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- using Aitex.Core.Util;
- namespace Aitex.Sorter.RT.EFEMs.Servers.ABS
- {
- /// <summary>
- /// Insufficient vacuum source pressure
- /// </summary>
- public class VacPolicy : CheckImp, IPolicy
- {
- public VacPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (Singleton<EfemEntity>.Instance.EfemDevice.CheckVacuumError())
- {
- reason = string.Format("VAC");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// AIR Insufficient air source pressure
- /// </summary>
- public class AirPolicy : CheckImp, IPolicy
- {
- public AirPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- //if (DeviceModel.SensorMainAirErrorForRobot.Value || DeviceModel.SensorMainAirErrorForLoadport.Value)
- //{
- // reason = string.Format("AIR");
- // return false;
- //}
- return true;
- }
- }
- /// <summary>
- /// Motor Stall - Controller detected motor stall.
- /// (1) If a wafer is on the finger or aligner, confirm that the wafer is not misaligned.
- /// If the wafer is misaligned, retrieve the wafer.
- /// (2) After(1) is confirmed, send "SET: ERROR/CLEAR;", "MOV:INIT;" and
- /// "MOV:ORGSH;" messages to EFEM to recover.
- /// Note: If this error occurs again, maintenance for mechanical and electric
- /// sections is required.
- /// </summary>
- public class StallPolicy : CheckImp, IPolicy
- {
- public StallPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("STALL");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// LIMIT Limit error
- /// </summary>
- public class LIMITPolicy : CheckImp, IPolicy
- {
- public LIMITPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("LIMIT");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// SENSOR Sensor abnormal
- /// </summary>
- public class SENSORPolicy : CheckImp, IPolicy
- {
- public SENSORPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("SENSOR");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// POSITION Position error
- /// </summary>
- public class POSITIONPolicy : CheckImp, IPolicy
- {
- public POSITIONPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("POSITION");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// Emergency stop
- /// </summary>
- public class EMSPolicy : CheckImp, IPolicy
- {
- public EMSPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("EMS");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// Controller Communication
- /// Error occurred in communication between the controllers of the unit.
- /// </summary>
- public class COMMPolicy : CheckImp, IPolicy
- {
- public COMMPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("COMM");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// COMM2 Module Communication Error
- /// Error occurred in communication between modules.
- /// </summary>
- public class COMM2Policy : CheckImp, IPolicy
- {
- public COMM2Policy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("COMM2");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// VACON Vacuum ON Error - Load port failed to perform chucking of FOUP door when opening FOUP.
- /// </summary>
- public class VACONPolicy : CheckImp, IPolicy
- {
- public VACONPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("VACON");
- return false;
- }
- return true;
- }
- }
-
- /// <summary>
- ///VACOF Vacuum OFF error - Vacuum solenoid valve at the load port failed.
- /// </summary>
- public class VACOFPolicy : CheckImp, IPolicy
- {
- public VACOFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("VACOF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///CLAMPON Aligner Clamp On Error - Aligner failed clamping wafer when placing wafer on the aligner.
- /// Robot Clamp ON Error - Robot failed clamping wafer when picking up the wafer.
- /// </summary>
- public class CLAMPONPolicy : CheckImp, IPolicy
- {
- public CLAMPONPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("CLAMPON");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///CLAMPOF
- ///Clamp Off Error - Clamp cylinder of the robot failed
- ///Clamp sensor of the robot failed
- ///Clamp cylinder of the aligner failed
- ///Clamp sensor of the aligner failed.
- /// </summary>
- public class CLAMPOFPolicy : CheckImp, IPolicy
- {
- public CLAMPOFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("CLAMPOF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// PRTWAF Found Wafer Protrude - Wafer protrusion is detected.
- /// </summary>
- public class PRTWAFPolicy : CheckImp, IPolicy
- {
- public PRTWAFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("PRTWAF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// COMMAND
- /// Command Error - Command error occurred in the communication between controllers.
- /// </summary>
- public class COMMANDPolicy : CheckImp, IPolicy
- {
- public COMMANDPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("COMMAND");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// PODNG
- /// Pod No-Good Position - FOUP is not properly placed.
- /// </summary>
- public class PODNGPolicy : CheckImp, IPolicy
- {
- public PODNGPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("PODNG");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// PODMISMATCH
- /// Pod Type Mismatch - Carrier other than FOUP is place on the load port.
- /// No cover is on FOUP on the load port.
- /// </summary>
- public class PODMISMATCHPolicy : CheckImp, IPolicy
- {
- public PODMISMATCHPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("PODMISMATCH");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// VAC_S
- /// Vacuum Sensor Error - Chucking sensor on the load port shows abnormality.
- /// </summary>
- public class VAC_SPolicy : CheckImp, IPolicy
- {
- public VAC_SPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("VAC_S");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// CLAMP_S
- /// Clamp Sensor Error - Clamp sensor in the robot shows abnormality.
- /// Clamp sensor in the aligner shows abnormality.
- /// </summary>
- public class CLAMP_SPolicy : CheckImp, IPolicy
- {
- public CLAMP_SPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("CLAMP_S");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// SAFTY
- /// Safety Sensor Active - Finger pinch detecting sensor is activated during load port operation.
- /// </summary>
- public class SAFTYPolicy : CheckImp, IPolicy
- {
- public SAFTYPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("SAFTY");
- return false;
- }
- return true;
- }
- }
-
- /// <summary>
- /// LOCKNG
- /// FOUP Lock Fail - FOUP clamp failure on the load port
- /// </summary>
- public class LOCKNGPolicy : CheckImp, IPolicy
- {
- public LOCKNGPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("LOCKNG");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// UNLOCKNG
- /// FOUP Unlock Fail - FOUP unclamp failure on the load port.
- /// </summary>
- public class UNLOCKNGPolicy : CheckImp, IPolicy
- {
- public UNLOCKNGPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("UNLOCKNG");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// L_KEY_LK
- /// Latch-Key Lock Fail - Latch key is not properly returned when FOUP is closed on the load port.
- /// </summary>
- public class L_KEY_LKPolicy : CheckImp, IPolicy
- {
- public L_KEY_LKPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("L_KEY_LK");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// L_KEY_UL
- /// Latch-Key Unlock Fail - Latch key is not properly turned when FOUP is opened on the load port.
- /// </summary>
- public class L_KEY_ULPolicy : CheckImp, IPolicy
- {
- public L_KEY_ULPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("L_KEY_UL");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// MAP_S
- /// Mapping Sensor Error - Mapping sensor shows abnormality on the load port.
- /// </summary>
- public class MAP_SPolicy : CheckImp, IPolicy
- {
- public MAP_SPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("MAP_S");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// MAP_S1
- /// Mapping Sensor Error1- Load port failed preparation for mapping sensor.
- /// </summary>
- public class MAP_S1Policy : CheckImp, IPolicy
- {
- public MAP_S1Policy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("MAP_S1");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// MAP_S2
- /// Mapping Sensor Error2- Load port failed containing of mapping sensor.
- /// </summary>
- public class MAP_S2Policy : CheckImp, IPolicy
- {
- public MAP_S2Policy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("MAP_S2");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// WAFLOST Wafer Lost - Wafer presence on the robot finger is lost.
- /// Wafer presence on the aligner is lost.
- /// </summary>
- public class WAFLOSTPolicy : CheckImp, IPolicy
- {
- public WAFLOSTPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("WAFLOST");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///ALIGNNG Alignment Fail - Wafer alignment failed.
- /// </summary>
- public class ALIGNNGPolicy : CheckImp, IPolicy
- {
- public ALIGNNGPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("ALIGNNG");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///DRIVER Driver Abnormal - Motor control driver shows abnormality.
- ///Driver abnormality is shown due to drive power failure while motor is operating.
- /// </summary>
- public class DRIVERPolicy : CheckImp, IPolicy
- {
- public DRIVERPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("DRIVER");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///DRPOWERDOWN
- ///Driver Power Down - Motion is stopped due to drive power failure.
- /// </summary>
- public class DRPOWERDOWNPolicy : CheckImp, IPolicy
- {
- public DRPOWERDOWNPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("DRPOWERDOWN");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///HARDWARE Hardware Error - Hardware malfunction occurred on any single unit.
- /// </summary>
- public class HARDWAREPolicy : CheckImp, IPolicy
- {
- public HARDWAREPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("HARDWARE");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// INTERNAL
- /// Internal Error - Internal error occurred at the section where each unit inside EFEM PC iscontrolled.
- /// </summary>
- public class INTERNALPolicy : CheckImp, IPolicy
- {
- public INTERNALPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("INTERNAL");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// CRSWAF Found Cross Wafer- Cross wafer is detected during wafer mapping.
- /// </summary>
- public class CRSWAFPolicy : CheckImp, IPolicy
- {
- public CRSWAFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("CRSWAF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// THICKWAF Found Thick Wafer- Thicker wafer than the standard is detected during wafer mappi
- /// </summary>
- public class THICKWAFPolicy : CheckImp, IPolicy
- {
- public THICKWAFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("THICKWAF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// THINWAF Found Thin wafer- Thinner wafer than the standard isdetected during wafer mapping.
- /// </summary>
- public class THINWAFPolicy : CheckImp, IPolicy
- {
- public THINWAFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("THINWAF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// DBLWAF Found Double Wafer- Two or more wafers in one slot ar detected during wafer mapping. ///
- /// </summary>
- public class DBLWAFPolicy : CheckImp, IPolicy
- {
- public DBLWAFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("DBLWAF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// BOWWAF Found Bow Wafer- Front bow wafer is detected during wafer mapping.
- /// </summary>
- public class BOWWAFPolicy : CheckImp, IPolicy
- {
- public BOWWAFPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("BOWWAF");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- /// E84_TIMEOUTx E84 Timeout- E84 automated transfer sequence timeout occurred. ///
- /// </summary>
- public class E84_TIMEOUTxPolicy : CheckImp, IPolicy
- {
- public E84_TIMEOUTxPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("E84_TIMEOUTx");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///E84_CS_VALID E84 Signal Error
- /// CS_0,CS_1,VALID signals are changed while E84 automated transfer sequence is processing.
- /// </summary>
- public class E84_CS_VALIDPolicy : CheckImp, IPolicy
- {
- public E84_CS_VALIDPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("E84_CS_VALID");
- return false;
- }
- return true;
- }
- }
- /// <summary>
- ///READFAIL ID Read Fail- ID reading failed
- /// </summary>
- public class READFAILPolicy : CheckImp, IPolicy
- {
- public READFAILPolicy()
- {
- }
- public bool Check(string device, out string reason)
- {
- reason = string.Empty;
- if (false)
- {
- reason = string.Format("READFAIL");
- return false;
- }
- return true;
- }
- }
- }
|