PickExtendRoutine.cs 17 KB

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  1. using System;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Device.Unit;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using EFEM.RT.Devices;
  10. using EFEM.RT.Modules;
  11. using EFEM.RT.Tasks;
  12. using Aitex.Sorter.Common;
  13. using MECF.Framework.Common.Equipment;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  16. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
  17. namespace EFEM.RT.Routines
  18. {
  19. public class PickExtendRoutine : CommonRoutine, IRoutine, IEfemPickRoutine
  20. {
  21. enum PickEx
  22. {
  23. CheckBeforePick,
  24. GotoReadyPosition,
  25. WaitReadyPosition,
  26. PickExWafer,
  27. WaitExPick,
  28. PickReWafer,
  29. WaitRePick,
  30. CheckAfterPick,
  31. RobotBladeGrip,
  32. CheckWaferPrecenseBeforePick,
  33. CheckWaferPrecenseAfterPick,
  34. QuerySignalStatusBeforePick,
  35. QuerySignalStatusAfterPick,
  36. CheckTriggerSignalOn,
  37. }
  38. protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
  39. private SCConfigItem _scPickTimeout = null;
  40. private int _timeout = 0;
  41. private int _axisTimeout = 0;
  42. private int _axisSpeed = 0;
  43. public double WaitForPickTime = 0.00;
  44. public PickExtendRoutine(string module, string name)
  45. {
  46. Module = module;
  47. name = "Pick";
  48. }
  49. public bool Initalize()
  50. {
  51. _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
  52. if (HaveMotionAxis)
  53. {
  54. _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
  55. _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
  56. }
  57. return true;
  58. }
  59. public ModuleName Source { get; set; }
  60. public int Slot { get; set; }
  61. public Hand Blade { get; set; }
  62. public MpntTaskEnum TaskEnum { get; set; }
  63. private LoadPort _lpDevice;
  64. public Result Start(params object[] objs)
  65. {
  66. Reset();
  67. _timeout = _scPickTimeout.IntValue;
  68. Name = "Pick";
  69. Reset();
  70. EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));
  71. if (!ModuleHelper.IsLoadLock(Source) || TaskEnum == MpntTaskEnum.ParamNg)
  72. return Result.FAIL;
  73. return Result.RUN;
  74. }
  75. public Result Monitor()
  76. {
  77. try
  78. {
  79. switch (TaskEnum)
  80. {
  81. case MpntTaskEnum.G1:
  82. CheckBeforePick((int)PickEx.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  83. RobotGoto((int)PickEx.PickExWafer, "Extend to LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickExtend, Notify, Stop);
  84. this.WaitRobotMotion((int)PickEx.WaitReadyPosition, robot, "Wait picked", _timeout, Notify, Stop);
  85. break;
  86. case MpntTaskEnum.GB:
  87. //RobotSignalStatus((int)Pick.QuerySignalStatusBeforePick, robot, _timeout);
  88. CheckBladeWaferIsExist((int)PickEx.CheckWaferPrecenseBeforePick, robot, Blade, _timeout);
  89. //CheckTriggerSignalOn((int)PickEx.CheckTriggerSignalOn, "Check Trigger Signal On", Source, _timeout);
  90. CheckBeforePick((int)PickEx.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  91. RobotGoto((int)PickEx.PickExWafer, "Extend to LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickExtend, Notify, Stop);
  92. this.WaitRobotMotion((int)PickEx.WaitReadyPosition, robot, "Wait picked", _timeout, Notify, Stop);
  93. break;
  94. case MpntTaskEnum.G4:
  95. if (NeedRobotGripAndUngrip)
  96. GripRobotBlade((int)PickEx.RobotBladeGrip, Blade, robot, _timeout);
  97. RobotGoto((int)PickEx.PickReWafer, "Retract from LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickRetracted, Notify, Stop);
  98. this.WaitRobotMotion((int)PickEx.WaitRePick, robot, "Wait picked", _timeout, Notify, Stop);
  99. CheckBladeWaferIsExist((int)PickEx.CheckWaferPrecenseAfterPick, robot, Blade, _timeout);
  100. //RobotSignalStatus((int)Pick.QuerySignalStatusAfterPick, robot, _timeout);
  101. CheckAfterPick((int)PickEx.CheckAfterPick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  102. break;
  103. default:
  104. throw new RoutineFaildException();
  105. }
  106. }
  107. catch (RoutineBreakException)
  108. {
  109. return Result.RUN;
  110. }
  111. catch (RoutineFaildException)
  112. {
  113. return Result.FAIL;
  114. }
  115. EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberEnds, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));
  116. return Result.DONE;
  117. }
  118. public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  119. {
  120. Tuple<bool, Result> ret = Execute(id, () =>
  121. {
  122. notify(name);
  123. string reason = string.Empty;
  124. if (!CheckRobotMotionInterlock(chamber, slot, out reason))
  125. {
  126. EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
  127. return false;
  128. }
  129. notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));
  130. if (blade == Hand.Blade1)
  131. {
  132. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  133. {
  134. //online mode, CreateWafer in LoadLock
  135. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  136. }
  137. else
  138. {
  139. bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  140. if (!bHasWafer)
  141. {
  142. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  143. return false;
  144. }
  145. }
  146. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
  147. if (!bNoWafer)
  148. {
  149. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  150. return false;
  151. }
  152. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor
  153. if (!bNoWafer)
  154. {
  155. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  156. return false;
  157. }
  158. if (ModuleHelper.IsBuffer(chamber))
  159. {
  160. bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor
  161. if (!bHasWafer)
  162. {
  163. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  164. return false;
  165. }
  166. }
  167. }
  168. else if (blade == Hand.Blade2)
  169. {
  170. bool bHasWafer = true;
  171. for (int i = 0; i < robot.Blade2Slots; i++)
  172. {
  173. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  174. {
  175. //online mode, CreateWafer in LoadLock
  176. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  177. }
  178. else
  179. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);
  180. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
  181. if (!bNoWafer)
  182. {
  183. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  184. return false;
  185. }
  186. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor
  187. if (!bNoWafer)
  188. {
  189. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  190. return false;
  191. }
  192. if (ModuleHelper.IsBuffer(chamber))
  193. {
  194. bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor
  195. if (!bHasWafer)
  196. {
  197. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  198. return false;
  199. }
  200. }
  201. }
  202. if (!bHasWafer)
  203. {
  204. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  205. return false;
  206. }
  207. }
  208. else
  209. {
  210. bool bHasWafer = true;
  211. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  212. {
  213. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  214. {
  215. //online mode, CreateWafer in LoadLock
  216. WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  217. }
  218. else
  219. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  220. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
  221. if (!bNoWafer)
  222. {
  223. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  224. return false;
  225. }
  226. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor
  227. if (!bNoWafer)
  228. {
  229. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  230. return false;
  231. }
  232. if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
  233. {
  234. bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor
  235. if (!bHasWafer)
  236. {
  237. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  238. return false;
  239. }
  240. }
  241. }
  242. if (!bHasWafer)
  243. {
  244. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
  245. return false;
  246. }
  247. }
  248. if (ModuleHelper.IsCoolingBuffer(chamber))
  249. {
  250. IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
  251. if (!buffer.CheckPinUp())
  252. {
  253. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
  254. return false;
  255. }
  256. }
  257. return true;
  258. });
  259. if (ret.Item1)
  260. {
  261. if (ret.Item2 == Result.FAIL)
  262. {
  263. error(String.Format("Failed to check wafer information."));
  264. throw (new RoutineFaildException());
  265. }
  266. }
  267. }
  268. protected void PickReadyPosition(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  269. {
  270. var reason = string.Empty;
  271. var ret = Execute(id, () =>
  272. {
  273. notify($"Robot go to {chamber.ToString()} ready position");
  274. return robot.GoTo((RobotArmEnum)(int)blade, chamber.ToString(), slot, RobotPostionEnum.PickReady);
  275. });
  276. if (ret.Item1)
  277. if (ret.Item2 == Result.FAIL)
  278. {
  279. error(reason);
  280. throw new RoutineFaildException();
  281. }
  282. }
  283. protected void PickExWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  284. {
  285. var reason = string.Empty;
  286. var ret = Execute(id, () =>
  287. {
  288. notify(string.Format("pick extend to {0}", chamber.ToString()));
  289. return true;//robot.PickExtend(chamber, slot, blade, out reason);
  290. });
  291. if (ret.Item1)
  292. if (ret.Item2 == Result.FAIL)
  293. {
  294. error(reason);
  295. throw new RoutineFaildException();
  296. }
  297. }
  298. protected void PickReWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  299. {
  300. var reason = string.Empty;
  301. var ret = Execute(id, () =>
  302. {
  303. notify(string.Format("pick retract from {0}", chamber.ToString()));
  304. return true;//robot.PickRetract(chamber, slot, blade, out reason);
  305. });
  306. if (ret.Item1)
  307. if (ret.Item2 == Result.FAIL)
  308. {
  309. error(reason);
  310. throw new RoutineFaildException();
  311. }
  312. }
  313. public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  314. {
  315. Tuple<bool, Result> ret = Execute(id, () =>
  316. {
  317. notify(name);
  318. if (blade == Hand.Blade1)
  319. {
  320. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);
  321. if (!bHasWafer)
  322. {
  323. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  324. return false;
  325. }
  326. }
  327. else if (blade == Hand.Blade2)
  328. {
  329. for (int i = 0; i < robot.Blade2Slots; i++)
  330. {
  331. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
  332. if (!bHasWafer)
  333. {
  334. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  335. return false;
  336. }
  337. }
  338. }
  339. else
  340. {
  341. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  342. {
  343. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
  344. if (!bHasWafer)
  345. {
  346. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  347. return false;
  348. }
  349. }
  350. }
  351. return true;
  352. });
  353. if (ret.Item1)
  354. {
  355. if (ret.Item2 == Result.FAIL)
  356. {
  357. error(String.Format("Failed to check wafer information."));
  358. throw (new RoutineFaildException());
  359. }
  360. }
  361. }
  362. }
  363. }