using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using EFEM.RT.Devices; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots; using System; namespace EFEM.RT.Routines { public class PlaceRoutine : CommonRoutine, IRoutine, IEfemPlaceRoutine { private enum Place { QueryState, OpenLoadLockDoor, CoolBufferMoveUP, WaitCoolBufferMoveUP, CheckBeforePlace, QueryRobotParameter, RobotServoOff, WaitRobotServoOff, SetWaferSizeParameter0000, SetWaferSizeParameter0114, RobotServoOn, WaitRobotServoOn, PlaceWafer, WaitPlace, CloseLoadLockDoor, CoolBufferMoveDown, WaitCoolBufferMoveDown, CheckAfterPlace, XMove, PostMessage, RobotBusytoSimifOn, RobotBusytoSimifOff, PinDown, CheckWaferPrecense, WaitCheckWaferPrecense, CheckWaferPrecenseAfterPlace, QuerySignalStatus, RobotBladeGrip, NotifyFlipperPrepare, NotifyFlipperOver } protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue("MultiWaferSize") ?? false; protected bool EnableMoveInDiffSlotsNumLP { get { if (SC.ContainsItem("System.IsEnableMoveInDiffSlotsNumLP")) return SC.GetValue("System.IsEnableMoveInDiffSlotsNumLP"); return false; } } private SCConfigItem _scPlaceTimeout = null; private int _timeout = 0; private int _axisTimeout = 0; private int _axisSpeed = 0; private int _alignerdelay = 0; private int _coolingdelay = 0; private int delaytime = 0; public PlaceRoutine(string module, string name) { Module = module; Name = name; _alignerdelay = SC.GetValue("System.AlignerPinDownDelay"); _coolingdelay = SC.GetValue("System.CoolingPinDownDelay"); _scPlaceTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPlaceWafer); if (HaveMotionAxis) { _axisTimeout = SC.GetValue("MotionAxis.MoveTimeout"); _axisSpeed = SC.GetValue("MotionAxis.AutoSpeed"); } } public bool Initalize() { IsStopped = true; return true; } public ModuleName Station { get; set; } public int Slot { get; set; } public Hand Blade { get; set; } public LoadPort _lpDevice; private bool _skipWait; public Result Start(params object[] objs) { IsStopped = false; Name = "Place"; Reset(); _timeout = robot.RobotCommandTimeout; if (ModuleHelper.IsCoolingBuffer(Station)) delaytime = _coolingdelay * 1000; else delaytime = _alignerdelay * 1000; EV.PostMessage(ModuleName.System.ToString(), EventEnum.PuttingWaferToChamberBegins, string.Format("{0}{1:D2} by {2}", Station.ToString(), Slot + 1, Blade.ToString())); return Result.RUN; } public Result Monitor() { try { if (IsStopped) return Result.DONE; if (ModuleHelper.IsCoolingBuffer(Station) || ModuleHelper.IsAligner(Station)) { var dev = GetCoolBuffer(Station); if (dev != null) { //QueryCoolBufferState((int)Place.QueryState, GetCoolBuffer(Station)); CoolBufferMoveUP((int)Place.CoolBufferMoveUP, GetCoolBuffer(Station), WaferManager.Instance.GetWaferSize(ModuleName.Robot, 0), _timeout, Notify, Stop); WaitCoolBufferMoveUp((int)Place.WaitCoolBufferMoveUP, GetCoolBuffer(Station), "Wait CoolingBuffer Move Up...", _timeout, Notify, Stop); } } else if (ModuleHelper.IsFlipper(Station)) { FlipperPrepare((int)Place.NotifyFlipperPrepare, GetFlipper(), "Flipper Prepare Transfer...", _timeout, Notify, Stop); } CheckBladeWaferIsExist((int)Place.CheckWaferPrecense, robot, Blade, _timeout); // RobotSignalStatus((int)Place.QuerySignalStatus, robot, _timeout); WaitRobotMotion((int)Place.WaitCheckWaferPrecense, robot, "Wait finish check wafer", _timeout, Notify, Stop); CheckBeforePlace((int)Place.CheckBeforePlace, "Check wafer before place", Station, Slot, Blade, Notify, Stop); //GripRobotBlade((int)Place.RobotBladeGrip, Blade, robot, _timeout); if (!ModuleHelper.IsLoadLock(Station)) { PlaceWafer((int)Place.PlaceWafer, "Place wafer", Station, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop); this.WaitRobotMotion((int)Place.WaitPlace, robot, "Wait wafer placed", _timeout, Notify, Stop); } if (LoadLockDoorControlByStation && ModuleHelper.IsLoadLock(Station) && !Singleton.Instance.IsOnlineMode) { LoadLockCloseAtmDoor((int)Place.CloseLoadLockDoor, DEVICE.GetDevice(Station.ToString()), "Wait Atm Door Close", _timeout, Notify, Stop); } //为了提高上位机调度效率,机械手放片在上面就认为place指令完成。pin落下的时间和指令从上位机发送 //为了保持兼容性,暂时判断了是否上位机控制,需要等cycle功能做好,这里都统一成外部控制lift pin if (!Singleton.Instance.IsOnlineMode) { if (ModuleHelper.IsCoolingBuffer(Station) || ModuleHelper.IsAligner(Station)) { var dev = GetCoolBuffer(Station); if (dev != null) { TimeDelay((int)Place.PinDown, delaytime); CoolBufferMoveDown((int)Place.CoolBufferMoveDown, GetCoolBuffer(Station), WaferManager.Instance.GetWaferSize(Station, Slot), _timeout, Notify, Stop); WaitCoolBufferMoveDown((int)Place.WaitCoolBufferMoveDown, GetCoolBuffer(Station), "Wait CoolingBuffer Move Down...", _timeout, Notify, Stop); } } } if (ModuleHelper.IsFlipper(Station)) { FlipperComplete((int)Place.NotifyFlipperOver, GetFlipper(), "Flipper Complete Transfer...", _timeout, Notify, Stop); } PostMessage((int)Place.PostMessage, string.Format("{0}{1:D2} by {2}", Station.ToString(), Slot + 1, Blade.ToString())); //CheckBladeWaferIsExist((int)Place.CheckWaferPrecenseAfterPlace, robot, Blade, _timeout); CheckAfterPlace((int)Place.CheckAfterPlace, "Check wafer information after wafer placed", Station, Slot, Blade, Notify, Stop); } catch (RoutineBreakException) { if (!IsActived(TokenId) && !_skipWait) { _skipWait = true; return Monitor(); } return Result.RUN; } catch (RoutineFaildException) { IsStopped = true; return Result.FAIL; } IsStopped = true; return Result.DONE; } protected override void Notify(string message) { EV.PostMessage(Module, EventEnum.GeneralInfo, String.Format("Place sequence:{0}", message)); } /// /// prepare process failed /// /// /// protected override void Stop(string failReason) { string reason = String.Empty; EV.PostMessage(ModuleName.System.ToString(), EventEnum.PlaceWaferFailed, Station.ToString(), Slot + 1, Blade.ToString(), failReason); } public void PlaceWafer(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(String.Format("Place wafer to {0}", chamber.ToString())); string reason = string.Empty; return robot.Place((RobotArmEnum)(int)blade, chamber.ToString(), slot); }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } } } public void CheckBeforePlace(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(String.Format("Check {0}{1:D2} wafer information before place wafer", chamber.ToString(), slot)); string reason = string.Empty; if (!CheckRobotMotionInterlock(chamber, slot, out reason)) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("Target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason)); return false; } if (blade == Hand.Blade1) { bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + 1)); return false; } bool bHasWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade, WaferStatus.Normal); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend); return false; } bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade); //check sensor if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend); return false; } if (IsEnableIdentifyThickness) { if (ModuleHelper.IsLoadPort(chamber)) { if (SC.GetStringValue($"CarrierInfo.LowerThicknessType") != SC.GetStringValue($"CarrierInfo.{chamber}ThicknessType")) { EV.PostAlarmLog(ModuleName.System.ToString(), $"The wafer thickness of the lower arm is different from {chamber}."); return false; } } } } else if (blade == Hand.Blade2) { bool bHasWafer = true; for (int i = 0; i < robot.Blade2Slots; i++) { bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + i + 1)); return false; } bHasWafer &= WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Normal); bool bSensorWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade + i); //check sensor if (!bSensorWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend); return false; } } if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend); return false; } if (IsEnableIdentifyThickness) { if (ModuleHelper.IsLoadPort(chamber)) { if (SC.GetStringValue($"CarrierInfo.UpperThicknessType") != SC.GetStringValue($"CarrierInfo.{chamber}ThicknessType")) { EV.PostAlarmLog(ModuleName.System.ToString(), $"The wafer thickness of the lower arm is different from {chamber}."); return false; } } } } else { bool bHasWafer = true; for (int i = 0; i < robot.Blade2Slots + 1; i++) { bool bNoWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, String.Format("Target {0}{1:D2}", chamber.ToString(), slot + i + 1)); return false; } bHasWafer &= WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Normal); bool bSensorWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor if (!bSensorWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend); return false; } if (ModuleHelper.IsLoadPort(chamber)) { string arm = i == 0 ? "Lower" : "Upper"; if (SC.GetStringValue($"CarrierInfo.{arm}ThicknessType") != SC.GetStringValue($"CarrierInfo.{chamber}ThicknessType")) { EV.PostAlarmLog(ModuleName.System.ToString(), $"The wafer thickness of the {arm} arm is different from {chamber}."); return false; } } } if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend); return false; } } if (ModuleHelper.IsCoolingBuffer(chamber)) { IoCoolingBuffer buffer = DEVICE.GetDevice(chamber.ToString()); if (buffer == null) { EV.PostWarningLog("System", String.Format("{0} Device is Null", chamber.ToString())); return false; } if (!buffer.CheckPinUp()) { EV.PostWarningLog(chamber.ToString(), "Can not place wafer to buffer, buffer isn't pick position."); return false; } } if (ModuleHelper.IsLoadPort(chamber)) { //WaferSize size = WaferManager.Instance.GetWaferSize(ModuleName.Robot, (blade == Hand.Both) ? 0 : (int)blade); WaferInfo wafer = WaferManager.Instance.GetWafer(ModuleName.Robot, (blade == Hand.Both) ? 0 : (int)blade); LoadPortBaseDevice lp = DEVICE.GetDevice(chamber.ToString()); LoadPortBaseDevice lp1 = DEVICE.GetDevice(((ModuleName)wafer.OriginStation).ToString()); if (!EnableMoveInDiffSlotsNumLP && lp1 != null && lp1.ValidSlotsNumber != lp.ValidSlotsNumber) { EV.PostWarningLog(chamber.ToString(), "Can not place wafer to loadport, SlotsNumber is unmatch."); return false; } if (IsEnableMultiWaferSize) { //因为此手臂只有一个手抓 WaferSize size = WaferManager.Instance.GetWaferSize(ModuleName.Robot, (blade == Hand.Both) ? 0 : (int)blade); lp = DEVICE.GetDevice(chamber.ToString()); if (size != lp.GetCurrentWaferSize()) { EV.PostWarningLog(chamber.ToString(), "Can not place wafer to loadport, size is unmatch."); return false; } } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { error(String.Format("Check wafer information failed, can not place.")); throw (new RoutineFaildException()); } } } public void CheckAfterPlace(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(name); //if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) //{ // //online mode, DeleteWafer in LoadLock // WaferManager.Instance.DeleteWafer(chamber, slot); //} //if (ModuleHelper.IsBuffer(chamber) && Singleton.Instance.IsOnlineMode) //{ // //online mode, DeleteWafer in LoadLock // WaferManager.Instance.DeleteWafer(chamber, slot); //} if (blade == Hand.Blade1) { bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend); return false; } } else if (blade == Hand.Blade2) { for (int i = 0; i < robot.Blade2Slots; i++) { bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend); return false; } } } else { for (int i = 0; i < robot.Blade2Slots + 1; i++) { bool bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend); return false; } } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { error(String.Format("Failed to check wafer information")); throw (new RoutineFaildException()); } } } } }