ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Routines/PlaceRoutine.cs

using System;
using Aitex.Core.Common;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using EFEM.RT.Devices;
using EFEM.RT.Modules;

using Aitex.Sorter.Common;
using EFEMSC;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
using Aitex.Core.RT.Log;

namespace EFEM.RT.Routines
{
    public class PlaceRoutine : CommonRoutine, IRoutine, IEfemPlaceRoutine
    {
        enum Place
        {
            QueryState,
            OpenLoadLockDoor,
            CoolBufferMoveUP,
            WaitCoolBufferMoveUP,
            CheckBeforePlace,
            
            QueryRobotParameter,

            RobotServoOff,
            WaitRobotServoOff,
            SetWaferSizeParameter0000,
            SetWaferSizeParameter0114,
            RobotServoOn,
            WaitRobotServoOn,

            PlaceWafer,
            WaitPlace,
            CloseLoadLockDoor,
            CoolBufferMoveDown,
            WaitCoolBufferMoveDown,
            CheckAfterPlace,
            XMove,
            PostMessage,

            RobotBusytoSimifOn,
            RobotBusytoSimifOff,
            PinDown,
            CheckWaferPrecense,

            WaitCheckWaferPrecense,

            CheckWaferPrecenseAfterPlace,
            QuerySignalStatus,
            RobotBladeGrip
        }

        protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;

        protected bool EnableMoveInDiffSlotsNumLP
        {
            get 
            {
                if (SC.ContainsItem("System.IsEnableMoveInDiffSlotsNumLP"))
                    return SC.GetValue<bool>("System.IsEnableMoveInDiffSlotsNumLP");
                return false;
            }
        }
           

        private SCConfigItem _scPlaceTimeout = null;
        private int _timeout = 0;
        private int _axisTimeout = 0;
        private int _axisSpeed = 0;
        private int _alignerdelay = 0;
        private int _coolingdelay = 0;
        private int delaytime = 0;
        public PlaceRoutine(string module, string name)
        {
            Module = module;Name = name;
            _alignerdelay = SC.GetValue<int>("System.AlignerPinDownDelay");
            _coolingdelay = SC.GetValue<int>("System.CoolingPinDownDelay");
            _scPlaceTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPlaceWafer);
            if (HaveMotionAxis)
            {
                _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
                _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
            }
        }

        public bool Initalize()
        {
            IsStopped = true;

            return true;
        }

        public ModuleName Station { get; set; }
        public int Slot { get; set; }
        public Hand Blade { get; set; }

        public LoadPort _lpDevice;

        private bool _skipWait;

        public   Result Start(params object[] objs)
        {
            IsStopped = false;   
            Name = "Place";
            Reset();
            _timeout = robot.RobotCommandTimeout;
            if (ModuleHelper.IsCoolingBuffer(Station))
                delaytime = _coolingdelay*1000;
            else delaytime = _alignerdelay*1000;
            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PuttingWaferToChamberBegins, string.Format("{0}{1:D2} by {2}", Station.ToString(), Slot + 1, Blade.ToString()));

            

            return Result.RUN;
        }


        public Result Monitor()
        {
            try
            {
                if (IsStopped) return Result.DONE;
                
                if (ModuleHelper.IsCoolingBuffer(Station)|| ModuleHelper.IsAligner(Station))
                {
                    //QueryCoolBufferState((int)Place.QueryState, GetCoolBuffer(Station));
                    CoolBufferMoveUP((int)Place.CoolBufferMoveUP, GetCoolBuffer(Station), WaferManager.Instance.GetWaferSize(ModuleName.Robot, 0), _timeout, Notify, Stop);
                    WaitCoolBufferMoveUp((int)Place.WaitCoolBufferMoveUP, GetCoolBuffer(Station), "Wait CoolingBuffer Move Up...", _timeout, Notify, Stop);
                }
                CheckBladeWaferIsExist((int)Place.CheckWaferPrecense, robot, Blade, _timeout);
                // RobotSignalStatus((int)Place.QuerySignalStatus, robot, _timeout);

                WaitRobotMotion((int)Place.WaitCheckWaferPrecense, robot, "Wait finish check wafer", _timeout, Notify, Stop);

                CheckBeforePlace((int)Place.CheckBeforePlace, "Check wafer before place", Station, Slot, Blade, Notify, Stop);
                //GripRobotBlade((int)Place.RobotBladeGrip, Blade, robot, _timeout);
                if (!ModuleHelper.IsLoadLock(Station))
                {
                    PlaceWafer((int)Place.PlaceWafer, "Place wafer", Station, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop);

                    this.WaitRobotMotion((int)Place.WaitPlace, robot, "Wait wafer placed", _timeout, Notify, Stop);
                }

                if (LoadLockDoorControlByStation && ModuleHelper.IsLoadLock(Station) && !Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    LoadLockCloseAtmDoor((int)Place.CloseLoadLockDoor, DEVICE.GetDevice<LoadLockDevice>(Station.ToString()), "Wait Atm Door Close", _timeout, Notify, Stop);
                }  

                //为了提高上位机调度效率，机械手放片在上面就认为place指令完成。pin落下的时间和指令从上位机发送
                
                //为了保持兼容性，暂时判断了是否上位机控制，需要等cycle功能做好，这里都统一成外部控制lift pin
                if (!Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    if (ModuleHelper.IsCoolingBuffer(Station) || ModuleHelper.IsAligner(Station))
                    {
                        TimeDelay((int)Place.PinDown, delaytime);
                        CoolBufferMoveDown((int)Place.CoolBufferMoveDown, GetCoolBuffer(Station), WaferManager.Instance.GetWaferSize(Station, Slot), _timeout, Notify, Stop);
                        WaitCoolBufferMoveDown((int)Place.WaitCoolBufferMoveDown, GetCoolBuffer(Station), "Wait CoolingBuffer Move Down...", _timeout, Notify, Stop);
                    }
                }

                PostMessage((int)Place.PostMessage, string.Format("{0}{1:D2} by {2}", Station.ToString(), Slot + 1, Blade.ToString()));
               
                //CheckBladeWaferIsExist((int)Place.CheckWaferPrecenseAfterPlace, robot, Blade, _timeout);
               
                CheckAfterPlace((int)Place.CheckAfterPlace, "Check wafer information after wafer placed", Station, Slot, Blade, Notify, Stop);
            }
            catch (RoutineBreakException)
            {
                if (!IsActived(TokenId) && !_skipWait)
                {
                    _skipWait = true;
                    return Monitor();
                }

                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                IsStopped = true;
                return Result.FAIL;
            }

            IsStopped = true;
            return Result.DONE;
        }

        protected override void Notify(string message)
        {
            EV.PostMessage(Module, EventEnum.GeneralInfo, String.Format("Place sequence:{0}", message));
        }

        /// <summary>
        /// prepare process failed
        /// </summary>
        /// <param name="failReason"></param>
        /// <param name="reactor"></param>
        protected override void Stop(string failReason)
        {
            string reason = String.Empty;
            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PlaceWaferFailed, Station.ToString(), Slot + 1, Blade.ToString(), failReason);
        }

        public void PlaceWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Place wafer to {0}", chamber.ToString()));
                string reason = string.Empty;

                return robot.Place((RobotArmEnum)(int)blade, chamber.ToString(), slot);
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }



        public void CheckBeforePlace(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Check {0}{1:D2} wafer information before place wafer", chamber.ToString(), slot));

                string reason = string.Empty;

                if (!CheckRobotMotionInterlock(chamber, slot, out reason))
                {
                    EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("Target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
                    return false;
                }


                if (blade == Hand.Blade1)
                {
                    bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Empty);
                    if (!bNoWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + 1));
                        return false;
                    }

                    bool bHasWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade, WaferStatus.Normal);
                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }

                    bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);  //check sensor
                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                    if (IsEnableIdentifyThickness)
                    {
                        if (ModuleHelper.IsLoadPort(chamber))
                        {
                            if (SC.GetStringValue($"CarrierInfo.LowerThicknessType") != SC.GetStringValue($"CarrierInfo.{chamber}ThicknessType"))
                            {
                                EV.PostAlarmLog(ModuleName.System.ToString(), $"The wafer thickness of the lower arm is different from {chamber}.");
                                return false;
                            }
                        }
                    }
                }
                else if (blade == Hand.Blade2)
                {
                    bool bHasWafer = true;

                    for (int i = 0; i < robot.Blade2Slots; i++)
                    {
                        bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Empty);
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + i + 1));
                            return false;
                        }

                        bHasWafer &= WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Normal);


                        bool bSensorWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade + i);  //check sensor
                        if (!bSensorWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                            return false;
                        }
                    }

                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                    if (IsEnableIdentifyThickness)
                    {
                        if (ModuleHelper.IsLoadPort(chamber))
                        {
                            if (SC.GetStringValue($"CarrierInfo.UpperThicknessType") != SC.GetStringValue($"CarrierInfo.{chamber}ThicknessType"))
                            {
                                EV.PostAlarmLog(ModuleName.System.ToString(), $"The wafer thickness of the lower arm is different from {chamber}.");
                                return false;
                            }
                        }
                    }
                }
                else
                {
                    bool bHasWafer = true;
                    for (int i = 0; i < robot.Blade2Slots + 1; i++)
                    {
                        bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Empty);
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + i + 1));
                            return false;
                        }

                        bHasWafer &= WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Normal);


                        bool bSensorWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);  //check sensor
                        if (!bSensorWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                            return false;
                        }
                        if (ModuleHelper.IsLoadPort(chamber))
                        {
                            string arm = i == 0 ? "Lower" : "Upper";
                            if (SC.GetStringValue($"CarrierInfo.{arm}ThicknessType") != SC.GetStringValue($"CarrierInfo.{chamber}ThicknessType"))
                            {
                                EV.PostAlarmLog(ModuleName.System.ToString(), $"The wafer thickness of the {arm} arm is different from {chamber}.");
                                return false;
                            }
                        }
                    }
                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                    
                }

                if (ModuleHelper.IsCoolingBuffer(chamber))
                {
                        IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());


                    if (!buffer.CheckPinUp())
                    {
                        EV.PostWarningLog(chamber.ToString(), "Can not place wafer to buffer, buffer isn't pick position.");
                        return false;
                    }

                }
                if (ModuleHelper.IsLoadPort(chamber))
                {   
                    
                    //WaferSize size = WaferManager.Instance.GetWaferSize(ModuleName.Robot, (blade == Hand.Both) ? 0 : (int)blade);
                    WaferInfo wafer = WaferManager.Instance.GetWafer(ModuleName.Robot, (blade == Hand.Both) ? 0 : (int)blade);
                    LoadPortBaseDevice lp = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
                    LoadPortBaseDevice lp1 = DEVICE.GetDevice<LoadPortBaseDevice>(((ModuleName)wafer.OriginStation).ToString());
                    
                    if (!EnableMoveInDiffSlotsNumLP &&lp1 != null&&lp1.ValidSlotsNumber != lp.ValidSlotsNumber)
                    {
                        EV.PostWarningLog(chamber.ToString(), "Can not place wafer to loadport, SlotsNumber is unmatch.");
                        return false;
                    }
                    if (IsEnableMultiWaferSize)
                    {

                        //因为此手臂只有一个手抓
                        WaferSize size = WaferManager.Instance.GetWaferSize(ModuleName.Robot, (blade == Hand.Both) ? 0 : (int)blade);

                        lp = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());

                        if (size != lp.GetCurrentWaferSize())
                        {
                            EV.PostWarningLog(chamber.ToString(), "Can not place wafer to loadport, size is unmatch.");
                            return false;
                        }
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    error(String.Format("Check wafer information failed, can not place."));
                    throw (new RoutineFaildException());
                }
            }
        }


        public void CheckAfterPlace(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(name);
              
                if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    //online mode, DeleteWafer in LoadLock
                     WaferManager.Instance.DeleteWafer(chamber, slot);
                }
                if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    //online mode, DeleteWafer in LoadLock
                     WaferManager.Instance.DeleteWafer(chamber, slot);
                }

                if (blade == Hand.Blade1)
                {
                    bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade);

                    if (!bNoWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                        return false;
                    }
                }
                else if (blade == Hand.Blade2)
                {
                    for (int i = 0; i < robot.Blade2Slots; i++)
                    {
                        bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i);

                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                            return false;
                        }
                    }

                }
                else
                {
                    for (int i = 0; i < robot.Blade2Slots + 1; i++)
                    {
                        bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i);

                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                            return false;
                        }
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    error(String.Format("Failed to check wafer information"));
                    throw (new RoutineFaildException());
                }
            }
        }
    }
}