 niuyx
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2af6e0c929
1. Revise waferInfo transfer when robot occurs error;
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3 semanas atrás |
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niuyx
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03d8760e29
1. Add FlipTask and Flipper ModuleName parse;
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1 mês atrás |
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niuyx
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3e163da74b
1. Add interlocks (Safety to LP1/2, Enable to operate LP1/2)
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1 mês atrás |
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niuyx
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b3d405cf36
Add Hirata LoadPort ans its simulator; Modify LoadPort UI;
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2 meses atrás |
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niuyx
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16a714dc77
Modify ZZEfem UI; Add Buffer1, Aligner1 Module;
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2 meses atrás |
