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- <?xml version="1.0" encoding="utf-8"?>
- <DeviceModelDefine type="EFEM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
- <IoSignalTowers>
- <IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
- doRed="DO_Redlight" doYellow="DO_Yellowlight" doGreen="DO_Greenlight"
- doBlue="DO_Bulelight" doBuzzer1="DO_Buzzer1" doBuzzer2="DO_Buzzer2" doBuzzer3="" doBuzzer4="" doBuzzer5=""/>
- </IoSignalTowers>
- <IoSensors>
- <IoSensor module="System" id="SensorGratingSensorIN1" di="DI_SafeGratingSensorIN1" textOutTrigValue="false" infoText="" warningText="" alarmText="Safe Grating Sensor IN1 Alarm"/>
- <IoSensor module="System" id="SensorFFUalarm" di="DI_FFUAlarm" textOutTrigValue="false" infoText="" warningText="" alarmText="FFU Alarm"/>
- <IoSensor module="System" id="SensorCDAPressureSW" di="DI_CDAPressureSW" textOutTrigValue="false" infoText="" warningText="" alarmText="CDA Pressure SW Alarm"/>
- <IoSensor module="System" id="SensorVACPressureSW" di="DI_VACPressureSW" textOutTrigValue="false" infoText="" warningText="" alarmText="VAC Pressure SW Alarm"/>
- <IoSensor module="System" id="SensorIONCDAPressureSW" di="DI_IONCDAPressureSW" textOutTrigValue="false" infoText="" warningText="" alarmText=""/>
- <IoSensor module="System" id="SensorIONAlarmSIGNAL" di="DI_IONAlarmSignal" textOutTrigValue="false" infoText="" warningText="" alarmText=""/>
- <IoSensor module="System" id="SensorEFEMSideDoorClosed" di="DI_EFEMSideDoorOpened" textOutTrigValue="true"/>
- <IoSensor module="System" id="SensorPMASystemInterlock" di="DI_PMASystemInterlock" textOutTrigValue="false" infoText="" warningText="" alarmText="PMA System Interlock Alarm"/>
- <IoSensor module="System" id="SensorPMBSystemInterlock" di="DI_PMBSystemInterlock" textOutTrigValue="false" infoText="" warningText="" alarmText="PMB System Interlock Alarm"/>
- <IoSensor module="System" id="SensorPAorFLPDoorClosed" di="DI_PA/FLPDoorClosed" textOutTrigValue="false" infoText="" warningText="PA/FLP Door Closed Warning" alarmText=""/>
- <IoSensor module="System" id="SensorMaintenanceMode" di="DI_RunMode" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorEFEMPowerON" di="DI_EFEMPowerON" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorPAEnableToRobot" di="DI_PreAlignerEnableToRobot" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRobotEMStoEFEM" di="DI_RobotEMSToEFEM" textOutTrigValue="false" infoText="" warningText="" alarmText="Robot EMS To EFEM Alarm"/>
- <IoSensor module="System" id="SensorRobotTeachingModeToEFEM" di="DI_RobotTeachingModeToEFEM" textOutTrigValue="true" warningText=""/>
-
- <IoSensor module="System" id="SensorRBNotExtendPMA" di="DI_RBNotExtendToPMA" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendPMB" di="DI_RBNotExtendToPMB" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendSIMF1" di="DI_RBNotExtendToLP1" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendSIMF2" di="DI_RBNotExtendToLP2" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendPreAligner" di="DI_RBNotExtendPreAligner" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendFlipper" di="DI_RBNotExtendFlipper" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP1OperationStatus" di="DI_LP1OperationStatus" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP1FoupOpen" di="DI_LP1FoupOpen" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP1FoupPlacement" di="DI_LP1FoupPlacement" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP1Ready" di="DI_LP1Ready" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP1Presence" di="DI_LP1Presence" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP2OperationStatus" di="DI_LP2OperationStatus" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP2FoupOpen" di="DI_LP2FoupOpen" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP2FoupPlacement" di="DI_LP2FoupPlacement" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP2Ready" di="DI_LP2Ready" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorLP2Presence" di="DI_LP2Presence" textOutTrigValue="true" warningText=""/>
-
-
- </IoSensors>
- <IoTriggers>
- <IoTrigger id="TrigIonizerInterrupt" display="" schematicId="" unit="" doTrigger="DO_IonizerInterrupt"/>
- <IoTrigger id="TrigPauseResumetoRobot" display="" schematicId="" unit="" doTrigger="DO_Pause/ResumetoRobot"/>
- <IoTrigger id="TrigSafetytoSMIF1" display="" schematicId="" unit="" doTrigger="DO_RobotSafetyToLP1"/>
- <IoTrigger id="TrigSafetytoSMIF2" display="" schematicId="" unit="" doTrigger="DO_RobotSafetyToLP2"/>
- <IoTrigger id="TrigEnableToOperateLP1" display="" schematicId="" unit="" doTrigger="DO_EnableToOperateLP1"/>
- <IoTrigger id="TrigEnableToOperateLP2" display="" schematicId="" unit="" doTrigger="DO_EnableToOperateLP2"/>
- </IoTriggers>
- <JetFlippers assembly="EfemRT" classType="EFEM.RT.Devices.Flipper.JetFlipper" IsEnabled = "False">
- <JetFlipper module="System" id ="TurnOverStation" display="TurnOverStation" schematicId=""
- diFlipperTurnOverOriginSensor="DI_FlipperTurnOverOriginSensor"
- diFlipperTurnOverHorizontalSensor="DI_FlipperTurnOverHorizontalSensor"
- diFlipperTurnOverMotorPosCompleted="DI_FlipperTurnOverMotorPosCompleted"
- diFlipperTurnOverMotorAlarm="DI_FlipperTurnOverMotorAlarm"
- diFlipperEnableToRobot="DI_FlipperSafetyToRobot"
- diFlipperClampClosedSensor="DI_FlipperClampClosedSensor"
- diFlipperClampOpenedSensor="DI_FlipperClampOpenedSensor"
- diFlipperClampMotorPosCompleted="DI_FlipperClampMotorPosCompleted"
- diFlipperClampMotorAlarm="DI_FlipperClampMotorAlarm"
- doFlipperTurnOverMotorModeSW="DO_FlipperTurnOverMotor0/180"
- doFlipperClampMotorModeSW="DO_FlipperClampMotorClose/Open"
- doFlipperTurnOverStartStop="DO_FlipperTurnOverStepMotionStart"
- doFlipperClampSTARTSTOP="DO_FlipperClampStepMotionStart"
- doFlipperTurnOverSEL0="DO_FlipperTurnOverJOGP"
- doFlipperTurnOverSEL1="DO_FlipperTurnOverJOGN"
- doFlipperTurnOverSEL2="DO_FlipperTurnOverSetOrigin"
- doFlipperClampSEL0="DO_FlipperClampJOGP"
- doFlipperClampSEL1="DO_FlipperClampJOGN"
- doFlipperClampSEL2="DO_FlipperClampSetOrigin"
- doFlipperClampPGMRES="DO_FlipperClampALM-RST"
- doFlipperTurnOverPgmres="DO_FlipperTurnOverALM-RST"
- />
- </JetFlippers>
- </DeviceModelDefine>
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