ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Routines/PlaceExtendRoutine.cs

using Aitex.Core.Common;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using EFEM.RT.Tasks;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using System;

namespace EFEM.RT.Routines
{
    public class PlaceExtendRoutine : CommonRoutine, IRoutine, IEfemPlaceRoutine
    {
        private enum PlaceEx
        {
            CheckBeforePlace,

            PlaceReady,
            WaitPlaceReady,
            PlaceWafer,
            WaitPlace,
            PlaceRetract,
            WaitPlaceRetract,
            CheckAfterPlace,
            RobotBladeUnGrip,
            CheckWaferPrecenseBeforePlace,
            CheckWaferPrecenseAfterPlace,
            QuerySignalStatusBeforePlace,
            QuerySignalStatusAfterPlace,
            CheckTriggerSignalOn,
        }

        protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;

        private SCConfigItem _scPlaceTimeout = null;
        private int _timeout = 0;
        private int _axisTimeout = 0;
        private int _axisSpeed = 0;

        public PlaceExtendRoutine(string module, string name)
        {
        }

        public bool Initalize()
        {
            _scPlaceTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPlaceWafer);
            if (HaveMotionAxis)
            {
                _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
                _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
            }
            return true;
        }

        public ModuleName Station { get; set; }
        public int Slot { get; set; }
        public Hand Blade { get; set; }
        public MpntTaskEnum TaskEnum { get; set; }

        public LoadPort _lpDevice;

        public Result Start(params object[] objs)
        {
            Name = "Place";
            Reset();
            _timeout = _scPlaceTimeout.IntValue;

            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PuttingWaferToChamberBegins, string.Format("{0}{1:D2} by {2}", Station.ToString(), Slot + 1, Blade.ToString()));

            if (!ModuleHelper.IsLoadLock(Station) || TaskEnum == MpntTaskEnum.ParamNg)
                return Result.FAIL;

            return Result.RUN;
        }

        public Result Monitor()
        {
            try
            {
                switch (TaskEnum)
                {
                    case MpntTaskEnum.P1:
                        CheckBeforePlace((int)PlaceEx.CheckBeforePlace, "Check wafer before place", Station, Slot, Blade, Notify, Stop);
                        RobotGoto((int)PlaceEx.PlaceWafer, "Extend to unLoadingPosition", Station, Slot, Blade, RobotPostionEnum.PlaceExtend, Notify, Stop);
                        //PlaceReady((int)PlaceEx.PlaceReady, "Place wafer", Station, Slot, Blade, Notify, Stop);
                        this.WaitRobotMotion((int)PlaceEx.WaitPlaceReady, robot, "Wait wafer placed", _timeout, Notify, Stop);
                        break;

                    case MpntTaskEnum.PB:
                        //RobotSignalStatus((int)Pick.QuerySignalStatusBeforePlace, robot, _timeout);
                        CheckBladeWaferIsExist((int)PlaceEx.CheckWaferPrecenseBeforePlace, robot, Blade, _timeout);
                        //CheckTriggerSignalOn((int)PlaceEx.CheckTriggerSignalOn, "Check Trigger Signal On", Station, _timeout);
                        CheckBeforePlace((int)PlaceEx.CheckBeforePlace, "Check wafer before place", Station, Slot, Blade, Notify, Stop);
                        RobotGoto((int)PlaceEx.PlaceWafer, "Extend to unLoadingPosition", Station, Slot, Blade, RobotPostionEnum.PlaceExtend, Notify, Stop);
                        this.WaitRobotMotion((int)PlaceEx.WaitPlaceReady, robot, "Wait wafer placed", _timeout, Notify, Stop);
                        if (IsVacuumMode && NeedRobotGripAndUngrip)
                            UnGripRobotBlade((int)PlaceEx.RobotBladeUnGrip, Blade, robot, _timeout);
                        break;

                    case MpntTaskEnum.P4:

                        if (!IsVacuumMode && NeedRobotGripAndUngrip)
                            UnGripRobotBlade((int)PlaceEx.RobotBladeUnGrip, Blade, robot, _timeout);
                        RobotGoto((int)PlaceEx.PlaceRetract, "Retract from unLoadingPosition", Station, Slot, Blade, RobotPostionEnum.PlaceRetract, Notify, Stop);
                        this.WaitRobotMotion((int)PlaceEx.WaitPlaceRetract, robot, "Wait wafer placed", _timeout, Notify, Stop);
                        CheckBladeWaferIsExist((int)PlaceEx.CheckWaferPrecenseAfterPlace, robot, Blade, _timeout);
                        //RobotSignalStatus((int)Pick.QuerySignalStatusAfterPlace, robot, _timeout);
                        CheckAfterPlace((int)PlaceEx.CheckAfterPlace, "Check wafer information after wafer placed", Station, Slot, Blade, Notify, Stop);
                        break;

                    case MpntTaskEnum.ParamNg:
                        break;
                }
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }

            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PuttingWaferToChamberEnds, string.Format("{0}{1:D2} by {2}", Station.ToString(), Slot + 1, Blade.ToString()));

            return Result.DONE;
        }

        protected override void Notify(string message)
        {
            EV.PostMessage(Module, EventEnum.GeneralInfo, String.Format("Place sequence:{0}", message));
        }

        /// <summary>
        /// prepare process failed
        /// </summary>
        /// <param name="failReason"></param>
        /// <param name="reactor"></param>
        protected override void Stop(string failReason)
        {
            string reason = String.Empty;
            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PlaceWaferFailed, Station.ToString(), Slot + 1, Blade.ToString(), failReason);
        }

        public void PlaceReady(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Place wafer to {0}", chamber.ToString()));
                string reason = string.Empty;

                return robot.GoTo((RobotArmEnum)blade, chamber.ToString(), slot, RobotPostionEnum.PlaceReady);
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }

        public void PlaceExtend(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Place wafer to {0}", chamber.ToString()));
                string reason = string.Empty;

                return robot.GoTo((RobotArmEnum)blade, chamber.ToString(), slot, RobotPostionEnum.PlaceExtendAtWafer);
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }

        public void PlaceRetract(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Place wafer to {0}", chamber.ToString()));
                string reason = string.Empty;

                return robot.GoTo((RobotArmEnum)blade, chamber.ToString(), slot, RobotPostionEnum.PlaceRetract);
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }

        public void CheckBeforePlace(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Check {0}{1:D2} wafer information before place wafer", chamber.ToString(), slot));

                string reason = string.Empty;

                if (!CheckRobotMotionInterlock(chamber, slot, out reason))
                {
                    EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("Target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
                    return false;
                }

                if (blade == Hand.Blade1)
                {
                    bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Empty);
                    if (!bNoWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + 1));
                        return false;
                    }

                    bool bHasWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade, WaferStatus.Normal);
                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }

                    bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);  //check sensor
                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                }
                else if (blade == Hand.Blade2)
                {
                    bool bHasWafer = true;

                    for (int i = 0; i < robot.Blade2Slots; i++)
                    {
                        bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Empty);
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + i + 1));
                            return false;
                        }

                        bHasWafer &= WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Normal);

                        bool bSensorWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade + i);  //check sensor
                        if (!bSensorWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                            return false;
                        }
                    }

                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                }
                else
                {
                    bool bHasWafer = true;
                    for (int i = 0; i < robot.Blade2Slots + 1; i++)
                    {
                        bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Empty);
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + i + 1));
                            return false;
                        }

                        bHasWafer &= WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Normal);

                        bool bSensorWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);  //check sensor
                        if (!bSensorWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                            return false;
                        }
                    }
                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                }

                if (ModuleHelper.IsCoolingBuffer(chamber))
                {
                    IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());

                    if (!buffer.CheckPinUp())
                    {
                        EV.PostWarningLog(chamber.ToString(), "Can not place wafer to buffer, buffer isn't pick position.");
                        return false;
                    }
                }
                else if (ModuleHelper.IsLoadPort(chamber) && MultiWaferSize)
                {
                    //因为此手臂只有一个手抓
                    WaferSize size = WaferManager.Instance.GetWaferSize(ModuleName.Robot, 0);

                    OpenStageWithWaferSizeLoadPort lp = DEVICE.GetDevice<OpenStageWithWaferSizeLoadPort>(chamber.ToString());

                    if (size != lp.Size)
                    {
                        EV.PostWarningLog(chamber.ToString(), "Can not place wafer to loadport, size is unmatch.");
                        return false;
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    error(String.Format("Check wafer information failed, can not place."));
                    throw (new RoutineFaildException());
                }
            }
        }

        public void CheckAfterPlace(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(name);

                //if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                //{
                //    //online mode, DeleteWafer in LoadLock
                //    WaferManager.Instance.DeleteWafer(chamber, slot);
                //}

                if (blade == Hand.Blade1)
                {
                    bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade);

                    if (!bNoWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                        return false;
                    }
                }
                else if (blade == Hand.Blade2)
                {
                    for (int i = 0; i < robot.Blade2Slots; i++)
                    {
                        bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i);

                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                            return false;
                        }
                    }
                }
                else
                {
                    for (int i = 0; i < robot.Blade2Slots + 1; i++)
                    {
                        bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i);

                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                            return false;
                        }
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    error(String.Format("Failed to check wafer information"));
                    throw (new RoutineFaildException());
                }
            }
        }
    }
}