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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLock
- {
- public enum LoadLockDoorState
- {
- Opened,
- Closed,
- Unknown
- }
- public class LoadLockBaseDevice : BaseDevice, IDevice
- {
- public int SlotCount { get; set; }
- public virtual bool IsIdle { get; set; }
- public virtual LoadLockDoorState LoadLockAtmDoorState
- {
- get;set;
- }
-
- public virtual LoadLockDoorState LoadLockVtmDoorState
- {
- get;set;
- }
- public LoadLockBaseDevice(string module, string name, int slotNumber)
- {
- Module = module;
- Name = name;
- SlotCount = slotNumber;
- WaferManager.Instance.SubscribeLocation(name, slotNumber);
- }
-
- public bool Initialize()
- {
-
- return true;
- }
- public bool IsEnableExtend
- {
- get;set;
- }
-
- public void Monitor()
- {
-
- }
- public void Terminate()
- {
- }
- public void Reset()
- {
- }
-
- }
- }
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