9 Operator Access:{0} Information OperationAuthorization Only authorized account can execute operation and control command 10 '{0}' Quit System. Information UserLoggedOff User Logged Off. 11 User {0} login Information UserLoggedIn UserLogin User {0} login User {0} Login 12 UserAccount'{0}'was modified. Information AccountChanged AccountChanged 13 Account '{0}' password was changed. Information PasswordChanged PasswordChanged 14 Account '{0}' was deleted. Information AccountDeleted AccountDeleted 15 Account '{0}' was created. Information AccountCreated UserAccountCreated 19 Wafer placed to {0} Information PuttingWaferToChamberEnds This event is posted right after put a wafer 20 Placing wafer to {0} Information PuttingWaferToChamberBegins This event is posted right before placing 21 Wafer picked from {0} Information PickingWaferFromChamberEnds This event is posted right after wafer picked 22 Picking wafer from {0} Information PickingWaferFromChamberBegins This event is posted right before picking 25 Align start：notch is {0}. Information AlignBegins When aligners start aligning. 26 Align end. Information AlignEnds When aligners aligning completed. 27 Align failed.{0} Warning AlignFailed When aligners aligning failed. 28 Wafer {0} moved from {1} {2} to {3} {4} Information WaferMoved Wafer Move information. 36 Wafer created at {0} slot {1}, status is {2}. Information WaferCreate Wafer Create Information 37 Wafer deleted from {0} slot {1}. Information WaferDelete Wafer Delete Information 41 {0} load FOUP start. Information LoadFOUPStart 42 {0} load FOUP end. Information LoadFOUPEnd 43 {0} load FOUP Failed. Alarm LoadFOUPFailed 44 {0} unload FOUP start. Information UnloadFOUPStart 45 {0} unload Foup end. Information UnloadFOUPEnd 46 {0} unload Foup failed. Alarm UnloadFOUPFailed 1000 {0} Information GeneralInfo 默认事件类型(通用) 1222 1023 {0} '{1}' stopped，reason: {2}. Information ServiceRoutineAborted where {0} is the chamber name, while {1} is the service name. When service routine is aborted, this event will be posted. 1033 {0} {1}：{2}. Information ServiceRoutineInfo Indicate the information，{0}PM，{1}servicename，{2}actionname. 1040 {0} {1}. Information GuiCmdExecSucc GUI command execution succesfully.{0}PM，{1}Command explaination. 1052 {0} {1}. Information SwInterlock Software interlock.{0}PM，{1}Detailed Reason. 2052 用户 {0} 无操控权，请先获取操控权 Warning AccountWithoutAuthorization Only authorized account can operate. Apply Authorization 2053 {0}. Warning DefaultWarning AlarmRange2000~3999，DefaultAlarmCode. DefaultAlarmCode. 3027 {0} {1}. Warning GuiCmdExecFailed GUICommandFailed. 1.Check software interlock. 3034 {0} DBConnectionError. Warning DbConnFailed The DB connection broken. 1.Check DB connection. 3038 {0} {1}. Warning SafePlcInterlock SafePlcInterlock. 1.Check interlock 3039 {0} Value{1}{2}failed，reason{3}. Warning ValveOperationFail ValveOperationTimeout. 1.Check if the value action satisfy the interlock. 4050 Prepare transfer failed, {0} Alarm TransferPrepareFailed See detail description 4051 {0}didn't detect wafer or wafer record Alarm WaferAbsentWithoutRecord Didn't detect wafer or record on destination 1.Check if there's wafer on destination. 4052 {0}detect wafer,can't place. Alarm WaferPresentWithRecord There's wafer record on destination 1.There must be no wafer record on destination. 4054 Place wafer to {0} {1} by {2} failed,{3} Alarm PlaceWaferFailed PlaceWaferFailed Check detail reason 4055 Failed pick wafer from {0} Alarm PickingWaferFromChamberFails failed pick wafer 1.check log to get the reason. 4061 System detect wafer on arm after place. Alarm WaferDetectedAfterSend System detect wafer on arm after place. 1.Check Wafer sensor on arm. 2.Check if Wafer drop. 4062 System didn't detect wafer on arm before place. Alarm WaferNotDetectedBeforeSend System didn't detect wafer on arm before place 1.Check Wafer sensor on arm. 2.Check if Wafer drop. 4063 System didn't detect wafer on arm after pick Alarm WaferNotDetectedAfterPick System didn't detect wafer on arm after pick 1.Check Wafer sensor on arm. 2.Check if Wafer drop. 4064 System detect wafer on arm before pick Alarm WaferDetectedBeforePick System detect wafer on arm before pick 1.There must be no wafer or information on arm. 4093 Alarm event:{0}. Alarm event:{0}. AlamrEvent:{0}. Alarm DefaultAlarm Alarm range4000~4000+，Default alarm code. Default alarm event 5020 {0} TV abnormal. Alarm ThrottleValveAbnormal Alarm was set when the TV abnormal. 1. Check TV working status. 5027 {0} PLC running error. Alarm PlcHeartBeatFail PLC send heart beat fail. 1.Check if the PLC on PM is active. 5120 TCPConnSucess TCP connect success,IP:{0} Port:{1} TCP connect success Information 5125 {0} Communication error, {1} Alarm CommunicationError Error occur during communication with hardware 1.Check network 2.Check hardware working status 5126 {0} {1}Tolerance alarm：{2}. {0} {1} Tolerance alarm：{2}. {0} {1} Tolerance alarm：{2}. Alarm ToleranceAlarm Alarm was set when the tolerance out of spec. 1.Check if the device is working normal. 2.Check if the setpoint or rate is out of spec. 5128 TC {0} broken. TC {0} broken. TC {0} error. Alarm TCBroken display if TC is broken change the broken TC. 5130 System running mode changed to {0} Information RunningModeChanged system changed running mode System running mode changed to {0} System running mode change to {0} 5200 Initialize start. Information HomeBegins 5201 Initialize end. Information HomeEnds 5202 Initialize failed，{0} . Alarm HomeFailed check subsystem. 5203 Foup Arrived at {0} Information CarrierArrived Notify the Foup placed at the position. 5204 Foup removed from {0} Information CarrierRemoved Notify the Foup is removed from the position. 5205 Manually Push the OP button at {0} Information ManualOpAccess Notify the Foup will be load. 5206 Read {0} Carrier ID, {1} Information CarrierIdRead Notify the carrier id was read. 5207 Failed read {0} carrier ID Alarm CarrierIdReadFailed Notify failed while reading the carrier id. 5208 {0} wafer mapped, {1} Information SlotMapAvailable Notify after mapped wafer.