using Aitex.Core.Common; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using Brooks.WinSECS; using MECF.Framework.Common.Communications; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.SMIFs.Brooks; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading; using System.Threading.Tasks; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.SMIF { public class BrooksSmifPort : LoadPortBaseDevice, IConnection { public WinSECS wshost { get; set; } public BrooksSMIFHostAgent ha { get; set; } protected bool _isLoaded; protected bool _isUnloaded; public bool IsActionComplete { get; set; } public override bool IsLoaded => _isLoaded; public bool IsAutoMode { get; set; } public bool IsPioInterlockOn { get; set; } public bool IsPodPresent { get; set; } public bool IsOpStatusReady { get; set; } public LastFunctionEnum LastFunctionDone { get; set; } public PortStateEnum CurrentPortStatus { get; set; } public bool IsLiftAtOverTravelLimit { get; set; } public bool IsLiftAtUpLimit { get; set; } public bool IsLiftAtStagePosition { get; set; } public WaferSeaterStateEnum CurrentWaferSeaterStatus { get; set; } public bool IsNormalModeNotServiceMode { get; set; } public int PortLifterSlotPosition { get; set; } public bool IsArmRetract { get; set; } public bool IsAlarm { get; set; } public bool IsDisableEvenSlot { get { if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.DisableEvenSlot")) return SC.GetValue($"CarrierInfo.Carrier{InfoPadCarrierIndex}.DisableEvenSlot"); return false; } } public bool IsDisableOddSlot { get { if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.DisableOddSlot")) return SC.GetValue($"CarrierInfo.Carrier{InfoPadCarrierIndex}.DisableOddSlot"); return false; } } public bool IsConnected { get; set; } // public override bool IsLoad { get; set; } private R_TRIG _trigError = new R_TRIG(); private R_TRIG _trigCommunicationError = new R_TRIG(); private R_TRIG _trigRetryConnect = new R_TRIG(); private DeviceTimer _reConnectdTimer = new DeviceTimer(); private PeriodicJob _thread; protected object _locker = new object(); private bool _enableLog; private string _errorCode = ""; private DeviceTimer _setStatusTimer = new DeviceTimer(); private int SetStatusTime = 800; private DateTime _dtStartAction; private string _scRoot; public WaferSize DefaultWaferSize = WaferSize.WS8; public override WaferSize GetCurrentWaferSize() { return DefaultWaferSize; } public override LoadportCassetteState CassetteState { get { if (IsPodPresent) return LoadportCassetteState.Normal; return LoadportCassetteState.Absent; } } public string Address { get; private set; } public BrooksSmifPort(string module, string name, string scRoot, RobotBaseDevice robot, bool mapbyLp = true,int slotsCount = 25) : base(module, name, robot,null,slotsCount) { Module = module; Name = name; _scRoot = scRoot; string commPort = SC.GetStringValue($"LoadPort.{Name}.PortName"); if (!Enum.TryParse(name, out ModuleName m)) Enum.TryParse(module, out m); //Instantiate the WinSecs objects for the Host wshost = new WinSECS(); //Set the PortType for RS232 communication wshost.PortType = SECS_PORT_TYPE.SECS1_SERIAL; //Properties that apply to all port types wshost.AutoDevice = true; wshost.DefaultDeviceID = 0; wshost.Secs1.IgnoreSytemBytes = false; wshost.MultipleOpen = true; wshost.MonitorEnabled = true; //Properties that apply to all SECS1 port types, which includes RS232 wshost.Secs1.AcceptDupBlock = false; wshost.Secs1.Interleave = true; wshost.Secs1.RetryCount = 10; wshost.Secs1.SecsHost = true; wshost.Secs1.T1 = 1; wshost.Secs1.T2 = 10; wshost.Secs1.T3 = 30; wshost.Secs1.T4 = 45; wshost.Secs1.AutoBaud = false; wshost.Secs1.PortName = commPort; wshost.Secs1.BaudRate = 9600; //Set up the agents that deals with the SECS messages ha = new BrooksSMIFHostAgent(wshost, this); wshost.OpenPort(ha); if (wshost.PortIsOpen) { IsConnected = true; } ConnectionManager.Instance.Subscribe($"{Name}", this); IsMapWaferByLoadPort = mapbyLp; } public void OnErrorArrived(string alarmcode, string alarmdecri, string alarmtext) { if (alarmcode == "5") { if (_ErrorDict.ContainsKey(alarmdecri)) EV.PostWarningLog(Name, $"AlarmID:({alarmdecri}){_ErrorDict[alarmdecri]},AlarmText{alarmtext}"); OnError(); } if (alarmcode == "6") { if (_ErrorDict.ContainsKey(alarmdecri)) EV.PostAlarmLog(Name, $"AlarmID:({alarmdecri}){_ErrorDict[alarmdecri]},AlarmText{alarmtext}"); OnError(); } } public void OnStausArrived(object[] datas) { try { string templog = ""; foreach (var data in datas) templog += data.ToString() + " "; LOG.Write($"{LPModuleName} received data message:{templog}"); IsPioInterlockOn = datas[0].ToString() == "1"; IsPodPresent = datas[1].ToString() == "1"; if (IsPodPresent) { OnCarrierPresent(); OnCarrierPlaced(); } else { OnCarrierNotPresent(); OnCarrierNotPlaced(); } IsOpStatusReady = datas[2].ToString() == "1"; IsHomed = datas[3].ToString() == "1"; LastFunctionDone = (LastFunctionEnum)Convert.ToInt32(datas[4]); CurrentPortStatus = (PortStateEnum)Convert.ToInt32(datas[5]); IsLiftAtOverTravelLimit = datas[6].ToString() == "1"; IsLiftAtUpLimit = datas[7].ToString() == "1"; IsLiftAtStagePosition = datas[8].ToString() == "1"; CurrentWaferSeaterStatus = (WaferSeaterStateEnum)Convert.ToInt32(datas[9]); IsNormalModeNotServiceMode = datas[10].ToString() == "1"; PortLifterSlotPosition = Convert.ToInt32(datas[11]); } catch (Exception ex) { LOG.Write(ex); } } internal void OnEventArrived(string eventID) { EV.PostInfoLog("LoadPort", $"{LPModuleName} received event,CEID:{eventID}"); if (int.TryParse(eventID, out int index)) { BrooksSMIFEventEnum eventname = (BrooksSMIFEventEnum)index; switch (eventname) { case BrooksSMIFEventEnum.AutoMode: IsAutoMode = true; break; case BrooksSMIFEventEnum.ManualMode: IsAutoMode = false; break; case BrooksSMIFEventEnum.PodArrived: IsPodPresent = true; OnCarrierPresent(); OnCarrierPlaced(); _isLoaded = false; break; case BrooksSMIFEventEnum.PodRemoved: IsPodPresent = false; OnCarrierNotPresent(); OnCarrierNotPlaced(); break; case BrooksSMIFEventEnum.ReachStage: DockState = FoupDockState.Docked; _isLoaded = true; DoorState = FoupDoorState.Open; EV.PostInfoLog("LoadPort", $"{LPModuleName} complete load"); break; case BrooksSMIFEventEnum.BeginLoad: EV.PostInfoLog("LoadPort", $"{LPModuleName} start to load"); break; case BrooksSMIFEventEnum.CompleteLoad: DockState = FoupDockState.Docked; _isLoaded = true; DoorState = FoupDoorState.Open; EV.PostInfoLog("LoadPort", $"{LPModuleName} complete load"); break; case BrooksSMIFEventEnum.AbortLoad: OnError("LoadAborted"); break; case BrooksSMIFEventEnum.BeginUnload: EV.PostInfoLog("LoadPort", $"{LPModuleName} start to unload"); break; case BrooksSMIFEventEnum.CompleteUnload: DockState = FoupDockState.Undocked; _isUnloaded = true; DoorState = FoupDoorState.Close; _isLoaded = false; break; case BrooksSMIFEventEnum.AbortUnload: OnError("UnloadAborted"); break; case BrooksSMIFEventEnum.BeginHome: EV.PostInfoLog("LoadPort", $"{LPModuleName} start to home"); break; case BrooksSMIFEventEnum.ReachHome: _isLoaded = false; _isUnloaded = true; DoorState = FoupDoorState.Close; DockState = FoupDockState.Undocked; IsHomed = true; break; case BrooksSMIFEventEnum.AbortHome: OnError("HomeAborted"); break; } } lock (_locker) { SECSTransactionBuilder.BuildS1F5(0).Send(wshost); } } internal void OnTagFileWriteComplete() { IsWriteSmartTagComplete = true; } public void OnTagFileRead(string strTag) { CurrentReadSmartTagFileText = strTag; IsReadSmartTagFileBack = true; } private static Dictionary _ErrorDict = new Dictionary() { {"1","Move to Stage" }, {"2","Return Home" }, {"8","Wafer Map" }, {"32","Port lock or unlock" }, {"34","Move to a specified position" }, {"37","Others" }, {"38","X Move (shuttle failure)" }, }; private static Dictionary _RealyMessageDict = new Dictionary() { {"OK","Comment accepted" }, {"BUSY","Command rejected, LPI is busy" }, {"ALARM","Command rejected, LPI in alarm state" }, {"NO_POD","Command rejected, Pod not on LPI" }, {"NOT_READY","Command rejected, Host interlock not enabled" }, {"INVALID_ARG","Command rejected, at least one invalid parameter" }, {"CANNOT_PERFORM","LPI not in the proper state to perform the Host command" }, {"DENIED","Command rejected for other reason" }, }; private static Dictionary _AlarmTimeCodeDict = new Dictionary() { {"00","No alarm" }, {"41","Alarm occurred during a fetch or open operation" }, {"42","Alarm occurred during a cassette placement on the process tool" }, {"43","Alarm occurred during a returning of the minienvironment to Home" }, {"44","Alarm occurred during a retrieval of the cassette from the Tool" }, {"45","Alarm occurred during a placement of the cassette on the Pod door" }, {"46","Non-recoverable fatal error" } }; private static Dictionary _ErrorCodeDict = new Dictionary() { {"00","No error" }, {"01","Position following error" }, {"02","LPI not Home" }, {"03","LPI busy" }, {"04","Pod removed/missing elevator door" }, {"05","Aborted by user" }, {"07","Protrusion sensor failure" }, {"08","Slot sensor failure" }, {"09","Wafer presence sensor failure" }, {"10","Flash sensor failure" }, {"11","Elevator over-travel limit trip" }, {"13","Excessive wafer protrusion" }, {"14","System internal time-out" }, {"15","Servo command error" }, {"16","Pod door open time-out" }, {"17","Pod door close time-out" }, {"18","Pod hold-down open time-out" }, {"19","Pod hold-down close time-out" }, {"20","Wafer seater failed to move toward wafer" }, {"21","Wafer seater failed to return to Home" }, {"22","Elevator failed to reach target position" }, {"24","System error" }, {"27","Loss of configuration data" }, {"28","Cassette not present" }, {"29","Loss of air flow" }, {"31","Gripper open time out" }, {"32","Gripper close time out" }, {"33","Interprocessor communication error" }, {"34","Gripper overtravel" }, {"35","Cassette found during unload" }, }; internal void OnAlarmArrived(string alarmData) { EV.PostAlarmLog(Name, $"alarmdata：{alarmData}"); if (alarmData.Length != 4) return; string alarmTimeCode = alarmData.Substring(0, 2); string alarmInfoCode = alarmData.Substring(2, 2); AlarmOccurTime = alarmTimeCode + "=" + _AlarmTimeCodeDict[alarmTimeCode]; AlarmInfo = alarmInfoCode + "=" + _ErrorCodeDict[alarmInfoCode]; EV.PostAlarmLog(Module, $"{Module} {AlarmOccurTime}, for {AlarmInfo}"); OnError(); IsAlarm = true; } public override void Reset() { _trigError.RST = true; _trigCommunicationError.RST = true; _trigRetryConnect.RST = true; } protected override bool fStartReset(object[] param) { lock (_locker) { SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.Reset).Send(wshost); SECSTransactionBuilder.BuildS1F5(0).Send(wshost); } return true; } protected override bool fMonitorReset(object[] param) { IsBusy = false; return true; } #region Command Functions protected override bool fStartInit(object[] param) { IsHomed = false; lock (_locker) { SECSTransactionBuilder.BuildS1F5(0).Send(wshost); SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.GoHome).Send(wshost); } _dtStartAction = DateTime.Now; return true; } protected override bool fMonitorInit(object[] param) { IsBusy = false; if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitHome)) { OnError("InitTimeout"); return true; } return IsHomed; } protected override bool fStartLoad(object[] objs) { ResetRoutine(); return true; } protected override bool fMonitorLoad(object[] param) { IsBusy = false; LoadCassette((int)LpStepEnum.Step1, TimelimitAction, OnError); if (ExecuteResult.Item1) { return false; } if (IsMapWaferByLoadPort) { QueryMap((int)LpStepEnum.Step2, TimelimitAction, OnError); if (ExecuteResult.Item1) { return false; } } IsBusy = false; return true; } protected override bool fStartExecute(object[] param) { try { IsActionComplete = false; switch (param[0].ToString()) { case "Unclamp": lock (_locker) { SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.HostToUnlockPort).Send(wshost); } break; case "Clamp": lock (_locker) { SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.HostToLockPort).Send(wshost); } break; case "MapWafer": lock (_locker) { if (!IsMapWaferByLoadPort) { if (MapRobot != null) return MapRobot.WaferMapping(LPModuleName, out _); return false; } } break; } _dtStartAction = DateTime.Now; return true; } catch (Exception ex) { LOG.Write(ex); EV.PostAlarmLog(Name, $"Parameter invalid"); return false; } } protected override bool fMonitorExecuting(object[] param) { IsBusy = false; if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitHome)) { OnError("InitTimeout"); return true; } switch (CurrentParamter[0].ToString()) { case "Unclamp": return CurrentPortStatus == PortStateEnum.Unlock; case "Clamp": return CurrentPortStatus == PortStateEnum.Lock; case "MapWafer": break; default: return true; } return false; } public override bool Stop(out string reason) { lock (_locker) { SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.EmergencyStop).Send(wshost); } return base.Stop(out reason); } public bool QueryMapStatus(out string reason) { //IsBusy = true; reason = string.Empty; lock (_locker) { SECSTransactionBuilder.BuildS1F5(2).Send(wshost); } if (!_setStatusTimer.IsIdle()) _setStatusTimer.Stop(); _setStatusTimer.Start(0); return true; } public bool QueryPortStatus(out string reason) { reason = string.Empty; lock (_locker) { SECSTransactionBuilder.BuildS1F5(0).Send(wshost); } //IsIdle = false; if (!_setStatusTimer.IsIdle()) _setStatusTimer.Stop(); _setStatusTimer.Start(0); return true; } protected override bool fStartUnload(object[] param) { lock (_locker) { _isUnloaded = false; //SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.EnableUnload).Send(wshost); //Thread.Sleep(500); SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.GoHome).Send(wshost); } _isUnloaded = false; _dtStartAction = DateTime.Now; return true; } protected override bool fMonitorUnload(object[] param) { IsBusy = false; if (DateTime.Now - _dtStartAction > TimeSpan.FromSeconds(TimelimitAction)) { OnError("UnloadTimeout"); EV.Notify(AlarmLoadPortUnloadTimeOut); return true; } if (_isUnloaded) { OnUnloaded(); return true; } return false; } public void OnCarrierNotPlaced() { _isPlaced = false; ConfirmRemoveCarrier(); } public void OnCarrierNotPresent() { _isPresent = false; //ConfirmRemoveCarrier(); } public void OnCarrierPlaced() { _isPlaced = true; ConfirmAddCarrier(); } public void OnCarrierPresent() { _isPresent = true; //ConfirmAddCarrier(); } public override void OnSlotMapRead(string slotMap) { MapError = false; CurrentSlotMapResult = slotMap; for (int i = 0; i < slotMap.Length; i++) { // No wafer: "0", Wafer: "1", Crossed:"2", Undefined: "?", Overlapping wafers: "W" WaferInfo wafer = null; if (i >= SlotsCount) continue; if (IsMapWaferByLoadPort) { CurrentSlotMapResult = slotMap.Replace("0", "?").Replace("1", "0").Replace("2", "1"); switch (slotMap[i]) { case '2': WaferManager.Instance.DeleteWafer(LPModuleName, i); CarrierManager.Instance.UnregisterCarrierWafer(Name, i); break; case '1': wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Normal, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); break; case '4': wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Crossed, GetCurrentWaferSize()); WaferManager.Instance.CheckWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); OnError($"MappingError:Slot:{i + 1} crossedwafer"); //NotifyWaferError(Name, i, WaferStatus.Crossed); break; default: wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Unknown, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); //NotifyWaferError(Name, i, WaferStatus.Unknown); OnError($"MappingError:Slot:{i + 1} unknowwafer"); break; } } else { switch (slotMap[i]) { case '0': WaferManager.Instance.DeleteWafer(LPModuleName, i); CarrierManager.Instance.UnregisterCarrierWafer(Name, i); break; case '1': if ((IsDisableEvenSlot && i % 2 == 1) || (IsDisableOddSlot && i % 2 == 0)) { OnMapError($"Slot{i + 1}WaferOn"); wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Unknown, GetCurrentWaferSize()); } else wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Normal, GetCurrentWaferSize()); WaferManager.Instance.CheckWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); break; case '?': if ((IsDisableEvenSlot && i % 2 == 1) || (IsDisableOddSlot && i % 2 == 0)) { OnMapError($"Slot{i + 1}WaferOn"); } wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Crossed, GetCurrentWaferSize()); WaferManager.Instance.CheckWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); OnMapError($"MappingError:Slot:{i + 1} crossedwafer"); //NotifyWaferError(Name, i, WaferStatus.Crossed); break; case 'W': if ((IsDisableEvenSlot && i % 2 == 1) || (IsDisableOddSlot && i % 2 == 0)) { OnMapError($"Slot{i + 1}WaferOn"); } wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Double, GetCurrentWaferSize()); WaferManager.Instance.CheckWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); OnMapError($"MappingError:Slot:{i + 1} doublewafer"); //NotifyWaferError(Name, i, WaferStatus.Double); break; default: if ((IsDisableEvenSlot && i % 2 == 1) || (IsDisableOddSlot && i % 2 == 0)) { OnMapError($"Slot{i + 1}WaferOn"); } wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Unknown, GetCurrentWaferSize()); WaferManager.Instance.CheckWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); OnMapError($"MappingError:Slot:{i + 1} unknowwafer"); //NotifyWaferError(Name, i, WaferStatus.Unknown); break; } } } if (CurrentSlotMapResult.Contains("2")) { MapError = true; EV.Notify(AlarmLoadPortMapCrossedWafer); EV.Notify(AlarmLoadPortMappingError); } if (CurrentSlotMapResult.Contains("4")) { MapError = true; EV.Notify(AlarmLoadPortMapCrossedWafer); EV.Notify(AlarmLoadPortMappingError); } if (CurrentSlotMapResult.Contains("W")) { MapError = true; EV.Notify(AlarmLoadPortMapDoubleWafer); EV.Notify(AlarmLoadPortMappingError); } if (CurrentSlotMapResult.Contains("?")) { MapError = true; EV.Notify(AlarmLoadPortMapUnknownWafer); EV.Notify(AlarmLoadPortMappingError); } if (MapError) { Unload(out _); } SerializableDictionary dvid = new SerializableDictionary(); dvid["SlotMap"] = CurrentSlotMapResult; dvid["PortID"] = PortID; dvid["PORT_CTGRY"] = SpecPortName; dvid["CarrierType"] = SpecCarrierType; dvid["CarrierIndex"] = InfoPadCarrierIndex; dvid["InfoPadSensorIndex"] = InfoPadSensorIndex; dvid["CarrierID"] = CarrierId; EV.Notify(EventSlotMapAvailable, dvid); EV.Notify(EventMapComplete, dvid); if (LPCallBack != null) LPCallBack.MappingComplete(_carrierId, CurrentSlotMapResult); _isMapped = true; } private void OnMapError(string errText) { EV.Notify(AlarmLoadPortError); EV.PostAlarmLog("LoadPort", $"{LPModuleName} occurried error:{errText} with carrier:{CarrierId ?? ""}."); } #endregion #region Properties public string AlarmOccurTime { get; private set; } public string AlarmInfo { get; private set; } #endregion public override void Terminate() { } public override void Monitor() { if (!IsConnected && ha != null && (_reConnectdTimer.IsIdle() || _reConnectdTimer.GetElapseTime() > 10000)) { wshost.ClosePort(); wshost.OpenPort(ha); _reConnectdTimer.Start(0); } if (IsConnected) { _reConnectdTimer.Stop(); } if (!IsPlacement) { _isLoaded = false; } } public override bool IsEnableMapWafer(out string reason) { reason = ""; if (!_isLoaded) { reason = "Not loaded"; return false; } if (!IsReady()) { reason = "Not Ready"; return false; } if (_isPresent && _isPlaced && CassetteState == LoadportCassetteState.Normal) return true; reason = "No cassette"; return false; } public override bool IsEnableTransferWafer(out string reason) { reason = ""; if (!IsReady()) { reason = "Not ready"; return false; } if (!_isLoaded) { reason = "Not loaded"; return false; } if (!_isMapped) { reason = "Not Mapped"; return false; } if (CurrentSlotMapResult.Contains("2")) { reason = "Cross wafer"; return false; } if (CurrentSlotMapResult.Contains("3")) { reason = "Double wafer"; return false; } if (CurrentSlotMapResult.Contains("4")) { reason = "Double wafer"; return false; } if (_isPresent && _isPlaced && CassetteState == LoadportCassetteState.Normal) return true; reason = "No cassette"; return false; } public override bool IsEnableUnload(out string reason) { reason = ""; return true; } public override bool IsEnableLoad(out string reason) { reason = ""; return true; } public override bool Connect() { return true; } public bool Disconnect() { return true; } protected override bool fStartWrite(object[] param) { return true; } protected override bool fStartRead(object[] param) { return true; } public override bool ReadCarrierID() { return ReadCarrierIDByIndex(0, 16); } public override bool ReadCarrierIDByIndex(int offset = 0, int length = 16, int index = 0) { if (CIDReaders != null && CIDReaders.Length > 0 && CIDReaders[0] != null) { return base.ReadCarrierIDByIndex(offset, length, index); } ReadSmifSmartTag(); return true; } public virtual void ReadSmifSmartTag() { SECSTransaction secsTransaction = new SECSTransaction(100, 121); secsTransaction.Primary.Root.Name = "S100F121"; secsTransaction.Primary.Root.AddNew("L2a", ""); secsTransaction.Primary.Root.Item("L2a").Format = SECS_FORMAT.U4; secsTransaction.Primary.Root.Item("L2a").Value = 7; //secsTransaction.Primary.Root.Item("L2a").Format = SECS_FORMAT.LIST; //secsTransaction.Primary.Root.Item("L2a").AddNew("Param1", ""); //secsTransaction.Primary.Root.Item("L2a").Item("Param1").Format = SECS_FORMAT.U4; //secsTransaction.Primary.Root.Item("L2a").Item("Param1").Value = 7; secsTransaction.ReplyExpected = true; secsTransaction.Send(wshost); } public override bool GetCarrierID(int offset, int length, string tagid, out string carrierId) { carrierId = ""; ReadSmifSmartTagFile(tagid); int waitCount = 0; while (!IsReadSmartTagFileBack) { Thread.Sleep(100); waitCount++; if (waitCount > 200) { return false; } } carrierId = CurrentReadSmartTagFileText; return true; } public bool IsReadSmartTagFileBack; public bool IsWriteSmartTagComplete; public string CurrentReadSmartTagFileText; public virtual void ReadSmifSmartTagFile(string file) { SECSTransaction secsTransaction = new SECSTransaction(100, 109); secsTransaction.Primary.Root.Name = "S100F109"; secsTransaction.Primary.Root.AddNew("L2a", ""); secsTransaction.Primary.Root.Item("L2a").Format = SECS_FORMAT.LIST; secsTransaction.Primary.Root.Item("L2a").AddNew("FileIndex"); secsTransaction.Primary.Root.Item("L2a").Item("FileIndex").Format = SECS_FORMAT.U4; secsTransaction.Primary.Root.Item("L2a").Item("FileIndex").Value = 0; secsTransaction.Primary.Root.Item("L2a").AddNew("FileName"); secsTransaction.Primary.Root.Item("L2a").Item("FileName").Format = SECS_FORMAT.ASCII; secsTransaction.Primary.Root.Item("L2a").Item("FileName").Value = file; secsTransaction.ReplyExpected = true; IsReadSmartTagFileBack = false; secsTransaction.Send(wshost); } public override bool WriteCarrierID(string cid, int offset, int length, string tagid, out string reason) { reason = ""; WriteTagfile(tagid, cid); int waitCount = 0; while (true) { if (IsWriteSmartTagComplete) return true; Thread.Sleep(100); waitCount++; if (waitCount > 150) break; } reason = "TimeOut"; return false; } public void WriteTagfile(string filename, string tag) { SECSTransaction secsTransaction = new SECSTransaction(100, 107); secsTransaction.Primary.Root.Name = "S100F107"; secsTransaction.Primary.Root.AddNew("L2a", ""); secsTransaction.Primary.Root.Item("L2a").Format = SECS_FORMAT.LIST; secsTransaction.Primary.Root.Item("L2a").AddNew("FileIndex"); secsTransaction.Primary.Root.Item("L2a").Item("FileIndex").Format = SECS_FORMAT.U4; secsTransaction.Primary.Root.Item("L2a").Item("FileIndex").Value = 0; secsTransaction.Primary.Root.Item("L2a").AddNew("FileIndex1"); secsTransaction.Primary.Root.Item("L2a").Item("FileIndex1").Format = SECS_FORMAT.U1; secsTransaction.Primary.Root.Item("L2a").Item("FileIndex1").Value = 1; secsTransaction.Primary.Root.Item("L2a").AddNew("FileName"); secsTransaction.Primary.Root.Item("L2a").Item("FileName").Format = SECS_FORMAT.ASCII; secsTransaction.Primary.Root.Item("L2a").Item("FileName").Value = filename; secsTransaction.Primary.Root.Item("L2a").AddNew("Parameter1"); secsTransaction.Primary.Root.Item("L2a").Item("Parameter1").Format = SECS_FORMAT.ASCII; secsTransaction.Primary.Root.Item("L2a").Item("Parameter1").Value = ""; secsTransaction.Primary.Root.Item("L2a").AddNew("Tagcontent"); secsTransaction.Primary.Root.Item("L2a").Item("Tagcontent").Format = SECS_FORMAT.ASCII; secsTransaction.Primary.Root.Item("L2a").Item("Tagcontent").Value = tag; secsTransaction.ReplyExpected = true; IsWriteSmartTagComplete = false; secsTransaction.Send(wshost); } public void LoadCassette(int id, int time, Action error) { var ret = ExecuteAndWait(id, () => { EV.PostInfoLog("System", $"{MapRobot.RobotModuleName} start loading"); var reason = string.Empty; lock (_locker) { SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.EnableLoad).Send(wshost); Thread.Sleep(500); SECSTransactionBuilder.BuildS2F41((int)BrooksSMIFRCMDEnum.GotoStagePosition).Send(wshost); SECSTransactionBuilder.BuildS1F5(0).Send(wshost); } _isLoaded = false; _isMapped = false; return true; }, () => { if (_isLoaded) return Result.DONE; return Result.RUN; }, time * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { error("load failed"); EV.Notify(AlarmLoadPortLoadTimeOut); } if (ret.Item2 == Result.TIMEOUT) //timeout { error("load timeout"); EV.Notify(AlarmLoadPortLoadTimeOut); } } } protected void QueryMap(int id, int time, Action error) { var ret = ExecuteAndWait(id, () => { EV.PostInfoLog("System", $"{MapRobot.RobotModuleName} start to query map"); var reason = string.Empty; _isMapped = false; lock (_locker) { SECSTransactionBuilder.BuildS1F5(2).Send(wshost); } return true; }, () => { if (_isMapped) return Result.DONE; return Result.RUN; }, time * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) error("map failed"); if (ret.Item2 == Result.TIMEOUT) //timeout { error("map timeout"); } } } protected void SetDoValue(int id, IoTrigger dotrig, bool bValue) { var ret = Execute(id, () => { EV.PostInfoLog("LoadPort", $"{LPModuleName} start to set {dotrig.Name} start to {bValue}"); dotrig.SetTrigger(bValue, out _); return true; }); } public void WaitDiValue(int id, int time, IoSensor disensor, bool bvalue, Action error) { var ret = ExecuteAndWait(id, () => { EV.PostInfoLog("System", $"Wait {disensor.Name} to be {bvalue}"); return true; }, () => { if (disensor.Value == bvalue) return Result.DONE; return Result.RUN; }, time * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { error($"Wait {disensor.Name} to be {bvalue} failed"); } if (ret.Item2 == Result.TIMEOUT) //timeout { error($"Wait {disensor.Name} to be {bvalue} timeout"); } } } public enum LpStepEnum { Step1, Step2, Step3, Step4, Step5, Step6, Step7, Step8, Step9, Step10, Step11, Step12, } protected DeviceTimer counter = new DeviceTimer(); protected DeviceTimer delayTimer = new DeviceTimer(); private enum STATE { IDLE, WAIT, } public int TokenId { get { return _id; } } private int _id; //step index private int _currentTokenId = -1; /// /// already done steps /// private Stack _steps = new Stack(); private STATE state; //step state //idel,wait, //loop control private int loop = 0; private int loopCount = 0; private int loopID = 0; private DeviceTimer timer = new DeviceTimer(); public int LoopCounter { get { return loop; } } public int LoopTotalTime { get { return loopCount; } } // public int Timeout { get { return (int)(timer.GetTotalTime() / 1000); } } //状态持续时间，单位为秒 public int Elapsed { get { return (int)(timer.GetElapseTime() / 1000); } } protected RoutineResult RoutineToken = new RoutineResult() { Result = RoutineState.Running }; protected Tuple ExecuteResult; public void ResetRoutine() { _id = 0; _steps.Clear(); loop = 0; loopCount = 0; state = STATE.IDLE; counter.Start(60 * 60 * 100); //默认1小时 RoutineToken.Result = RoutineState.Running; _currentTokenId = -1; ExecuteResult = Tuple.Create(false, Result.DONE); } protected void PerformRoutineStep(int id, Func execution, RoutineResult result) { if (!Acitve(id)) return; result.Result = execution(); } #region interface public void StopLoop() { loop = loopCount; } public Tuple Loop(T id, Func func, int count) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { if (!func()) { return Tuple.Create(bActive, Result.FAIL); //执行错误 } loopID = idx; loopCount = count; next(); return Tuple.Create(true, Result.RUN); } return Tuple.Create(false, Result.RUN); } public Tuple EndLoop(T id, Func func) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { if (++loop >= loopCount) //Loop 结束 { if (!func()) { return Tuple.Create(bActive, Result.FAIL); //执行错误 } loop = 0; loopCount = 0; // Loop 结束时，当前loop和loop总数都清零 next(); return Tuple.Create(true, Result.RUN); } //继续下一LOOP next(loopID); return Tuple.Create(true, Result.RUN); } return Tuple.Create(false, Result.RUN); } public Tuple ExecuteAndWait(T id, IRoutine routine) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { if (state == STATE.IDLE) { Result startRet = routine.Start(); if (startRet == Result.FAIL) { return Tuple.Create(true, Result.FAIL); //执行错误 } else if (startRet == Result.DONE) { next(); return Tuple.Create(true, Result.DONE); } state = STATE.WAIT; } Result ret = routine.Monitor(); if (ret == Result.DONE) { next(); return Tuple.Create(true, Result.DONE); } else if (ret == Result.FAIL || ret == Result.TIMEOUT) { return Tuple.Create(true, Result.FAIL); } else { return Tuple.Create(true, Result.RUN); } } return Tuple.Create(false, Result.RUN); } public Tuple ExecuteAndWait(T id, List routines) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { if (state == STATE.IDLE) { foreach (var item in routines) { if (item.Start() == Result.FAIL) return Tuple.Create(true, Result.FAIL); } state = STATE.WAIT; } //wait all sub failed or completedboo bool bFail = false; bool bDone = true; foreach (var item in routines) { Result ret = item.Monitor(); bDone &= (ret == Result.FAIL || ret == Result.DONE); bFail |= ret == Result.FAIL; } if (bDone) { next(); if (bFail) return Tuple.Create(true, Result.FAIL); return Tuple.Create(true, Result.DONE); } return Tuple.Create(true, Result.RUN); } return Tuple.Create(false, Result.RUN); } public Tuple Check(T id, Func func) //顺序执行 { return Check(Check(Convert.ToInt32(id), func)); } public Tuple Execute(T id, Func func) //顺序执行 { return Check(execute(Convert.ToInt32(id), func)); } public Tuple Wait(T id, Func func, double timeout = int.MaxValue) //Wait condition { return Check(wait(Convert.ToInt32(id), func, timeout)); } public Tuple Wait(T id, Func func, double timeout = int.MaxValue) //Wait condition { return Check(wait(Convert.ToInt32(id), func, timeout)); } public Tuple ExecuteAndWait(T id, Func execute, Func check, double timeout = int.MaxValue) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); Result? bExecute = Result.RUN; if (bActive) { //if (idx != _currentTokenId && ExecuteResult.Item1) return ExecuteResult; if (state == STATE.IDLE) { if (!execute()) { ExecuteResult = Tuple.Create(bActive, Result.FAIL); return Tuple.Create(bActive, Result.FAIL); //执行错误 } timer.Start(timeout); state = STATE.WAIT; _currentTokenId = idx; } bExecute = check(); if (bExecute == null) { ExecuteResult = Tuple.Create(bActive, Result.FAIL); return Tuple.Create(bActive, Result.FAIL); //Termianate } else { if (bExecute == Result.DONE) //检查Success, next { next(); ExecuteResult = Tuple.Create(true, Result.RUN); return Tuple.Create(true, Result.RUN); } if (bExecute == Result.Succeed) //检查Success, next { next(); ExecuteResult = Tuple.Create(true, Result.RUN); return Tuple.Create(true, Result.RUN); } if (bExecute == Result.FAIL) //检查 Fail 直接返回Fail { ExecuteResult = Tuple.Create(true, Result.FAIL); return Tuple.Create(true, Result.FAIL); } } if (timer.IsTimeout()) { ExecuteResult = Tuple.Create(true, Result.TIMEOUT); return Tuple.Create(true, Result.TIMEOUT); } ExecuteResult = Tuple.Create(true, Result.RUN); return Tuple.Create(true, Result.RUN); } ExecuteResult = Tuple.Create(false, Result.RUN); return Tuple.Create(false, Result.RUN); } public Tuple Wait(T id, IRoutine rt) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { if (state == STATE.IDLE) { rt.Start(); state = STATE.WAIT; } Result ret = rt.Monitor(); return Tuple.Create(true, ret); } return Tuple.Create(false, Result.RUN); } //Monitor public Tuple Monitor(T id, Func func, Func check, double time) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); bool bCheck = false; if (bActive) { if (state == STATE.IDLE) { if ((func != null) && !func()) { return Tuple.Create(true, Result.FAIL); } timer.Start(time); state = STATE.WAIT; } bCheck = check(); if (!bCheck) { return Tuple.Create(true, Result.FAIL); //Termianate } if (timer.IsTimeout()) { next(); } return Tuple.Create(true, Result.RUN); } return Tuple.Create(false, Result.RUN); } //Delay public Tuple Delay(T id, Func func, double time) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { //if (_currentTokenId != idx && !ExecuteResult.Item1) return ExecuteResult; if (state == STATE.IDLE) { if ((func != null) && !func()) { ExecuteResult = Tuple.Create(true, Result.FAIL); return Tuple.Create(true, Result.FAIL); } _currentTokenId = idx; timer.Start(time); state = STATE.WAIT; } if (timer.IsTimeout()) { next(); } ExecuteResult = Tuple.Create(true, Result.RUN); return Tuple.Create(true, Result.RUN); } ExecuteResult = Tuple.Create(false, Result.RUN); return Tuple.Create(false, Result.RUN); } //先delay 再运行 public Tuple DelayCheck(T id, Func func, double time) { int idx = Convert.ToInt32(id); bool bActive = Acitve(idx); if (bActive) { if (state == STATE.IDLE) { timer.Start(time); state = STATE.WAIT; } if (timer.IsTimeout()) { if (func != null && !func()) { return Tuple.Create(true, Result.FAIL); } next(); } return Tuple.Create(true, Result.RUN); } return Tuple.Create(false, Result.RUN); } #endregion private Tuple execute(int id, Func func) //顺序执行 { bool bActive = Acitve(id); bool bExecute = false; if (bActive) { //if (ExecuteResult.Item1) return Tuple.Create(true, true); bExecute = func(); if (bExecute) { next(); } } return Tuple.Create(bActive, bExecute); } private Tuple Check(int id, Func func) //check { bool bActive = Acitve(id); bool bExecute = false; if (bActive) { if (ExecuteResult.Item1) return Tuple.Create(true, true); bExecute = func(); next(); } return Tuple.Create(bActive, bExecute); } /// /// /// /// /// /// /// item1 Active /// item2 execute /// item3 Timeout /// private Tuple wait(int id, Func func, double timeout = int.MaxValue) //Wait condition { bool bActive = Acitve(id); bool bExecute = false; bool bTimeout = false; if (bActive) { if (state == STATE.IDLE) { timer.Start(timeout); state = STATE.WAIT; } bExecute = func(); if (bExecute) { next(); } bTimeout = timer.IsTimeout(); } return Tuple.Create(bActive, bExecute, bTimeout); } private Tuple wait(int id, Func func, double timeout = int.MaxValue) //Wait condition && Check error { bool bActive = Acitve(id); bool? bExecute = false; bool bTimeout = false; if (bActive) { if (state == STATE.IDLE) { timer.Start(timeout); state = STATE.WAIT; } bExecute = func(); if (bExecute.HasValue && bExecute.Value) { next(); } bTimeout = timer.IsTimeout(); } return Tuple.Create(bActive, bExecute, bTimeout); } /// /// /// /// /// item1 true, return item2 /// private Tuple Check(Tuple value) { if (value.Item1) { if (!value.Item2) { ExecuteResult = Tuple.Create(true, Result.FAIL); return Tuple.Create(true, Result.FAIL); } ExecuteResult = Tuple.Create(true, Result.RUN); return Tuple.Create(true, Result.RUN); } ExecuteResult = Tuple.Create(false, Result.RUN); return Tuple.Create(false, Result.RUN); } private Tuple Check(Tuple value) { if (value.Item1) // 当前执行 { if (CheckTimeout(value)) //timeout { return Tuple.Create(true, Result.TIMEOUT); } return Tuple.Create(true, Result.RUN); } return Tuple.Create(false, Result.RUN); } private Tuple Check(Tuple value) { if (value.Item1) // 当前执行 { if (value.Item2 == null) { return Tuple.Create(true, Result.FAIL); } else { if (value.Item2 == false && value.Item3 == true) //timeout { return Tuple.Create(true, Result.TIMEOUT); } return Tuple.Create(true, Result.RUN); } } return Tuple.Create(false, Result.RUN); } private bool CheckTimeout(Tuple value) { return value.Item1 == true && value.Item2 == false && value.Item3 == true; } private bool Acitve(int id) // { if (_steps.Contains(id)) return false; this._id = id; return true; } private void next() { _steps.Push(this._id); state = STATE.IDLE; } private void next(int step) //loop { while (_steps.Pop() != step) ; state = STATE.IDLE; } public void Delay(int id, double delaySeconds) { Tuple ret = Delay(id, () => { return true; }, delaySeconds * 1000); if (ret.Item1) { if (ret.Item2 == Result.RUN) { } } } public bool IsActived(int id) { return _steps.Contains(id); } } public enum LastFunctionEnum { PowerUp, OpenOrReachStage, CloseOrAutoHome, Map = 8, HomingCalibration = 16, MoveCommand = 34, } public enum PortStateEnum { Unlock, Lock, Other, } public enum WaferSeaterStateEnum { SeaterAtHome, SeaterOut, None, } }