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ZZ-EFEM
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Jet_001_2P_Jet
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EfemRT
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Config
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2LPJet006
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_ioDefineCard1.xml

_ioDefineCard1.xml 7.8 KB
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  1. <?xml version="1.0" encoding="utf-8" ?>
    2. 

  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
    3. 

  3. 	<Dig_In>
    4. 

  4. 		<DI_ITEM Index="2"  BufferOffset="2"  Addr="DI-02" Name="DI_SafeGratingSensorIN1" Description="LIGHT CURTAIN SENSOR"/>
    5. 

  5. 		<DI_ITEM Index="16" BufferOffset="16" Addr="DI-16" Name="DI_FlipperTurnOverHorizontalSensor" Description="FLIPPER TURNOVER HORIZONTAL SENSOR"/>
    6. 

  6. 		<DI_ITEM Index="17" BufferOffset="17" Addr="DI-17" Name="DI_FlipperTurnOverOriginSensor" Description="FLIPPER TURNOVER ORIGIN SENSOR"/>
    7. 

  7. 		<DI_ITEM Index="18" BufferOffset="18" Addr="DI-18" Name="DI_FlipperTurnOverMotorPosCompleted" Description="FLIPPER TURNOVER MOTOR  POS COMPLETED"/>
    8. 

  8. 		<DI_ITEM Index="20" BufferOffset="20" Addr="DI-20" Name="DI_FlipperTurnOverMotorAlarm" Description="FLIPPER TURNOVER MOTOR ALARM"/>
    9. 

  9. 		<DI_ITEM Index="21" BufferOffset="21" Addr="DI-21" Name="DI_FlipperSafetyToRobot" Description="FLIPPER SAFETY TO ROBOT"/>
    10. 

  10. 		<DI_ITEM Index="22" BufferOffset="22" Addr="DI-22" Name="DI_FlipperClampClosedSensor" Description="FLIPPER CLAMP CLOSED SENSOR"/>
    11. 

  11. 		<DI_ITEM Index="23" BufferOffset="23" Addr="DI-23" Name="DI_FlipperClampOpenedSensor" Description="FLIPPER CLAMP OPENED SENSOR"/>
    12. 

  12. 		<DI_ITEM Index="24" BufferOffset="24" Addr="DI-24" Name="DI_FlipperClampMotorPosCompleted" Description="FLIPPER CLAMP MOTOR   POS COMPLETED"/>
    13. 

  13. 		<DI_ITEM Index="26" BufferOffset="26" Addr="DI-26" Name="DI_FlipperClampMotorAlarm" Description="FLIPPER CLAMP MOTOR  ALARM"/>
    14. 

  14. 		<DI_ITEM Index="28" BufferOffset="28" Addr="DI-28" Name="DI_FlipperWaterInPosition" Description="FLIPPER WATER IN POSITION"/> 
    15. 

  15. 		<DI_ITEM Index="30" BufferOffset="30" Addr="DI-30" Name="DI_FFUAlarm" Description="FFU ALARM"/>
    16. 

  16. 		<DI_ITEM Index="31" BufferOffset="31" Addr="DI-31" Name="DI_CDAPressureSW" Description="CDA Pressure SW"/>
    17. 

  17. 		<DI_ITEM Index="32" BufferOffset="32" Addr="DI-32" Name="DI_VACPressureSW" Description="VAC Pressure SW"/>
    18. 

  18. 		<DI_ITEM Index="33" BufferOffset="33" Addr="DI-33" Name="DI_IONCDAPressureSW" Description="ION CDA Pressure SW"/>
    19. 

  19. 		<DI_ITEM Index="34" BufferOffset="34" Addr="DI-34" Name="DI_IONAlarmSignal" Description="ION ALARM SIGNAL"/>
    20. 

  20. 		<DI_ITEM Index="35" BufferOffset="35" Addr="DI-35" Name="DI_EFEMSideDoorClosed" Description="EFEM SIDE DOOR CLOSED"/>
    21. 

  21. 		<DI_ITEM Index="36" BufferOffset="36" Addr="DI-36" Name="DI_PMASystemInterlock" Description="PMA System Interlock (Door Opened)"/>
    22. 

  22. 		<DI_ITEM Index="37" BufferOffset="37" Addr="DI-37" Name="DI_PMBSystemInterlock" Description="PMB System Interlock (Door Opened)"/>
    23. 

  23. 		<DI_ITEM Index="38" BufferOffset="38" Addr="DI-38" Name="DI_PA/FLPDoorClosed" Description="PA/FLP Door Closed"/>
    24. 

  24. 		<DI_ITEM Index="39" BufferOffset="39" Addr="DI-39" Name="DI_RunMode" Description="RUN Mode"/>
    25. 

  25. 		<DI_ITEM Index="40" BufferOffset="40" Addr="DI-40" Name="DI_EFEMPowerON" Description="EFEM Power ON"/>
    26. 

  26. 		<DI_ITEM Index="41" BufferOffset="41" Addr="DI-41" Name="DI_PreAlignerEnableToRobot" Description="PRE-ALIGNER ENABLE TO ROBOT"/>
    27. 

  27. 		<DI_ITEM Index="43" BufferOffset="43" Addr="DI-43" Name="DI_RobotEMSToEFEM" Description="Robot EMS to EFEM"/>
    28. 

  28. 		<DI_ITEM Index="45" BufferOffset="45" Addr="DI-45" Name="DI_RobotTeachingModeToEFEM" Description="Robot Teaching Mode to EFEM"/>		
    29. 

  29. 		<DI_ITEM Index="48" BufferOffset="48" Addr="DI-48" Name="DI_RBNotExtendToPMA" Description="RB Not Extend to PMA"/>
    30. 

  30. 		<DI_ITEM Index="49" BufferOffset="49" Addr="DI-49" Name="DI_RBNotExtendToPMB" Description="RB Not Extend to PMB"/>
    31. 

  31. 		<DI_ITEM Index="50" BufferOffset="50" Addr="DI-50" Name="DI_RBNotExtendToLP1" Description="RB Not Extend to LP1"/>
    32. 

  32. 		<DI_ITEM Index="51" BufferOffset="51" Addr="DI-51" Name="DI_RBNotExtendToLP2" Description="RB Not Extend to LP2"/>
    33. 

  33. 		<DI_ITEM Index="52" BufferOffset="52" Addr="DI-52" Name="DI_RBNotExtendPreAligner" Description="RB Not Extend PRE-ALIGNER"/>
    34. 

  34. 		<DI_ITEM Index="53" BufferOffset="53" Addr="DI-53" Name="DI_RBNotExtendFlipper" Description="RB Not Extend Flipper"/>
    35. 

  35. 		<DI_ITEM Index="54" BufferOffset="54" Addr="DI-54" Name="DI_LP1OperationStatus" Description="LP1 OPERATION STATUS"/>
    36. 

  36. 		<DI_ITEM Index="55" BufferOffset="55" Addr="DI-55" Name="DI_LP1FoupOpen" Description="LP1 FOUP OPEN"/>
    37. 

  37. 		<DI_ITEM Index="56" BufferOffset="56" Addr="DI-56" Name="DI_LP1FoupPlacement" Description="LP1 FOUP PLACEMENT"/>
    38. 

  38. 		<DI_ITEM Index="57" BufferOffset="57" Addr="DI-57" Name="DI_LP1Ready" Description="LP1 READY"/>
    39. 

  39. 		<DI_ITEM Index="58" BufferOffset="58" Addr="DI-58" Name="DI_LP1Presence" Description="LP1 PRESENCE"/>
    40. 

  40. 		<DI_ITEM Index="59" BufferOffset="59" Addr="DI-59" Name="DI_LP2OperationStatus" Description="LP2 OPERATION STATUS"/>
    41. 

  41. 		<DI_ITEM Index="60" BufferOffset="60" Addr="DI-60" Name="DI_LP2FoupOpen" Description="LP2 FOUP OPEN"/>
    42. 

  42. 		<DI_ITEM Index="61" BufferOffset="61" Addr="DI-61" Name="DI_LP2FoupPlacement" Description="LP2 FOUP PLACEMENT"/>
    43. 

  43. 		<DI_ITEM Index="62" BufferOffset="62" Addr="DI-62" Name="DI_LP2Ready" Description="LP2 READY"/>
    44. 

  44. 		<DI_ITEM Index="63" BufferOffset="63" Addr="DI-63" Name="DI_LP2Presence" Description="LP2  PRESENCE"/>
    45. 

  45. 	</Dig_In>
    46. 

  46. 	<Dig_Out>
    47. 

  47. 		<DO_ITEM Index="0"  BufferOffset="0"  Addr="DO-00" Name="DO_YellowLight" Description="Yellow light"/>
    48. 

  48. 		<DO_ITEM Index="1"  BufferOffset="1"  Addr="DO-01" Name="DO_GreenLight" Description="Green light"/>
    49. 

  49. 		<DO_ITEM Index="2"  BufferOffset="2"  Addr="DO-02" Name="DO_RedLight" Description="Red light"/>
    50. 

  50. 		<DO_ITEM Index="3"  BufferOffset="3"  Addr="DO-03" Name="DO_BuleLight" Description="Bule light"/>
    51. 

  51. 		<DO_ITEM Index="4"  BufferOffset="4"  Addr="DO-04" Name="DO_Buzzer1" Description="Buzzer1"/>
    52. 

  52. 		<DO_ITEM Index="5"  BufferOffset="5"  Addr="DO-05" Name="DO_Buzzer2" Description="Buzzer2"/>
    53. 

  53. 		<DO_ITEM Index="16" BufferOffset="16" Addr="DO-16" Name="DO_FlipperTurnOverMotor0/180" Description="FLP TURNOVER MOTOR TO 0 OR 180 DEGREE"/>
    54. 

  54. 		<DO_ITEM Index="17" BufferOffset="17" Addr="DO-17" Name="DO_FlipperTurnOverStepMotionStart" Description="FLP TURNOVER STEP MOTION START"/>
    55. 

  55. 		<DO_ITEM Index="18" BufferOffset="18" Addr="DO-18" Name="DO_FlipperTurnOverJOGP" Description="FLP TURNOVER JOG POSITIVE"/>
    56. 

  56. 		<DO_ITEM Index="19" BufferOffset="19" Addr="DO-19" Name="DO_FlipperTurnOverJOGN" Description="FLP TURNOVER JOG NEGATIVE"/>
    57. 

  57. 		<DO_ITEM Index="20" BufferOffset="20" Addr="DO-20" Name="DO_FlipperTurnOverSetOrigin" Description="FLP TURNOVER SET ORIGIN"/>
    58. 

  58. 		<DO_ITEM Index="21" BufferOffset="21" Addr="DO-21" Name="DO_FlipperTurnOverALM-RST" Description="FLP TURNOVER ALM-RST"/>
    59. 

  59. 		<DO_ITEM Index="24" BufferOffset="24" Addr="DO-24" Name="DO_FlipperClampMotorClose/Open" Description="FLP CLAMP MOTOR CLOSE OR OPEN"/>
    60. 

  60. 		<DO_ITEM Index="25" BufferOffset="25" Addr="DO-25" Name="DO_FlipperClampStepMotionStart" Description="FLP CLAMP STEP MOTION START"/>
    61. 

  61. 		<DO_ITEM Index="26" BufferOffset="26" Addr="DO-26" Name="DO_FlipperClampJOGP" Description="FLP CLAMP JOGP"/>
    62. 

  62. 		<DO_ITEM Index="27" BufferOffset="27" Addr="DO-27" Name="DO_FlipperClampJOGN" Description="FLP CLAMP JOGN"/>
    63. 

  63. 		<DO_ITEM Index="28" BufferOffset="28" Addr="DO-28" Name="DO_FlipperClampSetOrigin" Description="FLP CLAMP SET ORIGIN"/>
    64. 

  64. 		<DO_ITEM Index="29" BufferOffset="29" Addr="DO-29" Name="DO_FlipperClampALM-RST" Description="FLP CLAMP ALM-RST"/>
    65. 

  65. 		<DO_ITEM Index="34" BufferOffset="34" Addr="DO-34" Name="DO_IonizerInterrupt" Description="Ionizer Interrupt"/>
    66. 

  66. 		<DO_ITEM Index="40" BufferOffset="40" Addr="DO-40" Name="DO_Pause/ResumeToRobot" Description="Pause/Resume to Robot  (ON PAUSE)"/>
    67. 

  67. 		<DO_ITEM Index="50" BufferOffset="50" Addr="DO-50" Name="DO_RobotSafetyToLP1" Description="Robot Safety to LP1"/>
    68. 

  68. 		<DO_ITEM Index="51" BufferOffset="51" Addr="DO-51" Name="DO_RobotSafetyToLP2" Description="Robot Safety to LP2"/>
    69. 

  69. 		<DO_ITEM Index="52" BufferOffset="52" Addr="DO-52" Name="DO_EnableToOperateLP1" Description="Enable to Operate LP1"/>
    70. 

  70. 		<DO_ITEM Index="53" BufferOffset="53" Addr="DO-53" Name="DO_EnableToOperateLP2" Description="Enable to Operate LP2"/>
    71. 

  71. 

  72. 	</Dig_Out>
    73. 

  73. </IO_DEFINE>
    74.