OK Cancel Version： Login： Role： Logout Auto Manual Buzzer OFF Buzzer Off Reset Terminal Event: Log Select Recipe Recipe Start Pause Resume Stop Recipe Setting Type Source Destination Place Mode Pick Mode Process Information Elapse Time(s) Wafer Count Throughput Cycle Count Status Speed Operation Cycle Status Speed(%) Upper Size Lower Size Size WaferId WaferSize Wafer Detector Metrology Result Initialize Abort Auto Manual Stop Pause Resume Return Wafer Load Unld Map Match Lot Scan Select Recipe Data Log Total Cycle Recipe Scan Start Next Step Stop Chamber Door： Pump Door： Pump Inlet Outlet Vent Precursor Door： Backpanel Door： Process Status Parameters Feedback Set Point ProcessTime(s) Step No Step Time Chamber Pressure(mTorr) TV Mode TV Position(%) TV Pressure(mTorr) Boost Pressure(mTorr) RF Time(s) RF Mode RF Power(w) Reflect Power(w) Pulsing Frequency(Hz) Pulsing DC(%) RF Match Preset Mode RF Match Position C1 RF Match Position C2 Vapor MFC1(sccm) Vapor MFC2(sccm) Electrode Temp(c) Operation Manual Auto Working Mode Manual Operation Base Pressure(mT) Pump Down Limit(s) Pump Time(s) Pump Gas RF Purge Vent ChamberStatus Process Configuration Vent Time Limit(s) Purge Pump Time Limit(s) Purge Pump Pressure(mTor) Purge Time Limit(s) Purge Pressure(mTor) Purge Cycle Count Gas Flow Pressure Alarm Time(s) Gas Flow Pressure Alarm Range(mTor) RF Power Alarm Range(w) RF Power Alarm Time(s) RF Reflect Power Alarm Range(w) RF Reflect Power Alarm Time(s) Vent Time(s) Set RF Match Running Mode RF Match Position C1 RF Match Position C2 RF Match Mode In Auto Run Process Gas Enable Display Name N2 Scale Scale Factor Alarm Range Alarm Time Enable Alarm Set Gas 1 Gas 2 Gas 3 Gas 4 Gas 5 Pulsing Function Power Range Enable Barcode Enable Manual Select Recipe Vacuum System Independent Pressure Control Dry Pump Dry Pump Setting Cooling Water Flow N2 Pressure Pressure Control Min Max Device Control Test Mode Statistics RF On Time Pump On Time Last PM Time From Last PM Reset Total PM Interval(Days) RecipeList Current Recipe： Reload Save New Recipe Import Recipe New Folder Export Recipe Delete Recipe Export Recipe as Excel Save as Rename Recipe Rename Folder Delete Folder save current recipe? {0} {0} load recipe file failed! 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Liquid Level： Standing Time： Name Set Real Alarm Range Alarm Time Enable Alarm Precursor Temp Precursor Container Temp Vapor Line Temp Pumping Line Temp Precursor High Limit Precursor Low Limit Vapor Pressure Container Vacuum Pressure Maintenance Control Tank Pump Status: Pumping Container Pump Vapor line Pump Precursor Feed Leak Check Configuration Pump Down Time(m) Leak Check Time(m) Leak Check Mode Status Leak Check Abort Delete Date Start Pressure Stop Pressure Leak Rate Pressure RF Match RF Power On/Off RF Power (w) Match Mode C1 Setting (%) C2 Setting (%) ON OFF Query condition Time Range Recipe Run Query Data Log History List Recipe Name End Time Start Time Running result Lot Data Charting Source LoadPort destination LoadPort Transfer Options Reader Option: Job Selection: Quick Select Clear All Start Transfer Remove PlaceMode Pre Align Post Align Read Laser Marker Turn Over Turn Over before PA Add... Rename Save As... Delete Recipe Selected: Save Cancle Recipe Type: Module: Add Clear OK Cancel Add... Rename Save As... Delete Recipe Selected: Save Cancle Recipe Type: Recipe Default: Set Default Refresh Set Pre-Align Angle: Laser Mark1: Laser Mark2: Reader Job File List: LM1 Job File: LM2 Job File: Post Align: Turn Over: Turn Over Before PA Read Verify Verify Checksum Load UnLoad Manual Presence Placement Auto Reserve Alarm System Status Mode Initial Pos.Mov Operation Status Error Code Container Status Clamp Postion Latch Postion Vacuum Status Door Position Wafer Protruision Elevator Axis Dock Position Map Position Map Status Model Fosb Mode State Machine Command Option: Execute Command Load UnLoad Home Reset Stop Force Home Read Status Fosb ON Fosb Off Port Reserved : Port State : Carrier ID : Slot Map : Access Mode : Access Status : Carrier ID Status : Slot Map Status : SetAMHS SetManual InService OutService CarrierIDReaderOption : Read Write Vaild : Transfer Request : Busy : Transfer Complete : CS_0 : CS_1 : Continuous Transfer : Load Request : UnLoad Request : Ready to Transfer : Handoff Available : Emergency Stop OK : Error on Placement Timeout E84 Status Monitor Status : E84 Factory Inputs E84 Factory Outputs TimeOut Settings Error Recovery Retry Complete Error on access mode violation Set LoadPort Status E87 Status Carrier ID Reader Pod Present : Pod Placed : Pod Latched : Pod Docked : Pod Open : In Service : Place Pick Clamp Automatic Mode In Service Robot Position ZAxis(μm): EXAxis(μm): THAxis(μm): H1Axis(0.001deg): H2Axis(0.001deg): Status Error Code Blade1 Target Blade2 Target Speed Read Speed(%) SetSpeed(%) Init Home Reset Stop Low Medium High Grip Ungrip Pick Place Query Position Read Speed Set Speed Hold Release Read Set Read Cmd Set Cmd Read Position Write Position Write Current Aligner Status Elapse Time Notch Is Wafer On Error Code Notch (Degree) Align Angle Align Home Reset Stop Move To Prepare Lift Up Lift Down Init Grip Release Hold Laser Mark Reader1 Status Reset Laser Mark Reader Job List Refresh LM1 Job LM2 Job Job List Select Job Result Set Read Resume Pause Star Stop Abort Cancel DeSelect HeadofQueue Display Turning Control Jobs Process Jobs Material Present Material Define Select Index Type OK Close Grip Un Grip Turn to 0 Turn to 180 Home Reset error Stop Status Home Busy Grip IsUnGrip 0 Position 180 Position Placement Alarm PressureError Home Command Grip Command UnGrip Command Turn To 0 Cmd Turn To 180 Cmd Reset Cmd Stop Cmd Reset Initialize Clear Message Hold Release StartProcess MoveToLoad SetRecipe Status WaferID Measurenment Status WaferSize Analysis Result XRF PM RecipeList Message