niuyx
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46dc980865
1. Revise resetting bug when using OpenCassette;
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3 weeks ago |
niuyx
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2af6e0c929
1. Revise waferInfo transfer when robot occurs error;
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3 months ago |
niuyx
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7a65407cbb
1. Add UIConfig Vrigo008 and related UIOperationView(Max config: 2LP,2PM,1Flipper,1Buffer,1Aligner)
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4 months ago |
niuyx
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3e163da74b
1. Add interlocks (Safety to LP1/2, Enable to operate LP1/2)
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4 months ago |
niuyx
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b3d405cf36
Add Hirata LoadPort ans its simulator; Modify LoadPort UI;
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5 months ago |
niuyx
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16a714dc77
Modify ZZEfem UI; Add Buffer1, Aligner1 Module;
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5 months ago |