123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386 |
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Event;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.OcrReaders;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase
- {
- public abstract class AlignerBaseDevice : Entity, IDevice, IEntity
- {
- protected bool IsSimulatorMode
- {
- get
- {
- if (SC.ContainsItem("System.IsSimulatorMode"))
- return SC.GetValue<bool>("System.IsSimulatorMode");
- return false;
- }
- }
- private OCRReaderBaseDevice[] _ocrs;
- public OCRReaderBaseDevice[] OCRs
- {
- get => _ocrs;
- set
- {
- _ocrs = value;
- foreach (var ocr in _ocrs)
- {
- if (ocr != null)
- ocr.InstalledModule = RobotModuleName;
- }
- }
- }
- public event Action<bool> ActionDone;
- public event Action<string, AlarmEventItem> OnDeviceAlarmStateChanged;
- public bool HasAlarm { get; }
- private bool _isBusy;
- public bool IsBusy
- {
- get { return _isBusy; }
- set
- {
- if (_isBusy != value)
- LOG.Write($"Set {RobotModuleName} IsBusy flag to {value}");
- _isBusy = value;
- }
- }
- public string ErrorCode { get; set; } = "";
- public virtual bool IsReady()
- {
- return !IsBusy && AlignerState == AlignerStateEnum.Idle;
- }
- public object[] CurrentParamter { get; private set; }
- public bool IsOnline { get; set; }
- public WaferSize Size
- {
- get; set;
- } = WaferSize.WS12;
- public virtual WaferAlignerTypeEnum CurrentWaferAlignmentType { get; set; }
- public virtual int AlginerSpeedSetPoint
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{RobotModuleName}.AlignSpeed"))
- return SC.GetValue<int>($"Aligner.{RobotModuleName}.AlignSpeed");
- return 100;
- }
- set
- {
- if (SC.ContainsItem($"Aligner.{RobotModuleName}.AlignSpeed"))
- SC.SetItemValue($"Aligner.{RobotModuleName}.AlignSpeed", value);
- }
- }
- public virtual bool IsReversePreAlignDirection
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{RobotModuleName}.ReversePreAlignDirection"))
- return SC.GetValue<bool>($"Aligner.{RobotModuleName}.ReversePreAlignDirection");
- return false;
- }
- }
- public virtual bool IsReversePostAlignDirection
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{RobotModuleName}.ReversePostAlignDirection"))
- return SC.GetValue<bool>($"Aligner.{RobotModuleName}.ReversePostAlignDirection");
- return false;
- }
- }
- public virtual bool IsPreAlgin { get; set; }
- public virtual WaferSize GetCurrentWaferSize()
- {
- return Size;
- }
- public virtual double CompensationAngleValue
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{Name}.CompensationAngle"))
- return SC.GetValue<double>($"Aligner.{Name}.CompensationAngle");
- return 0;
- }
- }
- public virtual double PostAlignCompensationAngleValue
- {
- get
- {
- double retValue = 0;
- if (SC.ContainsItem($"Aligner.{Name}.PostAlignCompensationAngle"))
- retValue += SC.GetValue<double>($"Aligner.{Name}.PostAlignCompensationAngle");
- var wafer = WaferManager.Instance.GetWafer(RobotModuleName, 0);
- if (wafer.IsEmpty || !ModuleHelper.IsLoadPort((ModuleName)wafer.DestinationStation))
- return retValue;
- ModuleName module = (ModuleName)wafer.DestinationStation;
- if (SC.ContainsItem($"LoadPort.{module}.PostAlignAngle"))
- retValue += SC.GetValue<double>($"LoadPort.{module}.PostAlignAngle");
- return retValue;
- }
- }
- public virtual double PreDefineAngle { get; set; }
- public virtual bool IsGripperHoldWafer { get; set; }
- public bool IsIdle
- {
- get
- {
- return fsm.State == (int)AlignerStateEnum.Idle && fsm.CheckExecuted() && !IsBusy;
- }
- }
- public bool IsError
- {
- get
- {
- return fsm.State == (int)AlignerStateEnum.Error;
- }
- }
- public bool IsInit
- {
- get
- {
- return fsm.State == (int)AlignerStateEnum.Init;
- }
- }
- public double CurrentNotch { get; set; }
- public int SpeedAxis1 { set; get; }
- public int SpeedAxis2 { set; get; }
- public int SpeedAxis3 { set; get; }
- public int SpeedAxis4 { set; get; }
- public int SpeedAxis5 { set; get; }
- public int SpeedAxis6 { set; get; }
- public float PositionAxis1 { get; set; }
- public float PositionAxis2 { get; set; }
- public float PositionAxis3 { get; set; }
- public float PositionAxis4 { get; set; }
- public float PositionAxis5 { get; set; }
- public float PositionAxis6 { get; set; }
- public int AlignerCommandTimeout { get; private set; }
- public virtual float RadialOffset { set; get; }//extend
- public virtual float ThetaOffset { set; get; }//rotate
- public virtual int TimeLimitAlignWafer
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{Name}.TimeLimitForAlignWafer"))
- return SC.GetValue<int>($"Aligner.{Name}.TimeLimitForAlignWafer");
- return 90;
- }
- }
- public virtual int TimeLimitAlignerHome
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{Name}.TimeLimitAlignerHome"))
- return SC.GetValue<int>($"Aligner.{Name}.TimeLimitAlignerHome");
- return 30;
- }
- }
- public virtual int TimeLimitReadOcr
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{Name}.TimeLimitReadOCR"))
- return SC.GetValue<int>($"Aligner.{Name}.TimeLimitReadOCR");
- return 180;
- }
- }
- public virtual int TimeLimitVerifyOcr
- {
- get
- {
- if (SC.ContainsItem($"Aligner.{Name}.TimeLimitVerifyOCR"))
- return SC.GetValue<int>($"Aligner.{Name}.TimeLimitVerifyOCR");
- return 5;
- }
- }
- public enum AlignerMsg
- {
- Reset,
- Clear,
- ResetToReady,
- Stop,
- StartInit,
- InitComplete,
- StartHome,
- HomeComplete,
- ERROR,
- ActionDone,
- Abort,
- StartMaintenance,
- CompleteMaintenance,
- ReadData,
- SetParameters,
- SetParametersComplete,
- Grip,
- GripComplete,
- UnGrip,
- UnGripComplete,
- LiftUp,
- LiftUpComplete,
- LiftDown,
- LiftDownComplete,
- Align,
- AlignComplete,
- PrepareAccept,
- PrepareAcceptComplete,
- ToIdle,
- }
- protected AlignerBaseDevice(string module, string name)
- : base()
- {
- Module = module;
- Name = name;
- RobotModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), Name);
- InitializeRobot();
- }
- public string EventAlignerStartAlign { get => RobotModuleName.ToString() + "StartAligning"; }
- public string EventAlignerCompleteAlign { get => RobotModuleName.ToString() + "CompleteAligning"; }
- public string AlarmAlignFailed { get => RobotModuleName.ToString() + "AligningFailed"; }
- public string AlarmAlignTimeout { get => RobotModuleName.ToString() + "AligningTimeout"; }
- public string AlarmVerifyLaserMarkFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkFailed"; }
- public string AlarmVerifyLaserMarkSlotNoFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkSlotNoFailed"; }
- public string AlarmVerifyLaserMarkLengthFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkLengthFailed"; }
- public string AlarmVerifyLaserMarkWithHostFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkWithHostFailed"; }
- public string AlarmVerifyLaserMarkChecksumFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkChecksumFailed"; }
- public string AlarmSlotInLaserMarkIsOccuppied { get => RobotModuleName.ToString() + "SlotInLaserMarkIsOccuppied"; }
- public string AlarmVerifyLaserMarkTimeout { get => RobotModuleName.ToString() + "VerifyLaserMarkTimeout"; }
- public string AlarmWaferInformationError { get => RobotModuleName.ToString() + "WaferInformationError"; }
- public virtual bool IsNeedChangeWaferSize(WaferSize wz)
- {
- return false;
- }
- protected override bool Init()
- {
- return base.Init();
- }
- public void InitializeRobot()
- {
- BuildTransitionTable();
- SubscribeDataVariable();
- SubscribeOperation();
- SubscribeDeviceOperation();
- AlignerCommandTimeout = SC.ContainsItem("Aligner.TimeLimitAlignerCommand") ?
- SC.GetValue<int>("Aligner.TimeLimitAlignerCommand") : 120;
- WaferManager.Instance.SubscribeLocation(Name, 1);
- Running = true;
- }
- protected virtual void SubscribeOperation()
- {
- OP.Subscribe(String.Format("{0}.{1}", Name, "LiftUp"), (out string reason, int time, object[] param) =>
- {
- bool ret = LiftUp(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "LiftUp");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "LiftDown"), (out string reason, int time, object[] param) =>
- {
- bool ret = LiftDown(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "LiftDown");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "SetWaferSize"), (out string reason, int time, object[] param) =>
- {
- if (param.Length < 2)
- {
- reason = "Invalide parameter";
- return false;
- }
- WaferSize size = (WaferSize)Enum.Parse(typeof(WaferSize), param[1].ToString());
- bool ret = SetWaferSize(size, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "SetWaferSize");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "Init"), (out string reason, int time, object[] param) =>
- {
- bool ret = Init(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Initializing");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "Abort"), (out string reason, int time, object[] param) =>
- {
- bool ret = Abort(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Abort");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "Home"), (out string reason, int time, object[] param) =>
- {
- bool ret = Home(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Homing");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHome"), (out string reason, int time, object[] param) =>
- {
- bool ret = Home(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Homing");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "HomeModule"), (out string reason, int time, object[] param) =>
- {
- bool ret = HomeModule(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "ModuleHoming");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHomeModule"), (out string reason, int time, object[] param) =>
- {
- bool ret = HomeModule(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "ModuleHoming");
- return true;
- }
- reason = "";
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "Reset"), (out string reason, int time, object[] param) =>
- {
- bool ret = AlignerReset(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Resetting");
- return true;
- }
- reason = "";
- return true;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerReset"), (out string reason, int time, object[] param) =>
- {
- bool ret = AlignerReset(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Resetting");
- return true;
- }
- reason = "";
- return true;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerAlign"), (out string reason, int time, object[] param) =>
- {
- bool ret = AlignerAlign(param, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Resetting");
- return true;
- }
- reason = "";
- return true;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerSetWaferSize"), (out string reason, int time, object[] param) =>
- {
- bool ret = AlignerSetWaferSize(param, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Resetting");
- return true;
- }
- reason = "";
- return true;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "PrepareAccept"), (out string reason, int time, object[] param) =>
- {
- bool ret = PrepareAcceptWafer();
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "PrepareAccept");
- return true;
- }
- reason = "";
- return true;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHold"), (out string reason, int time, object[] param) =>
- {
- bool ret = Grip(0, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Hold Wafer");
- return true;
- }
- return false;
- });
- OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerRelease"), (out string reason, int time, object[] param) =>
- {
- bool ret = Release(0, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Release Wafer");
- return true;
- }
- return false;
- });
- }
- protected virtual void SubscribeDeviceOperation()
- {
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerInit"), (out string reason, int time, object[] param) =>
- {
- bool ret = Init(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Init");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerHome"), (out string reason, int time, object[] param) =>
- {
- bool ret = Home(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Home");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerHomeModule"), (out string reason, int time, object[] param) =>
- {
- bool ret = HomeModule(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "ModuleHome");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerReset"), (out string reason, int time, object[] param) =>
- {
- bool ret = AlignerReset(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Reset Error");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerGrip"), (out string reason, int time, object[] param) =>
- {
- bool ret = Grip(0, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Hold Wafer");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerRelease"), (out string reason, int time, object[] param) =>
- {
- bool ret = Release(0, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Release Wafer");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerLiftUp"), (out string reason, int time, object[] param) =>
- {
- bool ret = LiftUp(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Lifter Up");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerLiftDown"), (out string reason, int time, object[] param) =>
- {
- bool ret = LiftDown(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Lifter Down");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerStop"), (out string reason, int time, object[] param) =>
- {
- bool ret = Stop(out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "Stop Align");
- return true;
- }
- return false;
- });
- DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerAlign"), (out string reason, int time, object[] param) =>
- {
- double angle = double.Parse((string)param[0]);
- bool ret = Align(angle, out reason);
- if (ret)
- {
- reason = string.Format("{0} {1}", Name, "PreAlign");
- return true;
- }
- return false;
- });
- }
- public bool SetWaferSize(WaferSize size, out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.SetParameters, new object[] { "WaferSize", size }))
- {
- IsBusy = true;
- return true;
- }
- return false;
- }
- public bool AlignerReset(out string reason)
- {
- IsBusy = false;
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.Reset, null))
- return true;
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Abort(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.Abort, null))
- return true;
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Stop(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.Stop, null))
- return true;
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool AlignerAlign(object[] param, out string reason)
- {
- reason = "";
- return Align((double)param[0], out reason);
- //if (CheckToPostMessage((int)AlignerMsg.Align, param))
- //{
- // IsBusy = true;
- // return true;
- //}
- //reason = $"{Name} is in {AlignerState}";
- //return false;
- }
- public bool AlignerSetWaferSize(object[] param, out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.SetParameters, param))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool AlignerSetWaferSize(WaferSize wz, out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.SetParameters, new object[] { "WaferSize", wz }))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Align(double angle, out string reason)
- {
- IsPreAlgin = true;
- reason = "";
- double anglevalue = angle + CompensationAngleValue;
- while (anglevalue >= 360)
- {
- anglevalue -= 360;
- }
- while (anglevalue < 0)
- {
- anglevalue += 360;
- }
- IsBusy = true;
- if (CheckToPostMessage((int)AlignerMsg.Align, new object[] { anglevalue }))
- {
- WaferManager.Instance.UpdateWaferAlignAngle(RobotModuleName, 0, angle);
- return true;
- }
- IsBusy = false;
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool PreAlign(double angle, out string reason)
- {
- IsPreAlgin = true;
- reason = "";
- double anglevalue = angle + CompensationAngleValue;
- while (anglevalue > 360)
- {
- anglevalue -= 360;
- }
- while (anglevalue < 0)
- {
- anglevalue += 360;
- }
- IsBusy = true;
- if (CheckToPostMessage((int)AlignerMsg.Align, new object[] { anglevalue }))
- {
- EV.PostInfoLog("Aligner", $"{RobotModuleName} start to implement the align command");
- WaferManager.Instance.UpdateWaferAlignAngle(RobotModuleName, 0, angle);
- return true;
- }
- IsBusy = false;
- reason = $"{Name} is in {AlignerState}";
- EV.PostAlarmLog("Aligner", $"{RobotModuleName} failed to implement the align command due to {reason}");
- return false;
- }
- public bool PostAlign(double angle, out string reason)
- {
- IsPreAlgin = false;
- reason = "";
- double anglevalue = angle + CompensationAngleValue;
- while (anglevalue > 360)
- {
- anglevalue -= 360;
- }
- while (anglevalue < 0)
- {
- anglevalue += 360;
- }
- IsBusy = true;
- if (CheckToPostMessage((int)AlignerMsg.Align, new object[] { anglevalue }))
- {
- WaferManager.Instance.UpdateWaferAlignAngle(RobotModuleName, 0, angle);
- return true;
- }
- IsBusy = false;
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool LiftDown(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.LiftDown, null))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool LiftUp(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.LiftUp, null))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Release(int v, out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.UnGrip, new object[] { v }))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Grip(int v, out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.Grip, new object[] { v }))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Clear(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.Clear, null))
- {
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Init(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.StartInit, null))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool Home(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.StartInit, null))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool HomeModule(out string reason)
- {
- reason = "";
- if (CheckToPostMessage((int)AlignerMsg.StartHome, null))
- {
- IsBusy = true;
- return true;
- }
- reason = $"{Name} is in {AlignerState}";
- return false;
- }
- public bool SetMaintenanceMode(bool ismaintain)
- {
- if (ismaintain)
- return CheckToPostMessage((int)AlignerMsg.StartMaintenance, null);
- else
- return CheckToPostMessage((int)AlignerMsg.CompleteMaintenance, null);
- }
- private void SubscribeDataVariable()
- {
- DATA.Subscribe($"{Name}.State", () => AlignerState.ToString());
- DATA.Subscribe($"{Name}.AlignerState", () => AlignerState.ToString());
- DATA.Subscribe($"{Name}.Busy", () => AlignerState != AlignerStateEnum.Idle && AlignerState != AlignerStateEnum.Init);
- DATA.Subscribe($"{Name}.ErrorCode", () => ErrorCode);
- DATA.Subscribe($"{Name}.Error", () => AlignerState == AlignerStateEnum.Error);
- DATA.Subscribe($"{Name}.Notch", () => CurrentNotch);
- DATA.Subscribe($"{Name}.WaferOnAligner", () => IsWaferPresent(0));
- DATA.Subscribe($"{Name}.WaferSize", () => GetCurrentWaferSize().ToString());
- DATA.Subscribe($"{Name}.WaferAlignmentType", () => CurrentWaferAlignmentType.ToString());
- // string str = string.Empty;
- //
- DATA.Subscribe($"{Module}.{Name}.State", () => AlignerState.ToString());
- DATA.Subscribe($"{Module}.{Name}.Axis1Postion", () => PositionAxis1.ToString());
- DATA.Subscribe($"{Module}.{Name}.Axis2Postion", () => PositionAxis2.ToString());
- DATA.Subscribe($"{Module}.{Name}.Axis3Postion", () => PositionAxis3.ToString());
- DATA.Subscribe($"{Module}.{Name}.Axis4Postion", () => PositionAxis4.ToString());
- DATA.Subscribe($"{Module}.{Name}.Axis5Postion", () => PositionAxis5.ToString());
- DATA.Subscribe($"{Module}.{Name}.AlignerErrorCode", () => ErrorCode ?? ErrorCode.ToString());
- //EV.Subscribe(new EventItem("Event", EventAlignerStartAlign, $"{RobotModuleName} start aligning wafer.", EventLevel.Information, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Event", EventAlignerCompleteAlign, $"{RobotModuleName} complete aligning wafer.", EventLevel.Information, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmAlignTimeout, "Aligner align wafer time out.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmAlignFailed, "Aligner aligner wafer failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkFailed, "Aligner verify laser mark failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkSlotNoFailed, "Aligner verify laser mark slot no failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkLengthFailed, "Aligner verify laser mark length failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkWithHostFailed, "Aligner verify laser mark with host failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkChecksumFailed, "Aligner verify laser mark check character failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkTimeout, "Aligner wait ocr manual verification timeout.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmSlotInLaserMarkIsOccuppied, "The slot in Laser Mark is occuppied.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- //EV.Subscribe(new EventItem("Alarm", AlarmWaferInformationError, "The wafer sensor status doesn't match wafer information.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
- }
- private void BuildTransitionTable()
- {
- fsm = new StateMachine<AlignerBaseDevice>(Name + ".StateMachine", (int)AlignerStateEnum.Init, 50);
- //Init sequence
- AnyStateTransition(AlignerMsg.ERROR, fError, AlignerStateEnum.Error);
- AnyStateTransition(AlignerMsg.Reset, fReset, AlignerStateEnum.Resetting);
- AnyStateTransition(AlignerMsg.Stop, fStop, AlignerStateEnum.Stopped);
- AnyStateTransition(AlignerMsg.Abort, FsmAbort, AlignerStateEnum.Init);
- AnyStateTransition(AlignerMsg.StartMaintenance, fStartMaintenance, AlignerStateEnum.Maintenance);
- Transition(AlignerStateEnum.Maintenance, FSM_MSG.TIMER, fMonitorMaintenance, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Maintenance, AlignerMsg.CompleteMaintenance, fCompleteMaintenance, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Resetting, AlignerMsg.ActionDone, fResetComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Resetting, FSM_MSG.TIMER, fMonitorReset, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Init, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
- Transition(AlignerStateEnum.Idle, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
- Transition(AlignerStateEnum.Error, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
- Transition(AlignerStateEnum.Init, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Error, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Initializing, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Initializing, AlignerMsg.ActionDone, fInitComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Initializing, FSM_MSG.TIMER, fMonitorInit, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Init, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
- Transition(AlignerStateEnum.Idle, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
- Transition(AlignerStateEnum.Error, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
- Transition(AlignerStateEnum.Init, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Error, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Homing, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Homing, AlignerMsg.ActionDone, fHomeComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Homing, FSM_MSG.TIMER, fMonitorHome, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Error, AlignerMsg.Clear, fClear, AlignerStateEnum.Init);
- Transition(AlignerStateEnum.Error, AlignerMsg.ResetToReady, fResetToReady, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.SetParameters, fStartSetParameters, AlignerStateEnum.SettingServos);
- Transition(AlignerStateEnum.SettingServos, AlignerMsg.SetParametersComplete, fSetComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.SettingServos, AlignerMsg.ActionDone, fSetComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.SettingServos, FSM_MSG.TIMER, fMonitorSetParamter, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.ReadData, fStartReadData, AlignerStateEnum.ReadingData);
- Transition(AlignerStateEnum.ReadingData, AlignerMsg.ActionDone, null, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.ReadingData, FSM_MSG.TIMER, fMonitorReadData, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.Grip, fStartGrip, AlignerStateEnum.Gripping);
- Transition(AlignerStateEnum.Gripping, AlignerMsg.GripComplete, fGripComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Gripping, AlignerMsg.ActionDone, fGripComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Gripping, FSM_MSG.TIMER, fMonitorGrip, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.UnGrip, fStartUnGrip, AlignerStateEnum.UnGripping);
- Transition(AlignerStateEnum.UnGripping, AlignerMsg.UnGripComplete, fUnGripComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.UnGripping, AlignerMsg.ActionDone, fUnGripComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.UnGripping, FSM_MSG.TIMER, fMonitorUnGrip, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.LiftUp, fStartLiftup, AlignerStateEnum.LiftingUp);
- Transition(AlignerStateEnum.LiftingUp, AlignerMsg.LiftUpComplete, fLiftupComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.LiftingUp, AlignerMsg.ActionDone, fLiftupComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.LiftingUp, FSM_MSG.TIMER, fMonitorLiftup, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.LiftDown, fStartLiftdown, AlignerStateEnum.LiftingDown);
- Transition(AlignerStateEnum.LiftingDown, AlignerMsg.LiftDownComplete, fLiftdownComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.LiftingDown, AlignerMsg.ActionDone, fLiftdownComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.LiftingDown, FSM_MSG.TIMER, fMonitorLiftdown, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.Align, fStartAlign, AlignerStateEnum.Aligning);
- Transition(AlignerStateEnum.Aligning, AlignerMsg.AlignComplete, fAlignComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Aligning, AlignerMsg.ActionDone, fAlignComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Aligning, FSM_MSG.TIMER, fMonitorAligning, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.Idle, AlignerMsg.PrepareAccept, fStartPrepareAccept, AlignerStateEnum.PrepareAccept);
- Transition(AlignerStateEnum.PrepareAccept, AlignerMsg.PrepareAcceptComplete, fPrepareAcceptComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.PrepareAccept, AlignerMsg.ActionDone, fPrepareAcceptComplete, AlignerStateEnum.Idle);
- Transition(AlignerStateEnum.PrepareAccept, FSM_MSG.TIMER, fMonitorPrepareAccept, AlignerStateEnum.Idle);
- }
- protected virtual bool fMonitorPrepareAccept(object[] param)
- {
- return false;
- }
- protected virtual bool fPrepareAcceptComplete(object[] param)
- {
- return true;
- }
- protected virtual bool fStartPrepareAccept(object[] param)
- {
- return true;
- }
- protected virtual bool fMonitorHome(object[] param)
- {
- return false;
- }
- protected virtual bool fHomeComplete(object[] param)
- {
- return true; ;
- }
- protected virtual bool fStartHome(object[] param)
- {
- return true;
- }
- public virtual bool IsWaferPresent(int slotindex)
- {
- return WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex);
- }
- public virtual RobotArmWaferStateEnum GetWaferState(int slotindex = 0)
- {
- if (WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex) != IsWaferPresent(slotindex))
- {
- return RobotArmWaferStateEnum.Error;
- }
- return IsWaferPresent(slotindex) ? RobotArmWaferStateEnum.Present : RobotArmWaferStateEnum.Absent;
- }
- protected virtual bool fStartMaintenance(object[] param)
- {
- return true;
- }
- protected virtual bool fMonitorMaintenance(object[] param)
- {
- return false;
- }
- protected virtual bool fCompleteMaintenance(object[] param)
- {
- return true;
- }
- protected abstract bool fStartLiftup(object[] param);
- protected virtual bool fLiftupComplete(object[] param)
- {
- return true;
- }
- protected virtual bool fMonitorLiftup(object[] param)
- {
- return false;
- }
- protected abstract bool fStartLiftdown(object[] param);
- protected virtual bool fLiftdownComplete(object[] param)
- {
- return true;
- }
- protected virtual bool fMonitorLiftdown(object[] param)
- {
- return false;
- }
- protected abstract bool fStartAlign(object[] param);
- private bool fAlignComplete(object[] param)
- {
- IsBusy = false;
- return true;
- }
- protected virtual bool fMonitorAligning(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorUnGrip(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorGrip(object[] param)
- {
- return false;
- }
- protected virtual bool fMoveComplete(object[] param)
- {
- return true;
- }
- protected virtual bool fStartMove(object[] param)
- {
- return true;
- }
- protected virtual bool fMonitorSetParamter(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorReadData(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorReset(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorGoTo(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorMap(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorPlace(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorSwap(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorPick(object[] param)
- {
- return false;
- }
- protected virtual bool fMonitorInit(object[] param)
- {
- return false;
- }
- protected abstract bool fStop(object[] param);
- protected abstract bool FsmAbort(object[] param);
- protected bool fResetComplete(object[] param)
- {
- IsBusy = false;
- return true;
- }
- protected abstract bool fClear(object[] param);
- protected virtual bool fSetComplete(object[] param)
- {
- IsBusy = false;
- return true;
- }
- protected abstract bool fStartReadData(object[] param);
- protected abstract bool fStartSetParameters(object[] param);
- protected abstract bool fStartUnGrip(object[] param);
- protected abstract bool fStartGrip(object[] param);
- protected abstract bool fResetToReady(object[] param);
- protected abstract bool fReset(object[] param);
- protected abstract bool fStartInit(object[] param);
- protected abstract bool fError(object[] param);
- protected virtual bool fUnGripComplete(object[] param)
- {
- IsBusy = false;
- return true;
- }
- protected virtual bool fGripComplete(object[] param)
- {
- IsBusy = false;
- return true;
- }
- protected virtual bool fInitComplete(object[] param)
- {
- IsBusy = false;
- return true;
- }
- public AlignerStateEnum AlignerState { get => (AlignerStateEnum)fsm.State; }
- public string Module { get; set; }
- public string Name { get; set; }
- public ModuleName RobotModuleName { get; private set; }
- public ModuleName CurrentInteractModule { get; private set; }
- public virtual bool IsNeedRelease
- {
- get; set;
- } = false;
- public virtual bool IsNeedPrepareBeforePlaceWafer()
- {
- return false;
- }
- public virtual void Monitor()
- {
- return;
- }
- public virtual void Reset()
- {
- }
- public virtual void OnError(string errortext)
- {
- EV.Notify("AlignerMotionError");
- EV.PostAlarmLog(Module, $"{Name} occurred error: {errortext}");
- IsBusy = false;
- CheckToPostMessage((int)AlignerMsg.ERROR, new object[] { errortext });
- }
- public virtual bool SetParameters(object[] param)
- {
- return CheckToPostMessage((int)AlignerMsg.SetParameters, param);
- }
- public virtual bool PrepareAcceptWafer()
- {
- if (CheckToPostMessage((int)AlignerMsg.PrepareAccept, null))
- {
- IsBusy = true;
- return true;
- }
- return false;
- }
- public virtual bool HomeAllAxes(out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool QueryWaferMap(ModuleName module, out string reason)
- {
- reason = "";
- return true;
- }
- public virtual bool OnActionDone(object[] param)
- {
- IsBusy = false;
- return CheckToPostMessage((int)AlignerMsg.ActionDone, new object[] { "ActionDone" });
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- if (msg != 7)
- EV.PostWarningLog(Name, $"{Name} is in { (AlignerStateEnum)fsm.State} state,can not do {(AlignerMsg)msg}");
- return false;
- }
- CurrentParamter = args;
- fsm.PostMsg(msg, args);
- return true;
- }
- public bool CheckToPostMessage(AlignerMsg msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, (int)msg))
- {
- if ((int)msg != 7)
- EV.PostWarningLog(Name, $"{Name} is in { (AlignerStateEnum)fsm.State} state,can not do {(AlignerMsg)msg}");
- return false;
- }
- CurrentParamter = args;
- fsm.PostMsg((int)msg, args);
- return true;
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- reason = String.Format("{0} is in {1} state,can not do {2}", Name, (AlignerStateEnum)fsm.State, (AlignerMsg)msg);
- return false;
- }
- CurrentParamter = args;
- reason = "";
- return true;
- }
- }
- public enum WaferAlignerTypeEnum
- {
- Notch,
- Line,
- }
- }
|