VirgoRT.csproj 16 KB

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  93. <Compile Include="Devices\CometRF.cs" />
  94. <Compile Include="Devices\DataDefine.cs" />
  95. <Compile Include="Devices\EdwardsPump.cs" />
  96. <Compile Include="Devices\EFEM\Efem.cs" />
  97. <Compile Include="Devices\EFEM\EfemAction.cs" />
  98. <Compile Include="Devices\EFEM\EfemBase.cs" />
  99. <Compile Include="Devices\EFEM\EfemDevice.cs" />
  100. <Compile Include="Devices\EFEM\EfemInterface.cs" />
  101. <Compile Include="Devices\EFEM\EfemMessage.cs" />
  102. <Compile Include="Devices\EFEM\Loadport.cs" />
  103. <Compile Include="Devices\IODevices\IoMessage.cs" />
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  107. <Compile Include="Devices\IODevices\IoGasStick.cs" />
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  110. <Compile Include="Devices\IODevices\IoLid.cs" />
  111. <Compile Include="Devices\IODevices\IoMatch.cs" />
  112. <Compile Include="Devices\IODevices\IoMfc.cs" />
  113. <Compile Include="Devices\IODevices\IoPressureControl.cs" />
  114. <Compile Include="Devices\IODevices\IoPressureMeter.cs" />
  115. <Compile Include="Devices\IODevices\IoPump.cs" />
  116. <Compile Include="Devices\IODevices\IoRf.cs" />
  117. <Compile Include="Devices\IODevices\IoTemperatureControl.cs" />
  118. <Compile Include="Devices\IODevices\IoThrottleValve.cs" />
  119. <Compile Include="Devices\JetPM.cs" />
  120. <Compile Include="Devices\PlasmaController.cs" />
  121. <Compile Include="Devices\SkyPump.cs" />
  122. <Compile Include="Devices\SMCChiller.cs" />
  123. <Compile Include="Devices\VirgoSignalTower.cs" />
  124. <Compile Include="FAs\FaEventItem.cs" />
  125. <Compile Include="FAs\FaHost.cs" />
  126. <Compile Include="FAs\FALogFileCleaner.cs" />
  127. <Compile Include="FAs\FaManager.cs" />
  128. <Compile Include="FAs\IFaHost.cs" />
  129. <Compile Include="FAs\IHostCallback.cs" />
  130. <Compile Include="FAs\VIDMap.cs" />
  131. <Compile Include="Devices\DeviceManager.cs" />
  132. <Compile Include="Modules\AutoTransferClean.cs" />
  133. <Compile Include="Modules\AutoTransfer.cs" />
  134. <Compile Include="Modules\AutoTransfer_FA.cs" />
  135. <Compile Include="Modules\EFEMs\EfemEntity.cs" />
  136. <Compile Include="Modules\LPs\LoadPortClampRoutine.cs" />
  137. <Compile Include="Modules\LPs\LoadPortCloseDoorRoutine.cs" />
  138. <Compile Include="Modules\LPs\LoadPortDockRoutine.cs" />
  139. <Compile Include="Modules\LPs\LoadPortReadTagDataRoutine.cs" />
  140. <Compile Include="Modules\LPs\LoadPortWriteTagDataRoutine.cs" />
  141. <Compile Include="Modules\LPs\LoadPortWriteCarrierIdRoutine.cs" />
  142. <Compile Include="Modules\LPs\LoadPortUnloadRoutine.cs" />
  143. <Compile Include="Modules\LPs\LoadPortModule.cs" />
  144. <Compile Include="Modules\HomeAll.cs" />
  145. <Compile Include="Modules\IMoveManager.cs" />
  146. <Compile Include="Modules\Interlocks\CheckLidClose.cs" />
  147. <Compile Include="Modules\Interlocks\CheckOnline.cs" />
  148. <Compile Include="Modules\Interlocks\OperationCheck.cs" />
  149. <Compile Include="Modules\EntityTaskBase.cs" />
  150. <Compile Include="Modules\LPs\LoadPortGetMapInfoRoutine.cs" />
  151. <Compile Include="Modules\LPs\LoadPortHomeRoutine.cs" />
  152. <Compile Include="Modules\LPs\LoadPortLoadRoutine.cs" />
  153. <Compile Include="Modules\LPs\LoadPortMapRoutine.cs" />
  154. <Compile Include="Modules\LPs\LoadPortOpenDoorRoutine.cs" />
  155. <Compile Include="Modules\LPs\LoadPortReadCarrierIdRoutine.cs" />
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  157. <Compile Include="Modules\LPs\LoadPortUndockRoutine.cs" />
  158. <Compile Include="Modules\PMs\Clean.cs" />
  159. <Compile Include="Modules\PMs\CyclePurgeRoutine.cs" />
  160. <Compile Include="Modules\PMs\Fdc.cs" />
  161. <Compile Include="Modules\PMs\GasFlowRoutine.cs" />
  162. <Compile Include="Modules\PMs\PMAllMfcVerificationRoutine.cs" />
  163. <Compile Include="Modules\PMs\PMMfcVerificationRoutine.cs" />
  164. <Compile Include="Modules\PMs\PMPostTransferRoutine.cs" />
  165. <Compile Include="Modules\PMs\PMLeakCheckRoutine.cs" />
  166. <Compile Include="Modules\PMs\PMHomeRoutine.cs" />
  167. <Compile Include="Modules\PMs\PMPrepareTransferRoutine.cs" />
  168. <Compile Include="Modules\PMs\PMEntity.cs" />
  169. <Compile Include="Modules\ManualTransfer.cs" />
  170. <Compile Include="Modules\PMs\PMRoutineBase.cs" />
  171. <Compile Include="Modules\PMs\PostProcess.cs" />
  172. <Compile Include="Modules\PMs\PreProcess.cs" />
  173. <Compile Include="Modules\PMs\Process.cs" />
  174. <Compile Include="Modules\PMs\Process_FA.cs" />
  175. <Compile Include="Modules\PMs\PumpDownRoutine.cs" />
  176. <Compile Include="Modules\PMs\Recipe.cs" />
  177. <Compile Include="Modules\PMs\RecipeDBCallback.cs" />
  178. <Compile Include="Modules\PMs\RfPowerRoutine.cs" />
  179. <Compile Include="Modules\PMs\StartPumpRoutine.cs" />
  180. <Compile Include="Modules\PMs\TemperatureControlRoutine.cs" />
  181. <Compile Include="Modules\PMs\VentRountine.cs" />
  182. <Compile Include="Modules\PMs\VirgoRecipeFileContext.cs" />
  183. <Compile Include="Modules\PMs\VirgoSequenceFileContext.cs" />
  184. <Compile Include="Modules\ReturnAllWafer.cs" />
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  302. <Generator>MSBuild:Compile</Generator>
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  308. </ItemGroup>
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  311. <CopyToOutputDirectory>Always</CopyToOutputDirectory>
  312. </None>
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  315. <None Include="Config\_ioDefineVirgo.xml">
  316. <CopyToOutputDirectory>Always</CopyToOutputDirectory>
  317. <SubType>Designer</SubType>
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  320. <ItemGroup>
  321. <Content Include="Config\Interlock.Virgo.xml">
  322. <CopyToOutputDirectory>PreserveNewest</CopyToOutputDirectory>
  323. <SubType>Designer</SubType>
  324. </Content>
  325. <None Include="Config\DataGroup.xml">
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  327. <CopyToOutputDirectory>Always</CopyToOutputDirectory>
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  330. <ItemGroup>
  331. <None Include="Config\Account\Account.xml">
  332. <SubType>Designer</SubType>
  333. <CopyToOutputDirectory>Always</CopyToOutputDirectory>
  334. </None>
  335. <Content Include="Config\DeviceModelVirgo.xml">
  336. <SubType>Designer</SubType>
  337. <CopyToOutputDirectory>PreserveNewest</CopyToOutputDirectory>
  338. </Content>
  339. <None Include="Config\RecipeFormat.xml">
  340. <CopyToOutputDirectory>Always</CopyToOutputDirectory>
  341. <SubType>Designer</SubType>
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  344. <ItemGroup>
  345. <Folder Include="Config\Recipe\" />
  346. </ItemGroup>
  347. <Import Project="$(MSBuildToolsPath)\Microsoft.CSharp.targets" />
  348. <PropertyGroup>
  349. <PostBuildEvent>REM 输出到安装目录,供安装打包使用
  350. if exist "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT" rd "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT" /s /q
  351. md "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\"
  352. echo 复制文件到安装目录,"$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\"
  353. xcopy /e "$(TargetDir)*.*" "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\" /q
  354. REM 配置文件Copy
  355. del "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\*.pdb"
  356. if exist "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\Logs" rd "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\Logs" /s /q
  357. if exist "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\Recipes" rd "$(ProjectDir)..\VirgoSetup\Packages\VirgoRT\Recipes" /s /q</PostBuildEvent>
  358. </PropertyGroup>
  359. </Project>