 niuyx
|
2af6e0c929
1. Revise waferInfo transfer when robot occurs error;
|
3 months ago |
|
niuyx
|
03d8760e29
1. Add FlipTask and Flipper ModuleName parse;
|
3 months ago |
|
niuyx
|
3e163da74b
1. Add interlocks (Safety to LP1/2, Enable to operate LP1/2)
|
4 months ago |
|
niuyx
|
b3d405cf36
Add Hirata LoadPort ans its simulator; Modify LoadPort UI;
|
5 months ago |
|
niuyx
|
16a714dc77
Modify ZZEfem UI; Add Buffer1, Aligner1 Module;
|
5 months ago |
