }
  693. strParameter = $"{strlevel},{strspeedtype},{strAxis}," + speeddata.ToString("D8");
  694. lock (_locker)
  695. {
  696. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SSPD", strParameter));
  697. }
  698. break;
  699. case "TransferSpeedLevel": //SSLV Select the transfer speed level
  700. string sslvlevel = param[1].ToString();
  701. if (!"123".Contains(sslvlevel))
  702. {
  703. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sslvlevel);
  704. return false;
  705. }
  706. //string strSpeedLevel = "M";
  707. //switch (sslvlevel)
  708. //{
  709. // case "1":
  710. // strSpeedLevel = "H";
  711. // break;
  712. // case "2":
  713. // strSpeedLevel = "M";
  714. // break;
  715. // case "3":
  716. // strSpeedLevel = "L";
  717. // break;
  718. // default:
  719. // strSpeedLevel = "H";
  720. // break;
  721. //}
  722. lock (_locker)
  723. {
  724. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SSLV", sslvlevel));
  725. }
  726. break;
  727. case "RegisterTheCurrentPositionAsTransferStation": // SPOS: Register the current position as the specified transfer station
  728. string sposMem = param[1].ToString();
  729. string sposRmode = param[2].ToString();
  730. string sposTrsSt = param[3].ToString();
  731. uint sposSlot = Convert.ToUInt16(param[4]);
  732. string sposPosture = param[5].ToString();
  733. string sposHand = param[6].ToString();
  734. if (!"VN".Contains(sposMem))
  735. {
  736. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposMem);
  737. return false;
  738. }
  739. if (!"AN".Contains(sposRmode))
  740. {
  741. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposRmode);
  742. return false;
  743. }
  744. if (sposSlot < 1 || sposSlot > 30)
  745. {
  746. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposSlot.ToString());
  747. return false;
  748. }
  749. if (!"LR".Contains(sposPosture))
  750. {
  751. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposPosture);
  752. return false;
  753. }
  754. if (!"12".Contains(sposHand))
  755. {
  756. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposHand);
  757. return false;
  758. }
  759. strParameter = $"{sposMem},{sposRmode},{sposTrsSt},{sposSlot},{sposPosture},{sposHand}";
  760. lock (_locker)
  761. {
  762. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SPOS", strParameter));
  763. }
  764. break;
  765. case "RegisterTheSpePostionAsTransferStation": //SABS
  766. string sabsMem = param[1].ToString();
  767. string sabsRmode = param[2].ToString();
  768. string sabsTrsSt = param[3].ToString();
  769. string sabsPosture = param[4].ToString();
  770. string sabsHand = param[5].ToString();
  771. Int32 sabsValue1 = Convert.ToInt32(param[6]);
  772. Int32 sabsValue2 = Convert.ToInt32(param[7]);
  773. Int32 sabsValue3 = Convert.ToInt32(param[8]);
  774. Int32 sabsValue4 = Convert.ToInt32(param[9]);
  775. Int32 sabsValue5 = Convert.ToInt32(param[10]);
  776. if (!"VN".Contains(sabsMem))
  777. {
  778. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsMem);
  779. return false;
  780. }
  781. if (!"AN".Contains(sabsRmode))
  782. {
  783. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsRmode);
  784. return false;
  785. }
  786. if (!"LR".Contains(sabsPosture))
  787. {
  788. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsPosture);
  789. return false;
  790. }
  791. if (!"12".Contains(sabsHand))
  792. {
  793. EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsHand);
  794. return false;
  795. }
  796. strParameter = $"{sabsMem},{sabsRmode},{sabsTrsSt},{sabsPosture},{sabsHand},"
  797. + sabsValue1.ToString("D8") + "," + sabsValue2.ToString("D8") + "," + sabsValue3.ToString("D8") +
  798. "," + sabsValue4.ToString("D8") + "," + sabsValue5.ToString("D8");
  799. lock (_locker)
  800. {
  801. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SABS", strParameter));
  802. }
  803. break;
  804. case "ModifyTheSpecStationPostionByOffset": //SAPS
  805. string sapsMem = param[1].ToString();
  806. string sapsRmode = param[2].ToString();
  807. string sapsTrsSt = param[3].ToString();
  808. string sapsPosture = param[4].ToString();
  809. string sapsHand = param[5].ToString();
  810. Int32 sapsOffsetX = Convert.ToInt32(param[6]);
  811. Int32 sapsOffsetY = Convert.ToInt32(param[7]);
  812. Int32 sapsOffsetZ = Convert.ToInt32(param[8]);
  813. strParameter = $"{sapsMem},{sapsRmode},{sapsTrsSt},{sapsPosture},{sapsHand},"
  814. + sapsOffsetX.ToString("D8") + "," + sapsOffsetY.ToString("D8") + "," + sapsOffsetZ.ToString("D8");
  815. lock (_locker)
  816. {
  817. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SAPS", strParameter));
  818. }
  819. break;
  820. case "DeleteTheSpecStation": //SPDL
  821. string spdlMem = param[1].ToString();
  822. string spdlTrsSt = param[2].ToString();
  823. string spdlPosture = param[3].ToString();
  824. string spdlHand = param[4].ToString();
  825. strParameter = $"{spdlMem},{spdlTrsSt},{spdlPosture},{spdlHand}";
  826. lock (_locker)
  827. {
  828. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SPDL", strParameter));
  829. }
  830. break;
  831. case "RegisterThePositionDataToVolatile": //SPSV
  832. string spsvTrsSt = param[1].ToString();
  833. string spsvPosture = param[2].ToString();
  834. string spsvHand = param[3].ToString();
  835. strParameter = $"{spsvTrsSt},{spsvPosture},{spsvHand}";
  836. lock (_locker)
  837. {
  838. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SPSV", strParameter));
  839. }
  840. break;
  841. case "ReadThePostionDataFromVolatile": //SPLD
  842. string spldTrsSt = param[1].ToString();
  843. string spldPosture = param[2].ToString();
  844. string spldHand = param[3].ToString();
  845. strParameter = $"{spldTrsSt},{spldPosture},{spldHand}";
  846. lock (_locker)
  847. {
  848. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SPLD", strParameter));
  849. }
  850. break;
  851. case "SetTheStationParameters": //SSTR
  852. string sstrMem = param[1].ToString();
  853. string sstrTrsSt = param[2].ToString();
  854. string sstrItem = param[3].ToString();
  855. Int32 sstrValue = Convert.ToInt32(param[4].ToString());
  856. strParameter = $"{sstrMem},{sstrTrsSt},{sstrItem}," + sstrValue.ToString("D8");
  857. lock (_locker)
  858. {
  859. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SSTR", strParameter));
  860. }
  861. break;
  862. case "ChangeParameterValue": // SPRM
  863. string sprmParaType = param[1].ToString();
  864. int sprmParaNO = Convert.ToInt32(param[2].ToString());
  865. Int32 sprmValue = Convert.ToInt32(param[3].ToString());
  866. strParameter = sprmParaType + "," + sprmParaNO.ToString("D4") + "," + sprmValue.ToString("D12");
  867. lock (_locker)
  868. {
  869. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SPRM", strParameter));
  870. }
  871. break;
  872. case "EnableInterLock": //SMSK
  873. int smskValid = Convert.ToInt16(param[1].ToString());
  874. lock (_locker)
  875. {
  876. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SPRM", smskValid.ToString("D4")));
  877. }
  878. break;
  879. case "RegisterTheCurrentPositionAsCoordinate": //SSTD
  880. string sstdAxis = param[1].ToString();
  881. lock (_locker)
  882. {
  883. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SSTD", sstdAxis));
  884. }
  885. break;
  886. case "ResigterTheSpecNumberAsReferencePostion": //SSTN
  887. Int32 sstnValue1 = Convert.ToInt32(param[1]);
  888. Int32 sstnValue2 = Convert.ToInt32(param[2]);
  889. Int32 sstnValue3 = Convert.ToInt32(param[3]);
  890. Int32 sstnValue4 = Convert.ToInt32(param[4]);
  891. Int32 sstnValue5 = Convert.ToInt32(param[5]);
  892. strParameter = sstnValue1.ToString("D12") + "," + sstnValue2.ToString("D12") + ","
  893. + sstnValue3.ToString("D12") + "," + sstnValue4.ToString("D12") + ","
  894. + sstnValue5.ToString("D12");
  895. lock (_locker)
  896. {
  897. _lstHandlers.AddLast(new YaskawaNxcAlignerSetHandler(this, "SSTN", strParameter));
  898. }
  899. break;
  900. case "WaferSize":
  901. var wafer = WaferManager.Instance.GetWafer(RobotModuleName, 0);
  902. if(!wafer.IsEmpty)
  903. {
  904. WaferSize size = (WaferSize)Enum.Parse(typeof(WaferSize), param[1].ToString());
  905. wafer.Size = size;
  906. }
  907. break;
  908. }
  909. }
  910. catch (Exception)
  911. {
  912. string reason = "";
  913. if (param != null)
  914. {
  915. foreach (var para in param)
  916. {
  917. reason += para.ToString() + ",";
  918. }
  919. }
  920. EV.PostAlarmLog(Name, "Set command parameter invalid:" + reason);
  921. return false;
  922. }
  923. return true;
  924. }
  925. protected override bool fMonitorSetParamter(object[] param)
  926. {
  927. if (_currentSetCmd == "WaferSize") return true;
  928. return base.fMonitorSetParamter(param);
  929. }
  930. protected override bool fStartUnGrip(object[] param)
  931. {
  932. lock (_locker)
  933. {
  934. string strpara = "A0";
  935. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", strpara));
  936. }
  937. return true;
  938. }
  939. protected override bool fStartGrip(object[] param)
  940. {
  941. lock (_locker)
  942. {
  943. string strpara = "A1";
  944. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CSOL", strpara));
  945. }
  946. return true;
  947. }
  948. protected override bool fResetToReady(object[] param)
  949. {
  950. if(!_connection.IsConnected)
  951. {
  952. _connection.Connect();
  953. }
  954. return true;
  955. }
  956. protected override bool fReset(object[] param)
  957. {
  958. _lstHandlers.Clear();
  959. _connection.ForceClear();
  960. if (!_connection.IsConnected || _connection.Address != SC.GetStringValue($"{_scRoot}.{Name}.Address"))
  961. {
  962. _address = SC.GetStringValue($"{_scRoot}.{Name}.Address");
  963. _enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
  964. UnitNumber = SC.GetValue<int>($"{_scRoot}.{Name}.UnitNumber");
  965. IsEnableCheckSum = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableCheckSum");
  966. IsEnableSeqNo = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableSeqNo");
  967. _connection = new YaskawaNxcAlignerConnection(this, _address);
  968. _connection.EnableLog(_enableLog);
  969. _connection.Connect();
  970. }
  971. lock(_locker)
  972. {
  973. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "CCLR", "E"));
  974. _lstHandlers.AddLast(new YaskawaNxcAlignerReadHandler(this, "RSTS"));
  975. if (IsNeedMtrsAfterAction)
  976. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "MTRS", "GP00ALA"));
  977. }
  978. return true;
  979. }
  980. protected override bool fMonitorReset(object[] param)
  981. {
  982. if (!_connection.IsBusy && _lstHandlers.Count ==0)
  983. {
  984. return true;
  985. }
  986. return false;
  987. }
  988. public override bool IsNeedRelease
  989. {
  990. //get
  991. //{
  992. //if (AlignerType == 1)
  993. // return true;
  994. //if (SC.ContainsItem($"{_scRoot}.{Name}.NeedReleaseBeforePick") && SC.GetValue<bool>($"{_scRoot}.{Name}.NeedReleaseBeforePick"))
  995. // return true;
  996. get { return false; }
  997. //}
  998. }
  999. protected override bool fStartInit(object[] param)
  1000. {
  1001. CurrentNotch = 0;
  1002. lock (_locker)
  1003. {
  1004. string strpara = "00";
  1005. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "INIT", strpara));
  1006. if (IsNeedMtrsAfterAction)
  1007. _lstHandlers.AddLast(new YaskawaNxcAlignerMotionHandler(this, "MTRS", "GP00ALA"));
  1008. //_lstHandlers.AddLast(new YaskawaNxcAlignerGripAndDetectHandler(this));
  1009. }
  1010. return true;
  1011. }
  1012. protected override bool fError(object[] param)
  1013. {
  1014. return true;
  1015. }
  1016. public bool ParseStatus(string status)
  1017. {
  1018. try
  1019. {
  1020. //int intstatus = Convert.ToInt32(status,16);
  1021. int intstatus = Convert.ToInt32(status, 16);
  1022. IsManipulatorBatteryLow = ((intstatus & 0x10) == 0x10);
  1023. IsCommandExecutionReady = ((intstatus & 0x20) == 0x20);
  1024. IsServoON = ((intstatus & 0x40) == 0x40);
  1025. IsErrorOccurred = ((intstatus & 0x80) == 0x80);
  1026. IsControllerBatteryLow = ((intstatus & 0x1) == 0x1);
  1027. //IsWaferPresenceOnFromVacuumSensorOrGripSensor = ((intstatus & 0x2) == 0x2);
  1028. //IsWaferPresenceOnFromCCDSensor = ((intstatus & 0x4) == 0x4);
  1029. return true;
  1030. }
  1031. catch (Exception ex)
  1032. {
  1033. LOG.Write(ex);
  1034. return false;
  1035. }
  1036. }
  1037. public bool ParseReadData(string _command, string rdata)
  1038. {
  1039. try
  1040. {
  1041. if (_command == "RSTS")
  1042. {
  1043. return (ParseRSTSStatus(rdata));
  1044. }
  1045. if (_command == "RSLV") //Read the speed level
  1046. {
  1047. return (ParseSpeedLevel(rdata));
  1048. }
  1049. if (_command == "RPOS") //Reference current postion
  1050. {
  1051. return (ParsePositionData(rdata));
  1052. }
  1053. if (_command == "RSTR") //Reference station item value
  1054. {
  1055. return (ParseStationData(rdata));
  1056. }
  1057. if (_command == "RPRM") //Reference the parameter values of the specified unit
  1058. {
  1059. return (ParseParameterData(rdata));
  1060. }
  1061. if (_command == "RMSK") //Reference the interlock information
  1062. {
  1063. return (ParseInterlockInfo(rdata));
  1064. }
  1065. if (_command == "RVER") //Reference the software version
  1066. {
  1067. return (ParseSoftwareVersion(rdata));
  1068. }
  1069. if (_command == "RALN") // Reference the alignment result
  1070. {
  1071. return true;
  1072. }
  1073. if (_command == "RACA") // Reference calibration result for alignment
  1074. {
  1075. return true;
  1076. }
  1077. return true;
  1078. }
  1079. catch (Exception ex)
  1080. {
  1081. LOG.Write(ex);
  1082. return false;
  1083. }
  1084. }
  1085. public bool ParseSpeedLevel(string data)
  1086. {
  1087. try
  1088. {
  1089. string speedtag = data.Substring(6, 1);
  1090. switch (speedtag)
  1091. {
  1092. case "H":
  1093. SpeedLevel = 1;
  1094. break;
  1095. case "M":
  1096. SpeedLevel = 2;
  1097. break;
  1098. case "L":
  1099. SpeedLevel = 3;
  1100. break;
  1101. }
  1102. return true;
  1103. }
  1104. catch (Exception ex)
  1105. {
  1106. LOG.Write(ex);
  1107. return false;
  1108. }
  1109. }
  1110. public bool ParsePositionData(string pdata)
  1111. {
  1112. try
  1113. {
  1114. string StsN = pdata.Substring(0, 2);
  1115. string Ackcd = pdata.Substring(2, 4);
  1116. ParseStatus(StsN);
  1117. CurrentThetaPosition = Convert.ToInt32(pdata.Substring(6, 8)) / 100;
  1118. PositionAxis1 = CurrentThetaPosition;
  1119. return true;
  1120. }
  1121. catch (Exception ex)
  1122. {
  1123. LOG.Write(ex);
  1124. return false;
  1125. }
  1126. }
  1127. public bool ParseStationData(string pdata)
  1128. {
  1129. try
  1130. {
  1131. string StsN = pdata.Substring(0, 2);
  1132. string Ackcd = pdata.Substring(2, 4);
  1133. ParseStatus(StsN);
  1134. //ReadMemorySpec = pdata[0];
  1135. //ReadTransferStation = pdata[1];
  1136. //if (ReadStationItemValues.ContainsKey(pdata[2]))
  1137. // ReadStationItemValues.Remove(pdata[2]);
  1138. //ReadStationItemValues.Add(pdata[2], pdata[3]);
  1139. return true;
  1140. }
  1141. catch (Exception ex)
  1142. {
  1143. LOG.Write(ex);
  1144. return false;
  1145. }
  1146. }
  1147. public bool ParseParameterData(string pdata)
  1148. {
  1149. try
  1150. {
  1151. ReadParameterType = pdata.Substring(6, 3);
  1152. ReadParameterNo = pdata.Substring(9, 4);
  1153. ReadParameterValue = pdata.Substring(13, 12);
  1154. return true;
  1155. }
  1156. catch (Exception ex)
  1157. {
  1158. LOG.Write(ex);
  1159. return false;
  1160. }
  1161. }
  1162. public bool ParseInterlockInfo(string pdata)
  1163. {
  1164. try
  1165. {
  1166. int intdata = Convert.ToInt16(pdata.Substring(6, 4));
  1167. IsCheckInterlockWaferPresenceAbsent = (intdata & 0x1) == 0;
  1168. IsCheckInterlockManipulatorOperation = (intdata & 0x1000) == 1000;
  1169. return true;
  1170. }
  1171. catch (Exception ex)
  1172. {
  1173. LOG.Write(ex);
  1174. return false;
  1175. }
  1176. }
  1177. public bool ParseSoftwareVersion(string pdata)
  1178. {
  1179. try
  1180. {
  1181. AlignerSystemVersion = pdata.Substring(6, 4);
  1182. AlignerSoftwareVersion = pdata.Substring(6, 4);
  1183. return true;
  1184. }
  1185. catch (Exception ex)
  1186. {
  1187. LOG.Write(ex);
  1188. return false;
  1189. }
  1190. }
  1191. public bool ParseRSTSStatus(string status)
  1192. {
  1193. try
  1194. {
  1195. string StsN = status.Substring(0, 2);
  1196. string Ackcd = status.Substring(2, 4);
  1197. ParseStatus(StsN);
  1198. if (status.Length <= 6) return true;
  1199. ErrorCode = status.Substring(6, 4);
  1200. int intstatus = Convert.ToInt32(status.Substring(10, 4), 16);
  1201. IsWaferPresenceOnFromVacuumSensorOrGripSensor = ((intstatus & 0x1000) != 0x1000);
  1202. IsWaferPresenceOnFromCCDSensor = ((intstatus & 0x2000) != 0x2000);
  1203. IsGripSensorOnEnd = ((intstatus & 0x0100) != 0x0100);
  1204. IsUngripSensorOnEnd = ((intstatus & 0x0200) != 0x0200);
  1205. return true;
  1206. }
  1207. catch (Exception ex)
  1208. {
  1209. LOG.Write(ex);
  1210. return false;
  1211. }
  1212. }
  1213. public void SenACK()
  1214. {
  1215. _connection.SendAck();
  1216. }
  1217. public override bool OnActionDone(object[] param)
  1218. {
  1219. if (_lstHandlers.Count == 0)
  1220. {
  1221. IsBusy = false;
  1222. return base.OnActionDone(param);
  1223. }
  1224. return true;
  1225. }
  1226. public override bool IsWaferPresent(int slotindex)
  1227. {
  1228. if (_diPreAlignerWaferOn != null)
  1229. return !_diPreAlignerWaferOn.Value;
  1230. return IsWaferPresenceOnFromCCDSensor || IsWaferPresenceOnFromVacuumSensorOrGripSensor;
  1231. }
  1232. public override void Terminate()
  1233. {
  1234. _thread.Stop();
  1235. if(!SC.ContainsItem($"{_scRoot}.{Name}.CloseConnectionOnShutDown") || SC.GetValue<bool>($"{_scRoot}.{Name}.CloseConnectionOnShutDown"))
  1236. {
  1237. LOG.Write($"Close connection for {RobotModuleName}");
  1238. _connection.Disconnect();
  1239. }
  1240. base.Terminate();
  1241. }
  1242. public void NotifyAlarmByErrorCode(string errorcode)
  1243. {
  1244. EV.Notify($"{Name}Error{errorcode}");
  1245. }
  1246. }
  1247. }