ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Servers/Protocol.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;

namespace Efem.Protocol
{
    public enum EfemCommandType
    {
        MOV,       //MOV Motion request
        GET,       //Request for each type status acquisition 
        SET,       //Control setting
        ACK,
    };

    public enum EfemCommand
    {
        READY,      //Ready , ACK, INF
        INIT,       //EFEM initialization MOV, ACK, INF
        ORGSH,      //Origin search    

        LOCK,       //Pod lock MOV, ACK, INF
        UNLOCK,     //Pod unlock
        DOCK,       //Moving to pod dock position MOV, ACK, INF
        UNDOCK,     //Moving to pod undock position MOV, ACK, INF
        OPEN,       //Pod open MOV, ACK, INF
        CLOSE,      //Pod close MOV, ACK, INF

        WAFSH,      //Wafer mapping MOV, ACK, INF
        MAPDT,      //Wafer map information GET, ACK, INF, EVT

        LOAD,       //Wafer carry-out MOV, ACK, INF
        UNLOAD,     //Wafer carry-in MOV, ACK, INF

        GOTO,       //Move to specified object MOV, ACK, INF
        TRANS,      //Wafer transfer MOV, ACK, INF
        CHANGE,     //Wafer exchange MOV, ACK, INF
        MPNT,     //Wafer MPNT MOV, ACK, INF

        ALIGN,      //Alignment MOV, SET, ACK, INF
        ALIGN2,      //Alignment MOV, SET, ACK, INF
        LIFT,      //Alignment MOV, SET, ACK, INF

        HOME,       //Home MOV, ACK, INF
        HOLD,       //Hold MOV, ACK, INF
        RESTR,      //Restart MOV, ACK
        ABORT,      //Abort termination MOV, ACK, INF
        EMS,        //Emergency stop MOV, ACK, INF
        ERROR,      //Error GET, SET, ACK, INF
        
        CLAMP,      //Clamp output, get state GET, SET, ACK, INF
        STATE,      //Get status GET, ACK, INF
        
        MODE,       //E84 mode setting GET, SET, ACK, INF
        TRANSREQ,   //E84 automatic transfer request   MOV, GET, ACK, INF, EVT

        SIGOUT,     //Signal output SET, ACK
        SIGSTAT,    //Signal input/output information GET, ACK, INF, EVT


        EVENT,      //Event setting GET, SET, ACK, INF
        CSTID,      //Carrier ID GET, ACK, INF

        USDEFINE,   //User Define 
        THICKNESS,  //wafer thickness, GET, SET, ACK, INF

        SLOTSNUM,  //LP slotsnum， GET, SET, ACK, INF

        WAFERSIZE, //LP WAFERSIZE， GET, SET, ACK, INF

        FLIP,      //Flipper TurnOver， MOV, ACK, INF (add) 
    }

    public enum EfemEventType
    {
        ALL      = 0x1000,        //All events (cannot be designated for GET)
        MAPDT    = 0x0001,        //Mapping result event
        TRANSREQ = 0x0002,        //E84 automatic transfer start event
        SYSTEM   = 0x0004,        //System I/O update event
        PORT     = 0x0008,        //Port I/O update event
        PRS      = 0x0010,        //Pressure sensor measured value update event
        FFU      = 0x0020,        //FFU revolution update event
        CSTID,
    };

    public enum EfemEventValue
    {
        ON,     //Event is enabled
        OFF,    //Event is disabled
    };
    public class EfemParameter
    {
        public const string SYS = "SYS";
        public const string STOWER = "STOWER";
        public const string P1 = "P1";
        public const string P2 = "P2";
        public const string P3 = "P3";
        public const string P4 = "P4";
    }
    public enum StateItem
    {
        VER,       //MOV Motion request
        TRACK,       //Request for each type status acquisition 
        PRS,       //Control setting
        FFU,
    };


    public enum MoveArm
    {
        ARM1,       //Designates upper finger
        ARM2,       //Designates lower finger
    }
    public enum MovePosition
    {
        UP,         //Height for inserting a wafer
        DOWN,       //Height for picking up a wafer
    }
}