ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Modules/RouteManager.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text.RegularExpressions;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using EFEM.RT.Devices;
using EFEM.RT.Routines;
using EFEM.RT.Routines.LP;

using EFEM.RT.Tasks;
using Aitex.Sorter.Common;
using EFEMSC;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
using IEntity = Aitex.Core.RT.Fsm.IEntity;
using Aitex.Sorter.RT.Module;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
using Aitex.Core.RT.Log;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.BufferStations;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Flipper.FlipperBase;
using static EFEM.RT.Devices.FlipperEntity;

namespace EFEM.RT.Modules
{


    public class RouteManager : Entity, IEntity, IModuleEntity
    {
        public enum MSG
        {
            MultiMoveWafer,
            MoveWafer,
            ReturnWafer,
            SetSpeed,

            HomeUnit,
            ReadID,
            WriteID,
            ReadAndLoad,
            LOAD,
            UNLOAD,


            Pause,
            Resume,

            Stop,

            StartCycle,

            Init,

            HOME,
            RESET,
            ABORT,
            ERROR,

            StartRecipe,
            StopRecipe,
            PauseRecipe,
            ResumeRecipe,

            SetAutoMode,
            SetManualMode,

            //SetLocalMode,
            //SetRemoteMode,

            SetMaintenanceMode,

            MapWafer,

            Pick,
            Place,
            MPNTPick,
            MPNTPlace,
			
            RobotActionDone,
            LoadPortActionDone,
            ChangeCassette
        }

        //routine
        private readonly bool _isInterferencePrevent =
            DeviceDefineManager.Instance.GetValue<bool>("InterferencePrevent") ?? false;
        private IEfemRoutine initRoutine = null;
        private SetSpeedRoutine setspeedRoutine = null;
        private WaferMappingRoutine _waferMapRoutine;
        private LoadFoupRoutine _loadFoupRoutine;
        private PickRoutine _pickRoutine;
        private PickExtendRoutine _pickExtendRoutine;
        private PlaceRoutine _placeRoutine;
        private PlaceExtendRoutine _placeExtendRoutine;
        private SorterCycleManager _cycle = new SorterCycleManager();
        //TrigRobotSafetyToLP1 Locker
        //private static readonly object _robotSafetyToLP1Locker = new object();
        //TrigRobotSafetyToLP2 Locker
        //private static readonly object _robotSafetyToLP2Locker = new object();

        private int LoadPortQuantity = DeviceDefineManager.Instance.GetValue<int>("LoadPortQuantity") ?? 0;
        //private int LoadLockQuantity = DeviceDefineManager.Instance.GetValue<int>("LoadLockQuantity") ?? 0;
        private static readonly bool FlipperIsDisable = SC.ContainsItem("System.FlipperDisable") ? SC.GetValue<bool>("System.FlipperDisable") : true;
        public bool IsTransferMode { get; private set; }

        public bool IsAutoMode { get; private set; }

        public bool IsFFUOk { get; set; }

        public bool IsEMSStop { get; set; }

        public string Name { get; set; }

        public bool IsInit
        {
            get { return fsm.State == (int)RtState.Init; }
        }

        public bool IsIdle
        {
            get { return fsm.State == (int)RtState.Idle; }
        }
 
        public bool IsError
        {
            get { return fsm.State == (int)RtState.Error; }
        }

        public bool IsMaintenanceMode
        {
            get { return fsm.State == (int)RtState.Maintenance; }
        }
        public bool IsCycle
        {
            get { return fsm.State == (int)RtState.Cycle; }
        }
        public bool Initializing
        {
            get { return fsm.State == (int)RtState.Initializing; }
        }
        public bool IsRunning
        {
            get
            {
                return !IsIdle && !IsInit && !IsError && !IsMaintenanceMode;
            }
        }

        public int RTStatus { get { return fsm.State; } }

        private double lastTime = 0;
        private double elapsedTime = 0;
        public double TransferTime
        {
            get
            {
                elapsedTime = 0;
                if (!_timerTransfer.IsIdle())
                {
                    elapsedTime = (_timerTransfer.GetElapseTime() / 1000);
                }

                return lastTime + elapsedTime;

            }

        }

        private static LoadPortEntity _lp1 = new LoadPortEntity(ModuleName.LP1.ToString());
        private static LoadPortEntity _lp2 = new LoadPortEntity(ModuleName.LP2.ToString());
        private static LoadPortEntity _lp3 = new LoadPortEntity(ModuleName.LP3.ToString());
        private static LoadPortEntity _lp4 = new LoadPortEntity(ModuleName.LP4.ToString());
        private static LoadPortEntity _lp5 = new LoadPortEntity(ModuleName.LP5.ToString());
        private static LoadPortEntity _lp6 = new LoadPortEntity(ModuleName.LP6.ToString());
        private static LoadPortEntity _lp7 = new LoadPortEntity(ModuleName.LP7.ToString());
        private static LoadPortEntity _lp8 = new LoadPortEntity(ModuleName.LP8.ToString());
        private static LoadPortEntity _lp9 = new LoadPortEntity(ModuleName.LP9.ToString());
        private static LoadPortEntity _lp10 = new LoadPortEntity(ModuleName.LP10.ToString());
        private static FlipperEntity _flp = new FlipperEntity(ModuleName.Flipper);

        private LoadPortEntity[] _loadportEntities =
        {
            _lp1,
            _lp2,
            _lp3,
            _lp4,
            _lp5,
            _lp6,
            _lp7,
            _lp8,
            _lp9,
            _lp10
        };
 

        public bool IsBusy
        {
            get { return !IsInit && !IsError && !IsIdle; }
        }

        public bool IsOnline { get; set; }

        private DeviceTimer _timerTransfer = new DeviceTimer();

        private TransferManager _transferManager = new TransferManager();


        private StaticTransfer _staticTransfer = new StaticTransfer();
        private IMoveManager _mover = null;
        private DualArmMoveManager _dualMover = new DualArmMoveManager();
        private SingleArmMoveManager _singleMover = new SingleArmMoveManager();

 

        private RobotBaseDevice _robot = null;

        public bool ClearEventLogEnable;
        public Result GetTaskState(string task)
        {
            if (_taskState.ContainsKey(task))
                return _taskState[task];

            return Result.DONE;
        }
        public string EFemNum
        {
            get 
            {   if(SC.ContainsItem("System.EFEMNUM"))
                return SC.GetStringValue("System.EFEMNUM");
                return "001";
            }
        }
        public string DeviceType
        {
            get
            {
                if (SC.ContainsItem("System.DeviceType"))
                    return SC.GetStringValue("System.DeviceType").Remove(0, 6);
                return "001";
            }
        }
        Dictionary<string, Result> _taskState = new Dictionary<string, Result>();

        #region Module Insatlled
        public bool IsLP1Disable { get; set; }
        public bool IsLP2Disable { get; set; }
        public bool IsAligner1Disable { get; set; }
        public bool IsAligner2Disable { get; set; }
        public bool IsPMADisable { get; set; }
        public bool IsPMBDisable { get; set; }
        public bool IsBufferDisable { get; set; }
        public bool IsBuffer1Disable { get; set; }
        public bool IsBuffer2Disable { get; set; }
        public bool IsCoolingBuffer1Disable { get; set; }
        public bool IsCoolingBuffer2Disable { get; set; }
        public bool IsFlipperDisable { get; set; }

        #endregion

        #region Flipper
        /// <summary>
        /// Flipper Entity
        /// </summary>
        public FlipperEntity FLPEntity => _flp;
        #endregion


        public RouteManager()
        {
            Name = "System";
            switch(EFemNum)
            {
                case "001":
                    {
                        DeviceModel.SensorPMASystemInterlock.OnSignalChanged += SensorPMASystemInterlock_OnSignalChanged;
                        DeviceModel.SensorPMBSystemInterlock.OnSignalChanged += SensorPMBSystemInterlock_OnSignalChanged;
                        DeviceModel.SensorRBNotExtendSIMF1.OnSignalChanged += SensorRBNotExtendSIMF1_OnSignalChanged;
                        DeviceModel.SensorRBNotExtendSIMF2.OnSignalChanged += SensorRBNotExtendSIMF2_OnSignalChanged;
                        DeviceModel.SensorSMIF1PODOPEN.OnSignalChanged += SensorSMIF1PODOPEN_OnSignalChanged;
                        DeviceModel.SensorSMIF2PODOPEN.OnSignalChanged += SensorSMIF2PODOPEN_OnSignalChanged;
                        DeviceModel.SensorWaterLeakSW.OnSignalChanged += SensorWaterLeakSW_OnSignalChanged;
                        DeviceModel.SensorGratingSensorIN1.OnSignalChanged += SensorGratingSensorIN1_OnSignalChanged;
                    }
                    break;
                case "002":
                    {
                        DeviceModel.SensorSMIF1PODOPEN.OnSignalChanged += SensorSMIF1PODOPEN_OnSignalChanged;
                        DeviceModel.SensorSMIF2PODOPEN.OnSignalChanged += SensorSMIF2PODOPEN_OnSignalChanged;
                        DeviceModel.SensorWaterLeakSW.OnSignalChanged += SensorWaterLeakSW_OnSignalChanged;
                        DeviceModel.SensorGratingSensorIN1.OnSignalChanged += SensorGratingSensorIN1_OnSignalChanged;
                    }
                    break;
                case "003":
                    {
                        DeviceModel.SensorSMIF1PODOPEN.OnSignalChanged += SensorSMIF1PODOPEN_OnSignalChanged;
                        DeviceModel.SensorSMIF2PODOPEN.OnSignalChanged += SensorSMIF2PODOPEN_OnSignalChanged;
                        DeviceModel.SensorWaterLeakSW.OnSignalChanged += SensorWaterLeakSW_OnSignalChanged;
                        DeviceModel.SensorGratingSensorIN1.OnSignalChanged += SensorGratingSensorIN1_OnSignalChanged;
                    }
                    break;
                case "004":
                    {
                        DeviceModel.SensorSMIF1PODOPEN.OnSignalChanged += SensorSMIF1PODOPEN_OnSignalChanged;
                        DeviceModel.SensorSMIF2PODOPEN.OnSignalChanged += SensorSMIF2PODOPEN_OnSignalChanged;
                        DeviceModel.SensorWaterLeakSW.OnSignalChanged += SensorWaterLeakSW_OnSignalChanged;
                        DeviceModel.SensorGratingSensorIN1.OnSignalChanged += SensorGratingSensorIN1_OnSignalChanged;
                    }
                    break;
                case "005":
                    {
                        DeviceModel.SensorWaterLeakSW.OnSignalChanged += SensorWaterLeakSW_OnSignalChanged;
                        DeviceModel.SensorCDAPressureSW.OnSignalChanged += SensorCDAPressureSW_OnSignalChanged;
                        ///DeviceModel.SensorRBNotExtendSIMF1.OnSignalChanged += SensorRBNotExtendSIMF1_OnSignalChanged1;
                    }
                    break;
                case "006":
                    {
                        ;
                    }
                    break;
                default:
                    {
                        DeviceModel.SensorPMASystemInterlock.OnSignalChanged += SensorPMASystemInterlock_OnSignalChanged;
                        DeviceModel.SensorPMBSystemInterlock.OnSignalChanged += SensorPMBSystemInterlock_OnSignalChanged;
                        DeviceModel.SensorRBNotExtendSIMF1.OnSignalChanged += SensorRBNotExtendSIMF1_OnSignalChanged;
                        DeviceModel.SensorRBNotExtendSIMF2.OnSignalChanged += SensorRBNotExtendSIMF2_OnSignalChanged;
                        DeviceModel.SensorSMIF1PODOPEN.OnSignalChanged += SensorSMIF1PODOPEN_OnSignalChanged;
                        DeviceModel.SensorSMIF2PODOPEN.OnSignalChanged += SensorSMIF2PODOPEN_OnSignalChanged;
                        DeviceModel.SensorWaterLeakSW.OnSignalChanged += SensorWaterLeakSW_OnSignalChanged;
                        DeviceModel.SensorGratingSensorIN1.OnSignalChanged += SensorGratingSensorIN1_OnSignalChanged;
                    }
                    break;
            }
           
            Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
            InitRouterManager();
        }

        
        private void SensorRBNotExtendSIMF1_OnSignalChanged1(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (arg2)
                DeviceModel.TrigSafetytoSMIF1.SetTrigger(true, out _);
            else
                DeviceModel.TrigSafetytoSMIF1.SetTrigger(false, out _);

        }

        private void SensorCDAPressureSW_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (arg2)
                DeviceModel.TrigCDAPressureOkToPM.SetTrigger(true,out _);
            else 
                DeviceModel.TrigCDAPressureOkToPM.SetTrigger(false, out _);
        }

        private void Instance_OnAlarmEvent(EventItem obj)
        {
            //if (obj.Level == EventLevel.Alarm && !obj.Source.StartsWith("LP"))
            //{
            //    if (!obj.Description.Contains("Has c Error.")|| obj.Description.Contains("PLM Error"))
            //    {
            //        CheckToPostMsg(MSG.ERROR);
            //    }
            //    //if (fsm.State == (int)RtState.Cycle||fsm.State==(int)RtState.Transfer || fsm.State == (int)RtState.Picking || fsm.State == (int)RtState.Placing)
            //    //{
            //    //    _tazmoRobot.Stop();
            //    //}
            //}
            if (obj.Level == EventLevel.Alarm)
            {   
                if(!CheckIsLpAlarmInfo(obj))//||!obj.Description.Contains("obj.Source.StartsWith("LP")"))!string.IsNullOrEmpty(obj.Source) &&
                    CheckToPostMsg(MSG.ERROR);
            }

        }
        public bool CheckIsLpAlarmInfo(EventItem obj)
        {
            try
            {   
                if (string.IsNullOrEmpty(obj.Source))
                {
                    if (obj.EventEnum.Equals("UnloadFOUPFailed"))
                        return true;
                    else if (obj.EventEnum.Equals("LoadFOUPFailed"))
                        return true;
                }
                else if (obj.Source.StartsWith("LP"))
                     return true;
                else  if (obj.Source.Contains("LoadPort"))
                     return true;
            }
            catch(Exception ex)
            {
                LOG.Write(ex);
                return false;
            }
            return false;
        }
        private void SensorRBNotExtendSIMF2_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (!arg2)
            {
                DeviceModel.TrigRBbusytoSIMF2.SetTrigger(true, out _);
                LOG.Write("SensorRBNotExtendSIMF2 signal change,set TrigRBbusytoSIMF2 signal on.");
            }
            else
            {
                DeviceModel.TrigRBbusytoSIMF2.SetTrigger(false, out _);
                LOG.Write("SensorRBNotExtendSIM2 signal change,set TrigRBbusytoSIMF2 signal off.");
            }
        }

        private void SensorRBNotExtendSIMF1_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (!arg2)
            {
                DeviceModel.TrigRBbusytoSIMF1.SetTrigger(true, out _);
                LOG.Write("SensorRBNotExtendSIMF1 signal change,set TrigRBbusytoSIMF1 signal on.");
            }
            else
            {
                DeviceModel.TrigRBbusytoSIMF1.SetTrigger(false, out _);
                LOG.Write("SensorRBNotExtendSIMF1 signal change,set TrigRBbusytoSIMF1 signal off.");
            }
        }

        private void SensorGratingSensorIN1_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (!arg2)
            {   
               if(fsm.State==(int)RtState.Cycle|| fsm.State == (int)RtState.Transfer
                    || fsm.State == (int)RtState.Placing||fsm.State == (int)RtState.Picking)
                    DeviceModel.TrigPauseResumetoRobot.SetTrigger(true, out _);

            }
            else
            {
                DeviceModel.TrigPauseResumetoRobot.SetTrigger(false, out _);

            }
        }

        private void SensorWaterLeakSW_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (!arg2)
            {
                if (EFemNum != "005")
                {
                    if (fsm.State == (int)RtState.Cycle || fsm.State == (int)RtState.Transfer
                           || fsm.State == (int)RtState.Placing || fsm.State == (int)RtState.Picking)
                        DeviceModel.TrigPauseResumetoRobot.SetTrigger(true, out _);
                }
                else
                {
                    DeviceModel.TrigWaterLeakOkToPM.SetTrigger(false, out _);
                }

            }
            else
            {
                if (EFemNum != "005")
                {
                    DeviceModel.TrigPauseResumetoRobot.SetTrigger(false, out _);
                }
                else
                {
                    DeviceModel.TrigWaterLeakOkToPM.SetTrigger(true, out _);
                }

            }
        }
        
        private void SensorSMIF2PODOPEN_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (arg2)
            {
                DeviceModel.TrigSafetytoSMIF2.SetTrigger(true, out _);
                LOG.Write("SensorSMIF2PODOPEN signal change,set TrigSafetytoSMIF2 signal on.");
            }
            else
            {
                DeviceModel.TrigSafetytoSMIF2.SetTrigger(false, out _);
                LOG.Write("SensorSMIF2PODOPEN signal change,set TrigSafetytoSMIF2 signal off.");
            }
        }

        
        private void SensorSMIF1PODOPEN_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (arg2)
            {
                DeviceModel.TrigSafetytoSMIF1.SetTrigger(true, out _);
                LOG.Write("SensorSMIF1PODOPEN signal change,set TrigSafetytoSMIF1 signal on.");
            }
            else
            {
                DeviceModel.TrigSafetytoSMIF1.SetTrigger(false, out _);
                LOG.Write("SensorSMIF1PODOPEN signal change,set TrigSafetytoSMIF1 signal off.");
            }
        }

        private void SensorPMBSystemInterlock_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (arg2)
            {
                DeviceModel.TrigSafetytoPMB.SetTrigger(true, out _);
                LOG.Write("SensorPMBSystemInterlock signal change,set TrigSafetytoPMB signal on.");
            }
            else
            {
                DeviceModel.TrigSafetytoPMB.SetTrigger(false, out _);
                LOG.Write("SensorPMBSystemInterlock signal change,set TrigSafetytoPMA signal off.");
            }
        }

        private void SensorPMASystemInterlock_OnSignalChanged(Aitex.Core.RT.Device.Unit.IoSensor arg1, bool arg2)
        {
            if (arg2)
            {
                DeviceModel.TrigSafetytoPMA.SetTrigger(true, out _);
                LOG.Write("SensorPMASystemInterlock signal change,set TrigSafetytoPMB signal on.");
            }
            else
            {
                DeviceModel.TrigSafetytoPMA.SetTrigger(false, out _);
                LOG.Write("SensorPMASystemInterlock signal change,set TrigSafetytoPMB signal off.");
            }
        }

        public void InitRouterManager()
        {
            BuildTransitionTable();
            InitModuleInstallment();
            SubscribeDataVariable();
            SubscribeOperation();

            _robot = DEVICE.GetDevice<RobotBaseDevice>(DeviceName.Robot);
            Running = false;
            IsAutoMode = false;
        }

        #region Initialization
        private void BuildTransitionTable()
        {
            fsm = new StateMachine<RouteManager>(Name, (int)RtState.Init, 50);

            //Init sequence
            Transition(RtState.Init, MSG.Init, null, RtState.Idle);

            //Init sequence
            Transition(RtState.Init, MSG.HOME, fStartInit, RtState.Initializing);
            Transition(RtState.Idle, MSG.HOME, fStartInit, RtState.Initializing);
            Transition(RtState.Error, MSG.HOME, fStartInit, RtState.Initializing);

            //  EnterExitTransition<RtState, FSM_MSG>(RtState.Initializing, fStartInit, FSM_MSG.NONE, null);

            Transition(RtState.Initializing, FSM_MSG.TIMER, fInit, RtState.Idle);
            Transition(RtState.Initializing, MSG.ERROR, fError, RtState.Error);
            Transition(RtState.Initializing, MSG.ABORT, null, RtState.Init);

            EnterExitTransition<RtState, FSM_MSG>(RtState.Idle, fIdle, FSM_MSG.NONE, null);
            //Reset
            AnyStateTransition(MSG.RESET, fStartReset, RtState.Idle);

            AnyStateTransition(MSG.ERROR, fError, RtState.Error);
            AnyStateTransition((int)FSM_MSG.ALARM, fError, (int)RtState.Error);

            //MaintanceMode
            Transition(RtState.Maintenance, MSG.SetManualMode, null, RtState.Idle);
            AnyStateTransition(MSG.SetMaintenanceMode, fSetMaintenanceMode, RtState.Maintenance);

            //Auto/manual sequence
            Transition(RtState.Idle, MSG.SetAutoMode, fSetAutoMode, RtState.Idle);
            Transition(RtState.Idle, MSG.SetManualMode, fSetManualMode, RtState.Idle);


            //Loadport operation
            Transition(RtState.Idle, MSG.LOAD, fLoad, RtState.Idle);
            Transition(RtState.Idle, MSG.ReadAndLoad, fReadAndLoad, RtState.Idle);


            Transition(RtState.Idle, MSG.UNLOAD, fUnload, RtState.Idle);
            Transition(RtState.Idle, MSG.ReadID, fReadID, RtState.Idle);
            Transition(RtState.Idle, MSG.WriteID, fWriteID, RtState.Idle);

            //SetSpeed
            Transition(RtState.Idle, MSG.SetSpeed, fStartSetSpeed, RtState.SetSpeed);
            Transition(RtState.SetSpeed, FSM_MSG.TIMER, fSetSpeed, RtState.Idle);

            //Wafer Map Routine
            Transition(RtState.Init, MSG.MapWafer, FsmStartMapWafer, RtState.WaferMapping);
            Transition(RtState.Idle, MSG.MapWafer, FsmStartMapWafer, RtState.WaferMapping);
            Transition(RtState.WaferMapping, FSM_MSG.TIMER, FsmMonitorWaferMapping, RtState.Idle);
            Transition(RtState.WaferMapping, MSG.ChangeCassette, FsmChangeCassette, RtState.Error);


            //Transfer sequence
            Transition(RtState.Idle, MSG.MoveWafer, fStartTransfer, RtState.Transfer);
            Transition(RtState.Transfer, FSM_MSG.TIMER, fTransfer, RtState.Idle);
            Transition(RtState.Transfer, MSG.ABORT, fAbortTransfer, RtState.Idle);
            EnterExitTransition<RtState, FSM_MSG>(RtState.Transfer, null, FSM_MSG.NONE, fExitTransfer);


            //Return sequence
            Transition(RtState.Idle, MSG.ReturnWafer, fStartReturn, RtState.Transfer);
            Transition(RtState.Transfer, FSM_MSG.TIMER, fTransfer, RtState.Idle);
            Transition(RtState.Transfer, MSG.ChangeCassette, FsmChangeCassette, RtState.Error);

            //Cycle sequence
            Transition(RtState.Idle, MSG.StartCycle, fStartCycle, RtState.Cycle);
            Transition(RtState.Cycle, FSM_MSG.TIMER, fCycle, RtState.Idle);
            Transition(RtState.Cycle, MSG.Stop, fCycleStop, RtState.Cycle);
            EnterExitTransition<RtState, FSM_MSG>(RtState.Cycle, FsmEnterCycle, FSM_MSG.NONE, FsmExitCycle);
            Transition(RtState.Cycle, MSG.ABORT, fAbortRunProcess, RtState.Idle);
            Transition(RtState.Cycle, MSG.ChangeCassette, FsmChangeCassette, RtState.Error);
            Transition(RtState.Cycle, MSG.RobotActionDone, fCycle, RtState.Cycle);
 
            //robot pick
            Transition(RtState.Idle, MSG.Pick, FsmStartRobotPick, RtState.Picking);
            Transition(RtState.Picking, FSM_MSG.TIMER, FsmMonitorPick, RtState.Idle);
            Transition(RtState.Picking, MSG.ABORT, FsmAbortTask, RtState.Idle);
            Transition(RtState.Picking, MSG.ChangeCassette, FsmChangeCassette, RtState.Error);

            //robot place
            Transition(RtState.Idle, MSG.Place, FsmStartRobotPlace, RtState.Placing);
            Transition(RtState.Placing, FSM_MSG.TIMER, FsmMonitorPlace, RtState.Idle);
            Transition(RtState.Placing, MSG.ABORT, FsmAbortTask, RtState.Idle);
            Transition(RtState.Placing, MSG.ChangeCassette, FsmChangeCassette, RtState.Error);

            //robot mpnt pick
            Transition(RtState.Idle, MSG.MPNTPick, FsmStartRobotMpntPick, RtState.PickingPM);
            Transition(RtState.PickingPM, FSM_MSG.TIMER, FsmMonitorMpntPick, RtState.Idle);
            Transition(RtState.PickingPM, MSG.ABORT, FsmAbortTask, RtState.Idle);

            //robot mpnt place
            Transition(RtState.Idle, MSG.MPNTPlace, FsmStartRobotMpntPlace, RtState.PlacingPM);
            Transition(RtState.PlacingPM, FSM_MSG.TIMER, FsmMonitorMpntPlace, RtState.Idle);
            Transition(RtState.PlacingPM, MSG.ABORT, FsmAbortTask, RtState.Idle);
        }

        void InitModuleInstallment()
        {
            IsBufferDisable = SC.ContainsItem("System.BufferDisable") ? SC.GetValue<bool>("System.BufferDisable") : true;
            IsBuffer1Disable = SC.ContainsItem("System.Buffer1Disable") ? SC.GetValue<bool>("System.Buffer1Disable") : true;
            IsBuffer2Disable = SC.ContainsItem("System.Buffer2Disable") ? SC.GetValue<bool>("System.Buffer2Disable") : true;
            IsAligner1Disable = SC.ContainsItem("System.Aligner1Disable") ? SC.GetValue<bool>("System.Aligner1Disable") : true;
            IsAligner2Disable = SC.ContainsItem("System.Aligner2Disable") ? SC.GetValue<bool>("System.Aligner2Disable") : true;
            IsPMADisable = SC.ContainsItem("System.PMADisable") ? SC.GetValue<bool>("System.PMADisable") : true;
            IsPMBDisable = SC.ContainsItem("System.PMBDisable") ? SC.GetValue<bool>("System.PMBDisable") : true;
            IsCoolingBuffer1Disable = SC.ContainsItem("System.CoolingBuffer1Disable") ? SC.GetValue<bool>("System.CoolingBuffer1Disable") : true;
            IsCoolingBuffer2Disable = SC.ContainsItem("System.CoolingBuffer2Disable") ? SC.GetValue<bool>("System.CoolingBuffer2Disable") : true;
            IsLP1Disable = SC.ContainsItem("LoadPort.LP1.Disable") ? SC.GetValue<bool>("LoadPort.LP1.Disable") : true;
            IsLP2Disable = SC.ContainsItem("LoadPort.LP2.Disable") ? SC.GetValue<bool>("LoadPort.LP2.Disable") : true;
            IsFlipperDisable = SC.ContainsItem("System.FlipperDisable") ? SC.GetValue<bool>("System.FlipperDisable") : true;
    }

        void SubscribeDataVariable()
        {
            //Parameter Register
            DATA.Subscribe(ModuleName.System.ToString(), ParamName.RTStatus, () => fsm.State);


            DATA.Subscribe(ModuleName.System.ToString(), ParamName.SystemIdle, () => IsIdle || IsInit);
            DATA.Subscribe(ModuleName.System.ToString(), ParamName.SystemRunning, () => IsRunning);
            DATA.Subscribe(ModuleName.System.ToString(), ParamName.SystemAlarm, () => IsError);

            DATA.Subscribe(ModuleName.System.ToString(), ParamName.IsProcessPaused, () => _mover != null && _mover.IsPaused);

            DATA.Subscribe(ModuleName.System.ToString(), ParamName.FFUOk, () => IsFFUOk);

            //            DATA.Subscribe(ModuleName.System.ToString(), ParamName.TransferCount, () => TransferCount);
            //            DATA.Subscribe(ModuleName.System.ToString(), ParamName.TransferTime, () => TransferTime);
            //            DATA.Subscribe(ModuleName.System.ToString(), ParamName.TranserThroughput, () => TranserThroughput);
            //            DATA.Subscribe(ModuleName.System.ToString(), ParamName.TotalWaferCount, () => SC.GetValue<int>(SorterCommon.ScPathName.System_TotalWaferCount));

            DATA.Subscribe(string.Format("{0}.{1}", ChamberSetString.System, ParamName.AlarmEvent), EV.GetAlarmEvent);

            //            DATA.Subscribe(ModuleName.System.ToString(), ParamName.CycleCount, () => CycleCount);

            DATA.Subscribe(ParamName.System.IsAlarm, () => IsError);
            DATA.Subscribe(ParamName.System.IsManualMode, () => !IsAutoMode);
            DATA.Subscribe(ParamName.System.IsAutoMode, () => IsAutoMode);
            DATA.Subscribe(ParamName.System.IsMaintenanceMode, () => IsMaintenanceMode);

            DATA.Subscribe(ParamName.System.IsRunning, () => IsRunning);
            DATA.Subscribe(ParamName.System.IsIdle, () => IsIdle);
            DATA.Subscribe("System.IsNoRunning", () => !IsRunning);

            DATA.Subscribe("System.CoolingBuffer1Disable",()=>SC.GetValue<bool>("System.CoolingBuffer1Disable"));
            DATA.Subscribe("System.CoolingBuffer2Disable", () => SC.GetValue<bool>("System.CoolingBuffer2Disable"));
            DATA.Subscribe("System.Aligner1Disable", () => SC.GetValue<bool>("System.Aligner1Disable"));
            DATA.Subscribe("System.Aligner2Disable", () => SC.GetValue<bool>("System.Aligner2Disable"));



            DATA.Subscribe("LP1.WaferThickness", () => SC.GetStringValue("CarrierInfo.LP1ThicknessType"));
            DATA.Subscribe("LP2.WaferThickness", () => SC.GetStringValue("CarrierInfo.LP2ThicknessType"));
            DATA.Subscribe("Cooling1.WaferThickness", () => SC.GetStringValue("CarrierInfo.CoolingBuffer1ThicknessType"));
            DATA.Subscribe("Cooling2.WaferThickness", () => SC.GetStringValue("CarrierInfo.CoolingBuffer2ThicknessType"));
            DATA.Subscribe("LL1.WaferThickness", () => SC.GetStringValue("CarrierInfo.LL1ThicknessType"));
            DATA.Subscribe("LL2.WaferThickness", () => SC.GetStringValue("CarrierInfo.LL2ThicknessType"));
            DATA.Subscribe("Buffer1.WaferThickness", () => SC.GetStringValue("CarrierInfo.Buffer1ThicknessType"));
            DATA.Subscribe("Buffer2.WaferThickness", () => SC.GetStringValue("CarrierInfo.Buffer2ThicknessType"));
            DATA.Subscribe("Aligner1.WaferThickness", () => SC.GetStringValue("CarrierInfo.Aligner1ThicknessType"));
            DATA.Subscribe("Aligner2.WaferThickness", () => SC.GetStringValue("CarrierInfo.Aligner2ThicknessType"));
            DATA.Subscribe("Upper.WaferThickness", () => SC.GetStringValue("CarrierInfo.UpperThicknessType"));
            DATA.Subscribe("Lower.WaferThickness", () => SC.GetStringValue("CarrierInfo.LowerThicknessType"));
            DATA.Subscribe($"System.IsEnableBufferMap", () => SC.GetValue<bool>("System.IsEnableBufferMap"));
            DATA.Subscribe("System.IsEnableIdentifyThickness", () => SC.GetValue<bool>("System.IsEnableIdentifyThickness"));
            DATA.Subscribe("System.IsEnableMultiWaferSize", () => SC.GetValue<bool>("System.IsEnableMultiWaferSize"));
            DATA.Subscribe("System.IsEnableMultiWaferSizeShow", () => SC.GetValue<bool>("System.IsEnableMultiWaferSizeShow"));


            DATA.Subscribe("System.IsSlotShowOpposite", () => SC.GetValue<bool>("System.IsSlotShowOpposite"));
            DATA.Subscribe("System.ClearEventLogEnable", () => ClearEventLogEnable);
           
            var robot = DEVICE.GetDevice<RobotBaseDevice>(DeviceName.Robot);
            robot.ActionDone += Robot_ActionDone;

            //foreach (var moduleName in Singleton<DeviceManager>.Instance.LpNames)
            //{
            //    LoadPort lp = DEVICE.GetDevice<LoadPort>(moduleName.ToString());
            //    lp.ActionDone += Lp_ActionDone;
            //}

            DATA.Subscribe("LP1.IsEnable", () => !IsLP1Disable);
            DATA.Subscribe("LP2.IsEnable", () => !IsLP2Disable);
            DATA.Subscribe("Aligner1.IsEnable", () => !IsAligner1Disable);
            DATA.Subscribe("Aligner2.IsEnable", () => !IsAligner2Disable);
            DATA.Subscribe("Buffer.IsEnable", () => !IsBufferDisable);
            DATA.Subscribe("Buffer1.IsEnable", () => !IsBuffer1Disable);
            DATA.Subscribe("Buffer2.IsEnable", () => !IsBuffer2Disable);
            DATA.Subscribe("CoolingBuffer1.IsEnable", () => !IsCoolingBuffer1Disable);
            DATA.Subscribe("CoolingBuffer2.IsEnable", () => !IsCoolingBuffer2Disable);
            DATA.Subscribe("PMA.IsEnable", () => !IsPMADisable);
            DATA.Subscribe("PMB.IsEnable", () => !IsPMBDisable);
            DATA.Subscribe("Flipper.IsEnable", () => !IsFlipperDisable);
        }

        private void Lp_ActionDone(bool obj)
        {
            if (fsm.State == (int)RtState.Cycle)
            {
                EV.PostInfoLog("System", "Notified LoadPort action done");
                CheckToPostMsg(MSG.LoadPortActionDone);
            }
        }

        private void Robot_ActionDone(bool obj)
        {
            if (fsm.State == (int) RtState.Cycle)
            {
                EV.PostInfoLog("System", "Notified robot action done");
                CheckToPostMsg(MSG.RobotActionDone);
            }

            if (obj == false && (fsm.State == (int) RtState.Picking || fsm.State == (int) RtState.Placing))
            {
                CheckToPostMsg(MSG.ERROR);
            }
        }

        void SubscribeOperation()
        {
            OP.Subscribe(OperationName.CreatWafer, InvokeCreateWafer);

            OP.Subscribe(OperationName.DeleteWafer, InvokeDeleteWafer);

            OP.Subscribe(OperationName.ResetRouteManager, InvokeResetRouteManager);

            //OP.Subscribe(OperationName.SetSpeed, InvokeSetSpeed);

            OP.Subscribe(OperationName.HomeUnit, InvokeHomeUnit);

            OP.Subscribe(OperationName.LoadFoup, InvokeLoadFoup);

            OP.Subscribe(OperationName.UnloadFoup, InvokeUnloadFoup);

            OP.Subscribe(OperationName.ReadFoupID, InvokeReadFoupID);

            OP.Subscribe(OperationName.WriteFoupID, InvokeWriteFoupID);

            OP.Subscribe(OperationName.MoveWafer, InvokeMoveWafer);

            OP.Subscribe(OperationName.ReturnWafer, InvokeReturnWafer);

            OP.Subscribe(OperationName.MultiMoveWafer, InvokeMultiMoveWafer);

            OP.Subscribe(OperationName.Stop, InvokeStop);
            
            OP.Subscribe("Benchmark", InvokeBenchmark);

            OP.Subscribe("System.StartCycle", InvokeCycle);

            OP.Subscribe(OperationName.SetAutoMode, InvokeSetAutoMode);

            OP.Subscribe(OperationName.SetManualMode, InvokeSetManualMode);

            OP.Subscribe(OperationName.HomeAll, InvokeHomeAll);

            OP.Subscribe(OperationName.AbortHomeAll, InvokeAbortHomeAll);

            OP.Subscribe(OperationName.SelectRecipe, InvokeSelectRecipe);

            OP.Subscribe(OperationName.StartRecipe, (string cmd, object[] args) =>
            {


                if (args.Length > 1)
                {
                    return CheckToPostMsg(MSG.StartRecipe, args[0], args[1]);
                }
                return CheckToPostMsg(MSG.StartRecipe, args[0]);
            });

            OP.Subscribe(OperationName.PauseRecipe, InvokePauseRecipe);

            OP.Subscribe(OperationName.ResumeRecipe, InvokeResumeRecipe);

            OP.Subscribe(OperationName.StopRecipe, InvokeStopRecipe);

            OP.Subscribe("MapWafer", InvokeMapWafer);

            OP.Subscribe(ParamName.System.OPName.Reset, (string cmd, object[] args) =>
            {
                EV.ClearAlarmEvent();

                Singleton<DeviceEntity>.Instance.PostMsg(DeviceEntity.MSG.RESET);

                Singleton<EfemEntity>.Instance.PostMsg(EfemEntity.MSG.Reset);

                return CheckToPostMsg(MSG.RESET);
            });

            OP.Subscribe("System.SetWaferSize3", (string cmd, object[] args) =>
            {
                string module = (string)args[0];

                if (module == "Lower")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 0, WaferSize.WS3);
                    return true;
                }

                if (module == "Upper")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 1, WaferSize.WS3);
                    return true;
                }
                if (ModuleHelper.IsBuffer(ModuleHelper.Converter(module)))
                {
                    var buffer = DEVICE.GetDevice<BufferStation>(module);
                    if (buffer != null)
                    {
                        for (int i = 0; i < buffer.ValidSlotsNumber; i++)
                        {
                            WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), i, WaferSize.WS3);
                        }
                    }
                    SC.SetItemValue($"System.{module}WaferSize", 3);
                    return true;
                }
                WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS3);
                //string module = (string) args[0];

                //WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS3);
                //if (ModuleHelper.Converter(module) == ModuleName.Robot)
                //{
                //    WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 1, WaferSize.WS3);
                //}
                return true;
            });
            OP.Subscribe("System.SetWaferSize4", (string cmd, object[] args) =>
            {
                string module = (string)args[0];

                if (module == "Lower")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 0, WaferSize.WS4);
                    return true;
                }

                if (module == "Upper")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 1, WaferSize.WS4);
                    return true;
                }
                if(ModuleHelper.IsBuffer(ModuleHelper.Converter(module)))
                {
                    var buffer = DEVICE.GetDevice<BufferStation>(module);
                    if (buffer != null)
                    {
                        for (int i=0;i<buffer.ValidSlotsNumber;i++)
                        {
                            WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), i, WaferSize.WS4);
                        }
                    }
                    SC.SetItemValue($"System.{module}WaferSize", 4);
                    return true;
                }

                WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS4);

                //WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS4);
                //if(ModuleHelper.Converter(module) == ModuleName.Robot)
                //{
                //    WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 1, WaferSize.WS4);
                //}

                return true;
            });
            OP.Subscribe("System.SetWaferSize6", (string cmd, object[] args) =>
            {
                string module = (string)args[0];

                if (module == "Lower")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 0, WaferSize.WS6);
                    return true;
                }

                if (module == "Upper")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 1, WaferSize.WS6);
                    return true;
                }
                if (ModuleHelper.IsBuffer(ModuleHelper.Converter(module)))
                {
                    var buffer = DEVICE.GetDevice<BufferStation>(module);
                    if (buffer != null)
                    {
                        for (int i = 0; i < buffer.ValidSlotsNumber; i++)
                        {
                            WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), i, WaferSize.WS6);
                        }
                    }
                    SC.SetItemValue($"System.{module}WaferSize", 6);
                    return true;
                }
                WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS6);
                //string module = (string)args[0];

                //WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS6);
                //if (ModuleHelper.Converter(module) == ModuleName.Robot)
                //{
                //    WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 1, WaferSize.WS6);
                //}

                return true;
            });
            OP.Subscribe("System.SetWaferSize8", (string cmd, object[] args) =>
            {
                string module = (string)args[0];

                if (module == "Lower")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 0, WaferSize.WS8);
                    return true;
                }

                if (module == "Upper")
                {
                    WaferManager.Instance.UpdateWaferSize(ModuleName.Robot, 1, WaferSize.WS8);
                    return true;
                }
                if (ModuleHelper.IsBuffer(ModuleHelper.Converter(module)))
                {
                    var buffer = DEVICE.GetDevice<BufferStation>(module);
                    if (buffer != null)
                    {
                        for (int i = 0; i < buffer.ValidSlotsNumber; i++)
                        {
                            WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), i, WaferSize.WS8);
                        }
                    }
                    return true;
                    SC.SetItemValue($"System.{module}WaferSize", 8);
                }
                WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS8);
                //string module = (string)args[0];

                //WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS6);
                //if (ModuleHelper.Converter(module) == ModuleName.Robot)
                //{
                //    WaferManager.Instance.CheckWaferSize(ModuleHelper.Converter(module), 1, WaferSize.WS6);
                //}

                return true;
            });
            OP.Subscribe("System.SetWaferThick", (string cmd, object[] args) =>
            {
                string module = (string)args[0];
                SC.SetItemValueFromString($"CarrierInfo.{module}ThicknessType", "THICK");
                return true;
            });
            OP.Subscribe("System.SetWaferThin", (string cmd, object[] args) =>
            {
                string module = (string)args[0];
                SC.SetItemValueFromString($"CarrierInfo.{module}ThicknessType", "THIN");
                return true;
            });
            OP.Subscribe("System.SetSlot13", (string cmd, object[] args) =>
            {
                string module = (string)args[0];
                //SC.SetItemValue($"CarrierInfo.Carrier0.CarrierSlotsNumber", 13);
                SC.SetItemValue($"LoadPort.{module}.SlotsNumber", 13);
                return true;
            });
            OP.Subscribe("System.SetSlot25", (string cmd, object[] args) =>
            {
                string module = (string)args[0];
                // SC.SetItemValue($"CarrierInfo.Carrier0.CarrierSlotsNumber", 25);
                SC.SetItemValue($"LoadPort.{module}.SlotsNumber", 25);
                return true;
            });
            OP.Subscribe("System.ClearEventLogEnable", (string cmd, object[] args) =>
            {
                ClearEventLogEnable = false;
                return true;
            });

        }

        private bool InvokeMapWafer(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.MapWafer, arg2[0].ToString());
        }

        private bool InvokeStopRecipe(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.StopRecipe);
        }

        private bool InvokeResumeRecipe(string arg1, object[] arg2)
        {
            //ret = PostMsg<RouteManager, RouteManager.MSG>(RouteManager.MSG.ResumeRecipe, out reason);
            return true;
        }

        private bool InvokePauseRecipe(string arg1, object[] arg2)
        {
            //ret = PostMsg<RouteManager, RouteManager.MSG>(RouteManager.MSG.PauseRecipe, out reason);
            return true;
        }



        private bool InvokeSelectRecipe(string arg1, object[] arg2)
        {
            //JobManager.Instance.SelectRecipe(arg2[0].ToString());
            //ret = true;
            return true;
        }

        private bool InvokeAbortHomeAll(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.ABORT);
        }

        private bool InvokeHomeAll(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.HOME);
        }

        private bool InvokeSetManualMode(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.SetManualMode);
        }

        private bool InvokeSetAutoMode(string arg1, object[] arg2)
        {
            if (!CheckEnableAuto())
            {
                return false;
            }
            return CheckToPostMsg(MSG.SetAutoMode); ;
        }

        private bool InvokeCycle(string arg1, object[] arg2)
        {
            string reason;
            if (!checkCycle(out reason))
            {
                EV.PostWarningLog("System", $"Can not start cycle, {reason}");
                return false;
            }

            return CheckToPostMsg(MSG.StartCycle, arg2[0], arg2[1], arg2[2]);
        }
        
        private bool InvokeBenchmark(string arg1, object[] arg2)
        {
            string reason;
            if (!checkCycle(out reason))
            {
                EV.PostWarningLog("System", $"Can not start cycle, {reason}");
                return false;
            }

            return CheckToPostMsg(MSG.StartCycle, arg2[0], arg2[1], arg2[2], "Benchmark");
        }

        private bool InvokeStop(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.Stop);
        }

        private bool InvokeMultiMoveWafer(string arg1, object[] arg2)
        {
            Running = false;

            string reason = "";
            bool ret = CheckMultiMove(out reason, arg2);
            if (ret)
            {
                MoveType type = (MoveType)arg2[0];

                MoveOption option = (MoveOption)arg2[1];
                Hand blade = (Hand)arg2[2];
                ModuleName schamber1 = (ModuleName)arg2[3];
                int sslot1 = (int)arg2[4];
                ModuleName dchamber1 = (ModuleName)arg2[5];
                int dslot1 = (int)arg2[6];

                ModuleName schamber2 = (ModuleName)arg2[3];
                int sslot2 = (int)arg2[4];
                ModuleName dchamber2 = (ModuleName)arg2[5];
                int dslot2 = (int)arg2[6];

                if (type != MoveType.Move)
                {
                    schamber2 = (ModuleName)arg2[7];
                    sslot2 = (int)arg2[8];
                    dchamber2 = (ModuleName)arg2[9];
                    dslot2 = (int)arg2[10];
                }
                _taskState[arg1] = Result.RUN;
                PostMsg(RouteManager.MSG.MoveWafer, type, option, blade,
                    schamber1, sslot1, dchamber1, dslot1,
                    schamber2, sslot2, dchamber2, dslot2
                );
            }
            else
            {
                _taskState[arg1] = Result.FAIL;
                return false;
            }


            return true;
        }

        private bool InvokeReturnWafer(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.ReturnWafer);
        }

        public bool InvokeMoveWafer(string arg1, object[] args)
        {
            Running = false;

            string reason = "";
            bool ret = checkMove(out reason, args);
            if (ret)
            {
                MoveType type = (MoveType)args[0];
                MoveOption option = (MoveOption)args[1];
                Hand blade = (Hand)args[2];
                ModuleName schamber1 = (ModuleName)args[3];
                int sslot1 = (int)args[4];
                ModuleName dchamber1 = (ModuleName)args[5];
                int dslot1 = (int)args[6];

                ModuleName schamber2 = (ModuleName)args[3];
                int sslot2 = (int)args[4];
                ModuleName dchamber2 = (ModuleName)args[5];
                int dslot2 = (int)args[6];

                if (type != MoveType.Move)
                {
                    schamber2 = (ModuleName)args[7];
                    sslot2 = (int)args[8];
                    dchamber2 = (ModuleName)args[9];
                    dslot2 = (int)args[10];
                }
                _taskState[arg1] = Result.RUN;
                PostMsg(RouteManager.MSG.MoveWafer, type, option, blade,
                   schamber1, sslot1, dchamber1, dslot1,
                   schamber2, sslot2, dchamber2, dslot2
               );
            }
            else
            {
                _taskState[arg1] = Result.FAIL;

            }


            return true;
        }

        private bool InvokeWriteFoupID(string arg1, object[] arg2)
        {
            //{
            //    ret = true;
            //    ret = PostMsg<RouteManager, RouteManager.MSG>(RouteManager.MSG.WriteID, out reason, args);
            //}
            return true;
        }

        private bool InvokeReadFoupID(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.ReadID, arg2[0]);
        }

        private bool InvokeUnloadFoup(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.UNLOAD, arg2[0]);
        }

        private bool InvokeLoadFoup(string arg1, object[] arg2)
        {
            return CheckToPostMsg(MSG.LOAD, arg2[0]);
            //var lp = DEVICE.GetDevice<LoadPortBaseDevice>(arg2[0].ToString());
            //return lp.Load(out _);
        }

        private bool InvokeHomeUnit(string arg1, object[] arg2)
        {
            var lp = DEVICE.GetDevice<LoadPortBaseDevice>(arg2[0].ToString());
            return lp.Unload(out _);
        }

        private bool InvokeSetSpeed(string arg1, object[] args)
        {
            int speed = 3;
            string reason;
            if (int.TryParse((string)args[0], out speed))
            {
                if (!(speed <= 3 || speed >= 1))
                {
                    EV.PostWarningLog(ModuleName.Robot.ToString(), "Error Parameter,speed should be range in 1, 3");
                }

                PostMsg(MSG.SetSpeed, int.Parse((string)args[0]));
                return true;
            }

            EV.PostWarningLog(ModuleName.Robot.ToString(), $"invalid parameters. {args[0]}");
            return false;
        }

        private bool InvokeResetRouteManager(string arg1, object[] arg2)
        {
            PostMsg(MSG.RESET);
            return true;
        }

        private bool InvokeDeleteWafer(string arg1, object[] args)
        {
            ModuleName chamber = (ModuleName)args[0];
            int slot = (int)args[1];

            if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
            {
                if (WaferManager.Instance.CheckHasWafer(chamber, slot))
                {
                    WaferManager.Instance.DeleteWafer(chamber, slot);
                    EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);

                }
                else
                {
                    EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
                }
            }
            else
            {

                EV.PostWarningLog("System", string.Format("Invalid position，{0}，{1}", chamber.ToString(), slot.ToString()));
                return false;
            }

            return true;
        }

        private bool InvokeCreateWafer(string arg1, object[] args)
        {
            ModuleName chamber = (ModuleName)args[0];
            int slot = (int)args[1];
            WaferStatus state = (WaferStatus)args[2];

            if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
            {
                if (WaferManager.Instance.CheckHasWafer(chamber, slot))
                {
                    EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));
                }
                else
                {
                    if (ModuleHelper.IsLoadPort(chamber))
                    {
                        var lp = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
                        if (WaferManager.Instance.CreateWafer(chamber, slot, state, lp.GetCurrentWaferSize()) != null)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
                        }
                    }
                    else if (WaferManager.Instance.CreateWafer(chamber, slot, state, WaferSize.WS8) != null)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
                    }
                }
                
            }
            else
            {
                EV.PostWarningLog("System", string.Format("Invalid position，{0}，{1}", chamber.ToString(), slot.ToString()));
                return false;
            }

            return true;
        }
        #endregion


        protected override bool Init()
        {
            for (var i = 0; i < LoadPortQuantity; i++)
            {
                _loadportEntities[i].Initialize();
            }

            if(!FlipperIsDisable) _flp.Initialize();

            _cycle.Initialize();

            setspeedRoutine = new SetSpeedRoutine("System", "Set Speed");
            setspeedRoutine.Initalize();

            initRoutine = _isInterferencePrevent
                ? (IEfemRoutine)new InitRoutine2Step("System", "Init")
                : (IEfemRoutine)new InitRoutine("System", "Init");
            initRoutine.Initalize();

            _waferMapRoutine = new WaferMappingRoutine();
            _waferMapRoutine.Initalize();

            _staticTransfer.Initialize();
            _dualMover.Initialize();
            _singleMover.Initialize();

            _loadFoupRoutine = new LoadFoupRoutine(ModuleName.LP1.ToString(), "Load");
            _loadFoupRoutine.Initalize();

            _pickRoutine = new PickRoutine("System", "Pick");
            _pickRoutine.Initalize();

            _placeRoutine = new PlaceRoutine("System", "Place");
            _placeRoutine.Initalize();
            
            _pickExtendRoutine = new PickExtendRoutine("System", "PickExtend");
            _pickExtendRoutine.Initalize();

            _placeExtendRoutine = new PlaceExtendRoutine("System", "PlaceExtend");
            _placeExtendRoutine.Initalize();

            return true;
        }

        protected override void Term()
        {
            //_loadportA.Terminate();
            //_loadportB.Terminate();
        }

        #region Mode change

        private bool fSetAutoMode(object[] objs)
        {
            IsAutoMode = true;

            EV.PostMessage(ChamberSetString.System, EventEnum.RunningModeChanged, "AutoMode");

            return true;
        }
        private bool fSetManualMode(object[] objs)
        {
            IsAutoMode = false;

            EV.PostMessage(ChamberSetString.System, EventEnum.RunningModeChanged, "ManualMode");

            return true;
        }

        private bool fSetMaintenanceMode(object[] param)
        {
            IsAutoMode = false;

            EV.PostMessage(ChamberSetString.System, EventEnum.RunningModeChanged, "Maintenance");

            return true;
        }

        #endregion

        #region Init
        private bool fStartInit(object[] objs)
        {
            Result ret = initRoutine.Start(objs);
            if (ret == Result.DONE)
            {
                return false;
            }
            else if (ret == Result.FAIL)
            {
                return false;  //do noting
            }
            return true;
        }

        private bool fInit(object[] objs)
        {

            Result ret = initRoutine.Monitor();
            if (ret == Result.DONE)
            {
                //state = (int)STATE.IDLE;
                return true;
            }
            else if (ret == Result.FAIL)
            {
                //do nothing  
                //state = (int)STATE.ERROR;
                PostMsg(MSG.ERROR);
                return false;
            }
            return false; ;
        }

        private bool fError(object[] objs)
        {
            for (int i = 0; i < _taskState.Count; i++)
            {
                _taskState[_taskState.ElementAt(i).Key] = Result.FAIL;
            }

            return true;
        }
        private bool fIdle(object[] objs)
        {
            _taskState.Clear();

            return true;
        }




        #endregion


        #region setspeed
        private bool fStartSetSpeed(object[] objs)
        {
            Result ret = setspeedRoutine.Start(objs);
            setspeedRoutine.Speed = (int)objs[0];
            if (ret == Result.DONE)
            {
                return false;
            }
            else if (ret == Result.FAIL)
            {
                return false;  //do noting
            }
            return true;
        }

        private bool fSetSpeed(object[] objs)
        {
            Result ret = setspeedRoutine.Monitor();
            if (ret == Result.DONE)
            {
                //state = (int)STATE.IDLE;
                return true;
            }
            else if (ret == Result.FAIL)
            {
                //do nothing  
                //state = (int)STATE.ERROR;
                return true;
            }
            return false;
        }

        #endregion


        #region Transfer
        private bool fStartTransfer(object[] objs)
        {
            Running = true;
            return _staticTransfer.Start(objs);
        }
        private bool fStartReturn(object[] objs)
        {
            return _staticTransfer.Return(objs);
        }

        private bool fTransfer(object[] objs)
        {
            return _staticTransfer.Monitor(objs);
        }

        private bool fExitTransfer(object[] objs)
        {
            _staticTransfer.Clear();

            _taskState.Remove("MoveWafer");

            return true;
        }

        private void ProcessFinished()
        {

        }

        private IMoveManager GetMoveManager(bool bAligner)
        {
            if (!_robot.Blade1Enable)
            {
                EV.PostMessage(ModuleName.System.ToString(), EventEnum.DefaultWarning, "Robot arm1 is disable, can't execute transfer");
                return null;
            }

            if (bAligner)
            {
                _singleMover.Blade = Hand.Blade1;
                return _singleMover;
            }

            if (_robot.Blade1Enable && _robot.Blade2Enable && SC.GetValue<bool>(SorterCommon.ScPathName.Robot_DualBlade1TransferEnable))
                return _dualMover;

            _singleMover.Blade = Hand.Blade1;
            return _singleMover;
        }


       

        private bool fAbortTransfer(object[] objs)
        {
            return true;
        }

        private bool FsmStartRobotPick(object[] param)
        {
            Result ret = Result.DONE;
            if (param.Length == 3)
            {
                _pickRoutine.Source = ModuleHelper.Converter((string)param[0]);
                _pickRoutine.Slot = (int)param[1];
                _pickRoutine.Blade = (Hand)param[2];
                ret = _pickRoutine.Start();
            }
            else
            {
                return false;
            }
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }
        
        private bool FsmStartRobotMpntPick(object[] param)
        {
            Result ret = Result.DONE;
            if (param.Length == 4)
            {
                _pickExtendRoutine.Source = ModuleHelper.Converter((string)param[0]);
                _pickExtendRoutine.Slot = (int)param[1];
                _pickExtendRoutine.Blade = (Hand)param[2];
                _pickExtendRoutine.TaskEnum = (MpntTaskEnum)param[3];
                ret = _pickExtendRoutine.Start();
            }
            else
            {
                return false;
            }
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }

        private bool FsmStartRobotPlace(object[] param)
        {
            Result ret = Result.DONE;
            if (param.Length == 3)
            {
                _placeRoutine.Station = ModuleHelper.Converter((string)param[0]);
                _placeRoutine.Slot = (int)param[1];
                _placeRoutine.Blade = (Hand)param[2];
                ret = _placeRoutine.Start();
            }
            else
            {
                return false;
            }
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }
        
        private bool FsmStartRobotMpntPlace(object[] param)
        {
            Result ret = Result.DONE;
            if (param.Length == 4)
            {
                _placeExtendRoutine.Station = ModuleHelper.Converter((string)param[0]);
                _placeExtendRoutine.Slot = (int)param[1];
                _placeExtendRoutine.Blade = (Hand)param[2];
                _placeExtendRoutine.TaskEnum = (MpntTaskEnum)param[3];
                ret = _placeExtendRoutine.Start();
            }
            else
            {
                return false;
            }
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }

        private bool FsmChangeCassette(object[] param)
        {
            var lp = param[0].ToString();
            switch (fsm.State)
            {
                case (int)RtState.Cycle when lp == _cycle.OriginStation.ToString() || lp == _cycle.ToStation.ToString():
                    _transferManager.Clear();
                    IsTransferMode = false;
                    _robot.Stop();
                    EV.PostWarningLog("System", "Cassette changed during cycle");
                    return true;
                case (int)RtState.Transfer when lp == _staticTransfer.TargetStation.ToString() || lp ==  _staticTransfer.SourceStation.ToString():
                    _transferManager.Clear();
                    _staticTransfer.Clear();
                    IsTransferMode = false;
                    _robot.Stop();
                    EV.PostWarningLog("System", "Cassette changed during transfer");
                    return true;
                case (int)RtState.WaferMapping when lp == _waferMapRoutine.Source.ToString():
                    _transferManager.Clear();
                    _staticTransfer.Clear();
                    IsTransferMode = false;
                    _robot.Stop();
                    EV.PostWarningLog("System", "Cassette changed during wafer mapping");
                    return true;
                case (int)RtState.Picking when lp == _pickRoutine.Source.ToString():
                case (int)RtState.Placing when lp == _placeRoutine.Station.ToString():
                    _transferManager.Clear();
                    IsTransferMode = false;
                    _robot.Stop();
                    EV.PostWarningLog("System", "Cassette changed during transfer");
                    return true;
                default:
                    return false;
            }
        }
        
        private bool FsmAbortTask(object[] param)
        {
            return true;
        }

        private bool FsmMonitorPick(object[] param)
        {
            Result ret = _pickRoutine.Monitor();
            if (ret == Result.FAIL)
            {
                PostMsg(MSG.ERROR);
                return false;
            }

            return ret == Result.DONE;
        }
        
        private bool FsmMonitorMpntPick(object[] param)
        {
            Result ret = _pickExtendRoutine.Monitor();
            if (ret == Result.FAIL)
            {
                PostMsg(MSG.ERROR);
                return false;
            }

            return ret == Result.DONE;
        }

        private bool FsmMonitorPlace(object[] param)
        {
            Result ret = _placeRoutine.Monitor();
            if (ret == Result.FAIL)
            {
                PostMsg(MSG.ERROR);
                return false;
            }

            return ret == Result.DONE;
        }
        
        private bool FsmMonitorMpntPlace(object[] param)
        {
            Result ret = _placeExtendRoutine.Monitor();
            if (ret == Result.FAIL)
            {
                PostMsg(MSG.ERROR);
                return false;
            }

            return ret == Result.DONE;
        }

        #endregion

        #region reset

        private bool fStartReset(object[] objs)
        {
            Singleton<EfemEntity>.Instance.EventError?.Clear();
            if(DEVICE.GetDevice<LoadPortBaseDevice>(ModuleName.LP1.ToString())!=null&& DEVICE.GetDevice<LoadPortBaseDevice>(ModuleName.LP1.ToString()).State==DeviceState.Error)
               DEVICE.GetDevice<LoadPortBaseDevice>(ModuleName.LP1.ToString()).CheckToPostMessage((int)LoadPortMsg.Reset, null); ;
            if (DEVICE.GetDevice<LoadPortBaseDevice>(ModuleName.LP2.ToString()) != null && DEVICE.GetDevice<LoadPortBaseDevice>(ModuleName.LP2.ToString()).State == DeviceState.Error)
                DEVICE.GetDevice<LoadPortBaseDevice>(ModuleName.LP2.ToString()).CheckToPostMessage((int)LoadPortMsg.Reset, null); ;
            if (fsm.State == (int)RtState.Error)
                return true;

            return false;
        }

        #endregion



        #region  cycle
        private bool bCycle = false;
        private bool bReturn = false;
        private ModuleName _cycleSource;
        private ModuleName _cycleTarget;
        private bool bMappingSource = false;
        private bool _bUnload = false;
        private MoveOption _moveOption;

        private bool fStartCycle(object[] objs)
        {
            if (objs.Length < 2)
            {
                EV.PostWarningLog("System", "Cycle parameter is not valid, should be 2 LP modules");
                return false;
            }

            if (!Enum.TryParse((string)objs[0], out ModuleName from) || !Enum.TryParse((string)objs[1], out ModuleName to))
            {
                EV.PostWarningLog(ChamberSetString.System,
                    ("Cycle parameter error, please check source and destination."));
                return false;
            }

            Result ret = Result.FAIL;
                
            if (objs.Length >= 3)
            {
                string[] _moveOption = (string[])objs[2];
                ret = _cycle.Start(from, to, (string[])objs[2]);
            }
           
            

            if (ret == Result.FAIL)
            {
                EV.PostWarningLog(ChamberSetString.System,
                    ("There is wafer on the passing route"));
                return false;
            }

            return ret == Result.RUN;
        }

        private bool fCycle(object[] objs)
        {
            Result ret = _cycle.Monitor();
            if (ret == Result.DONE)
                return true;

            if (ret == Result.FAIL)
            {
                PostMsg(MSG.ERROR);
                return false;
            }

            return false;   //continue
        }

        private bool fAbortRunProcess(object[] objs)
        {
            if (fsm.State == (int)RtState.Cycle)
            {
                bool _swapHand = false;
                if (SC.ContainsItem("Process.CycleSwapHand"))
                {
                    _swapHand = SC.GetValue<bool>("Process.CycleSwapHand");
                }
                if (_swapHand &&
                    ((_moveOption & MoveOption.LoadLock1) == MoveOption.LoadLock1 ||
                     (_moveOption & MoveOption.LoadLock2) == MoveOption.LoadLock2 ||
                     (_moveOption & MoveOption.LoadLock3) == MoveOption.LoadLock3 ||
                     (_moveOption & MoveOption.LoadLock4) == MoveOption.LoadLock4 ||
                     (_moveOption & MoveOption.LoadLock5) == MoveOption.LoadLock5 ||
                     (_moveOption & MoveOption.LoadLock6) == MoveOption.LoadLock6 ||
                     (_moveOption & MoveOption.LoadLock7) == MoveOption.LoadLock7 ||
                     (_moveOption & MoveOption.LoadLock8) == MoveOption.LoadLock8 ||
                     (_moveOption & MoveOption.Buffer) == MoveOption.Buffer))
                {
                    SC.SetItemValue(ScPathName.Robot_Blade1Enable, true);
                    SC.SetItemValue(ScPathName.Robot_Blade2Enable, true);
                }
                _moveOption = MoveOption.None;
            }
            _transferManager.Clear();
            IsTransferMode = false;
            return true;
        }

        private bool fCycleStop(object[] objs)
        {
            _cycle.Stop();
            bool _swapHand = false;
            if (SC.ContainsItem("Process.CycleSwapHand"))
            {
                _swapHand = SC.GetValue<bool>("Process.CycleSwapHand");
            }
            if (_swapHand &&
                ((_moveOption & MoveOption.LoadLock1) == MoveOption.LoadLock1 ||
                 (_moveOption & MoveOption.LoadLock2) == MoveOption.LoadLock2 ||
                 (_moveOption & MoveOption.LoadLock3) == MoveOption.LoadLock3 ||
                 (_moveOption & MoveOption.LoadLock4) == MoveOption.LoadLock4 ||
                 (_moveOption & MoveOption.LoadLock5) == MoveOption.LoadLock5 ||
                 (_moveOption & MoveOption.LoadLock6) == MoveOption.LoadLock6 ||
                 (_moveOption & MoveOption.LoadLock7) == MoveOption.LoadLock7 ||
                 (_moveOption & MoveOption.LoadLock8) == MoveOption.LoadLock8 ||
                 (_moveOption & MoveOption.Buffer) == MoveOption.Buffer))
            {
                SC.SetItemValue(ScPathName.Robot_Blade1Enable, true);
                SC.SetItemValue(ScPathName.Robot_Blade2Enable, true);
            }
            _moveOption = MoveOption.None;
            return true;
        }

        private bool FsmExitCycle(object[] param)
        {
            _cycle.Stop();
            EV.PostInfoLog("System", "Stop Cycle");
            bool _swapHand = false;
            if (SC.ContainsItem("Process.CycleSwapHand"))
            {
                _swapHand = SC.GetValue<bool>("Process.CycleSwapHand");
            }
            if (_swapHand &&
                ((_moveOption & MoveOption.LoadLock1) == MoveOption.LoadLock1 ||
                 (_moveOption & MoveOption.LoadLock2) == MoveOption.LoadLock2 ||
                 (_moveOption & MoveOption.LoadLock3) == MoveOption.LoadLock3 ||
                 (_moveOption & MoveOption.LoadLock4) == MoveOption.LoadLock4 ||
                 (_moveOption & MoveOption.LoadLock5) == MoveOption.LoadLock5 ||
                 (_moveOption & MoveOption.LoadLock6) == MoveOption.LoadLock6 ||
                 (_moveOption & MoveOption.LoadLock7) == MoveOption.LoadLock7 ||
                 (_moveOption & MoveOption.LoadLock8) == MoveOption.LoadLock8 ||
                 (_moveOption & MoveOption.Buffer) == MoveOption.Buffer))
            {
                SC.SetItemValue(ScPathName.Robot_Blade1Enable, true);
                SC.SetItemValue(ScPathName.Robot_Blade2Enable, true);
            }
            _moveOption = MoveOption.None;
            return true;
        }

        private bool FsmEnterCycle(object[] param)
        {
            EV.PostInfoLog("System", "Start Cycle");
            return true;
        }

        #endregion


        #region Loadport
        private bool fHome(object[] objs)
        {
            ModuleName chamber = (ModuleName)(objs[0]);
            Post(chamber, LoadPortEntity.MSG.HOME);
            return true;
        }

        private bool fLoad(object[] objs)
        {
            ModuleName chamber = (ModuleName)(objs[0]);
            Post(chamber, LoadPortEntity.MSG.Load);
            return true;
        }


        private bool fReadAndLoad(object[] objs)
        {
            ModuleName chamber = (ModuleName)(objs[0]);
            Post(chamber, LoadPortEntity.MSG.ReadAndLoad);
            return true;
        }


        private bool fUnload(object[] objs)
        {
            ModuleName chamber = (ModuleName)(objs[0]);
            Post(chamber, LoadPortEntity.MSG.Unload);
            return true;
        }

        private bool fReadID(object[] objs)
        {
            ModuleName chamber = (ModuleName)(objs[0]);
            Post(chamber, LoadPortEntity.MSG.ReadRFID);
            return true;
        }

        private bool fWriteID(object[] objs)
        {
            ModuleName chamber = (ModuleName)(objs[0]);
            Post(chamber, LoadPortEntity.MSG.WriteRFID);
            return true;
        }

        private bool Post(ModuleName chamber, LoadPortEntity.MSG msg, params object[] objs)
        {
            string pattern = "[1-9]\\d*";
            Regex rgx = new Regex(pattern);
            var match = int.Parse(rgx.Match(chamber.ToString()).ToString());
            if (match <= LoadPortQuantity)
                _loadportEntities[match - 1].PostMsg(msg, objs);
            return true;
        }
        #endregion
        #region validation


        /// <summary>
        /// 
        /// </summary>
        /// <param name="msg"></param>
        /// <param name="reason"></param>
        /// <param name="args"></param>
        /// <returns></returns>
        public bool CheckMsg(int msg, out string reason, bool eventOutReason, params object[] args)
        {
            Running = true;
            if (!fsm.FindTransition(fsm.State, msg))
            {
                reason = String.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg);
                if (eventOutReason)
                {
                    EV.PostMessage("System", EventEnum.DefaultWarning, reason);
                }

                Running = false;
                return false;
            }

            if (msg == (int)MSG.StartRecipe || msg == (int)MSG.StartCycle)
            {
                if (!IsAutoMode)
                {
                    reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString());
                    if (eventOutReason)
                    {
                        EV.PostMessage("System", EventEnum.DefaultWarning, reason);
                    }

                    Running = false;
                    return false;
                }
            }
            reason = "";

            return true;
        }

        public bool CheckToPostMsg(MSG msg)
        {
            if (!fsm.FindTransition(fsm.State, (int)msg))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning,
                    string.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg));
                return false;
            }

            PostMsg(msg);

            return true;
        }

        public bool CheckToPostMsg(MSG msg, object param1)
        {
            if (!fsm.FindTransition(fsm.State, (int)msg))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning,
                    string.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg));
                return false;
            }

            PostMsg(msg, param1);

            return true;
        }

        public bool CheckToPostMsg(MSG msg, object param1, object param2)
        {
            if (!fsm.FindTransition(fsm.State, (int)msg))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning,
                    string.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg));
                return false;
            }

            PostMsg(msg, param1, param2);

            return true;
        }

        public bool CheckToPostMsg(MSG msg, object param1, object param2, object param3)
        {
            if (!fsm.FindTransition(fsm.State, (int)msg))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning,
                    string.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg));
                return false;
            }

            PostMsg(msg, param1, param2, param3);

            return true;
        }
        
        public bool CheckToPostMsg(MSG msg, object param1, object param2, object param3, object param4)
        {
            if (!fsm.FindTransition(fsm.State, (int)msg))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning,
                    string.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg));
                return false;
            }

            PostMsg(msg, param1, param2, param3, param4);

            return true;
        }

        private bool check(ModuleName source, int slot, ModuleName dest, int dslot, Hand blade, MoveOption option, out string reason)
        {
            reason = string.Empty;


            if (!checkFoup(source, out reason))
            {
                return false;
            }

            if (!checkFoup(dest, out reason))
            {
                return false;
            }

            if (!WaferManager.Instance.IsWaferSlotLocationValid(source, slot))
            {


                reason = string.Format("Invalid source parameter, {0}:{1:D2}", source.ToString(), slot);
                return false;
            }

            if (!WaferManager.Instance.IsWaferSlotLocationValid(dest, dslot))
            {
                reason = string.Format("Invalid destination parameter, {0}:{1:D2}", dest.ToString(), dslot);
                return false;
            }

            if (!WaferManager.Instance.CheckWafer(source, slot, WaferStatus.Normal))
            {
                if (ModuleHelper.IsLoadLock(source) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    //online mode, CreateWafer in LoadLock
                    WaferManager.Instance.CreateWafer(source, slot, WaferStatus.Normal);
                }
                else
                {
                    reason = string.Format("Source no normal wafer, {0}:{1:D2}", source.ToString(), slot);
                    return false;
                }

            }

            if (!WaferManager.Instance.CheckWafer(dest, dslot, WaferStatus.Empty))
            {
                reason = string.Format("destination has wafer, {0}:{1:D2}", dest.ToString(), dslot);
                return false;
            }

            if (source != ModuleName.Robot && dest != ModuleName.Robot)
            {
                if (!WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade, WaferStatus.Empty))
                {
                    reason = string.Format("robot has wafer on arm");
                    return false;
                }
            }

            bool bAligner = ((option & MoveOption.Align) == MoveOption.Align) ||
                     ((option & MoveOption.ReadID) == MoveOption.ReadID) ||
                     ((option & MoveOption.ReadID2) == MoveOption.ReadID2);
            if (bAligner)
            {
                if (source != ModuleName.Aligner && dest != ModuleName.Aligner)
                {
                    if (!WaferManager.Instance.CheckWafer(ModuleName.Aligner, 0, WaferStatus.Empty))
                    {
                        reason = string.Format("aligner has wafer on");
                        return false;
                    }
                }
            }

            return true;
        }



        private bool check(ModuleName source, int slot, ModuleName dest, int dslot, out string reason)
        {
            reason = string.Empty;

            if (!checkFoup(source, out reason))
            {
                return false;
            }

            if (!checkFoup(dest, out reason))
            {
                return false;
            }

            if (!WaferManager.Instance.IsWaferSlotLocationValid(source, slot))
            {
                reason = string.Format("非法的参数。{0}:{1:D2}", source.ToString(), slot);
                return false;
            }

            if (!WaferManager.Instance.IsWaferSlotLocationValid(dest, dslot))
            {
                reason = string.Format("非法的参数。{0}:{1:D2}", dest.ToString(), dslot);
                return false;
            }

            if (!WaferManager.Instance.CheckWafer(source, slot, WaferStatus.Normal))
            {
                reason = string.Format("源位置没有wafer。{0}:{1:D2}", source.ToString(), slot);
                return false;
            }


            if (!WaferManager.Instance.CheckWafer(dest, dslot, WaferStatus.Empty))
            {
                reason = string.Format("目标位置有wafer。{0}:{1:D2}", dest.ToString(), dslot);
                return false;
            }

            return true;
        }


        private bool checkCycle(out string reason, params object[] args)
        {
            reason = string.Empty;

            //bool isAutoMode = (bool)DATA.Poll(ModuleName.System.ToString(), ParamName.IsAutoMode);
            //if (!isAutoMode)
            //{
            //    reason = String.Format("can not cycle, isn't auto mode.");
            //    return false;
            //}

            if (!WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty))
            {
                reason = string.Format("Upper arm has wafer");
                return false;
            }

            if (!WaferManager.Instance.CheckWafer(ModuleName.Robot, 1, WaferStatus.Empty))
            {
                reason = string.Format("Lower arm has wafer");
                return false;
            }

            if (DeviceModel.SensorRBupperArmhavewafer != null && !DeviceModel.SensorRBupperArmhavewafer.Value)
            {
                reason = string.Format("Upper arm has wafer");
                return false;
            }

            if (DeviceModel.SensorRBlowerArmhavewafer != null && !DeviceModel.SensorRBlowerArmhavewafer.Value)
            {
                reason = string.Format("Lower arm has wafer");
                return false;
            }


            return true;
        }

        private bool CheckEnableAuto()
        {
            string reason = string.Empty;

            DeviceState state = (DeviceState)DATA.Poll(ModuleName.Robot.ToString(), ParamName.RobotState);
            if (state != DeviceState.Idle)
            {
                EV.PostMessage("System", EventEnum.DefaultWarning, "can not change auto mode, Robot isn't ready.");
                return false;
            }

            if (!Singleton<DeviceManager>.Instance.IsAnyLPIdle())
            {
                EV.PostMessage("System", EventEnum.DefaultWarning, "can not change auto mode, no loadport is ready.");
                return false;
            }

            if (!WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning, "Upper arm has wafer");
                return false;
            }


            if (!WaferManager.Instance.CheckWafer(ModuleName.Robot, 1, WaferStatus.Empty))
            {
                EV.PostMessage("System", EventEnum.DefaultWarning, "Lower arm has wafer");
                return false;
            }


            if (!SC.GetValue<bool>(SorterCommon.ScPathName.System_IsSimulatorMode))
            {
                if (!DeviceModel.SensorRBupperArmhavewafer.Value)
                {
                    EV.PostMessage("System", EventEnum.DefaultWarning, "Upper arm has wafer");
                    return false;
                }

                if (!DeviceModel.SensorRBlowerArmhavewafer.Value)
                {
                    EV.PostMessage("System", EventEnum.DefaultWarning, "Lower arm has wafer");
                    return false;
                }
            }


            return true;
        }

        private bool checkMove(out string reason, params object[] args)
        {
            MoveType type = (MoveType)args[0];
            MoveOption option = (MoveOption)args[1];
            Hand blade = (Hand)args[2];
            ModuleName schamber1 = (ModuleName)args[3];
            int sslot1 = (int)args[4];
            ModuleName dchamber1 = (ModuleName)args[5];
            int dslot1 = (int)args[6];

            ModuleName schamber2 = (ModuleName)args[3];
            int sslot2 = (int)args[4];
            ModuleName dchamber2 = (ModuleName)args[5];
            int dslot2 = (int)args[6];

            if (type != MoveType.Move)
            {
                schamber2 = (ModuleName)args[7];
                sslot2 = (int)args[8];
                dchamber2 = (ModuleName)args[9];
                dslot2 = (int)args[10];
            }

            if (!check(type, blade, out reason))
            {
                EV.PostWarningLog("System", "Can not move wafer, " + reason);
                return false;
            }

            if (!check(schamber1, sslot1, dchamber1, dslot1, blade, option, out reason))
            {
                EV.PostWarningLog("System", "Can not move wafer, " + reason);
                return false;
            }

            if (type != MoveType.Move)
            {
                if (!check(schamber2, sslot2, dchamber2, dslot2, out reason))
                {
                    EV.PostWarningLog("System", "Can not move wafer, " + reason);
                    return false;
                }
            }

            return true;
        }

        private bool CheckMultiMove(out string reason, params object[] args)
        {
            MoveType type = (MoveType)args[0];
            MoveOption option = (MoveOption)args[1];
            Hand blade = (Hand)args[2];
            ModuleName schamber1 = (ModuleName)args[3];
            int sslot1 = (int)args[4];
            ModuleName dchamber1 = (ModuleName)args[5];
            int dslot1 = (int)args[6];

            ModuleName schamber2 = (ModuleName)args[3];
            int sslot2 = (int)args[4];
            ModuleName dchamber2 = (ModuleName)args[5];
            int dslot2 = (int)args[6];

            if (type != MoveType.Move)
            {
                schamber2 = (ModuleName)args[7];
                sslot2 = (int)args[8];
                dchamber2 = (ModuleName)args[9];
                dslot2 = (int)args[10];
            }

            if (!check(type, blade, out reason))
            {
                EV.PostWarningLog("System", "Can not move wafer, " + reason);
                return false;
            }

            //检查双臂, *若该机器人类型为下手臂1上手臂2
            if (!check(schamber1, sslot1, dchamber1, dslot1, Hand.Blade1, option, out reason))
            {
                EV.PostWarningLog("System", "Can not move wafer, " + reason);
                return false;
            }

            if (!check(schamber1, sslot1 + 1, dchamber1, dslot1 + 1, Hand.Blade2, option, out reason))
            {
                EV.PostWarningLog("System", "Can not move wafer, " + reason);
                return false;
            }

            if (type != MoveType.Move)
            {
                if (!check(schamber2, sslot2, dchamber2, dslot2, out reason))
                {
                    EV.PostWarningLog("System", "Can not move wafer, " + reason);
                    return false;
                }
            }

            return true;
        }

        private bool check(MoveType type, Hand blade, out string reason)
        {
            reason = string.Empty;
            if (type != MoveType.Move && blade == Hand.Both)
            {
                reason = string.Format("非法的参数。单片传盘时,不能指定Both blade");
                return false;
            }

            return true;
        }

 
        private bool checkFoup(ModuleName chamber, out string reason)
        {
            reason = string.Empty;
            if (ModuleHelper.IsLoadPort(chamber))
            {
                LoadPortBaseDevice loadport = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
                if (!loadport.IsEnableTransferWafer(out reason))
                {
                    reason = string.Format("{0} isn't Ready, {1}", chamber.ToString(), reason);
                    return false;
                }

                return true;
            }
            //reason = string.Format("Not Foup, parameter {0} is not valid.", chamber.ToString());
            return true;
        }

        public bool Check(int msg, out string reason, params object[] args)
        {
            if (!fsm.FindTransition(fsm.State, msg))
            {
                reason = String.Format("{0} is in {1} state，can not do {2}", Name, (RtState)fsm.State, (MSG)msg);

                return false;
            }

            if (msg == (int)MSG.StartRecipe || msg == (int)MSG.StartCycle)
            {
                if (!IsAutoMode)
                {
                    reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString());

                    return false;
                }
            }
            reason = "";

            return true;
        }

        #endregion

        #region Map Wafer

        private bool FsmStartMapWafer(object[] param)
        {
            Running = false;
            Result ret = _waferMapRoutine.Start(param);
            if (ret == Result.DONE || (ret == Result.FAIL))
            {
                return false;  //do noting
            }
            return true;
        }

        private bool FsmMonitorWaferMapping(object[] param)
        {
            Result ret = _waferMapRoutine.Monitor();
            if (ret == Result.DONE)
            {
                return true;
            }
            else if (ret == Result.FAIL)
            {
                return true;
            }
            return false;
        }

        public void MapBuffer()
        {
            var sensors = new List<bool>
            {
                false,false,false,false,false,
                //DeviceModel.SensorCoolingStageSLOT2WaferON.Value,
                //DeviceModel.SensorCoolingStageSLOT3WaferON.Value,
                //DeviceModel.SensorCoolingStageSLOT4WaferON.Value,
                //DeviceModel.SensorCoolingStageSLOT5WaferON.Value,
                //DeviceModel.SensorCoolingStageSLOT6WaferON.Value
            };
            var index = 0;
            foreach (var sensor in sensors)
            {
                if (!sensor && WaferManager.Instance.CheckNoWafer(ModuleName.Buffer, index))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.Buffer, index, WaferStatus.Normal);
                }
                else if (sensor && WaferManager.Instance.CheckHasWafer(ModuleName.Buffer, index))
                {
                    WaferManager.Instance.DeleteWafer(ModuleName.Buffer, index);
                }
                index++;
            }

            var robotSensors = new List<bool>
            {
                DeviceModel.SensorRBlowerArmhavewafer.Value,
                DeviceModel.SensorRBupperArmhavewafer.Value
            };
            index = 0;
            foreach (var sensor in robotSensors)
            {
                if (!sensor && WaferManager.Instance.CheckNoWafer(ModuleName.Robot, index))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.Robot, index, WaferStatus.Normal);
                }
                else if (sensor && WaferManager.Instance.CheckHasWafer(ModuleName.Robot, index))
                {
                    WaferManager.Instance.DeleteWafer(ModuleName.Robot, index);
                }
                index++;
            }
        }

        public int Invoke(string function, params object[] args)
        {
            switch (function)
            {
                case "Place":
                    CheckToPostMsg(MSG.Place, args[0], args[1], args[2]);
                    return (int)MSG.Place;
                case "Pick":
                    CheckToPostMsg(MSG.Pick, args[0], args[1], args[2]);
                    return (int)MSG.Pick;
                case "MPNTPick":
                    CheckToPostMsg(MSG.MPNTPick, args[0], args[1], args[2], args[3]);
                    return (int)MSG.MPNTPick;
                case "MPNTPlace":
                    CheckToPostMsg(MSG.MPNTPlace, args[0], args[1], args[2], args[3]);
                    return (int)MSG.MPNTPlace;
                case "Reset":
                    CheckToPostMsg(MSG.RESET );
                    return (int)MSG.RESET;
            }

            return (int)FSM_MSG.NONE;
        }

        public bool CheckAcked(int msg)
        {
            return fsm.CheckExecuted(msg);
        }

        #endregion

      
    }
}