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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using EFEM.RT.Tasks;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using System;
- namespace EFEM.RT.Routines
- {
- public class PickExtendRoutine : CommonRoutine, IRoutine, IEfemPickRoutine
- {
- private enum PickEx
- {
- CheckBeforePick,
- GotoReadyPosition,
- WaitReadyPosition,
- PickExWafer,
- WaitExPick,
- PickReWafer,
- WaitRePick,
- CheckAfterPick,
- RobotBladeGrip,
- CheckWaferPrecenseBeforePick,
- CheckWaferPrecenseAfterPick,
- QuerySignalStatusBeforePick,
- QuerySignalStatusAfterPick,
- CheckTriggerSignalOn,
- }
- protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
- private SCConfigItem _scPickTimeout = null;
- private int _timeout = 0;
- private int _axisTimeout = 0;
- private int _axisSpeed = 0;
- public double WaitForPickTime = 0.00;
- public PickExtendRoutine(string module, string name)
- {
- Module = module;
- name = "Pick";
- }
- public bool Initalize()
- {
- _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
- if (HaveMotionAxis)
- {
- _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
- _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
- }
- return true;
- }
- public ModuleName Source { get; set; }
- public int Slot { get; set; }
- public Hand Blade { get; set; }
- public MpntTaskEnum TaskEnum { get; set; }
- private LoadPort _lpDevice;
- public Result Start(params object[] objs)
- {
- Reset();
- _timeout = _scPickTimeout.IntValue;
- Name = "Pick";
- Reset();
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));
- if (!ModuleHelper.IsLoadLock(Source) || TaskEnum == MpntTaskEnum.ParamNg)
- return Result.FAIL;
- return Result.RUN;
- }
- public Result Monitor()
- {
- try
- {
- switch (TaskEnum)
- {
- case MpntTaskEnum.G1:
- CheckBeforePick((int)PickEx.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
- RobotGoto((int)PickEx.PickExWafer, "Extend to LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickExtend, Notify, Stop);
- this.WaitRobotMotion((int)PickEx.WaitReadyPosition, robot, "Wait picked", _timeout, Notify, Stop);
- break;
- case MpntTaskEnum.GB:
- //RobotSignalStatus((int)Pick.QuerySignalStatusBeforePick, robot, _timeout);
- CheckBladeWaferIsExist((int)PickEx.CheckWaferPrecenseBeforePick, robot, Blade, _timeout);
- //CheckTriggerSignalOn((int)PickEx.CheckTriggerSignalOn, "Check Trigger Signal On", Source, _timeout);
- CheckBeforePick((int)PickEx.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
- RobotGoto((int)PickEx.PickExWafer, "Extend to LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickExtend, Notify, Stop);
- this.WaitRobotMotion((int)PickEx.WaitReadyPosition, robot, "Wait picked", _timeout, Notify, Stop);
- break;
- case MpntTaskEnum.G4:
- if (NeedRobotGripAndUngrip)
- GripRobotBlade((int)PickEx.RobotBladeGrip, Blade, robot, _timeout);
- RobotGoto((int)PickEx.PickReWafer, "Retract from LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickRetracted, Notify, Stop);
- this.WaitRobotMotion((int)PickEx.WaitRePick, robot, "Wait picked", _timeout, Notify, Stop);
- CheckBladeWaferIsExist((int)PickEx.CheckWaferPrecenseAfterPick, robot, Blade, _timeout);
- //RobotSignalStatus((int)Pick.QuerySignalStatusAfterPick, robot, _timeout);
- CheckAfterPick((int)PickEx.CheckAfterPick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
- break;
- default:
- throw new RoutineFaildException();
- }
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- return Result.FAIL;
- }
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberEnds, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));
- return Result.DONE;
- }
- public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- Tuple<bool, Result> ret = Execute(id, () =>
- {
- notify(name);
- string reason = string.Empty;
- if (!CheckRobotMotionInterlock(chamber, slot, out reason))
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
- return false;
- }
- notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));
- if (blade == Hand.Blade1)
- {
- if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- }
- else
- {
- bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
- return false;
- }
- }
- bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(chamber))
- {
- bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor
- if (!bHasWafer)
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- else if (blade == Hand.Blade2)
- {
- bool bHasWafer = true;
- for (int i = 0; i < robot.Blade2Slots; i++)
- {
- if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- }
- else
- bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);
- bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(chamber))
- {
- bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor
- if (!bHasWafer)
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
- return false;
- }
- }
- else
- {
- bool bHasWafer = true;
- for (int i = 0; i < robot.Blade2Slots + 1; i++)
- {
- if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- }
- else
- bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
- bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
- {
- bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor
- if (!bHasWafer)
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
- return false;
- }
- }
- if (ModuleHelper.IsCoolingBuffer(chamber))
- {
- IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
- if (!buffer.CheckPinUp())
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
- return false;
- }
- }
- return true;
- });
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- error(String.Format("Failed to check wafer information."));
- throw (new RoutineFaildException());
- }
- }
- }
- protected void PickReadyPosition(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- var reason = string.Empty;
- var ret = Execute(id, () =>
- {
- notify($"Robot go to {chamber.ToString()} ready position");
- return robot.GoTo((RobotArmEnum)(int)blade, chamber.ToString(), slot, RobotPostionEnum.PickReady);
- });
- if (ret.Item1)
- if (ret.Item2 == Result.FAIL)
- {
- error(reason);
- throw new RoutineFaildException();
- }
- }
- protected void PickExWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- var reason = string.Empty;
- var ret = Execute(id, () =>
- {
- notify(string.Format("pick extend to {0}", chamber.ToString()));
- return true;//robot.PickExtend(chamber, slot, blade, out reason);
- });
- if (ret.Item1)
- if (ret.Item2 == Result.FAIL)
- {
- error(reason);
- throw new RoutineFaildException();
- }
- }
- protected void PickReWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- var reason = string.Empty;
- var ret = Execute(id, () =>
- {
- notify(string.Format("pick retract from {0}", chamber.ToString()));
- return true;//robot.PickRetract(chamber, slot, blade, out reason);
- });
- if (ret.Item1)
- if (ret.Item2 == Result.FAIL)
- {
- error(reason);
- throw new RoutineFaildException();
- }
- }
- public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- Tuple<bool, Result> ret = Execute(id, () =>
- {
- notify(name);
- if (blade == Hand.Blade1)
- {
- bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- else if (blade == Hand.Blade2)
- {
- for (int i = 0; i < robot.Blade2Slots; i++)
- {
- bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- }
- else
- {
- for (int i = 0; i < robot.Blade2Slots + 1; i++)
- {
- bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- }
- return true;
- });
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- error(String.Format("Failed to check wafer information."));
- throw (new RoutineFaildException());
- }
- }
- }
- }
- }
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