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ZZ-EFEM
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RTEquipmentLibrary1
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RTEquipmentLibrary.csproj

RTEquipmentLibrary.csproj 37 KB
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  221.     <Compile Include="HardwareUnits\LoadPorts\TDKII\TDKLoadPortHandler.cs" />
    222. 

  222.     <Compile Include="HardwareUnits\MFCs\FujikinMFC\FujikinMFC.cs" />
    223. 

  223.     <Compile Include="HardwareUnits\MFCs\FujikinMFC\FujikinMFCConnection.cs" />
    224. 

  224.     <Compile Include="HardwareUnits\MFCs\FujikinMFC\FujikinMFCHandler.cs" />
    225. 

  225.     <Compile Include="HardwareUnits\MFCs\IMfc.cs" />
    226. 

  226.     <Compile Include="HardwareUnits\OcrReaders\Cognex\CognexAsyncSocket.cs" />
    227. 

  227.     <Compile Include="HardwareUnits\OcrReaders\Cognex\CognexConnection.cs" />
    228. 

  228.     <Compile Include="HardwareUnits\OcrReaders\Cognex\CognexHandler.cs" />
    229. 

  229.     <Compile Include="HardwareUnits\OcrReaders\Cognex\CognexWaferIDReaderWithCylinder.cs" />
    230. 

  230.     <Compile Include="HardwareUnits\OcrReaders\Cognex\CognexWaferIDReader.cs" />
    231. 

  231.     <Compile Include="HardwareUnits\OcrReaders\HST\HstConnection.cs" />
    232. 

  232.     <Compile Include="HardwareUnits\OcrReaders\HST\HstConnectionBase.cs" />
    233. 

  233.     <Compile Include="HardwareUnits\OcrReaders\HST\HstHandler.cs" />
    234. 

  234.     <Compile Include="HardwareUnits\OcrReaders\HST\HstOcrReader.cs" />
    235. 

  235.     <Compile Include="HardwareUnits\OcrReaders\IOSS\110\Ioss110WidReader.cs" />
    236. 

  236.     <Compile Include="HardwareUnits\OcrReaders\IOSS\110\Wid110Lib.cs" />
    237. 

  237.     <Compile Include="HardwareUnits\OcrReaders\IOSS\110\Wid110LibConst.cs" />
    238. 

  238.     <Compile Include="HardwareUnits\OcrReaders\IOSS\110\Wid110LibConstDevel.cs" />
    239. 

  239.     <Compile Include="HardwareUnits\OcrReaders\IOSS\120\IossWidReader.cs" />
    240. 

  240.     <Compile Include="HardwareUnits\OcrReaders\IOSS\120\Wid110Lib.cs" />
    241. 

  241.     <Compile Include="HardwareUnits\OcrReaders\IOSS\120\Wid110LibConst.cs" />
    242. 

  242.     <Compile Include="HardwareUnits\OcrReaders\OCRReaderBase\OCRReaderBase.cs" />
    243. 

  243.     <Compile Include="HardwareUnits\Pumps\EdwardsPump\EdwardsPump.cs" />
    244. 

  244.     <Compile Include="HardwareUnits\Pumps\EdwardsPump\EdwardsPumpConnection.cs" />
    245. 

  245.     <Compile Include="HardwareUnits\Pumps\EdwardsPump\EdwardsPumpHandler.cs" />
    246. 

  246.     <Compile Include="HardwareUnits\Pumps\Hanbells\HanbellPump.cs" />
    247. 

  247.     <Compile Include="HardwareUnits\Pumps\Hanbells\HanbellPumpConnection.cs" />
    248. 

  248.     <Compile Include="HardwareUnits\Pumps\Hanbells\HanbellPumpHandler.cs" />
    249. 

  249.     <Compile Include="HardwareUnits\MFCs\HoribaMFC\HoribaConnection.cs" />
    250. 

  250.     <Compile Include="HardwareUnits\MFCs\HoribaMFC\HoribaHandler.cs" />
    251. 

  251.     <Compile Include="HardwareUnits\Pumps\IPump.cs" />
    252. 

  252.     <Compile Include="HardwareUnits\Pumps\PfeifferPumpA100\PfeifferPumpA100.cs" />
    253. 

  253.     <Compile Include="HardwareUnits\Pumps\PfeifferPumpA100\PfeifferPumpA100Connection.cs" />
    254. 

  254.     <Compile Include="HardwareUnits\Pumps\PfeifferPumpA100\PfeifferPumpA100Handler.cs" />
    255. 

  255.     <Compile Include="HardwareUnits\RFs\AdTecTxHigh\TxHighFrequencyRF.cs" />
    256. 

  256.     <Compile Include="HardwareUnits\RFs\AdTecTxHigh\TxHighFrequencyRFConnection.cs" />
    257. 

  257.     <Compile Include="HardwareUnits\RFs\AdTecTxHigh\TxHighFrequencyRFHandler.cs" />
    258. 

  258.     <Compile Include="HardwareUnits\RFs\AdTecTxLow\TxLowFrequencyRF.cs" />
    259. 

  259.     <Compile Include="HardwareUnits\RFs\AdTecTxLow\TxLowFrequencyRFConnection.cs" />
    260. 

  260.     <Compile Include="HardwareUnits\RFs\AdTecTxLow\TxLowFrequencyRFHandler.cs" />
    261. 

  261.     <Compile Include="HardwareUnits\RFs\MKSPlasmaGnerator\MksRfPlasmaGenerator.cs" />
    262. 

  262.     <Compile Include="HardwareUnits\RFs\MKSPlasmaGnerator\MksRfPlasmaGeneratorConnection.cs" />
    263. 

  263.     <Compile Include="HardwareUnits\RFs\MKSPlasmaGnerator\MksRfPlasmaGeneratorHandler.cs" />
    264. 

  264.     <Compile Include="HardwareUnits\Robots\Hiwin\HiwinRobot.cs" />
    265. 

  265.     <Compile Include="HardwareUnits\Robots\Hiwin\HiwinRobotConnection.cs" />
    266. 

  266.     <Compile Include="HardwareUnits\Robots\Hiwin\HiwinRobotHandler.cs" />
    267. 

  267.     <Compile Include="HardwareUnits\Robots\JEL\JELC5000\JelC5000RobotZys.cs" />
    268. 

  268.     <Compile Include="HardwareUnits\Robots\JEL\JELC500Flippe\JelC5000RobotFlippeV1.cs" />
    269. 

  269.     <Compile Include="HardwareUnits\Robots\YaskawaRobots\YaskawaRobotHhCcmc.cs" />
    270. 

  270.     <Compile Include="HardwareUnits\TurboPumps\OsakaPumpTGkine\OsakaPumpTGkine.cs" />
    271. 

  271.     <Compile Include="HardwareUnits\TurboPumps\OsakaPumpTGkine\OsakaPumpTGkineConnection.cs" />
    272. 

  272.     <Compile Include="HardwareUnits\TurboPumps\OsakaPumpTGkine\OsakaPumpTGkineHandler.cs" />
    273. 

  273.     <Compile Include="HardwareUnits\Pumps\PfeifferPumpA603\PfeifferPumpA603.cs" />
    274. 

  274.     <Compile Include="HardwareUnits\Pumps\PfeifferPumpA603\PfeifferPumpA603Connection.cs" />
    275. 

  275.     <Compile Include="HardwareUnits\Pumps\PfeifferPumpA603\PfeifferPumpA603Handler.cs" />
    276. 

  276.     <Compile Include="HardwareUnits\Pumps\SkySGMPump\SkySGMPump.cs" />
    277. 

  277.     <Compile Include="HardwareUnits\Pumps\SkySGMPump\SkySGMPumpConnection.cs" />
    278. 

  278.     <Compile Include="HardwareUnits\Pumps\SkySGMPump\SkySGMPumpHandler.cs" />
    279. 

  279.     <Compile Include="HardwareUnits\RFMatchs\AE\AeRfMatch.cs" />
    280. 

  280.     <Compile Include="HardwareUnits\RFMatchs\AE\AeRfMatchConnection.cs" />
    281. 

  281.     <Compile Include="HardwareUnits\RFMatchs\AE\AeRfMatchHandler.cs" />
    282. 

  282.     <Compile Include="HardwareUnits\RFMatchs\AE\AeRfMatchState.cs" />
    283. 

  283.     <Compile Include="HardwareUnits\RFMatchs\Kaimei\KaimeiRFMatch.cs" />
    284. 

  284.     <Compile Include="HardwareUnits\RFMatchs\Kaimei\KaimeiRFMatchConnection.cs" />
    285. 

  285.     <Compile Include="HardwareUnits\RFMatchs\Kaimei\KaimeiRFMatchHandler.cs" />
    286. 

  286.     <Compile Include="HardwareUnits\RFMatchs\MKSs\MksRfMatch.cs" />
    287. 

  287.     <Compile Include="HardwareUnits\RFMatchs\MKSs\MksRfMatchConnection.cs" />
    288. 

  288.     <Compile Include="HardwareUnits\RFMatchs\MKSs\MksRfMatchHandler.cs" />
    289. 

  289.     <Compile Include="HardwareUnits\RFMatchs\MKSs\MksRfMatchState.cs" />
    290. 

  290.     <Compile Include="HardwareUnits\RFMatchs\Serens\SerenRfMatch.cs" />
    291. 

  291.     <Compile Include="HardwareUnits\RFMatchs\Serens\SerenRfMatchConnection.cs" />
    292. 

  292.     <Compile Include="HardwareUnits\RFMatchs\Serens\SerenRfMatchHandler.cs" />
    293. 

  293.     <Compile Include="HardwareUnits\RFMatchs\Serens\SerenRfMatchState.cs" />
    294. 

  294.     <Compile Include="HardwareUnits\RFMatchs\STeam\STeamRFMatch.cs" />
    295. 

  295.     <Compile Include="HardwareUnits\RFMatchs\STeam\STeamRFMatchConnection.cs" />
    296. 

  296.     <Compile Include="HardwareUnits\RFMatchs\STeam\STeamRFMatchHanlder.cs" />
    297. 

  297.     <Compile Include="HardwareUnits\RFs\AE\AeRfPower.cs" />
    298. 

  298.     <Compile Include="HardwareUnits\RFs\AE\AeRfPowerConnection.cs" />
    299. 

  299.     <Compile Include="HardwareUnits\RFs\AE\AeRfPowerHandler.cs" />
    300. 

  300.     <Compile Include="HardwareUnits\RFs\MKSs\MksRfPower.cs" />
    301. 

  301.     <Compile Include="HardwareUnits\RFs\MKSs\MksRfPowerConnection.cs" />
    302. 

  302.     <Compile Include="HardwareUnits\RFs\MKSs\MksRfPowerHandler.cs" />
    303. 

  303.     <Compile Include="HardwareUnits\RFs\Serens\SerenRfPower.cs" />
    304. 

  304.     <Compile Include="HardwareUnits\RFs\Serens\SerenRfPowerConnection.cs" />
    305. 

  305.     <Compile Include="HardwareUnits\RFs\Serens\SerenRfPowerHandler.cs" />
    306. 

  306.     <Compile Include="HardwareUnits\RFs\TruPlasmaRF1000\TruPlasmaRF1000.cs" />
    307. 

  307.     <Compile Include="HardwareUnits\RFs\TruPlasmaRF1000\TruPlasmaRF1000Connection.cs" />
    308. 

  308.     <Compile Include="HardwareUnits\RFs\TruPlasmaRF1000\TruPlasmaRF1000Handler.cs" />
    309. 

  309.     <Compile Include="HardwareUnits\RFs\TruPlasmaRF1001\TruPlasmaRF1001.cs" />
    310. 

  310.     <Compile Include="HardwareUnits\RFs\TruPlasmaRF1001\TruPlasmaRF1001Connection.cs" />
    311. 

  311.     <Compile Include="HardwareUnits\RFs\TruPlasmaRF1001\TruPlasmaRF1001Handler.cs" />
    312. 

  312.     <Compile Include="HardwareUnits\RFs\Wattsine\WattsineRF.cs" />
    313. 

  313.     <Compile Include="HardwareUnits\RFs\Wattsine\WattsineRFConnection.cs" />
    314. 

  314.     <Compile Include="HardwareUnits\RFs\Wattsine\WattsineRFHandler.cs" />
    315. 

  315.     <Compile Include="HardwareUnits\Robots\GuanAng\GAPlcRobot.cs" />
    316. 

  316.     <Compile Include="HardwareUnits\Robots\HirataRobotII\HirataRobotII.cs" />
    317. 

  317.     <Compile Include="HardwareUnits\Robots\HirataRobotII\HirataRobotIIConnection.cs" />
    318. 

  318.     <Compile Include="HardwareUnits\Robots\HirataRobotII\HirataRobotIIHandler.cs" />
    319. 

  319.     <Compile Include="HardwareUnits\Robots\JEL\JELC4400\JelBoffottEfem.cs" />
    320. 

  320.     <Compile Include="HardwareUnits\Robots\JEL\JELC4400\JelRobotWithX.cs" />
    321. 

  321.     <Compile Include="HardwareUnits\Robots\JEL\JELC5000\JelC5000Robot.cs" />
    322. 

  322.     <Compile Include="HardwareUnits\Robots\JEL\JELC5000\JelC5000RobotConnection.cs" />
    323. 

  323.     <Compile Include="HardwareUnits\Robots\JEL\JELC5000\JelC5000RobotHandler.cs" />
    324. 

  324.     <Compile Include="HardwareUnits\Robots\JEL\JELC500Flippe\JelC5000RobotFlippe.cs" />
    325. 

  325.     <Compile Include="HardwareUnits\Robots\JEL\JELC500Flippe\JelC5000RobotFlippeConnection.cs" />
    326. 

  326.     <Compile Include="HardwareUnits\Robots\JEL\JELC500Flippe\JelC5000RobotFlippeHandler.cs" />
    327. 

  327.     <Compile Include="HardwareUnits\Robots\Rorze751\RorzeRobot751.cs" />
    328. 

  328.     <Compile Include="HardwareUnits\Robots\Rorze751\RorzeRobot751Connection.cs" />
    329. 

  329.     <Compile Include="HardwareUnits\Robots\Rorze751\RorzeRobot751Handler.cs" />
    330. 

  330.     <Compile Include="HardwareUnits\Robots\Siasun1500C800C\RobotSiasun1500C800C.cs" />
    331. 

  331.     <Compile Include="HardwareUnits\Robots\Siasun1500C800C\RobotSiasun1500C800CConnection.cs" />
    332. 

  332.     <Compile Include="HardwareUnits\Robots\Siasun1500C800C\RobotSiasun1500C800CHandler.cs" />
    333. 

  333.     <Compile Include="HardwareUnits\Robots\YaskakwaNXC\YaskawaNXCRobot.cs" />
    334. 

  334.     <Compile Include="HardwareUnits\Robots\YaskakwaNXC\YaskawaNXCRobotConnection.cs" />
    335. 

  335.     <Compile Include="HardwareUnits\Robots\YaskakwaNXC\YaskawaNXCRobotHandler.cs" />
    336. 

  336.     <Compile Include="HardwareUnits\SMIFs\Reje\RejeSMIF.cs" />
    337. 

  337.     <Compile Include="HardwareUnits\SMIFs\Reje\RejeSMIFConnection.cs" />
    338. 

  338.     <Compile Include="HardwareUnits\SMIFs\Reje\RejeSMIFHandler.cs" />
    339. 

  339.     <Compile Include="HardwareUnits\Temperatures\AEs\AEOR4000T.cs" />
    340. 

  340.     <Compile Include="HardwareUnits\Temperatures\AEs\AEOR4000TConnection.cs" />
    341. 

  341.     <Compile Include="HardwareUnits\Temperatures\AEs\AEOR4000THandler.cs" />
    342. 

  342.     <Compile Include="HardwareUnits\Temperatures\Eurotherms\EurothermP116.cs" />
    343. 

  343.     <Compile Include="HardwareUnits\Temperatures\Eurotherms\EurothermP116Connection.cs" />
    344. 

  344.     <Compile Include="HardwareUnits\Temperatures\Eurotherms\EurothermP116Handler.cs" />
    345. 

  345.     <Compile Include="HardwareUnits\Temperatures\Omrons\OmronEJ1.cs" />
    346. 

  346.     <Compile Include="HardwareUnits\Temperatures\Omrons\OmronEJ1Connection.cs" />
    347. 

  347.     <Compile Include="HardwareUnits\Temperatures\Omrons\OmronEJ1Handler.cs" />
    348. 

  348.     <Compile Include="HardwareUnits\TurboPumps\PfeifferHipace\HipaceConnection.cs" />
    349. 

  349.     <Compile Include="HardwareUnits\TurboPumps\PfeifferHipace\HipaceHandler.cs" />
    350. 

  350.     <Compile Include="HardwareUnits\TurboPumps\PfeifferHipace\HipaceTurboPump.cs" />
    351. 

  351.     <Compile Include="HardwareUnits\Pumps\SkyPump\SkyPump.cs" />
    352. 

  352.     <Compile Include="HardwareUnits\Pumps\SkyPump\SkyPumpConnection.cs" />
    353. 

  353.     <Compile Include="HardwareUnits\Pumps\SkyPump\SkyPumpHandler.cs" />
    354. 

  354.     <Compile Include="HardwareUnits\RFMatchs\Comet\CometRFMatch.cs" />
    355. 

  355.     <Compile Include="HardwareUnits\RFMatchs\Comet\CometRFMatchConnection.cs" />
    356. 

  356.     <Compile Include="HardwareUnits\RFMatchs\Comet\CometRFMatchHandler.cs" />
    357. 

  357.     <Compile Include="HardwareUnits\Robots\HineAutomation\ConnectionBase.cs" />
    358. 

  358.     <Compile Include="HardwareUnits\Robots\HineAutomation\HAtmConnection.cs" />
    359. 

  359.     <Compile Include="HardwareUnits\Robots\HineAutomation\HAtmHandler.cs" />
    360. 

  360.     <Compile Include="HardwareUnits\Robots\HineAutomation\HAtmRobot.cs" />
    361. 

  361.     <Compile Include="HardwareUnits\Robots\HineAutomation\RobotConvertor.cs" />
    362. 

  362.     <Compile Include="HardwareUnits\Aligners\TazmoAligners\TazmoAligner.cs" />
    363. 

  363.     <Compile Include="HardwareUnits\Aligners\TazmoAligners\TazmoAlignerConnection.cs" />
    364. 

  364.     <Compile Include="HardwareUnits\Aligners\TazmoAligners\TazmoAlignerHandler.cs" />
    365. 

  365.     <Compile Include="HardwareUnits\Robots\HirataRobot\HirataR4Robot.cs" />
    366. 

  366.     <Compile Include="HardwareUnits\Robots\HirataRobot\HirataR4RobotConnection.cs" />
    367. 

  367.     <Compile Include="HardwareUnits\Robots\HirataRobot\HirataR4RobotHandler.cs" />
    368. 

  368.     <Compile Include="HardwareUnits\Robots\JEL\JELC4400\JelRobot.cs" />
    369. 

  369.     <Compile Include="HardwareUnits\Robots\JEL\JELC4400\JelRobotConnection.cs" />
    370. 

  370.     <Compile Include="HardwareUnits\Robots\JEL\JELC4400\JelRobotHandler.cs" />
    371. 

  371.     <Compile Include="HardwareUnits\Robots\RobotBase\RobotBase.cs" />
    372. 

  372.     <Compile Include="HardwareUnits\Robots\SiasunPhoenixB\RobotSiasunPhoenixB.cs" />
    373. 

  373.     <Compile Include="HardwareUnits\Robots\SiasunPhoenixB\RobotSiasunPhoenixBConnection.cs" />
    374. 

  374.     <Compile Include="HardwareUnits\Robots\SiasunPhoenixB\RobotSiasunPhoenixBHandler.cs" />
    375. 

  375.     <Compile Include="HardwareUnits\Robots\TazmoRobot\TazmoRobot.cs" />
    376. 

  376.     <Compile Include="HardwareUnits\Robots\TazmoRobot\TazmoRobotConnection.cs" />
    377. 

  377.     <Compile Include="HardwareUnits\Robots\TazmoRobot\TazmoRobotHandler.cs" />
    378. 

  378.     <Compile Include="HardwareUnits\Robots\YaskawaRobots\YaskawaRobot.cs" />
    379. 

  379.     <Compile Include="HardwareUnits\Robots\YaskawaRobots\YaskawaRobotConnection.cs" />
    380. 

  380.     <Compile Include="HardwareUnits\Robots\YaskawaRobots\YaskawaRobotHandler.cs" />
    381. 

  381.     <Compile Include="HardwareUnits\SMIFs\Brooks\BrooksSMIF.cs" />
    382. 

  382.     <Compile Include="HardwareUnits\SMIFs\Brooks\BrooksSMIFConnection.cs" />
    383. 

  383.     <Compile Include="HardwareUnits\SMIFs\Brooks\BrooksSMIFHandler.cs" />
    384. 

  384.     <Compile Include="HardwareUnits\ThrottleValves\KITZ\KITZTConnection.cs" />
    385. 

  385.     <Compile Include="HardwareUnits\ThrottleValves\KITZ\KITZTHandler.cs" />
    386. 

  386.     <Compile Include="HardwareUnits\ThrottleValves\KITZ\KITZCTTThrottleValve.cs" />
    387. 

  387.     <Compile Include="HardwareUnits\ThrottleValves\VAT\VATS651.cs" />
    388. 

  388.     <Compile Include="HardwareUnits\ThrottleValves\VAT\VATS651Connection.cs" />
    389. 

  389.     <Compile Include="HardwareUnits\ThrottleValves\VAT\VATS651Handler.cs" />
    390. 

  390.     <Compile Include="HardwareUnits\VCE\BrooksVCE\BrooksVCE.cs" />
    391. 

  391.     <Compile Include="HardwareUnits\VCE\BrooksVCE\BrooksVCEConnection.cs" />
    392. 

  392.     <Compile Include="HardwareUnits\VCE\BrooksVCE\BrooksVCEHandler.cs" />
    393. 

  393.     <Compile Include="HardwareUnits\VCE\SiasunVCEII\SiasunVCE.cs" />
    394. 

  394.     <Compile Include="HardwareUnits\VCE\SiasunVCEII\SiasunVCEConnection.cs" />
    395. 

  395.     <Compile Include="HardwareUnits\VCE\SiasunVCEII\SiasunVCEHandler.cs" />
    396. 

  396.     <Compile Include="HardwareUnits\VCE\SiasunVCE\SiasunVCE.cs" />
    397. 

  397.     <Compile Include="HardwareUnits\VCE\SiasunVCE\SiasunVCEConnection.cs" />
    398. 

  398.     <Compile Include="HardwareUnits\VCE\SiasunVCE\SiasunVCEHandler.cs" />
    399. 

  399.     <Compile Include="HardwareUnits\OHT\Vehicle\IVehicle.cs" />
    400. 

  400.     <Compile Include="HardwareUnits\OHT\Vehicle\Ncd\NcdVehicle.cs" />
    401. 

  401.     <Compile Include="HardwareUnits\OHT\Vehicle\VehicleBaseDevice.cs" />
    402. 

  402.     <Compile Include="HardwareUnits\OHT\Vehicle\VehicleStateEnum.cs" />
    403. 

  403.     <Compile Include="HardwareUnits\WalkingAixs\IOWalkingAxisNcd01.cs" />
    404. 

  404.     <Compile Include="HardwareUnits\WalkingAixs\IOWalkingAxisHH.cs" />
    405. 

  405.     <Compile Include="HardwareUnits\WalkingAixs\WalkingAxisBaseDevice.cs" />
    406. 

  406.     <Compile Include="LogicUnits\BufferStations\BufferStation.cs" />
    407. 

  407.     <Compile Include="HardwareUnits\CarrierIdReaders\Old\CarrierIdReader.cs" />
    408. 

  408.     <Compile Include="HardwareUnits\CarrierIdReaders\Old\OmronBarcode\OmronBarcodeReader.cs" />
    409. 

  409.     <Compile Include="HardwareUnits\CarrierIdReaders\Old\OmronBarcode\OmronRFID\Handler.cs" />
    410. 

  410.     <Compile Include="HardwareUnits\CarrierIdReaders\Old\OmronBarcode\OmronRFID\OmronRfidReader.cs" />
    411. 

  411.     <Compile Include="HardwareUnits\AsyncSerial.cs" />
    412. 

  412.     <Compile Include="HardwareUnits\AsyncSocket.cs" />
    413. 

  413.     <Compile Include="HardwareUnits\Efems\DummyEfem.cs" />
    414. 

  414.     <Compile Include="HardwareUnits\Efems\EfemBase.cs" />
    415. 

  415.     <Compile Include="HardwareUnits\Efems\IEfemBase.cs" />
    416. 

  416.     <Compile Include="HardwareUnits\FFUs\MayAir\FfuMayAir.cs" />
    417. 

  417.     <Compile Include="HardwareUnits\FFUs\MayAir\FfuMayAirConnection.cs" />
    418. 

  418.     <Compile Include="HardwareUnits\FFUs\MayAir\FfuMayAirHandler.cs" />
    419. 

  419.     <Compile Include="LogicUnits\ITransferTarget.cs" />
    420. 

  420.     <Compile Include="LogicUnits\LoadLocks\ILoadLock.cs" />
    421. 

  421.     <Compile Include="LogicUnits\LoadLocks\LoadLock.cs" />
    422. 

  422.     <Compile Include="HardwareUnits\LoadPorts\CasstleType.cs" />
    423. 

  423.     <Compile Include="HardwareUnits\ICommunication.cs" />
    424. 

  424.     <Compile Include="HardwareUnits\LoadPorts\DummyLoadPort.cs" />
    425. 

  425.     <Compile Include="HardwareUnits\LoadPorts\LoadPort.cs" />
    426. 

  426.     <Compile Include="HardwareUnits\LoadPorts\LoadPortType.cs" />
    427. 

  427.     <Compile Include="HardwareUnits\LoadPorts\OpenStages\OpenStageWithDoorLoadPort.cs" />
    428. 

  428.     <Compile Include="HardwareUnits\LoadPorts\OpenStages\OpenStageLoadPort.cs" />
    429. 

  429.     <Compile Include="HardwareUnits\LoadPorts\TDK\constant.cs" />
    430. 

  430.     <Compile Include="HardwareUnits\LoadPorts\TDK\EvtHandler.cs" />
    431. 

  431.     <Compile Include="HardwareUnits\LoadPorts\TDK\GetHandler.cs" />
    432. 

  432.     <Compile Include="HardwareUnits\LoadPorts\TDK\Handler.cs" />
    433. 

  433.     <Compile Include="HardwareUnits\LoadPorts\TDK\TDKLoadPort.cs" />
    434. 

  434.     <Compile Include="HardwareUnits\LoadPorts\TDK\ModHandler.cs" />
    435. 

  435.     <Compile Include="HardwareUnits\LoadPorts\TDK\MovHandler.cs" />
    436. 

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  444.     <Compile Include="HardwareUnits\TurboPumps\Pfeiffer\PumpMagpowerConnection.cs" />
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  446.     <Compile Include="HardwareUnits\Robots\RobotBase\IRobot.cs" />
    447. 

  447.     <Compile Include="HardwareUnits\Robots\RobotBase\RobotArmEnum.cs" />
    448. 

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    499. 

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    509. 

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    511. 

  511.     <Compile Include="Unit\IoPump.cs" />
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    514. 

  514.     <Compile Include="Unit\IoPlcDateTime.cs" />
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    516. 

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    517. 

  517.     <Compile Include="Unit\IoReset.cs" />
    518. 

  518.     <Compile Include="Unit\IoSensor.cs" />
    519. 

  519.     <Compile Include="Unit\IoServoMotor.cs" />
    520. 

  520.     <Compile Include="Unit\IoSignalLight.cs" />
    521. 

  521.     <Compile Include="Unit\IoSignalTower.cs" />
    522. 

  522.     <Compile Include="Unit\IoSlitValve.cs" />
    523. 

  523.     <Compile Include="Unit\IoTrigger.cs" />
    524. 

  524.     <Compile Include="Unit\IoTurnOver.cs" />
    525. 

  525.     <Compile Include="Unit\IoWaferSizeDetector.cs" />
    526. 

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    536. 

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    540.