using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Event; using Aitex.Core.RT.SCCore; using Aitex.Sorter.Common; using Efem; using Efem.Protocol; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; namespace EFEM.RT.Tasks { public class GotoTask : RobotImp, ITask { //public int spd1ForPick => SC.GetValue("Robot.Robot.GotoReadyXSpeedForPick"); //public int ZForPick => SC.GetValue("Robot.Robot.GotoReadyZDistanceForPick"); //public int falg1 => SC.GetValue("Robot.Robot.GotoReadyCICheckWaferForPlace"); //public int falg4 => SC.GetValue("Robot.Robot.GotoReadyXCheckWaferForPlace"); //public int spd1ForPlace=> SC.GetValue("Robot.Robot.GotoReadyXSpeedForPlace"); //public int spd2ForPlace=> SC.GetValue("Robot.Robot.GotoReadyCISpeedForPlace"); //public int ZForPlace => SC.GetValue("Robot.Robot.GotoReadyZDistanceForPlace"); public bool EnableGotoReady { get { if (SC.ContainsItem("Robot.Robot.EnableGotoReady")) return SC.GetValue("Robot.Robot.EnableGotoReady"); return true; } } public GotoTask() { } public bool Execute(out string result, params string[] args) { string device = DeviceName.Robot; IServerModule entity = GetEntity(device); ModuleName target = ModuleName.System; int slot = 1; if (!ParseMoveTarget(args[0], out target, out slot)) { result = PARAM_NG; return false; } Hand arm = Hand.Blade2; if (!ParseMoveArm(args[1], out arm)) { result = PARAM_NG; return false; } var isPick = true; isPick = !WaferManager.Instance.CheckHasWafer(ModuleName.Robot, arm == Hand.Blade2 ?1:0); if (MultiWaferSize && false) { if (args.Length < 2) { result = PARAM_NG; return false; } if (isPick) { if (!CheckWaferSize(args[2], target, slot - 1)) { result = PARAM_NG; return false; } } else { if (!CheckWaferSize(args[2], ModuleName.Robot, 0)) { result = PARAM_NG; return false; } } //if (ModuleHelper.IsLoadPort(target)) //{ // OpenStageWithWaferSizeLoadPort lp = DEVICE.GetDevice(target.ToString()); // if (slot == 1 && lp.WaferSize == WaferSize.WS3) // { // EV.PostWarningLog("EFEM", $"{target} is 3', slot 1 is disabled"); // result = PARAM_NG; // return false; // } //} } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } RobotBaseDevice _device = DEVICE.GetDevice(device); if (ModuleHelper.IsLoadPort(target)) { LoadPortBaseDevice lp = DEVICE.GetDevice(target.ToString()); if (!lp.IsEnableTransferWafer(out string reason)) { EV.PostWarningLog("EFEM", $"Can not goto, {reason}"); result = "NOPOS"; return false; } } if(!EnableGotoReady) return true; object[] objs; if (isPick) { // objs = new object[] { arm, target, slot - 1, RobotPostionEnum.PickReady, spd1ForPick, ZForPick }; objs = new object[] { arm, target, slot - 1, RobotPostionEnum.PickReady}; } else { // objs = new object[] { arm, target, slot - 1, RobotPostionEnum.PlaceReady, falg1, falg4, spd1ForPlace, spd2ForPlace, ZForPlace }; objs = new object[] { arm, target, slot - 1, RobotPostionEnum.PlaceReady }; } _device.GoTo(objs); return true; } public bool? Monitor(out string result, params string[] args) { result = string.Empty; RobotBaseDevice _device = DEVICE.GetDevice(DeviceName.Robot); if (_device.IsError) { flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; return CheckError(DeviceName.Robot, out result); } if (_device.IsReady()) return true; return null; } } }