AbsPolicy.cs 21 KB

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  1. using Aitex.Core.Util;
  2. namespace Aitex.Sorter.RT.EFEMs.Servers.ABS
  3. {
  4. /// <summary>
  5. /// Insufficient vacuum source pressure
  6. /// </summary>
  7. public class VacPolicy : CheckImp, IPolicy
  8. {
  9. public VacPolicy()
  10. {
  11. }
  12. public bool Check(string device, out string reason)
  13. {
  14. reason = string.Empty;
  15. if (Singleton<EfemEntity>.Instance.EfemDevice.CheckVacuumError())
  16. {
  17. reason = string.Format("VAC");
  18. return false;
  19. }
  20. return true;
  21. }
  22. }
  23. /// <summary>
  24. /// AIR Insufficient air source pressure
  25. /// </summary>
  26. public class AirPolicy : CheckImp, IPolicy
  27. {
  28. public AirPolicy()
  29. {
  30. }
  31. public bool Check(string device, out string reason)
  32. {
  33. reason = string.Empty;
  34. //if (DeviceModel.SensorMainAirErrorForRobot.Value || DeviceModel.SensorMainAirErrorForLoadport.Value)
  35. //{
  36. // reason = string.Format("AIR");
  37. // return false;
  38. //}
  39. return true;
  40. }
  41. }
  42. /// <summary>
  43. /// Motor Stall - Controller detected motor stall.
  44. /// (1) If a wafer is on the finger or aligner, confirm that the wafer is not misaligned.
  45. /// If the wafer is misaligned, retrieve the wafer.
  46. /// (2) After(1) is confirmed, send "SET: ERROR/CLEAR;", "MOV:INIT;" and
  47. /// "MOV:ORGSH;" messages to EFEM to recover.
  48. /// Note: If this error occurs again, maintenance for mechanical and electric
  49. /// sections is required.
  50. /// </summary>
  51. public class StallPolicy : CheckImp, IPolicy
  52. {
  53. public StallPolicy()
  54. {
  55. }
  56. public bool Check(string device, out string reason)
  57. {
  58. reason = string.Empty;
  59. if (false)
  60. {
  61. reason = string.Format("STALL");
  62. return false;
  63. }
  64. return true;
  65. }
  66. }
  67. /// <summary>
  68. /// LIMIT Limit error
  69. /// </summary>
  70. public class LIMITPolicy : CheckImp, IPolicy
  71. {
  72. public LIMITPolicy()
  73. {
  74. }
  75. public bool Check(string device, out string reason)
  76. {
  77. reason = string.Empty;
  78. if (false)
  79. {
  80. reason = string.Format("LIMIT");
  81. return false;
  82. }
  83. return true;
  84. }
  85. }
  86. /// <summary>
  87. /// SENSOR Sensor abnormal
  88. /// </summary>
  89. public class SENSORPolicy : CheckImp, IPolicy
  90. {
  91. public SENSORPolicy()
  92. {
  93. }
  94. public bool Check(string device, out string reason)
  95. {
  96. reason = string.Empty;
  97. if (false)
  98. {
  99. reason = string.Format("SENSOR");
  100. return false;
  101. }
  102. return true;
  103. }
  104. }
  105. /// <summary>
  106. /// POSITION Position error
  107. /// </summary>
  108. public class POSITIONPolicy : CheckImp, IPolicy
  109. {
  110. public POSITIONPolicy()
  111. {
  112. }
  113. public bool Check(string device, out string reason)
  114. {
  115. reason = string.Empty;
  116. if (false)
  117. {
  118. reason = string.Format("POSITION");
  119. return false;
  120. }
  121. return true;
  122. }
  123. }
  124. /// <summary>
  125. /// Emergency stop
  126. /// </summary>
  127. public class EMSPolicy : CheckImp, IPolicy
  128. {
  129. public EMSPolicy()
  130. {
  131. }
  132. public bool Check(string device, out string reason)
  133. {
  134. reason = string.Empty;
  135. if (false)
  136. {
  137. reason = string.Format("EMS");
  138. return false;
  139. }
  140. return true;
  141. }
  142. }
  143. /// <summary>
  144. /// Controller Communication
  145. /// Error occurred in communication between the controllers of the unit.
  146. /// </summary>
  147. public class COMMPolicy : CheckImp, IPolicy
  148. {
  149. public COMMPolicy()
  150. {
  151. }
  152. public bool Check(string device, out string reason)
  153. {
  154. reason = string.Empty;
  155. if (false)
  156. {
  157. reason = string.Format("COMM");
  158. return false;
  159. }
  160. return true;
  161. }
  162. }
  163. /// <summary>
  164. /// COMM2 Module Communication Error
  165. /// Error occurred in communication between modules.
  166. /// </summary>
  167. public class COMM2Policy : CheckImp, IPolicy
  168. {
  169. public COMM2Policy()
  170. {
  171. }
  172. public bool Check(string device, out string reason)
  173. {
  174. reason = string.Empty;
  175. if (false)
  176. {
  177. reason = string.Format("COMM2");
  178. return false;
  179. }
  180. return true;
  181. }
  182. }
  183. /// <summary>
  184. /// VACON Vacuum ON Error - Load port failed to perform chucking of FOUP door when opening FOUP.
  185. /// </summary>
  186. public class VACONPolicy : CheckImp, IPolicy
  187. {
  188. public VACONPolicy()
  189. {
  190. }
  191. public bool Check(string device, out string reason)
  192. {
  193. reason = string.Empty;
  194. if (false)
  195. {
  196. reason = string.Format("VACON");
  197. return false;
  198. }
  199. return true;
  200. }
  201. }
  202. /// <summary>
  203. ///VACOF Vacuum OFF error - Vacuum solenoid valve at the load port failed.
  204. /// </summary>
  205. public class VACOFPolicy : CheckImp, IPolicy
  206. {
  207. public VACOFPolicy()
  208. {
  209. }
  210. public bool Check(string device, out string reason)
  211. {
  212. reason = string.Empty;
  213. if (false)
  214. {
  215. reason = string.Format("VACOF");
  216. return false;
  217. }
  218. return true;
  219. }
  220. }
  221. /// <summary>
  222. ///CLAMPON Aligner Clamp On Error - Aligner failed clamping wafer when placing wafer on the aligner.
  223. /// Robot Clamp ON Error - Robot failed clamping wafer when picking up the wafer.
  224. /// </summary>
  225. public class CLAMPONPolicy : CheckImp, IPolicy
  226. {
  227. public CLAMPONPolicy()
  228. {
  229. }
  230. public bool Check(string device, out string reason)
  231. {
  232. reason = string.Empty;
  233. if (false)
  234. {
  235. reason = string.Format("CLAMPON");
  236. return false;
  237. }
  238. return true;
  239. }
  240. }
  241. /// <summary>
  242. ///CLAMPOF
  243. ///Clamp Off Error - Clamp cylinder of the robot failed
  244. ///Clamp sensor of the robot failed
  245. ///Clamp cylinder of the aligner failed
  246. ///Clamp sensor of the aligner failed.
  247. /// </summary>
  248. public class CLAMPOFPolicy : CheckImp, IPolicy
  249. {
  250. public CLAMPOFPolicy()
  251. {
  252. }
  253. public bool Check(string device, out string reason)
  254. {
  255. reason = string.Empty;
  256. if (false)
  257. {
  258. reason = string.Format("CLAMPOF");
  259. return false;
  260. }
  261. return true;
  262. }
  263. }
  264. /// <summary>
  265. /// PRTWAF Found Wafer Protrude - Wafer protrusion is detected.
  266. /// </summary>
  267. public class PRTWAFPolicy : CheckImp, IPolicy
  268. {
  269. public PRTWAFPolicy()
  270. {
  271. }
  272. public bool Check(string device, out string reason)
  273. {
  274. reason = string.Empty;
  275. if (false)
  276. {
  277. reason = string.Format("PRTWAF");
  278. return false;
  279. }
  280. return true;
  281. }
  282. }
  283. /// <summary>
  284. /// COMMAND
  285. /// Command Error - Command error occurred in the communication between controllers.
  286. /// </summary>
  287. public class COMMANDPolicy : CheckImp, IPolicy
  288. {
  289. public COMMANDPolicy()
  290. {
  291. }
  292. public bool Check(string device, out string reason)
  293. {
  294. reason = string.Empty;
  295. if (false)
  296. {
  297. reason = string.Format("COMMAND");
  298. return false;
  299. }
  300. return true;
  301. }
  302. }
  303. /// <summary>
  304. /// PODNG
  305. /// Pod No-Good Position - FOUP is not properly placed.
  306. /// </summary>
  307. public class PODNGPolicy : CheckImp, IPolicy
  308. {
  309. public PODNGPolicy()
  310. {
  311. }
  312. public bool Check(string device, out string reason)
  313. {
  314. reason = string.Empty;
  315. if (false)
  316. {
  317. reason = string.Format("PODNG");
  318. return false;
  319. }
  320. return true;
  321. }
  322. }
  323. /// <summary>
  324. /// PODMISMATCH
  325. /// Pod Type Mismatch - Carrier other than FOUP is place on the load port.
  326. /// No cover is on FOUP on the load port.
  327. /// </summary>
  328. public class PODMISMATCHPolicy : CheckImp, IPolicy
  329. {
  330. public PODMISMATCHPolicy()
  331. {
  332. }
  333. public bool Check(string device, out string reason)
  334. {
  335. reason = string.Empty;
  336. if (false)
  337. {
  338. reason = string.Format("PODMISMATCH");
  339. return false;
  340. }
  341. return true;
  342. }
  343. }
  344. /// <summary>
  345. /// VAC_S
  346. /// Vacuum Sensor Error - Chucking sensor on the load port shows abnormality.
  347. /// </summary>
  348. public class VAC_SPolicy : CheckImp, IPolicy
  349. {
  350. public VAC_SPolicy()
  351. {
  352. }
  353. public bool Check(string device, out string reason)
  354. {
  355. reason = string.Empty;
  356. if (false)
  357. {
  358. reason = string.Format("VAC_S");
  359. return false;
  360. }
  361. return true;
  362. }
  363. }
  364. /// <summary>
  365. /// CLAMP_S
  366. /// Clamp Sensor Error - Clamp sensor in the robot shows abnormality.
  367. /// Clamp sensor in the aligner shows abnormality.
  368. /// </summary>
  369. public class CLAMP_SPolicy : CheckImp, IPolicy
  370. {
  371. public CLAMP_SPolicy()
  372. {
  373. }
  374. public bool Check(string device, out string reason)
  375. {
  376. reason = string.Empty;
  377. if (false)
  378. {
  379. reason = string.Format("CLAMP_S");
  380. return false;
  381. }
  382. return true;
  383. }
  384. }
  385. /// <summary>
  386. /// SAFTY
  387. /// Safety Sensor Active - Finger pinch detecting sensor is activated during load port operation.
  388. /// </summary>
  389. public class SAFTYPolicy : CheckImp, IPolicy
  390. {
  391. public SAFTYPolicy()
  392. {
  393. }
  394. public bool Check(string device, out string reason)
  395. {
  396. reason = string.Empty;
  397. if (false)
  398. {
  399. reason = string.Format("SAFTY");
  400. return false;
  401. }
  402. return true;
  403. }
  404. }
  405. /// <summary>
  406. /// LOCKNG
  407. /// FOUP Lock Fail - FOUP clamp failure on the load port
  408. /// </summary>
  409. public class LOCKNGPolicy : CheckImp, IPolicy
  410. {
  411. public LOCKNGPolicy()
  412. {
  413. }
  414. public bool Check(string device, out string reason)
  415. {
  416. reason = string.Empty;
  417. if (false)
  418. {
  419. reason = string.Format("LOCKNG");
  420. return false;
  421. }
  422. return true;
  423. }
  424. }
  425. /// <summary>
  426. /// UNLOCKNG
  427. /// FOUP Unlock Fail - FOUP unclamp failure on the load port.
  428. /// </summary>
  429. public class UNLOCKNGPolicy : CheckImp, IPolicy
  430. {
  431. public UNLOCKNGPolicy()
  432. {
  433. }
  434. public bool Check(string device, out string reason)
  435. {
  436. reason = string.Empty;
  437. if (false)
  438. {
  439. reason = string.Format("UNLOCKNG");
  440. return false;
  441. }
  442. return true;
  443. }
  444. }
  445. /// <summary>
  446. /// L_KEY_LK
  447. /// Latch-Key Lock Fail - Latch key is not properly returned when FOUP is closed on the load port.
  448. /// </summary>
  449. public class L_KEY_LKPolicy : CheckImp, IPolicy
  450. {
  451. public L_KEY_LKPolicy()
  452. {
  453. }
  454. public bool Check(string device, out string reason)
  455. {
  456. reason = string.Empty;
  457. if (false)
  458. {
  459. reason = string.Format("L_KEY_LK");
  460. return false;
  461. }
  462. return true;
  463. }
  464. }
  465. /// <summary>
  466. /// L_KEY_UL
  467. /// Latch-Key Unlock Fail - Latch key is not properly turned when FOUP is opened on the load port.
  468. /// </summary>
  469. public class L_KEY_ULPolicy : CheckImp, IPolicy
  470. {
  471. public L_KEY_ULPolicy()
  472. {
  473. }
  474. public bool Check(string device, out string reason)
  475. {
  476. reason = string.Empty;
  477. if (false)
  478. {
  479. reason = string.Format("L_KEY_UL");
  480. return false;
  481. }
  482. return true;
  483. }
  484. }
  485. /// <summary>
  486. /// MAP_S
  487. /// Mapping Sensor Error - Mapping sensor shows abnormality on the load port.
  488. /// </summary>
  489. public class MAP_SPolicy : CheckImp, IPolicy
  490. {
  491. public MAP_SPolicy()
  492. {
  493. }
  494. public bool Check(string device, out string reason)
  495. {
  496. reason = string.Empty;
  497. if (false)
  498. {
  499. reason = string.Format("MAP_S");
  500. return false;
  501. }
  502. return true;
  503. }
  504. }
  505. /// <summary>
  506. /// MAP_S1
  507. /// Mapping Sensor Error1- Load port failed preparation for mapping sensor.
  508. /// </summary>
  509. public class MAP_S1Policy : CheckImp, IPolicy
  510. {
  511. public MAP_S1Policy()
  512. {
  513. }
  514. public bool Check(string device, out string reason)
  515. {
  516. reason = string.Empty;
  517. if (false)
  518. {
  519. reason = string.Format("MAP_S1");
  520. return false;
  521. }
  522. return true;
  523. }
  524. }
  525. /// <summary>
  526. /// MAP_S2
  527. /// Mapping Sensor Error2- Load port failed containing of mapping sensor.
  528. /// </summary>
  529. public class MAP_S2Policy : CheckImp, IPolicy
  530. {
  531. public MAP_S2Policy()
  532. {
  533. }
  534. public bool Check(string device, out string reason)
  535. {
  536. reason = string.Empty;
  537. if (false)
  538. {
  539. reason = string.Format("MAP_S2");
  540. return false;
  541. }
  542. return true;
  543. }
  544. }
  545. /// <summary>
  546. /// WAFLOST Wafer Lost - Wafer presence on the robot finger is lost.
  547. /// Wafer presence on the aligner is lost.
  548. /// </summary>
  549. public class WAFLOSTPolicy : CheckImp, IPolicy
  550. {
  551. public WAFLOSTPolicy()
  552. {
  553. }
  554. public bool Check(string device, out string reason)
  555. {
  556. reason = string.Empty;
  557. if (false)
  558. {
  559. reason = string.Format("WAFLOST");
  560. return false;
  561. }
  562. return true;
  563. }
  564. }
  565. /// <summary>
  566. ///ALIGNNG Alignment Fail - Wafer alignment failed.
  567. /// </summary>
  568. public class ALIGNNGPolicy : CheckImp, IPolicy
  569. {
  570. public ALIGNNGPolicy()
  571. {
  572. }
  573. public bool Check(string device, out string reason)
  574. {
  575. reason = string.Empty;
  576. if (false)
  577. {
  578. reason = string.Format("ALIGNNG");
  579. return false;
  580. }
  581. return true;
  582. }
  583. }
  584. /// <summary>
  585. ///DRIVER Driver Abnormal - Motor control driver shows abnormality.
  586. ///Driver abnormality is shown due to drive power failure while motor is operating.
  587. /// </summary>
  588. public class DRIVERPolicy : CheckImp, IPolicy
  589. {
  590. public DRIVERPolicy()
  591. {
  592. }
  593. public bool Check(string device, out string reason)
  594. {
  595. reason = string.Empty;
  596. if (false)
  597. {
  598. reason = string.Format("DRIVER");
  599. return false;
  600. }
  601. return true;
  602. }
  603. }
  604. /// <summary>
  605. ///DRPOWERDOWN
  606. ///Driver Power Down - Motion is stopped due to drive power failure.
  607. /// </summary>
  608. public class DRPOWERDOWNPolicy : CheckImp, IPolicy
  609. {
  610. public DRPOWERDOWNPolicy()
  611. {
  612. }
  613. public bool Check(string device, out string reason)
  614. {
  615. reason = string.Empty;
  616. if (false)
  617. {
  618. reason = string.Format("DRPOWERDOWN");
  619. return false;
  620. }
  621. return true;
  622. }
  623. }
  624. /// <summary>
  625. ///HARDWARE Hardware Error - Hardware malfunction occurred on any single unit.
  626. /// </summary>
  627. public class HARDWAREPolicy : CheckImp, IPolicy
  628. {
  629. public HARDWAREPolicy()
  630. {
  631. }
  632. public bool Check(string device, out string reason)
  633. {
  634. reason = string.Empty;
  635. if (false)
  636. {
  637. reason = string.Format("HARDWARE");
  638. return false;
  639. }
  640. return true;
  641. }
  642. }
  643. /// <summary>
  644. /// INTERNAL
  645. /// Internal Error - Internal error occurred at the section where each unit inside EFEM PC iscontrolled.
  646. /// </summary>
  647. public class INTERNALPolicy : CheckImp, IPolicy
  648. {
  649. public INTERNALPolicy()
  650. {
  651. }
  652. public bool Check(string device, out string reason)
  653. {
  654. reason = string.Empty;
  655. if (false)
  656. {
  657. reason = string.Format("INTERNAL");
  658. return false;
  659. }
  660. return true;
  661. }
  662. }
  663. /// <summary>
  664. /// CRSWAF Found Cross Wafer- Cross wafer is detected during wafer mapping.
  665. /// </summary>
  666. public class CRSWAFPolicy : CheckImp, IPolicy
  667. {
  668. public CRSWAFPolicy()
  669. {
  670. }
  671. public bool Check(string device, out string reason)
  672. {
  673. reason = string.Empty;
  674. if (false)
  675. {
  676. reason = string.Format("CRSWAF");
  677. return false;
  678. }
  679. return true;
  680. }
  681. }
  682. /// <summary>
  683. /// THICKWAF Found Thick Wafer- Thicker wafer than the standard is detected during wafer mappi
  684. /// </summary>
  685. public class THICKWAFPolicy : CheckImp, IPolicy
  686. {
  687. public THICKWAFPolicy()
  688. {
  689. }
  690. public bool Check(string device, out string reason)
  691. {
  692. reason = string.Empty;
  693. if (false)
  694. {
  695. reason = string.Format("THICKWAF");
  696. return false;
  697. }
  698. return true;
  699. }
  700. }
  701. /// <summary>
  702. /// THINWAF Found Thin wafer- Thinner wafer than the standard isdetected during wafer mapping.
  703. /// </summary>
  704. public class THINWAFPolicy : CheckImp, IPolicy
  705. {
  706. public THINWAFPolicy()
  707. {
  708. }
  709. public bool Check(string device, out string reason)
  710. {
  711. reason = string.Empty;
  712. if (false)
  713. {
  714. reason = string.Format("THINWAF");
  715. return false;
  716. }
  717. return true;
  718. }
  719. }
  720. /// <summary>
  721. /// DBLWAF Found Double Wafer- Two or more wafers in one slot ar detected during wafer mapping. ///
  722. /// </summary>
  723. public class DBLWAFPolicy : CheckImp, IPolicy
  724. {
  725. public DBLWAFPolicy()
  726. {
  727. }
  728. public bool Check(string device, out string reason)
  729. {
  730. reason = string.Empty;
  731. if (false)
  732. {
  733. reason = string.Format("DBLWAF");
  734. return false;
  735. }
  736. return true;
  737. }
  738. }
  739. /// <summary>
  740. /// BOWWAF Found Bow Wafer- Front bow wafer is detected during wafer mapping.
  741. /// </summary>
  742. public class BOWWAFPolicy : CheckImp, IPolicy
  743. {
  744. public BOWWAFPolicy()
  745. {
  746. }
  747. public bool Check(string device, out string reason)
  748. {
  749. reason = string.Empty;
  750. if (false)
  751. {
  752. reason = string.Format("BOWWAF");
  753. return false;
  754. }
  755. return true;
  756. }
  757. }
  758. /// <summary>
  759. /// E84_TIMEOUTx E84 Timeout- E84 automated transfer sequence timeout occurred. ///
  760. /// </summary>
  761. public class E84_TIMEOUTxPolicy : CheckImp, IPolicy
  762. {
  763. public E84_TIMEOUTxPolicy()
  764. {
  765. }
  766. public bool Check(string device, out string reason)
  767. {
  768. reason = string.Empty;
  769. if (false)
  770. {
  771. reason = string.Format("E84_TIMEOUTx");
  772. return false;
  773. }
  774. return true;
  775. }
  776. }
  777. /// <summary>
  778. ///E84_CS_VALID E84 Signal Error
  779. /// CS_0,CS_1,VALID signals are changed while E84 automated transfer sequence is processing.
  780. /// </summary>
  781. public class E84_CS_VALIDPolicy : CheckImp, IPolicy
  782. {
  783. public E84_CS_VALIDPolicy()
  784. {
  785. }
  786. public bool Check(string device, out string reason)
  787. {
  788. reason = string.Empty;
  789. if (false)
  790. {
  791. reason = string.Format("E84_CS_VALID");
  792. return false;
  793. }
  794. return true;
  795. }
  796. }
  797. /// <summary>
  798. ///READFAIL ID Read Fail- ID reading failed
  799. /// </summary>
  800. public class READFAILPolicy : CheckImp, IPolicy
  801. {
  802. public READFAILPolicy()
  803. {
  804. }
  805. public bool Check(string device, out string reason)
  806. {
  807. reason = string.Empty;
  808. if (false)
  809. {
  810. reason = string.Format("READFAIL");
  811. return false;
  812. }
  813. return true;
  814. }
  815. }
  816. }