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- using System;
- using System.Text;
- using Aitex.Core.RT.Device;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using System.Text.RegularExpressions;
- using Aitex.Core.RT.Log;
- using System.Collections.Generic;
- namespace Aitex.Sorter.RT.Device.Robot.NX100
- {
- /*
- * A command is transmitted from the host in the following format.
- * $ UNo (SeqNo) COMMAND Parameter Sum CR\
- * • $: Start mark (1 byte)
- Indicates the start of the message.
- • UNo: Unit No. (1 byte)
- Indicates the unit number
- • SeqNo: Sequence number (Non/1/2/3 bytes)
- Sequence number is used to avoid duplicate motion when sending of
- commands improperly. An integer parameter can specify the length of
- SeqNo. (Non/1/2/3 bytes). See parameter table for more details. (Default:
- Non), 设置 2bytes
- • Parameter: Parameter (Differs depending on the command.)
- Sets the operation axis, the moving amount, etc. following a command.
- • Sum: Checksum (2 bytes)
- This information is used for the communications error check.
- Calculate the sum of the ASCII characters (‘0’ to ‘9’ and ‘A’ to ‘F’), in “Uno”,
- “COMMAND” and “Parameter” section, and take the lowest tow digit.
- */
- public class handler<T> : IHandler where T : ITransferMsg, new()
- {
- public int ID { get; set; }
- public int Unit { get; set; }
- public bool IsBackground { get { return _imp.background; } }
- private static int retry_time = 3;
- private int retry_count = retry_time;
- private object[] _objs = null;
- private TokenGenerator _generator;
- private T _imp = new T();
- private List<string> _words = new List<string>();
- public handler()
- {
- }
- public handler(ref TokenGenerator gen, params object[] objs)
- {
- this._generator = gen;
- this._objs = objs;
- }
- public bool Execute<TPort>(ref TPort port) where TPort : ICommunication
- {
- retry_count = retry_time;
- ID = _generator.create();
- return port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, package().Replace(",", ""), ProtocolTag.tag_end));
- }
- /// <summary>
- /// return value: bhandle
- /// </summary>
- /// <typeparam name="TPort"></typeparam>
- /// <param name="port"></param>
- /// <param name="msg"></param>
- /// <param name="completed"></param>
- /// <returns></returns>
- ///
- public bool OnMessage<TPort>(ref TPort port, string message, out bool completed) where TPort : ICommunication
- {
- //$1E000003AC0300010
- //message = ">,1,EVNT,100,2018/11/16 17:01:06,2BA0,A1";
- //message = " !,1,36,40,2BA0,MTRS,002200,-0011931,-0610171,00179995,00049818,00186336,57";
- //message = "!,1,16,40,0000,MTCH,000483,-0011862,00000000,00179516,00090369,00172882,0A";
- //message = "$156000000RMAPC2FF01OK02OK03OK04OK05OK06OK07OK08OK09--10--11--12--13--14--15--16--17--18--19--20--21--22--23--24--25--96";
- //message =!283000000MALNE5.
- try
- {
- completed = false;
- string package = message;
- _words.Clear();
- string type = package.Substring(0,1);
- _words.Add(type);
- int unit = int.Parse(package.Substring(1, 1));
- _words.Add(package.Substring(1, 1));
- string sum = package.Substring(package.Length - 2, 2);
- string check = Checksum(package);
- if (sum != check)
- {
- throw (new InvalidPackageException(string.Format("check sum error{0}", package)));
- }
- if (type != ProtocolTag.resp_tag_event && type != ProtocolTag.resp_tag_error)
- {
- _words.Add(package.Substring(2, 2));
- int seq = int.Parse(package.Substring(2,2));
- if (seq != ID)
- return false;
- if (unit != Unit)
- {
- throw (new InvalidPackageException(string.Format("invalid unit {0}", package)));
- }
- }
- if (type == ProtocolTag.resp_tag_error)
- {
- //? Ackcd Sum CR
- string error = package.Substring(1,4);
- //‘1’: Warning 1 (W1), ‘2’: Warning 2 (W2), ‘3’: Important alarm 1 (A1), ‘4’: Important alarm 2 (A2),
- //‘5’: Serious alarm (F)
- if (error[0] != '1' || error[0] != '2')
- {
- string warning = string.Format("can't execute retry, {0}", error);
- LOG.Warning(warning);
- throw (new ExcuteFailedException(warning));
- }
- if (retry_count-- <= 0)
- {
- string warning = string.Format("retry over {0} times", retry_time);
- LOG.Warning(warning);
- throw (new ExcuteFailedException(warning));
- }
- port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, this.package(), ProtocolTag.tag_end));
- return true;
- }
- else if (type == ProtocolTag.resp_tag_event)
- {
- //0 1 2-3 4-7 8-10
- //> UNo SeqNo COMMAND EvNo EvData Sum CR
- //• COMMAND : Command (4 Byte) EVNT(Fixed length)
- //• EvNo: Event number(
- _words.Add(package.Substring(4, 4)); //stsN
- string evtType = package.Substring(8, 10);
- _words.Add(evtType); //Errcd
- string evtInfo = package.Substring(11, package.Length - 10 -2 );
- _words.Add(evtInfo); //Errcd
- if (_imp.evt)
- completed = _imp.unpackage(type, _words.ToArray());
- return _imp.evt;
- }
- else
- {
- //0 1 2,3 4,5 6-9
- //! UNo (SeqNo) StsN Errcd COMMAND Sum
- _words.Add(package.Substring(4, 2)); //stsN
- string error = package.Substring(6, 4);
- //int intError = Convert.ToInt32(error, 16);
- if (error != "0000")
- {
- string warning = string.Format("Robot execute failed, return error {0}", error);
- throw (new ExcuteFailedException(warning));
- }
- _words.Add(error); //Errcd
- _words.Add(package.Substring(10, package.Length - 10 -2)) ; //COMMAND
- completed = _imp.unpackage(type, _words.ToArray());
- if (completed)
- {
- _generator.release(ID);
- if (_imp.background)
- {
- ID = this._generator.create();
- port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, ackn(), ProtocolTag.tag_end));
- _generator.release(ID);
- }
- //wait 2ms
- return true;
- }
- return true;
- }
- }
- catch (ExcuteFailedException e)
- {
- throw (e);
- }
- catch (InvalidPackageException e)
- {
- throw e;
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- throw (new InvalidPackageException(message));
- }
- }
- private string Checksum(string package)
- {
- int start = package.IndexOf(ProtocolTag.cmd_token);
- int end = package.LastIndexOf(ProtocolTag.cmd_token);
- start = 1;
- end = package.Length - 2 - 1;
- int len = end - start + 1;
- if (len > 1)
- {
- string data = package.Substring(start, len);
- return Checksum(Encoding.Default.GetBytes(data));
- }
- return "";
- }
- private string Checksum(byte[] bytes)
- {
- int sum = 0;
- foreach (byte code in bytes)
- {
- sum += code;
- }
- string hex = String.Format("{0:X2}", sum % 256);
- return hex;
- }
- private string package()
- {
- //$,<UNo>(,<SeqNo>),<Command>,<Parameter>(,<Sum>)<CR>
- string data = string.Empty;
- data = string.Format("{0:D1}{1:D2}{2}", Unit, ID, _imp.package(this._objs).Replace(",",""));
- string sum = Checksum(Encoding.ASCII.GetBytes(data));
- return data + sum;
- }
- private string ackn()
- {
- //$<UNo>(<SeqNo>)ACKN(<Sum>)<CR>
- string data = string.Empty;
- data = string.Format("{0:D1}{1:D2}ACKN", Unit, ID);
- string sum = Checksum(Encoding.ASCII.GetBytes(data));
- return data + sum;
- }
- }
- public class RobotMotionHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- protected Robot _device;
- public RobotMotionHandler()
- {
- background = false;
- _device = DEVICE.GetDevice<Robot>(DeviceName.Robot);
- }
- public virtual string package(params object[] args)
- {
- return "";
- }
- public bool unpackage(string type, string[] items)
- {
- //! <UNo> (<SeqNo>) <StsN> <Errcd> MTRG <Sum> <CR>
- int value = Convert.ToInt32(items[3],16);
-
- _device.Status = value;
-
- int error = Convert.ToInt32(items[4], 16);
- _device.ErrorCode = error;
- if(error > 0)
- _device.LastErrorCode = error;
-
- if (type.Equals(ProtocolTag.resp_tag_excute))
- {
- //_device.ElapseTime = int.Parse(items[6]);
- //_device.Rotation = int.Parse(items[7]);
- //_device.Extension = int.Parse(items[8]);
- //_device.Wrist1= int.Parse(items[9]);
- //_device.Wrist2= int.Parse(items[10]);
- //_device.Evevation = int.Parse(items[11]);
- if (error == 0)
- {
- update(items);
- }
- return true;
- }
- return !background;
- }
- protected virtual void update(string[] data)
- {
-
- }
- }
- public class RbInitHandler : RobotMotionHandler
- {
- public RbInitHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- //$ <UNo> (<SeqNo>) INIT<IMode> <Sum> <CR>
- // IMode: Initialization mode(2 Byte)
- //• ”00”: Error clear, servo ON and all axes move to home position
- //• ”01”: Servo ON and all axes move to home position
- //• ”05”: Error clear, servo ON and arm moves to home position.
- //• ”06”: Servo ON and arm moves to home position
- //• ”10”: Error clear and servo ON
- updateBefore();
- return ",INIT,00,";
- }
- protected void updateBefore()
- {
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- protected override void update(string[] data)
- {
- _device.Initalized = true;
- _device.Swap = false;
- }
- }
- public class RbHomeHandler : RobotMotionHandler
- {
- public RbHomeHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- //$ < UNo > > (< SeqNo >) MHOM<MMode> < Sum > < CR >
- //• UNo: Unit number(1 byte)
- //• ‘1’ to ‘4’: Unit specified
- //• SeqNo: Sequence number(Non/ 1 / 2 / 3 byte)
- //• MMode: Motion mode(1 byte)
- //• ‘F’: All axes
- //• ‘A’: Arm(s) only
- updateBefore();
- return ",MHOM,F,";
- }
- protected void updateBefore()
- {
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- protected override void update(string[] data)
- {
- _device.Initalized = true;
- _device.Swap = false;
- }
- }
- public class RbClearErrorHandler : RobotMotionHandler
- {
-
- public RbClearErrorHandler()
- {
- background = true;
- }
- //$ <UNo> (<SeqNo>) CCLR <CMode> <Sum> <CR>
- public override string package(params object[] args)
- {
- //• CMode: Clear mode(1 byte)
- //• ‘E’: Releases the error status.
- //• ‘H’: Clears the error history.
- return ",CCLR,E,";
- }
- }
- public class RbGripHandler : RobotMotionHandler
- {
- Hand _hand;
- public RbGripHandler()
- {
- background = true;
- }
- //Command wafer hold/release signal to the solenoid of the specified unit.
- //$ <UNo> (<SeqNo>) CSOL <Fork> <Sw> <Sum> <CR>
- //• Fork: Fork specified(1 byte)
- //• ‘A’: Extension axis 1 (Blade 1), pre-aligner
- //• ‘B’: Extension axis 2 (Blade 2)
- //• Sw: Chucking command(1 byte)
- //• ‘0’: Chucking OFF
- //• ‘1’: Chucking ON
- public override string package(params object[] args)
- {
- _hand = (Hand)args[0];
- bool bHold = (bool)args[1];
- if(bHold)
- return string.Format(",CSOL,{0},1,",RobotConvertor.hand2string(_hand));
- return string.Format(",CSOL,{0},0,", RobotConvertor.hand2string(_hand));
- }
- }
- public class RbStopHandler : RobotMotionHandler
- {
- public RbStopHandler()
- {
- background = true;
- }
- //$ <UNo> (<SeqNo>) CHLTs <Sum> <CR>
- //Pause (decelerate and stop) the motion of the specified unit during the drive command execution.
- public override string package(params object[] args)
- {
- bool isEmergency = (bool)args[0];
- if (isEmergency)
- return ",CEMG,";
- //$ < UNo > (< SeqNo >) CHLT<Sum> < CR >
- return ",CHLT,";
- //return ",MHOM,F,";
- }
- }
- public class RbResumeHandler : RobotMotionHandler
- {
- public RbResumeHandler()
- {
- background = true;
- }
- //$ <UNo> (<SeqNo>) CRSM <Sum> <CR>
-
- public override string package(params object[] args)
- {
- return ",CRSM,";
- }
- }
- public class PickHandler : RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PickHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- //Move To Ready position and wafer Get motion(MTRS+MGET)
- //$ <UNo> (<SeqNo>) MTRG <TrsSt> <SlotNo> <MtnMode> <Posture> <Sum> <CR>
- // • TrsSt: Transfer station(2 bytes)
- //• "C1" to "C8": When cassette stage specified
- //• "S1" to "SC": When transfer stage specified
- //• "P1" to “P2”: When P/ A stage specified
- //Note: P2 station is effective only when two or more PA stations exist.
- //• SlotNo: Slot number(2 bytes)
- //< Manipulator >
- //• "01" to "XX": When cassette stage is specified by < TrsST >
- //(The maximum value of "XX" is in the ASCII code of the number of slots specified by parameter.)
- //• "00": When transfer stage or P / A stage specified by < TrsSt >
- //• MtnMode: Motion mode(2 bytes)
- //• "GA": Wafer Get motion at extension axis 1(Blade 1).
- //• "GB": Wafer Get motion at extension axis 2(Blade 2).
- //• "GW": Wafer Get motion with extension axis 1 and 2(Blade 1 and 2). < WGet motion >
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- if (_hand == Hand.Both)
- {
- return string.Format(",MTRG,{0},{1:D2},G{2},A,",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1) ,
- RobotConvertor.hand2string(_hand));
- }
- return string.Format(",MTRG,{0},{1:D2},G{2},A,",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Blade1)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
- }
- else if (_hand == Hand.Blade2)
- {
- for (int i = 0; i < _device.Blade2Slots; i++)
- WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleName.Robot, (int)Hand.Blade2 + i);
- }
- else
- {
- for (int i = 0; i < _device.Blade2Slots + 1; i++)
- WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleName.Robot, (int)Hand.Blade1 + i);
- }
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- }
- public class PlaceHandler : RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PlaceHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // $ <UNo> (<SeqNo>) MTRP <TrsSt> <SlotNo> <MtnMode> <Posture> <Sum> <CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- updateBefore();
- if (_hand == Hand.Both)
- {
- return string.Format(",MTRP,{0},{1:D2},P{2},A,",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
- RobotConvertor.hand2string(_hand));
- }
- return string.Format(",MTRP,{0},{1:D2},P{2},A,",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Blade1)
- {
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
- }
- else if (_hand == Hand.Blade2)
- {
- for (int i = 0; i < _device.Blade2Slots; i++)
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2 +i, _chamber, _slot + i);
- }
- else
- {
- for (int i = 0; i < _device.Blade2Slots + 1; i++)
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1 + i, _chamber, _slot + i);
- }
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- }
- public class ExchangeHandler : RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public ExchangeHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- // $ <UNo> (<SeqNo>) MTRE <TrsSt> <SlotNo> <MtnMode> <Posture> <Sum> <CR>
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- if (_hand == Hand.Blade1)
- _hand = Hand.Blade2;
- else
- _hand = Hand.Blade1;
- updateBefore();
- return string.Format(",MTRE,{0},{1:D2},E{2},A,",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- RobotConvertor.hand2string(_hand));
- }
- private void updateBefore()
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- _device.Swap = true;
- _device.PlaceBalde = _hand;
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Blade2)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade2);
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
- }
- else
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2, _chamber, _slot);
- }
- _device.Swap = false;
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- }
- public class GotoHandler : RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Motion _next;
- private Hand _hand;
- public GotoHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- //Move to ready position with specified adjustment offset
- //$<UNo>(<SeqNo>) MTRO <TrsSt> <SlotNo> <NextMtn> <Posture> <OffsetX> <OffsetY> <OffsetZ> <Sum>
- //• OffsetN: Offset(5 bytes each)
- //• OffsetX: X direction offset
- //• OffsetY: Y direction offset
- //• OffsetZ: Z direction offset
- //• Specified in the range between "-9999" and "99999"(Resolution: 0.01[mm])
- //• If value is less than 5 digits, fill the higher digit with ‘0’ so that the field always has 5 digits.
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _next = (Motion)args[2];
- _hand = (Hand)args[3];
- int x = (int)args[4];
- int y = (int)args[5];
- int z = (int)args[6];
- updateBefore();
- return string.Format(",MTRO,{0},{1:D2},{2},A,{3},{4},{5}",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- RobotConvertor.NextMotion2String(_next, _hand),
- RobotConvertor.Offset2String(x),
- RobotConvertor.Offset2String(y),
- RobotConvertor.Offset2String(z)
- ); ;
- }
- private void updateBefore()
- {
- if(_hand == Hand.Blade1)
- _device.Blade1Target = _chamber;
- else if (_hand == Hand.Blade2)
- _device.Blade2Target = _chamber;
- else
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- }
- }
- }
- public class PickHandlerEx : RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PickHandlerEx()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- //Move to ready position and get wafer with adjustment offset(MTRO+MGET)
- //$ < UNo > (< SeqNo >) MTGO<TrsSt> < SlotNo > < NextMtn > < Posture > < OffsetX > < OffsetY > < OffsetZ > < Sum > < CR >
- //• UNo: Unit number(1 byte)
- //• ‘1’ to ‘4’: Unit specified
- //• SeqNo: Sequence number(Non/ 1 / 2 / 3 byte)
- //• TrsSt: Transfer station(2 bytes)
- //• "C1" to "C8": When cassette stage specified
- //• "S1" to "SC": When transfer stage specified
- //• "P1" to “P2”: When P/ A stage specified
- //Note: P2 station is effective only when two or more PA stations exist.
- //• SlotNo: Slot number(2 bytes)
- //• "01" to "XX": When cassette stage specified by<TrsST>
- //(The maximum value of "XX" is in the ASCII code of the number of slots specified by parameter.)
- //• "00": When transfer stage or P / A stage specified by < TrsSt >
- //• NextMtn: Next motion mode(2 bytes)
- //• "GA": Next motion is wafer Get motion with extension axis 1(Blade 1).
- //• "GB": Next motion is wafer Get motion with extension axis 2(Blade 2).
- //• "GW": Next motion is wafer Get motion with extension axis 1 and 2(Blade 1 and 2). < WGet motion >
- //Note 1.The motion of extension axis 2(or blade 2) is available only for a dual-arm manipulator and dual blade
- //linear motion manipulator.
- //2.The WGet motion is available for a dual-arm manipulator and dual blade linear motion manipulator.
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- int x = (int)args[3];
- int y = (int)args[4];
- int z = (int)args[5];
- updateBefore();
- if (_hand == Hand.Both)
- {
- return string.Format(",MTGO,{0},{1:D2},G{2},A,{3},{4},{5}",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
- RobotConvertor.hand2string(_hand),
- RobotConvertor.Offset2String(x),
- RobotConvertor.Offset2String(y),
- RobotConvertor.Offset2String(z)
- );
- }
- return string.Format(",MTGO,{0},{1:D2},G{2},A,{3},{4},{5}",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- RobotConvertor.hand2string(_hand),
- RobotConvertor.Offset2String(x),
- RobotConvertor.Offset2String(y),
- RobotConvertor.Offset2String(z)
- );
- }
- private void updateBefore()
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Blade1)
- {
- WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
- }
- else if (_hand == Hand.Blade2)
- {
- for (int i = 0; i < _device.Blade2Slots; i++)
- WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleName.Robot, (int)Hand.Blade2 + i);
- }
- else
- {
- for (int i = 0; i < _device.Blade2Slots + 1; i++)
- WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleName.Robot, (int)Hand.Blade1 + i);
- }
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- }
- public class PlaceHandlerEx : RobotMotionHandler
- {
- private ModuleName _chamber;
- private int _slot;
- private Hand _hand;
- public PlaceHandlerEx()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- _chamber = (ModuleName)args[0];
- _slot = (int)args[1];
- _hand = (Hand)args[2];
- int x = (int)args[3];
- int y = (int)args[4];
- int z = (int)args[5];
- updateBefore();
- if (_hand == Hand.Both)
- {
- return string.Format(",MTPO,{0},{1:D2},P{2},A,{3},{4},{5}",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
- RobotConvertor.hand2string(_hand),
- RobotConvertor.Offset2String(x),
- RobotConvertor.Offset2String(y),
- RobotConvertor.Offset2String(z)
- );
- }
- return string.Format(",MTPO,{0},{1:D2},P{2},A,{3},{4},{5}",
- RobotConvertor.chamber2staion(_chamber),
- RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- RobotConvertor.hand2string(_hand),
- RobotConvertor.Offset2String(x),
- RobotConvertor.Offset2String(y),
- RobotConvertor.Offset2String(z)
- );
- }
- private void updateBefore()
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- }
- protected override void update(string[] data)
- {
- if (_hand == Hand.Blade1)
- {
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
- }
- else if (_hand == Hand.Blade2)
- {
- for (int i = 0; i < _device.Blade2Slots; i++)
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2 + i, _chamber, _slot + i);
- }
- else
- {
- for (int i = 0; i < _device.Blade2Slots + 1; i++)
- WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1 + i, _chamber, _slot + i);
- }
- _device.Blade1Target = ModuleName.Robot;
- _device.Blade2Target = ModuleName.Robot;
- }
- }
- //not support with offset
- //public class ExchangeHandlerEx : RobotMotionHandler
- //{
- // private ModuleName _chamber;
- // private int _slot;
- // private Hand _hand;
- // public ExchangeHandlerEx()
- // {
- // background = true;
- // }
- // public override string package(params object[] args)
- // {
- // // $ <UNo> (<SeqNo>) MEXG <Sum> <CR>
- // _chamber = (ModuleName)args[0];
- // _slot = (int)args[1];
- // _hand = (Hand)args[2];
- // if (_hand == Hand.Blade1)
- // _hand = Hand.Blade2;
- // else
- // _hand = Hand.Blade1;
- // updateBefore();
- // int x = (int)args[3];
- // int y = (int)args[4];
- // int z = (int)args[5];
- // updateBefore();
- // if (_hand == Hand.Both)
- // {
- // return string.Format(",MTPO,{0},{1:D2},G{2},A,{3},{4},{5}",
- // RobotConvertor.chamber2staion(_chamber),
- // RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
- // RobotConvertor.hand2string(_hand),
- // RobotConvertor.Offset2String(x),
- // RobotConvertor.Offset2String(y),
- // RobotConvertor.Offset2String(z)
- // );
- // }
- // return string.Format(",MTPO,{0},{1:D2},G{2},A,{3},{4},{5}",
- // RobotConvertor.chamber2staion(_chamber),
- // RobotConvertor.chamberSlot2Slot(_chamber, _slot),
- // RobotConvertor.hand2string(_hand),
- // RobotConvertor.Offset2String(x),
- // RobotConvertor.Offset2String(y),
- // RobotConvertor.Offset2String(z));
- // }
- // private void updateBefore()
- // {
- // _device.Blade1Target = _chamber;
- // _device.Blade2Target = _chamber;
- // _device.Swap = true;
- // _device.PlaceBalde = _hand;
- // }
- // protected override void update(string[] data)
- // {
- // if (_hand == Hand.Blade2)
- // {
- // WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade2);
- // WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
- // }
- // else
- // {
- // WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
- // WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2, _chamber, _slot);
- // }
- // _device.Swap = false;
- // _device.Blade1Target = ModuleName.Robot;
- // _device.Blade2Target = ModuleName.Robot;
- // }
- //}
- public class RBWaferMappingHandler : RobotMotionHandler
- {
- private ModuleName _chamber;
- public RBWaferMappingHandler()
- {
- background = true;
- }
- public override string package(params object[] args)
- {
- //$ <UNo> (<SeqNo>) MMAP <TrsSt> <SlotNo> <Sum> <CR>
- // SlotNo: Slot number(2 bytes)
- //• "FF": When all slots specified
- //• ”01” to ”XX”: When cassette stage is specified by < TrsSt >
- //(The maximum value of "XX" is in ASCII code of the number of slots specified by parameter.)
- //• ”00”: When transfer stage or P / A stage specified by<TrsSt>
- // Note: Specific slot section definition cannot be performed.
- //• Reception rejected: Responds with the error code.
- _chamber = (ModuleName)args[0];
- //_slot = (int)args[1];
- //_hand = (Hand)args[2];
- updateBefore();
- return string.Format(",MMAP,{0},FF,",
- RobotConvertor.chamber2staion(_chamber));
- }
- private void updateBefore()
- {
- _device.Blade1Target = _chamber;
- _device.Blade2Target = _chamber;
- }
- }
- public class RBQueryWaferMapHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- private ModuleName _chamber;
- protected Robot _device;
- public RBQueryWaferMapHandler()
- {
- background = false;
- _device = DEVICE.GetDevice<Robot>(DeviceName.Robot);
- }
- //$ <UNo> (<SeqNo>) RMAP <TrsSt> <SlotNo> <Sum> <CR>
- public string package(params object[] args)
- {
- _chamber = (ModuleName)args[0];
- return string.Format(",RMAP,{0},FF,",
- RobotConvertor.chamber2staion(_chamber));
- }
- public bool unpackage(string type, string[] items)
- {
- //$,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RMAP,<TrsSt>,<Slot>,
- //01:<Result1>…,N:<ResultN>(,<Sum>)<CR>
- //• UNo : Unit number (1 byte)
- //• SeqNo : Sequence number (None / 2 bytes)
- //• Sts : Status (2 bytes)
- //• Ackcd : Response code (4 bytes)
- //• TrsSt : Transfer station (3 bytes)
- //• Slot : Slot number (2 bytes)
- //• Result* : Mapping result (2 bytes each)
- //• “--” : No wafer detected.
- //• “OK” : Wafer inserted correctly.
- //• “CW” : Wafer inserted incorrectly (inclined).
- //• “DW” : Wafer inserted incorrectly (duplicated).
- //Note) Responds with the number of slots of the specified transfer station.
- //$,1,00,0000,RMAP,C02,00,
- //01:OK,02:DW,03:OK,04:CW,05:CW,06:OK,07:OK,08:--,09:OK,10:OK
- // No wafer: "0", Wafer: "1", Crossed:"2", Undefined: "?", Overlapping wafers: "W"
- if (items.Length > 5)
- {
- string data = items[5];
- StringBuilder sb = new StringBuilder();
-
- for (int i = 0; i < data.Length; i += 4)
- {
- string value = data.Substring(i + 2, 2);
- switch (value)
- {
- case "--":
- sb.Append("0");
- break;
- case "OK":
- sb.Append("1");
- break;
- case "CW":
- sb.Append("2");
- break;
- case "DW":
- sb.Append("W");
- break;
- }
- }
- _device.NotifySlotMapResult(_chamber, sb.ToString());
- return true;
- }
- return !background;
- }
- }
- // Transfer speed level setting
- public class RbSetSpeedHandler : RobotMotionHandler
- {
- private int _speed = 0;
- public RbSetSpeedHandler()
- {
- background = false;
- }
- public override string package(params object[] args)
- {
- _speed = (int)args[0];
- //$ < UNo > (< SeqNo >) SSLV<Level> < Sum > < CR >
- ///
- /// • ’H’ : High speed level
- //• ’M’ : Medium speed level
- //• ’L’ : Low speed level
- ///
- if(_speed == 1)
- return string.Format(",SSLV,H,");
- else if (_speed == 2)
- return string.Format(",SSLV,M,");
- return string.Format(",SSLV,L,");
- }
- }
- // Transfer speed level setting
- public class RbSetOffsetHandler : RobotMotionHandler
- {
- public RbSetOffsetHandler()
- {
- background = false;
- }
- public override string package(params object[] args)
- {
- //$ <UNo> (<SeqNo>) SOFS <Mem> <TrsSt> <Offset1> <Offset2> … <Offset5> <Sum> <CR>
- ///Mem: Memory (1 byte) ‘V’: Volatile memory ‘N’: Non -volatile memory
- //• TrsSt: Transfer station(2 bytes)
- //• "C1" to "C8": When cassette stage specified
- //• "S1" to "SC": When transfer stage specified
- //• "P1" to “P2”: When P/ A stage specified
- //Note: P2 station is effective only when two or more PA stations exist.
- //• Offset: Transfer offset(4 bytes each)
- //• Offset1: Downward offset
- //• Offset2: Upward offset
- //• Offset3: Offset in the extending direction(with the edge - grip - type fork)
- //• Offset4: Offset in the retracting direction(with the edge - grip - type fork)
- //• Offset5: Put downward offset(with the edge - grip - type fork)
- //Note: Offset3 to Offset5 are omitted when the fork type is not the edge - grip type.
- //• About Offset3 to Offset5, it is omissible with a parameter setup.
- //• Specified in the range between "-999" and "9999"(resolution: 0.01[mm])
- //• If a value is less than specified digits, fill the higher digit with ‘0’ so that the field always has specfied digits.
- ModuleName _chamber = (ModuleName)args[0];
- int down = (int)args[1];
- int up = (int)args[2];
- int extend = (int)args[2];
- int retract = (int)args[2];
- int pdown = (int)args[2];
- return string.Format(",SOFS,V,{0},{1:D4},{2:D4},{3:D4},{4:D4},",
- RobotConvertor.chamber2staion(_chamber),
- down,
- up,
- extend,
- retract,
- pdown
- );
- }
- }
- public class RBQueryStateHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- protected Robot _device;
- public RBQueryStateHandler()
- {
- background = false;
- _device = DEVICE.GetDevice<Robot>(DeviceName.Robot);
- }
- //$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Sum> <CR>
- //$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Errcd> <Status1> … <Status4> <Sum> <CR>
- public string package(params object[] args)
- {
- return ",RSTS,";
- }
- public bool unpackage(string type, string[] items)
- {
- return !background;
- }
- }
- public class RbEventHandler : ITransferMsg
- {
- public bool background { get { return false; } }
- public bool evt { get { return true; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- protected Robot _device;
- public RbEventHandler()
- {
- _device = DEVICE.GetDevice<Robot>(DeviceName.Robot);
- }
- //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
- public string package(params object[] args)
- {
- return "";
- }
- public bool unpackage(string type, string[] items)
- {
- string evtType = items[3];
- if (evtType.Equals(ProtocolTag.resp_evt_error))
- {
- int error = Convert.ToInt32(items[5], 16);
- _device.ErrorCode = error;
- if (error > 0)
- _device.LastErrorCode = error;
- return true;
- }
- return false;
- }
- }
- public class RBQueryPositionHandler : ITransferMsg
- {
- public bool background { get; protected set; }
- public bool evt { get { return false; } }
- public string deviceID { private get; set; }
- public string _cmd = string.Empty;
- protected Robot _device;
- public RBQueryPositionHandler()
- {
- background = false;
- _device = DEVICE.GetDevice<Robot>(DeviceName.Robot);
- }
- //$ <UNo> (<SeqNo>) RPOS <TrsSt> <Fork> <Posture> <Sum> <CR>
- // • TrsSt: Transfer station(2 bytes)
- //• "C1" to "C8": When the lowest-layer position of the cassette stage specified
- //• "H1" to "H8": When the highest-layer position of the cassette stage specified
- //• "S1" to "SC": When transfer stage specified
- //• "P1" to “P2”: When P/A stage specified
- //Note: P2 station is effective only when two or more PA stations exist.
- //• "FF": When current position specified
- //• "FE": When specify the feedback of present location
- //<Three-axis pre-aligner, Edge-grip pre-aligner>
- //• "FF": When current position specified
- //• "FE": When specify the feedback of present location
- //• Fork: Fork specified(1 byte)
- //• ‘A’: When extension axis 1 (Blade 1) specified
- //• ‘B’: When extension axis 2 (Blade 2) specified(for dual-arm manipulator and dual blade linear motion
- //manipulator only)
- //Note: Fixed to ‘A’ when the current position and feedback of present location are specified at<TrsSt>
- public string package(params object[] args)
- {
- return ",RPOS,FF,A,A,";
- }
- public bool unpackage(string type, string[] items)
- {
- //$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Value1> … <ValueN> <Sum> <CR>
- // • ValueN: Coordinate(8 bytes each)
- //• Specified in the range as follows (The resolution is 0.01[mm] or[deg])
- //8 Byte: between "-9999999" ~"99999999"
- //• If a value is less than specified digits, fill the higher digit with ‘0’ so that the field always has specfied digits.
- //• The sign is added to the highest digit.
- //• The number of “ValueN” depends on the unit type.
- //Responds with as many axis numbers as the specified unit has.See the table bellow.
- //Unit Value1 Value2 Value3 Value4 Value5 Value6
- //Single - arm manipulator Rotation //Elevation //(Track
- //Dual - arm manipulator Rotation //Extension //axis 1 //axis 2 //(Track
-
- if (items.Length > 7)
- {
- _device.Rotation = int.Parse(items[7]);
- _device.Extension = int.Parse(items[8]);
- _device.Wrist1 = int.Parse(items[9]);
- _device.Wrist2 = int.Parse(items[10]);
- _device.Evevation = int.Parse(items[11]);
-
- return true;
- }
- return !background;
- }
- }
- }
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