PickExtendRoutine.cs 17 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using EFEM.RT.Tasks;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
  14. using System;
  15. namespace EFEM.RT.Routines
  16. {
  17. public class PickExtendRoutine : CommonRoutine, IRoutine, IEfemPickRoutine
  18. {
  19. private enum PickEx
  20. {
  21. CheckBeforePick,
  22. GotoReadyPosition,
  23. WaitReadyPosition,
  24. PickExWafer,
  25. WaitExPick,
  26. PickReWafer,
  27. WaitRePick,
  28. CheckAfterPick,
  29. RobotBladeGrip,
  30. CheckWaferPrecenseBeforePick,
  31. CheckWaferPrecenseAfterPick,
  32. QuerySignalStatusBeforePick,
  33. QuerySignalStatusAfterPick,
  34. CheckTriggerSignalOn,
  35. }
  36. protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
  37. private SCConfigItem _scPickTimeout = null;
  38. private int _timeout = 0;
  39. private int _axisTimeout = 0;
  40. private int _axisSpeed = 0;
  41. public double WaitForPickTime = 0.00;
  42. public PickExtendRoutine(string module, string name)
  43. {
  44. Module = module;
  45. name = "Pick";
  46. }
  47. public bool Initalize()
  48. {
  49. _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
  50. if (HaveMotionAxis)
  51. {
  52. _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
  53. _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
  54. }
  55. return true;
  56. }
  57. public ModuleName Source { get; set; }
  58. public int Slot { get; set; }
  59. public Hand Blade { get; set; }
  60. public MpntTaskEnum TaskEnum { get; set; }
  61. private LoadPort _lpDevice;
  62. public Result Start(params object[] objs)
  63. {
  64. Reset();
  65. _timeout = _scPickTimeout.IntValue;
  66. Name = "Pick";
  67. Reset();
  68. EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));
  69. if (!ModuleHelper.IsLoadLock(Source) || TaskEnum == MpntTaskEnum.ParamNg)
  70. return Result.FAIL;
  71. return Result.RUN;
  72. }
  73. public Result Monitor()
  74. {
  75. try
  76. {
  77. switch (TaskEnum)
  78. {
  79. case MpntTaskEnum.G1:
  80. CheckBeforePick((int)PickEx.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  81. RobotGoto((int)PickEx.PickExWafer, "Extend to LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickExtend, Notify, Stop);
  82. this.WaitRobotMotion((int)PickEx.WaitReadyPosition, robot, "Wait picked", _timeout, Notify, Stop);
  83. break;
  84. case MpntTaskEnum.GB:
  85. //RobotSignalStatus((int)Pick.QuerySignalStatusBeforePick, robot, _timeout);
  86. CheckBladeWaferIsExist((int)PickEx.CheckWaferPrecenseBeforePick, robot, Blade, _timeout);
  87. //CheckTriggerSignalOn((int)PickEx.CheckTriggerSignalOn, "Check Trigger Signal On", Source, _timeout);
  88. CheckBeforePick((int)PickEx.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  89. RobotGoto((int)PickEx.PickExWafer, "Extend to LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickExtend, Notify, Stop);
  90. this.WaitRobotMotion((int)PickEx.WaitReadyPosition, robot, "Wait picked", _timeout, Notify, Stop);
  91. break;
  92. case MpntTaskEnum.G4:
  93. if (NeedRobotGripAndUngrip)
  94. GripRobotBlade((int)PickEx.RobotBladeGrip, Blade, robot, _timeout);
  95. RobotGoto((int)PickEx.PickReWafer, "Retract from LoadingPosition", Source, Slot, Blade, RobotPostionEnum.PickRetracted, Notify, Stop);
  96. this.WaitRobotMotion((int)PickEx.WaitRePick, robot, "Wait picked", _timeout, Notify, Stop);
  97. CheckBladeWaferIsExist((int)PickEx.CheckWaferPrecenseAfterPick, robot, Blade, _timeout);
  98. //RobotSignalStatus((int)Pick.QuerySignalStatusAfterPick, robot, _timeout);
  99. CheckAfterPick((int)PickEx.CheckAfterPick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  100. break;
  101. default:
  102. throw new RoutineFaildException();
  103. }
  104. }
  105. catch (RoutineBreakException)
  106. {
  107. return Result.RUN;
  108. }
  109. catch (RoutineFaildException)
  110. {
  111. return Result.FAIL;
  112. }
  113. EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberEnds, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));
  114. return Result.DONE;
  115. }
  116. public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  117. {
  118. Tuple<bool, Result> ret = Execute(id, () =>
  119. {
  120. notify(name);
  121. string reason = string.Empty;
  122. if (!CheckRobotMotionInterlock(chamber, slot, out reason))
  123. {
  124. EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
  125. return false;
  126. }
  127. notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));
  128. if (blade == Hand.Blade1)
  129. {
  130. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  131. {
  132. //online mode, CreateWafer in LoadLock
  133. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  134. }
  135. else
  136. {
  137. bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  138. if (!bHasWafer)
  139. {
  140. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  141. return false;
  142. }
  143. }
  144. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
  145. if (!bNoWafer)
  146. {
  147. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  148. return false;
  149. }
  150. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor
  151. if (!bNoWafer)
  152. {
  153. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  154. return false;
  155. }
  156. if (ModuleHelper.IsBuffer(chamber))
  157. {
  158. bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor
  159. if (!bHasWafer)
  160. {
  161. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  162. return false;
  163. }
  164. }
  165. }
  166. else if (blade == Hand.Blade2)
  167. {
  168. bool bHasWafer = true;
  169. for (int i = 0; i < robot.Blade2Slots; i++)
  170. {
  171. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  172. {
  173. //online mode, CreateWafer in LoadLock
  174. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  175. }
  176. else
  177. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);
  178. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
  179. if (!bNoWafer)
  180. {
  181. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  182. return false;
  183. }
  184. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor
  185. if (!bNoWafer)
  186. {
  187. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  188. return false;
  189. }
  190. if (ModuleHelper.IsBuffer(chamber))
  191. {
  192. bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor
  193. if (!bHasWafer)
  194. {
  195. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  196. return false;
  197. }
  198. }
  199. }
  200. if (!bHasWafer)
  201. {
  202. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  203. return false;
  204. }
  205. }
  206. else
  207. {
  208. bool bHasWafer = true;
  209. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  210. {
  211. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  212. {
  213. //online mode, CreateWafer in LoadLock
  214. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  215. }
  216. else
  217. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  218. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
  219. if (!bNoWafer)
  220. {
  221. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  222. return false;
  223. }
  224. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor
  225. if (!bNoWafer)
  226. {
  227. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  228. return false;
  229. }
  230. if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
  231. {
  232. bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor
  233. if (!bHasWafer)
  234. {
  235. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  236. return false;
  237. }
  238. }
  239. }
  240. if (!bHasWafer)
  241. {
  242. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
  243. return false;
  244. }
  245. }
  246. if (ModuleHelper.IsCoolingBuffer(chamber))
  247. {
  248. IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
  249. if (!buffer.CheckPinUp())
  250. {
  251. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
  252. return false;
  253. }
  254. }
  255. return true;
  256. });
  257. if (ret.Item1)
  258. {
  259. if (ret.Item2 == Result.FAIL)
  260. {
  261. error(String.Format("Failed to check wafer information."));
  262. throw (new RoutineFaildException());
  263. }
  264. }
  265. }
  266. protected void PickReadyPosition(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  267. {
  268. var reason = string.Empty;
  269. var ret = Execute(id, () =>
  270. {
  271. notify($"Robot go to {chamber.ToString()} ready position");
  272. return robot.GoTo((RobotArmEnum)(int)blade, chamber.ToString(), slot, RobotPostionEnum.PickReady);
  273. });
  274. if (ret.Item1)
  275. if (ret.Item2 == Result.FAIL)
  276. {
  277. error(reason);
  278. throw new RoutineFaildException();
  279. }
  280. }
  281. protected void PickExWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  282. {
  283. var reason = string.Empty;
  284. var ret = Execute(id, () =>
  285. {
  286. notify(string.Format("pick extend to {0}", chamber.ToString()));
  287. return true;//robot.PickExtend(chamber, slot, blade, out reason);
  288. });
  289. if (ret.Item1)
  290. if (ret.Item2 == Result.FAIL)
  291. {
  292. error(reason);
  293. throw new RoutineFaildException();
  294. }
  295. }
  296. protected void PickReWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  297. {
  298. var reason = string.Empty;
  299. var ret = Execute(id, () =>
  300. {
  301. notify(string.Format("pick retract from {0}", chamber.ToString()));
  302. return true;//robot.PickRetract(chamber, slot, blade, out reason);
  303. });
  304. if (ret.Item1)
  305. if (ret.Item2 == Result.FAIL)
  306. {
  307. error(reason);
  308. throw new RoutineFaildException();
  309. }
  310. }
  311. public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  312. {
  313. Tuple<bool, Result> ret = Execute(id, () =>
  314. {
  315. notify(name);
  316. if (blade == Hand.Blade1)
  317. {
  318. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);
  319. if (!bHasWafer)
  320. {
  321. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  322. return false;
  323. }
  324. }
  325. else if (blade == Hand.Blade2)
  326. {
  327. for (int i = 0; i < robot.Blade2Slots; i++)
  328. {
  329. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
  330. if (!bHasWafer)
  331. {
  332. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  333. return false;
  334. }
  335. }
  336. }
  337. else
  338. {
  339. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  340. {
  341. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
  342. if (!bHasWafer)
  343. {
  344. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  345. return false;
  346. }
  347. }
  348. }
  349. return true;
  350. });
  351. if (ret.Item1)
  352. {
  353. if (ret.Item2 == Result.FAIL)
  354. {
  355. error(String.Format("Failed to check wafer information."));
  356. throw (new RoutineFaildException());
  357. }
  358. }
  359. }
  360. }
  361. }