namespace Aitex.Sorter.RT.EFEMs.Servers { public enum EfemCommandType { MOV, //MOV Motion request GET, //Request for each type status acquisition SET, //Control setting ACK, }; public enum EfemCommand { READY, //Ready , ACK, INF INIT, //EFEM initialization MOV, ACK, INF ORGSH, //Origin search LOCK, //Pod lock MOV, ACK, INF UNLOCK, //Pod unlock DOCK, //Moving to pod dock position MOV, ACK, INF UNDOCK, //Moving to pod undock position MOV, ACK, INF OPEN, //Pod open MOV, ACK, INF CLOSE, //Pod close MOV, ACK, INF WAFSH, //Wafer mapping MOV, ACK, INF MAPDT, //Wafer map information GET, ACK, INF, EVT LOAD, //Wafer carry-out MOV, ACK, INF UNLOAD, //Wafer carry-in MOV, ACK, INF GOTO, //Move to specified object MOV, ACK, INF TRANS, //Wafer transfer MOV, ACK, INF CHANGE, //Wafer exchange MOV, ACK, INF ALIGN, //Alignment MOV, SET, ACK, INF HOME, //Home MOV, ACK, INF HOLD, //Hold MOV, ACK, INF RESTR, //Restart MOV, ACK ABORT, //Abort termination MOV, ACK, INF EMS, //Emergency stop MOV, ACK, INF ERROR, //Error GET, SET, ACK, INF CLAMP, //Clamp output, get state GET, SET, ACK, INF STATE, //Get status GET, ACK, INF MODE, //E84 mode setting GET, SET, ACK, INF TRANSREQ, //E84 automatic transfer request MOV, GET, ACK, INF, EVT SIGOUT, //Signal output SET, ACK SIGSTAT, //Signal input/output information GET, ACK, INF, EVT EVENT, //Event setting GET, SET, ACK, INF CSTID, //Carrier ID GET, ACK, INF USDEFINE, //User Define FFU, //Ffu SET,ACK,INF WTYPE, //Wtype Set and acquire wafer type SET,ACK,GET,ACK,INF PURGE, //Purge SET,ACK,GET,ACK,INF ADPLOCK, //Adplock MOV,ACK,INF ADPUNLOCK, //Adpunlock SET,ACK,INF LED, //Led SET,ACK,INF WORKCHK, //Workchk MOV,ACK,INF FFUFAN, } public enum EfemEventType { ALL = 0x1000, //All events (cannot be designated for GET) MAPDT = 0x0001, //Mapping result event TRANSREQ = 0x0002, //E84 automatic transfer start event SYSTEM = 0x0004, //System I/O update event PORT = 0x0008, //Port I/O update event PRS = 0x0010, //Pressure sensor measured value update event FFU = 0x0020, //FFU revolution update event } public class EfemParameter { public const string SYS = "SYS"; public const string STOWER = "STOWER"; public const string P1 = "P1"; public const string P2 = "P2"; public const string P3 = "P3"; public const string P4 = "P4"; } public enum EfemEventValue { ON, //Event is enabled OFF, //Event is disabled }; public enum StateItem { VER, //MOV Motion request TRACK, //Request for each type status acquisition PRS, //Control setting FFU, }; public enum MoveArm { ARM1, //Designates upper finger ARM2, //Designates lower finger } public enum MovePosition { UP, //Height for inserting a wafer DOWN, //Height for picking up a wafer } }