using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.Communications; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.CarrierIdReaders.CarrierIDReaderBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; using System; using System.Collections.Generic; using System.Diagnostics; using System.IO.Ports; using System.Linq; using System.Text; using System.Threading; using System.Threading.Tasks; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.SG { public class SELP8LoadPort : LoadPortBaseDevice, IConnection { public SELP8LoadPort(string module, string name, string scRoot, IoTrigger[] dos = null, IoSensor[] dis = null, RobotBaseDevice robot = null, bool IsTCPconnection = false, IE84CallBack e84 =null) : base(module, name, robot,e84) { _scRoot = scRoot; _isTcpConnection = IsTCPconnection; LoadPortType = "SELP8LoadPort"; if (dos != null && dos.Length >= 1) { _doLoadPortOK = dos[0]; } if (dis != null && dis.Length >= 1) { _diInfoPadA = dis[0]; _diInfoPadA.OnSignalChanged += _diInfoPad_OnSignalChanged; } if (dis != null && dis.Length >= 2) { _diInfoPadB = dis[1]; _diInfoPadB.OnSignalChanged += _diInfoPad_OnSignalChanged; } if (dis != null && dis.Length >= 3) { _diInfoPadC = dis[2]; _diInfoPadC.OnSignalChanged += _diInfoPad_OnSignalChanged; } if (dis != null && dis.Length >= 4) { _diInfoPadD = dis[3]; _diInfoPadB.OnSignalChanged += _diInfoPad_OnSignalChanged; } InitializeLP(); SubscribeLPData(); //SubscribeLPAlarm(); } protected Stopwatch _timerActionMonitor = new Stopwatch(); private void SubscribeLPData() { if (Module != "") { DATA.Subscribe($"{Module}.{Name}.SystemStatus", () => SystemStatus.ToString()); DATA.Subscribe($"{Module}.{Name}.Mode", () => Mode.ToString()); DATA.Subscribe($"{Module}.{Name}.InitPosMovement", () => InitPosMovement.ToString()); DATA.Subscribe($"{Module}.{Name}.OperationStatus", () => OperationStatus.ToString()); DATA.Subscribe($"{Module}.{Name}.ErrorCode", () => ErrorCode.ToString()); DATA.Subscribe($"{Module}.{Name}.ContainerStatus", () => ContainerStatus.ToString()); DATA.Subscribe($"{Module}.{Name}.ClampPosition", () => ClampPosition.ToString()); DATA.Subscribe($"{Module}.{Name}.LPDoorLatchPosition", () => LPDoorLatchPosition.ToString()); DATA.Subscribe($"{Module}.{Name}.VacuumStatus", () => VacuumStatus.ToString()); DATA.Subscribe($"{Module}.{Name}.LPDoorState", () => LPDoorState.ToString()); DATA.Subscribe($"{Module}.{Name}.WaferProtrusion", () => WaferProtrusion.ToString()); DATA.Subscribe($"{Module}.{Name}.ElevatorAxisPosition", () => ElevatorAxisPosition.ToString()); DATA.Subscribe($"{Module}.{Name}.MapperPostion", () => MapperPostion.ToString()); DATA.Subscribe($"{Module}.{Name}.MappingStatus", () => MappingStatus.ToString()); DATA.Subscribe($"{Module}.{Name}.Model", () => Model.ToString()); DATA.Subscribe($"{Module}.{Name}.IsFosbModeActual", () => IsFosbModeActual.ToString()); DATA.Subscribe($"{Module}.{Name}.DockPosition", () => DockPosition.ToString()); } else { DATA.Subscribe($"{Name}.SystemStatus", () => SystemStatus.ToString()); DATA.Subscribe($"{Name}.Mode", () => Mode.ToString()); DATA.Subscribe($"{Name}.InitPosMovement", () => InitPosMovement.ToString()); DATA.Subscribe($"{Name}.OperationStatus", () => OperationStatus.ToString()); DATA.Subscribe($"{Name}.ErrorCode", () => ErrorCode.ToString()); DATA.Subscribe($"{Name}.ContainerStatus", () => ContainerStatus.ToString()); DATA.Subscribe($"{Name}.ClampPosition", () => ClampPosition.ToString()); DATA.Subscribe($"{Name}.LPDoorLatchPosition", () => LPDoorLatchPosition.ToString()); DATA.Subscribe($"{Name}.VacuumStatus", () => VacuumStatus.ToString()); DATA.Subscribe($"{Name}.LPDoorState", () => LPDoorState.ToString()); DATA.Subscribe($"{Name}.WaferProtrusion", () => WaferProtrusion.ToString()); DATA.Subscribe($"{Name}.ElevatorAxisPosition", () => ElevatorAxisPosition.ToString()); DATA.Subscribe($"{Name}.MapperPostion", () => MapperPostion.ToString()); DATA.Subscribe($"{Name}.MappingStatus", () => MappingStatus.ToString()); DATA.Subscribe($"{Name}.Model", () => Model.ToString()); DATA.Subscribe($"{Name}.IsFosbModeActual", () => IsFosbModeActual.ToString()); DATA.Subscribe($"{Name}.DockPosition", () => DockPosition.ToString()); } } public void OnInputSignaChange(string evtcontent) { string data = evtcontent.Split('/').LastOrDefault().Replace("\r", "").Replace(";", ""); int value11 = Convert.ToInt32(data.Substring(0, 1), 16); int value7 = Convert.ToInt32(data.Substring(4, 1), 16); InfoPadSensorIndex = ((value11 & 0x1) == 0x1 ? 8 : 0) + ((value11 & 0x2) == 0x2 ? 4 : 0) + ((value7 & 0x2) == 0x2 ? 2 : 0) + ((value7 & 0x4) == 0x4 ? 1 : 0); } private void SubscribeLPAlarm() { EV.Subscribe(new EventItem("Alarm", AlarmTdkZLMIT, $"Load Port {Name} Z-axis position: NG", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkYLMIT, $"Load Port {Name} Y-axis position: NG", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkPROTS, $"Load Port {Name} Wafer protrusion", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkDLMIT, $"Load Port {Name} Door forward/backward position: NG", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkMPBAR, $"Load Port {Name} Mapper arm position: NG", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkMPSTP, $"Load Port {Name} Mapper stopper position: NG", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkMPEDL, $"Load Port {Name} Mapping end position: NG", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkCLOPS, $"Load Port {Name} FOUP clamp open error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkCLCLS, $"Load Port {Name} FOUP clamp close error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkDROPS, $"Load Port {Name} Latch key open error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkDRCLS, $"Load Port {Name} Latch key close error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkVACCS, $"Load Port {Name} Vacuum on error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkVACOS, $"Load Port {Name} Vacuum off error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkAIRSN, $"Load Port {Name} Main air error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkINTOP, $"Load Port {Name} Normal position error at FOUP open", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkINTCL, $"Load Port {Name} Normal position error at FOUP close", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkINTMP, $"Load Port {Name} Mapper storage error when Z-axis lowered", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkINTPI, $"Load Port {Name} Parallel signal error from upper machine", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkSAFTY, $"Load Port {Name} Interlock relay failure", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkFANST, $"Load Port {Name} Fan operation error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkMPDOG, $"Load Port {Name} Mapping mechanical(Adjustment) error", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkDRDKE, $"Load Port {Name} Door detection error during dock.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkDRSWE, $"Load Port {Name} Door detection error except dock", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", AlarmTdkNoOperation, $"Load Port {Name} No action when foup is present", EventLevel.Alarm, EventType.EventUI_Notify)); } private string AlarmTdkZLMIT { get => LPModuleName.ToString() + "ZLMIT"; } private string AlarmTdkYLMIT { get => LPModuleName.ToString() + "YLMIT"; } private string AlarmTdkPROTS { get => LPModuleName.ToString() + "PROTS"; } private string AlarmTdkDLMIT { get => LPModuleName.ToString() + "DLMIT"; } private string AlarmTdkMPBAR { get => LPModuleName.ToString() + "MPBAR"; } private string AlarmTdkMPSTP { get => LPModuleName.ToString() + "MPSTP"; } private string AlarmTdkMPEDL { get => LPModuleName.ToString() + "MPEDL"; } private string AlarmTdkCLOPS { get => LPModuleName.ToString() + "CLOPS"; } private string AlarmTdkCLCLS { get => LPModuleName.ToString() + "CLCLS"; } private string AlarmTdkDROPS { get => LPModuleName.ToString() + "DROPS"; } private string AlarmTdkDRCLS { get => LPModuleName.ToString() + "DRCLS"; } private string AlarmTdkVACCS { get => LPModuleName.ToString() + "VACCS"; } private string AlarmTdkVACOS { get => LPModuleName.ToString() + "VACOS"; } private string AlarmTdkAIRSN { get => LPModuleName.ToString() + "AIRSN"; } private string AlarmTdkINTOP { get => LPModuleName.ToString() + "INTOP"; } private string AlarmTdkINTCL { get => LPModuleName.ToString() + "INTCL"; } private string AlarmTdkINTMP { get => LPModuleName.ToString() + "INTMP"; } private string AlarmTdkINTPI { get => LPModuleName.ToString() + "INTPI"; } private string AlarmTdkSAFTY { get => LPModuleName.ToString() + "SAFTY"; } private string AlarmTdkFANST { get => LPModuleName.ToString() + "FANST"; } private string AlarmTdkMPDOG { get => LPModuleName.ToString() + "MPDOG"; } private string AlarmTdkDRDKE { get => LPModuleName.ToString() + "DRDKE"; } private string AlarmTdkDRSWE { get => LPModuleName.ToString() + "DRSWE"; } private string AlarmTdkNoOperation { get => LPModuleName.ToString() + "NoOperation"; } private void _diInfoPad_OnSignalChanged(IoSensor arg1, bool arg2) { //if (_infoPadType == 1) // InfoPadCarrierIndex = (_diInfoPadA == null || !_diInfoPadA.Value ? 0 : 1) + // (_diInfoPadB == null || !_diInfoPadB.Value ? 0 : 2) + // (_diInfoPadC == null || !_diInfoPadC.Value ? 0 : 4) + // (_diInfoPadD == null || !_diInfoPadD.Value ? 0 : 8); } public override int InfoPadCarrierIndex { get { return base.InfoPadCarrierIndex; } set { if (base.InfoPadCarrierIndex != value) { base.InfoPadCarrierIndex = value; EV.PostInfoLog("LoadPort", $"{LPModuleName} infopad index change to {value}"); } } } public override bool IsEnableDualTransfer(out string reason) { return base.IsEnableDualTransfer(out reason); } public override CIDReaderBaseDevice[] CIDReaders { get { return base.CIDReaders; } set { base.CIDReaders = value; //EV.PostInfoLog("LoadPort", $"{LPModuleName} infopad index change to {value}"); //if (CIDReaders != null && CIDReaders.Length > 1) //{ // int cidindex = SC.GetValue($"CarrierInfo.{LPModuleName}CIDReaderIndex{InfoPadCarrierIndex}"); // if (CIDReaders.Length <= cidindex) // { // EV.PostAlarmLog("System", $"The carrier info configuration for CIDReaderIndex{cidindex} is invalid."); // } // else // { // CarrierIDReaderCallBack = CIDReaders[cidindex]; // } //} } } public bool IsHandlerBusy { get { return _lstHandler.Count != 0 || _connection.IsBusy; } } public LinkedList> WaferPositionData { get; set; } = new LinkedList>(); private void InitializeLP() { IsMapWaferByLoadPort = true; if (_doLoadPortOK != null) _doLoadPortOK.SetTrigger(true, out _); //_deviceAddress = SC.GetValue($"{Name}.DeviceAddress"); //InfoPadType,0=TDK,1=Ext,2=FixedbySC _enableLog = SC.GetValue($"LoadPort.{Name}.EnableLogMessage"); if (_isTcpConnection) { Address = SC.GetStringValue($"LoadPort.{Name}.Address"); _tcpConnection = new SELP8LoadPortTCPConnection(this, Address); _tcpConnection.EnableLog(_enableLog); if (_tcpConnection.Connect()) { //LOG.Write($"Connected with {Module}.{Name} ."); EV.PostInfoLog(Module, $"Connected with {Module}.{Name} ."); } else { EV.PostAlarmLog(Module, $"Can't connect to {Module}.{Name}."); } } else { string portName = SC.GetStringValue($"LoadPort.{Name}.PortName"); int bautRate = SC.GetValue($"LoadPort.{Name}.BaudRate"); int dataBits = SC.GetValue($"LoadPort.{Name}.DataBits"); Enum.TryParse(SC.GetStringValue($"LoadPort.{Name}.Parity"), out Parity parity); Enum.TryParse(SC.GetStringValue($"LoadPort.{Name}.StopBits"), out StopBits stopBits); Address = portName; _connection = new SELP8LoadPortConnection(this, portName, bautRate, dataBits, parity, stopBits); _connection.IsEnableHandlerRetry = true; _connection.EnableLog(_enableLog); int count = SC.ContainsItem("System.ComPortRetryCount") ? SC.GetValue("System.ComPortRetryCount") : 5; int sleep = SC.ContainsItem("System.ComPortRetryDelayTime") ? SC.GetValue("System.ComPortRetryDelayTime") : 2; if (sleep <= 0 || sleep > 10) sleep = 2; int retry = 0; do { _connection.Disconnect(); Thread.Sleep(sleep * 1000); if (_connection.Connect()) { //LOG.Write($"Connected with {Module}.{Name} ."); EV.PostInfoLog(Module, $"Connected with {Module}.{Name} ."); break; } if (count > 0 && retry++ > count) { EV.PostAlarmLog(Module, $"Can't connect to {Module}.{Name}."); break; } } while (true); } ConnectionManager.Instance.Subscribe($"{Name}", this); _thread = new PeriodicJob(50, OnTimer, $"{Module}.{Name} MonitorHandler", true); } private HandlerBase _currentHandler; private bool OnTimer() { try { MonitorFoupState(); if (_isTcpConnection) { _tcpConnection.EnableLog(_enableLog); _trigCommunicationError.CLK = _tcpConnection.IsCommunicationError; if (_trigCommunicationError.Q) { EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_tcpConnection.LastCommunicationError}"); OnError("Communicartion Error"); } } else { _connection.EnableLog(_enableLog); _trigCommunicationError.CLK = _connection.IsCommunicationError; if (_trigCommunicationError.Q) { EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}"); OnError("Communicartion Error"); } } if (_isTcpConnection) { _tcpConnection.MonitorTimeout(); if (!_tcpConnection.IsConnected || _tcpConnection.IsCommunicationError) { lock (_locker) { _lstHandler.Clear(); } _trigRetryConnect.CLK = !_tcpConnection.IsConnected; if (_trigRetryConnect.Q) { Address = SC.GetStringValue($"LoadPort.{Name}.Address"); _tcpConnection = new SELP8LoadPortTCPConnection(this, Address); _tcpConnection.EnableLog(_enableLog); if (!_tcpConnection.Connect()) { EV.PostAlarmLog(Module, $"Can not connect with {_tcpConnection.Address}, {Module}.{Name}"); } } return true; } //_trigActionDone.CLK = (_lstHandler.Count == 0 && !_tcpConnection.IsBusy); //if (_trigActionDone.Q) // OnActionDone(null); //HandlerBase handler = null; if (!_tcpConnection.IsBusy) { lock (_locker) { if (_lstHandler.Count == 0) { } if (_lstHandler.Count > 0) { _currentHandler = _lstHandler.First.Value; if (_currentHandler != null) _tcpConnection.Execute(_currentHandler); _lstHandler.RemoveFirst(); } } } } else { _connection.MonitorTimeout(); if (!_connection.IsConnected || _connection.IsCommunicationError) { lock (_locker) { _lstHandler.Clear(); } _trigRetryConnect.CLK = !_connection.IsConnected; if (_trigRetryConnect.Q) { _connection.SetPortAddress(SC.GetStringValue($"{Name}.Address")); if (!_connection.Connect()) { EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}"); } } return true; } //_trigActionDone.CLK = (_lstHandler.Count == 0 && !_connection.IsBusy); //if (_trigActionDone.Q) // OnActionDone(null); //HandlerBase handler = null; if (!_connection.IsBusy) { lock (_locker) { if (_lstHandler.Count == 0) { } if (_lstHandler.Count > 0) { _currentHandler = _lstHandler.First.Value; if (_currentHandler != null) _connection.Execute(_currentHandler); _lstHandler.RemoveFirst(); } } } } if (_infoPadType == 1) //External { InfoPadSensorIndex = (_diInfoPadA == null || !_diInfoPadA.Value ? 0 : 1) + (_diInfoPadB == null || !_diInfoPadB.Value ? 0 : 2) + (_diInfoPadC == null || !_diInfoPadC.Value ? 0 : 4) + (_diInfoPadD == null || !_diInfoPadD.Value ? 0 : 8); } if (IsAutoDetectCarrierType) { if (_infoPadType == 2) //Fixed by SC { InfoPadCarrierIndex = SC.GetValue($"LoadPort.{Name}.CarrierIndex"); } if (_infoPadType == 0 || _infoPadType == 1) { InfoPadCarrierIndex = InfoPadSensorIndex; } } else //Fixed by SC { InfoPadCarrierIndex = SC.GetValue($"LoadPort.{Name}.CarrierIndex"); } } catch (Exception ex) { LOG.Write(ex); } return true; } public void LPSetInfoPadSensorIndex(int index) { if (_infoPadType == 0) { InfoPadSensorIndex = index; } } protected int _retryTimes; public bool RetryHandler() { if (_currentHandler == null) return false; if (_retryTimes > 6) return false; Thread.Sleep(500); lock(_locker) { _lstHandler.AddFirst(_currentHandler); //if(_isTcpConnection) //{ // _tcpConnection.Execute(_currentHandler); //} //else //{ // _connection.Execute(_currentHandler); //} } _retryTimes++; return true; } public override void Monitor() { base.Monitor(); try { } catch (Exception ex) { LOG.Write(ex); } } private void MonitorFoupState() { if (IsPlacement) { int currentfoupstatecode = (ClampPosition == TDKPosition.Close ? 0 : 1) + (DockPosition == TDKDockPosition.Dock ? 0 : 2) + (DoorState == FoupDoorState.Close ? 0 : 4) + (DoorPosition == FoupDoorPostionEnum.Down ? 0 : 8); if(currentfoupstatecode!= _foupstatecode) { _dtFoupStateStart = DateTime.Now; _foupstatecode = currentfoupstatecode; } if(DateTime.Now - _dtFoupStateStart > TimeSpan.FromSeconds(TimeLimitNoOperation) && TimeLimitNoOperation>0) { SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"carrier:{_carrierId} on {LPModuleName} no operation time over limit"; EV.Notify(AlarmTdkNoOperation,dvid); _dtFoupStateStart = DateTime.Now; } } else { _dtFoupStateStart = DateTime.Now; } } private DateTime _dtFoupStateStart = DateTime.Now; private int _foupstatecode = -1; private R_TRIG _trigActionDone = new R_TRIG(); private string _scRoot; private bool _isTcpConnection; private SELP8LoadPortConnection _connection; private SELP8LoadPortTCPConnection _tcpConnection; private IoTrigger _doLoadPortOK; private IoSensor _diInfoPadA; private IoSensor _diInfoPadB; private IoSensor _diInfoPadC; private IoSensor _diInfoPadD; private int _infoPadType { get { return SC.ContainsItem($"LoadPort.{Name}.InfoPadType") ? SC.GetValue($"LoadPort.{Name}.InfoPadType") : 2; } } public int InfoPadType => _infoPadType; public SELP8LoadPortConnection Connection { get => _connection; } public SELP8LoadPortTCPConnection TCPConnection => _tcpConnection; private PeriodicJob _thread; protected static Object _locker = new Object(); protected LinkedList _lstHandler = new LinkedList(); private bool _enableLog = true; //private bool _commErr = false; private R_TRIG _trigError = new R_TRIG(); private R_TRIG _trigWarningMessage = new R_TRIG(); private R_TRIG _trigCommunicationError = new R_TRIG(); private R_TRIG _trigRetryConnect = new R_TRIG(); public TDKSystemStatus SystemStatus { get; set; } public TDKMode Mode { get; set; } public TDKInitPosMovement InitPosMovement { get; set; } public TDKOperationStatus OperationStatus { get; set; } public TDKContainerStatus ContainerStatus { get; set; } public TDKPosition ClampPosition { get; set; } public TDKPosition LPDoorLatchPosition { get; set; } public TDKVacummStatus VacuumStatus { get; set; } public TDKPosition LPDoorState { get; set; } public TDKWaferProtrusion WaferProtrusion { get; set; } public TDKElevatorAxisPosition ElevatorAxisPosition { get; set; } public TDKDockPosition DockPosition { get; set; } public TDKMapPosition MapperPostion { get; set; } public TDKMappingStatus MappingStatus { get; set; } public TDKModel Model { get; set; } public string Address { get; set; } public bool IsConnected { get { if (_isTcpConnection) return TCPConnection.IsConnected; return _connection.IsConnected; } } public override bool IsEnableTransferWafer(out string reason) { if(!IsLoaded) { reason = "Not loaded"; return false; } if(LPDoorState != TDKPosition.Open) { reason = "Door is not open"; return false; } if(DockPosition != TDKDockPosition.Dock) { reason = "Foup is not dock"; return false; } return base.IsEnableTransferWafer(out reason); } public bool Disconnect() { if (_isTcpConnection) return _tcpConnection.Disconnect(); return _connection.Disconnect(); } public void OnCarrierNotPlaced() { _isPlaced = false; ConfirmRemoveCarrier(); } public void OnCarrierNotPresent() { _isPresent = false; //ConfirmRemoveCarrier(); } public void OnCarrierPlaced() { _isPlaced = true; ConfirmAddCarrier(); } public void OnCarrierPresent() { _isPresent = true; //ConfirmAddCarrier(); } public void OnSwitchKey1() { _isAccessSwPressed = true; } public void OnSwitchKey2() { } public void OffSwitchKey1() { _isAccessSwPressed = false; } public void OffSwitchKey2() { } public bool OnEvent(out string reason) { reason = string.Empty; lock (_locker) { //_lstHandler.AddLast(new SELP8GetHandler(this, "FSBxx", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "LEDST", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } return true; } private LoadportCassetteState _cassetteState = LoadportCassetteState.None; public override LoadportCassetteState CassetteState { get { return _cassetteState; } set { _cassetteState = value; } } public void SetCassetteState(LoadportCassetteState state) { _cassetteState = state; if (state == LoadportCassetteState.Normal) { OnCarrierPresent(); OnCarrierPlaced(); } if(state == LoadportCassetteState.Absent) { OnCarrierNotPlaced(); OnCarrierNotPresent(); } } public override bool IsRequestFOSBMode { get { //if (SC.ContainsItem($"CarrierInfo.CarrierFosbMode{InfoPadCarrierIndex}")) // return SC.GetValue($"CarrierInfo.CarrierFosbMode{InfoPadCarrierIndex}") == 1; if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.CarrierFosbMode")) return SC.GetValue($"CarrierInfo.Carrier{InfoPadCarrierIndex}.CarrierFosbMode"); return false; } set => base.IsRequestFOSBMode = value; } public override bool IsMapWaferByLoadPort { get { if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.MappedByRobot")) return !SC.GetValue($"CarrierInfo.Carrier{InfoPadCarrierIndex}.MappedByRobot"); return !IsRequestFOSBMode; } } public override WaferSize GetCurrentWaferSize() { return base.GetCurrentWaferSize(); //int intwz = SC.GetValue($"CarrierInfo.CarrierWaferSize{InfoPadCarrierIndex}"); //switch(intwz) //{ // case 0: // return WaferSize.WS0; // case 1: // return WaferSize.WS0; // case 2: // return WaferSize.WS2; // case 3: // return WaferSize.WS3; // case 4: // return WaferSize.WS4; // case 5: // return WaferSize.WS5; // case 6: // return WaferSize.WS6; // case 7: // case 8: // return WaferSize.WS8; // case 12: // return WaferSize.WS12; // default: // return WaferSize.WS0; //} } public override string SpecCarrierType { get { if (SC.ContainsItem($"CarrierInfo.Carrier{InfoPadCarrierIndex}.CarrierName")) return SC.GetStringValue($"CarrierInfo.Carrier{InfoPadCarrierIndex}.CarrierName"); if (SC.ContainsItem($"CarrierInfo.CarrierName{InfoPadCarrierIndex}")) return SC.GetStringValue($"CarrierInfo.CarrierName{InfoPadCarrierIndex}"); return ""; } set => base.SpecCarrierType = value; } protected override bool fStartWrite(object[] param) { return true; } protected override bool fStartRead(object[] param) { return true; } protected override bool fStartExecute(object[] param) { _retryTimes = 0; try { EV.PostInfoLog("LoadPort", $"{LPModuleName} start to execute command {param[0]}"); switch (param[0].ToString()) { case "SetIndicator": Indicator light = (Indicator)param[1]; IndicatorState state = (IndicatorState)param[2]; string[] statestr = new string[] { "", "LON", "LBL", "LOF" }; int lightNo = (int)light; lock (_locker) { _lstHandler.AddLast(new SELP8SetHandler(this, statestr[(int)state]+ $"{lightNo:D2}",null)); _lstHandler.AddLast(new SELP8GetHandler(this, "LEDST", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); IsBusy = false; } break; case "QueryIndicator": lock (_locker) { _lstHandler.AddLast(new SELP8GetHandler(this, "LEDST", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "QueryState": lock (_locker) { _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "Undock": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "YWAIT", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "Dock": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "YDOOR", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "CloseDoor": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "DORFW", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "OpenDoor": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "DORBK", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "Unclamp": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "PODOP", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "Clamp": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "PODCL", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "DoorUp": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "ZDRUP", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "DoorDown": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "ZDRDW", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "OpenDoorNoMap": lock (_locker) { //_lstHandler.AddLast(new TDKMoveHandler(this, "YDOOR", null)); } break; case "OpenDoorAndMap": lock (_locker) { //_lstHandler.AddLast(new TDKMoveHandler(this, "YDOOR", null)); } break; case "MapWafer": lock (_locker) { if (!IsMapWaferByLoadPort) { if (MapRobot != null) return MapRobot.WaferMapping(LPModuleName, out _); return false; } if (DockPosition != TDKDockPosition.Dock) _lstHandler.AddLast(new SELP8MoveHandler(this, "YDOOR", null)); if (DoorState != FoupDoorState.Open) _lstHandler.AddLast(new SELP8MoveHandler(this, "DORBK", null)); _lstHandler.AddLast(new SELP8MoveHandler(this, "MAPDO", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "MAPRD", null)); } break; case "DoorUpAndClose": lock (_locker) { WaferPositionData.Clear(); _lstHandler.AddLast(new SELP8MoveHandler(this, "CUMDK", null)); //_lstHandler.AddLast(new SELP8MoveHandler(this, "ZDRUP", null)); //_lstHandler.AddLast(new SELP8MoveHandler(this, "DORFW", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "OpenDoorAndDown": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "DORBK", null)); _lstHandler.AddLast(new SELP8MoveHandler(this, "ZDRDW", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "Move": lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, param[1].ToString(), null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } break; case "Set": lock (_locker) { _lstHandler.AddLast(new SELP8SetHandler(this, param[1].ToString(), null)); } break; case "Get": lock (_locker) { _lstHandler.AddLast(new SELP8GetHandler(this, param[1].ToString(), null)); } break; } _timerActionMonitor.Restart(); return true; } catch (Exception ex) { LOG.Write(ex); EV.PostAlarmLog(Name, $"Parameter invalid"); return false; } } protected override bool fStartUnload(object[] param) { WaferPositionData.Clear(); _retryTimes = 0; if (!_isPlaced) { EV.PostAlarmLog(Name, $"No carrier on {Name},can't unload."); return false; } if (!_isDocked) { EV.PostAlarmLog(Name, $"Carrier is not docked on {Name},can't unload."); return false; } lock (_locker) { if (DoorPosition == FoupDoorPostionEnum.Up && DoorState == FoupDoorState.Close) { lock (_locker) { _lstHandler.AddLast(new SELP8MoveHandler(this, "CUDNC", null)); } } else { if(IsNeedMapOnUnload) { _lstHandler.AddLast(new SELP8MoveHandler(this, "CUDMP", null)); } else _lstHandler.AddLast(new SELP8MoveHandler(this, "CULOD", null)); } if (IsKeepClampAfterUnload) { _lstHandler.AddLast(new SELP8MoveHandler(this, "PODCL", null)); } if (IsNeedMapOnUnload) { _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+01")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+02")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+03")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+04")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+05")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+06")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+07")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+08")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+09")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+10")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+11")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+12")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+13")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+14")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+15")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+16")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+17")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+18")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+19")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+20")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+21")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+22")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+23")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+24")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+25")); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "MAPRD", null)); } } _timerActionMonitor.Restart(); return true; } protected override bool fStartLoad(object[] param) { WaferPositionData.Clear(); _retryTimes = 0; if (!_isPlaced) { EV.PostAlarmLog(Name, $"No carrier on {Name},can't load."); return false; } if (_isDocked) { EV.PostAlarmLog(Name, $"Carrier is docked on {Name},can't load."); return false; } if (IsRequestFOSBMode) { lock (_locker) { if (ClampPosition == TDKPosition.Open) { _lstHandler.AddLast(new SELP8MoveHandler(this, "PODCL", null)); } _lstHandler.AddLast(new SELP8MoveHandler(this, "DORBK", null)); _lstHandler.AddLast(new SELP8MoveHandler(this, "YDOOR", null)); _lstHandler.AddLast(new SELP8MoveHandler(this, "ZDRDW", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } } else { lock (_locker) { if (IsMapWaferByLoadPort) { _lstHandler.AddLast(new SELP8MoveHandler(this, "CLDMP", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+01")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+02")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+03")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+04")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+05")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+06")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+07")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+08")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+09")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+10")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+11")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+12")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+13")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+14")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+15")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+16")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+17")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+18")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+19")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+20")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+21")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+22")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+23")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+24")); _lstHandler.AddLast(new SELP8GetHandler(this, "MPENC", "/+25")); _lstHandler.AddLast(new SELP8GetHandler(this, "MAPRD", null)); } else { _lstHandler.AddLast(new SELP8MoveHandler(this, "CLOAD", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); } } } _timerActionMonitor.Restart(); return true; } protected override bool fMonitorLoad(object[] param) { IsBusy = false; if (_timerActionMonitor.IsRunning && _timerActionMonitor.Elapsed > TimeSpan.FromSeconds(TimelimitAction)) { _timerActionMonitor.Stop(); OnError("LoadTimeout"); } if (!IsHandlerBusy) { OnLoaded(); _timerActionMonitor.Stop(); return true; } return false; } protected override bool fStartInit(object[] param) { _retryTimes = 0; lock (_locker) { _lstHandler.AddLast(new SELP8ModHandler(this, "ONMGV", null)); if (param.Length >= 1 && param[0].ToString() == "ForceHome") _lstHandler.AddLast(new SELP8MoveHandler(this, "ABORG", null)); else _lstHandler.AddLast(new SELP8MoveHandler(this, "ORGSH", null)); _lstHandler.AddLast(new SELP8EvtHandler(this, "EVTON", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); //_lstHandler.AddLast(new SELP8GetHandler(this, "FSBxx", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "LEDST", null)); } _timerActionMonitor.Restart(); return true; } protected override bool fMonitorInit(object[] param) { IsBusy = false; if (_timerActionMonitor.IsRunning && _timerActionMonitor.Elapsed > TimeSpan.FromSeconds(TimelimitHome)) { _timerActionMonitor.Stop(); OnError("HomeTimeout"); } if (!IsHandlerBusy) { OnHomed(); return true; } return false; } protected override bool fMonitorHome(object[] param) { IsBusy = false; if (_timerActionMonitor.IsRunning && _timerActionMonitor.Elapsed > TimeSpan.FromSeconds(TimelimitHome)) { _timerActionMonitor.Stop(); OnError("HomeTimeout"); } if (!IsHandlerBusy) { OnHomed(); return true; } return false; } protected override bool fMonitorUnload(object[] param) { IsBusy = false; if (_timerActionMonitor.IsRunning && _timerActionMonitor.Elapsed > TimeSpan.FromSeconds(TimelimitAction)) { _timerActionMonitor.Stop(); OnError("UnloadTimeout"); } if (!IsHandlerBusy) { OnUnloaded(); return true; } return false; } protected override bool fMonitorReset(object[] param) { IsBusy = false; if (!IsHandlerBusy) { return true; } return false; } protected override bool fMonitorExecuting(object[] param) { IsBusy = false; if (_timerActionMonitor.IsRunning && _timerActionMonitor.Elapsed > TimeSpan.FromSeconds(TimelimitAction)) { _timerActionMonitor.Stop(); OnError($"Execute{CurrentParamter[0]}Timeout"); } if (!IsHandlerBusy) { EV.PostInfoLog("LoadPort", $"{LPModuleName} success to execute command {CurrentParamter[0]}"); return true; } return false; } public override bool SetIndicator(Indicator light, IndicatorState state, out string reason) { reason = ""; return fStartExecute(new object[] { "SetIndicator", light, state }); } protected override bool fStartReset(object[] param) { _retryTimes = 0; _lstHandler.Clear(); if (_isTcpConnection) { if (!_tcpConnection.IsConnected) _tcpConnection.Connect(); _tcpConnection.ForceClear(); } else { if (!_connection.IsConnected) _connection.Connect(); _connection.ForceClear(); } lock (_locker) { _lstHandler.AddLast(new SELP8ModHandler(this, "ONMGV", null)); _lstHandler.AddLast(new SELP8SetHandler(this, "RESET", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); //_lstHandler.AddLast(new SELP8GetHandler(this, "FSBxx", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "LEDST", null)); } return true; } public override void OnError(string error = "") { lock (_locker) { _lstHandler.Clear(); if (_isTcpConnection) _tcpConnection.ForceClear(); else _connection.ForceClear(); _lstHandler.AddLast(new SELP8GetHandler(this, "STATE", null)); //_lstHandler.AddLast(new SELP8GetHandler(this, "FSBxx", null)); _lstHandler.AddLast(new SELP8GetHandler(this, "LEDST", null)); } base.OnError(error); } public void OnAbs(string absMsg) { try { string absContext = absMsg.Split('/')[1].Replace(";", "").Replace("\r",""); EV.Notify($"{Name}{absContext}"); } catch(Exception ex) { LOG.Write(ex); } OnError("Recieve ABS Message:" + absMsg); } public void OnNak(string absMsg) { try { string absContext = absMsg.Split('/')[1].Replace(";", "").Replace("\r", ""); EV.Notify($"{Name}{absContext}"); } catch (Exception ex) { LOG.Write(ex); } OnError("Recieve Nak Message:" + absMsg); } public override void Terminate() { _thread.Stop(); Thread.Sleep(100); if (!SC.ContainsItem($"{_scRoot}.{Name}.CloseConnectionOnShutDown") || SC.GetValue($"{_scRoot}.{Name}.CloseConnectionOnShutDown")) { LOG.Write($"Close {Address} for connection of {LPModuleName}"); _connection.Disconnect(); _connection.TerminateCom(); } base.Terminate(); } public override bool IsForbidAccessSlotAboveWafer() { if (SC.ContainsItem($"CarrierInfo.ForbidAccessAboveWaferCarrier{InfoPadCarrierIndex}")) return SC.GetValue($"CarrierInfo.ForbidAccessAboveWaferCarrier{InfoPadCarrierIndex}"); return false; } public override void OnSlotMapRead(string _slotMap) { CurrentSlotMapResult = _slotMap; if (CurrentSlotMapResult.Length != ValidSlotsNumber) { EV.PostAlarmLog("LoadPort", $"{LPModuleName} Mapping Data Error," + $"slotmap length is {CurrentSlotMapResult.Length} not match the valid slots number:{ValidSlotsNumber}."); } if (CurrentState == LoadPortStateEnum.Unloading) { if (CurrentSlotMapResult.Contains("2")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == '2') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} unload map crossed wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMapCrossedWafer, dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:crossed wafer when unload carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMappingError, dvid1); } if (CurrentSlotMapResult.Contains("3")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == '3') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} unload map double wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMapDoubleWafer, dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:double wafer when unload carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMappingError, dvid1); } if (CurrentSlotMapResult.Contains("W")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == 'W') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} unload map double wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMapDoubleWafer, dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:double wafer when unload carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMappingError, dvid1); } if (CurrentSlotMapResult.Contains("?")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == '?') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} unload map unknow wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMapUnknownWafer, dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:unknow wafer when unload carrier:{_carrierId}"; EV.Notify(AlarmLoadPortUnloadMappingError, dvid1); } return; } for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (!_isPlaced) break; // No wafer: "0", Wafer: "1", Crossed:"2", Undefined: "?", Overlapping wafers: "W" WaferInfo wafer = null; switch (CurrentSlotMapResult[i]) { case '0': WaferManager.Instance.DeleteWafer(LPModuleName, i); CarrierManager.Instance.UnregisterCarrierWafer(Name, i); break; case '1': if (WaferManager.Instance.CheckNoWafer(LPModuleName, i)) { wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Normal); } else WaferManager.Instance.GetWafer(LPModuleName, i).Status = WaferStatus.Normal; WaferManager.Instance.UpdateWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); break; case '2': if (WaferManager.Instance.CheckNoWafer(LPModuleName, i)) { wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Crossed); } else WaferManager.Instance.GetWafer(LPModuleName, i).Status = WaferStatus.Crossed; WaferManager.Instance.UpdateWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); //EV.Notify(AlarmLoadPortMapCrossedWafer); EV.PostInfoLog("LoadPort", $"{LPModuleName} map crossed wafer on carrier:{_carrierId},slot:{i + 1}."); break; case 'W': if (WaferManager.Instance.CheckNoWafer(LPModuleName, i)) { wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Double); } else WaferManager.Instance.GetWafer(LPModuleName, i).Status = WaferStatus.Double; WaferManager.Instance.UpdateWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); //EV.Notify(AlarmLoadPortMapDoubleWafer); EV.PostInfoLog("LoadPort", $"{LPModuleName} map double wafer on carrier:{_carrierId},slot:{i + 1}."); break; case '?': if (WaferManager.Instance.CheckNoWafer(LPModuleName, i)) { wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Unknown); } else WaferManager.Instance.GetWafer(LPModuleName, i).Status = WaferStatus.Unknown; WaferManager.Instance.UpdateWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); EV.PostInfoLog("LoadPort", $"{LPModuleName} map unknown wafer on carrier:{_carrierId},slot:{i + 1}."); break; default: CurrentSlotMapResult = CurrentSlotMapResult.Substring(0, i) + "?" + CurrentSlotMapResult.Substring(i + 1); if (WaferManager.Instance.CheckNoWafer(LPModuleName, i)) { wafer = WaferManager.Instance.CreateWafer(LPModuleName, i, WaferStatus.Unknown); } else WaferManager.Instance.GetWafer(LPModuleName, i).Status = WaferStatus.Unknown; WaferManager.Instance.UpdateWaferSize(LPModuleName, i, GetCurrentWaferSize()); CarrierManager.Instance.RegisterCarrierWafer(Name, i, wafer); EV.PostInfoLog("LoadPort", $"{LPModuleName} map unknown wafer on carrier:{_carrierId},slot:{i + 1}."); break; } } SerializableDictionary dvidmp = new SerializableDictionary(); dvidmp["SlotMap"] = CurrentSlotMapResult; dvidmp["PortID"] = PortID; dvidmp["PORT_CTGRY"] = SpecPortName; dvidmp["CarrierType"] = SpecCarrierType; dvidmp["CarrierIndex"] = InfoPadCarrierIndex; dvidmp["InfoPadSensorIndex"] = InfoPadSensorIndex; dvidmp["CarrierID"] = CarrierId; EV.Notify(EventSlotMapAvailable, dvidmp); EV.Notify(EventMapComplete, dvidmp); if (CurrentSlotMapResult.Contains("2")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == '2') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} load map crossed wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMapCrossedWafer, dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:crossed wafer when load carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMappingError, dvid1); } if (CurrentSlotMapResult.Contains("3")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == '3') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} load map double wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMapDoubleWafer,dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:double wafer when load carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMappingError, dvid1); } if (CurrentSlotMapResult.Contains("W")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == 'W') { if (slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} load map double wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMapDoubleWafer,dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:double wafer when load carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMappingError,dvid1); } if (CurrentSlotMapResult.Contains("?")) { MapError = true; string slotSpec = ""; for (int i = 0; i < CurrentSlotMapResult.Length; i++) { if (CurrentSlotMapResult[i] == '?') { if(slotSpec == "") slotSpec += $"{i + 1}"; else slotSpec += $",{i + 1}"; } } SerializableDictionary dvid = new SerializableDictionary(); dvid["AlarmDescription"] = $"{LPModuleName} load unknow wafer on slot:{slotSpec} of carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMapUnknownWafer,dvid); SerializableDictionary dvid1 = new SerializableDictionary(); dvid1["AlarmDescription"] = $"{LPModuleName} map error:unknow wafer when load carrier:{_carrierId}"; EV.Notify(AlarmLoadPortMappingError,dvid1); } if (LPCallBack != null && IsPlacement) LPCallBack.MappingComplete(_carrierId, CurrentSlotMapResult); _isMapped = true; WaferMapThickness = new double[_slotMap.Length]; int wIndex = 0; string thicknessMsg = ""; for (int i = 0; i < _slotMap.Length; i++) { if (_slotMap[i] != '0') { WaferMapThickness[i] = Math.Abs(WaferPositionData.ToArray()[wIndex].Item2 - WaferPositionData.ToArray()[wIndex].Item1); if (WaferMapThickness[i] > WaferThicknessTolerance.Item2) { EV.PostAlarmLog("LoadPort", $"{LPModuleName} Wafer on slot {i + 1} " + $"thickness is {WaferMapThickness[i]} um more than highlimit {WaferThicknessTolerance.Item2}."); OnError("Mapping Data Error"); } if (WaferMapThickness[i] < WaferThicknessTolerance.Item1) { EV.PostAlarmLog("LoadPort", $"{LPModuleName} Wafer on slot {i + 1} " + $"thickness is {WaferMapThickness[i]} um less than lowlimit {WaferThicknessTolerance.Item1}."); OnError("Mapping Data Error"); } int slotBasePos = SlotPositionBaseLine + (SlotPitch * i); int wafercenterpos = (WaferPositionData.ToArray()[wIndex].Item2 + WaferPositionData.ToArray()[wIndex].Item1) / 2; EV.PostInfoLog("LoadPort",$"{LPModuleName} Wafer on slot{i + 1} wafer horizontal center is {wafercenterpos}um,thickness is {WaferMapThickness[i]}um."); wIndex++; } else WaferMapThickness[i] = 0; thicknessMsg += $"Slot:{i + 1},Thickness:{WaferMapThickness[i] *0.001} mm;"; } LOG.Write($"{Name} map carrier:{CarrierId},slotmap:{_slotMap},thickness data:{thicknessMsg}."); base.OnSlotMapRead(_slotMap); } } }