using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using EFEM.RT.Modules; using Aitex.Sorter.Common; using System.Linq; using Efem; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; namespace EFEM.RT.Tasks { public class PickTask : RobotImp, ITask { public PickTask() { } public bool Execute(out string result, params string[] args) { string device = DeviceName.Robot; IServerModule entity = GetEntity(device); ModuleName target = ModuleName.System; int slot = 1; if (!ParseMoveTarget(args[0], out target, out slot)) { result = PARAM_NG; return false; } Hand arm = Hand.Blade2; if (!ParseMoveArm(args[1], out arm)) { EV.PostWarningLog("Server", $"{args[1]} not valid arm parameter"); result = PARAM_NG; return false; } if (ModuleHelper.IsLoadLock(target) && !SC.GetValue("System.IsLoadLockEnableZMotion")) { EV.PostWarningLog("Server", $"not support LL z motion, can not LOAD {target}"); result = PARAM_NG; return false; } if (MultiWaferSize) { if (args.Length < 2) { result = PARAM_NG; return false; } if (!CheckWaferSize(args[2], target, slot - 1)) { result = PARAM_NG; return false; } //if (ModuleHelper.IsLoadPort(target)) //{ //OpenStageWithWaferSizeLoadPort lp = DEVICE.GetDevice(target.ToString()); //var //if (slot == 1 && lp.WaferSize == WaferSize.WS3) //{ // EV.PostWarningLog("EFEM", $"{target} is 3', slot 1 is disabled"); // result = PARAM_NG; // return false; //} // } } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { // LOG.Write($"PickTask {device} Busy"); return false; } if (!Check(device, out result)) { LOG.Write($"PickTask {device} Busy"); return false; } if (!Check(target.ToString(), out result)) { // LOG.Write($"PickTask {device} Busy"); return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(target.ToString(), out result)) { return false; } if (!Check(device, out result)) { return false; } //do not check loadlock if (!ModuleHelper.IsBuffer(target)) { if (!ModuleHelper.IsLoadLock(target)&& !Singleton.Instance.CheckHasWafer(target, slot - 1)) { result = "NONWAF"; return false; } } if (ModuleHelper.IsLoadPort(target)) { if (!Check(target.ToString(), out result)) { return false; } } if (arm == Hand.Blade1) { if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot,0)) { result = "WAFER"; return false; } } else if (arm == Hand.Blade2) { if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot,1)) { result = "WAFER"; return false; } } else { if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot,0)) { result = "WAFER"; return false; } if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot,1)) { result = "WAFER"; return false; } } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Check(device, out result)) { return false; } if (!Singleton.Instance.IsIdle) { LOG.Write($"PickTask RouteManager is Busy"); result = "BUSY"; return false; } _token = Singleton.Instance.Invoke("Pick", target.ToString(), slot - 1, arm); return true; } public bool? Monitor(out string result, params string[] args) { result = string.Empty; RobotBaseDevice _device = DEVICE.GetDevice(DeviceName.Robot); if (_device.IsError|| Singleton.Instance.IsError) { flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; var ret= CheckError(DeviceName.Robot, out result); if (!ret) { result = ""; if (Singleton.Instance.EventError != null) { var items = Singleton.Instance.EventError.ToList().Where(m => m.Source == "System" || m.Source == "Robot").Reverse().ToList(); for(int i=0;i.Instance.IsIdle&& _device.IsReady()&& Singleton.Instance.CheckAcked(_token)) return true; return null; } } }