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- VirgoA 系统更新历史记录
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- 2023-02-5 version 1.0.0.80
- 1. fix: EAP查询recipe内容,会报warning的问题
- 2. add:DVID增加支持lot id,关联到recipe执行的event
- 3. fix: 误报RF turn on failed
- 2022-09-20 version 1.0.0.79
- 1. fix: 混合跑片会卡住不动的问题
- 2022-09-06 version 1.0.0.78
- 1. fix: can not open door if not vent after process
- 2022-08-28 version 1.0.0.77
- 1. enhancement:door open with robot extend
- 2022-07-17 version 1.0.0.75
- 1. enhancement:界面显示chamber pressure gauge value
- 2. fix: 温度偏差都用同一个校准系数
- 2022-06-24 version 1.0.0.73
- 1. enhancement:在recipe setting中分别增加pump和vent的pin up和pin down 功能
- 2. enhancement:基于idle时间来定义是否需要启用pre-job或post-job,需支持可以根据idle的时间长短来定义是否需要启用pre-job和post-job
- 2022-06-12 version 1.0.0.72
- 1. enhancement:fdc add step summary data
- 2. feature:增加chamber wall控温需求
- 3. feature:增加Grid控温需求
- 4. 改进:单数wafer跑双chamber的时候,最后一片跑一个chamber, 另一个chamber门一直是开着的。结果导致开门的chamber受大气影响ER变快
- 2022-06-09 version 1.0.0.71
- 1. EAP alarm enable all
- 2. 增加lot作业完成lot id,sequence name自动清除功能
- 2022-05-16 version 1.0.0.70
- 1."增加lot作业完成sequence记录自动清除功能:
- 当前lot作业完成时,该lot所调用的Sequence自动清楚,再run下一个lot时,需再次从新调用sequence"
- 2.当Job 未完成时,误把Cassette 拿走,Virgo 软件无任何报警,且没有任何提示,建议加此项报警管控(报Alarm,腔体内部wafer继续作业)
- 3.目前采用post-job recipe(setting Temp),如果客户端出现同一chamber run设置不同Recipe温度的Sequence,会出现by chamber的 pro-job后heater温度会不断的变化,致使heater temp不够稳定,现建议在执行pre-job和post-job时不卡控温度
- 4.软件在auto 状态下,不应该有wafer creat /delete功能,只有在手动情况下才可以运行该功能;
- 5. 另外在Auto run下,Recipe & Sequence 参数也不应该具有修改或删除功能
- 6. 在Virgo建立等级权限时,需区分:none、read、write功能,当前read功能并未完全作用。
- 2022-04-23 version 1.0.0.69
- 1. fix: some time reprot recipe file content not valid
- 2. fix: remove efem warning, EFEM Track wafer present return invalid value,should be 6 characters
- 3. enhancement: add alarm id: 24 = recipe file invalid
- 2022-04-16 version 1.0.0.68
- 1. enhancement: alarm add text
- 2. enhancement: add alarm id : 23 = efem error
- 3. enhancement: merge VirgoB累积更新到当前版本
- 2022-04-12 version 1.0.0.67
- 1. enhancement: default enable all FA alarm
- 2022-03-23 version 1.0.0.66
- 1. enhancement: enable FA alarm
- 2022-02-09 version 1.0.0.65
- 1. enhancement: Mapping button disable when cassette door opened
- 2. enhancement: Cassette door display improved
- 3. add: LP status display on overview area
- 4. enhancement: Wafer status description improved
- 5. feature: 修改在cooling位置的取放逻辑。修改后,机械手不再等待lift pin落下,可以继续去执行其他动作。
- 2021-12-09 version 1.0.0.64
- 1. fix: Job complete info - wafer size incorrect
- 2. add: Wafer size in simulator can be chosen
- 3. add: ATM mode on display
- 2021-11-21 version 1.0.0.63
- 1. fix: 混合跑的时候死锁的问题
- 2. enhancement:去掉大量的RF和Pump的串口通讯日志记录
- 2021-11-21 version 1.0.0.62
- 1. fix: 单片任务的时候开了两个门
- 2021-11-20 version 1.0.0.61
- 1. fix: 单片任务的时候开了两个门
- 2. fix:初始化的时候关闭腔体门
- 3. enhancement:map条件不满足的时候不进入mapping状态
- 2021-11-10 version 1.0.0.60
- 1. fix: efem挂住不执行动作
- 2. fix:efem 停留在动作状态,无法恢复
- 3. enhancement:弹出对话框
- 4:enhancement:蜂鸣器的配置修改
- 2021-10-19 version 1.0.0.59
- 1. fix: Wafer status always show "InProcess"
- 2021-10-19 version 1.0.0.58
- 1. add: LP wafer count display
- 2. enhance: Change efem state to error when protrusion
- 3. add: FDC function
- 4. enhance: Wafer history display format change
- 5. add: Process history data chart step line
- 6. enhance: Delete alarm view
- 7. add: Signal tower strategy can be config
- 8. fix: Parallel mode switch
- 2021-10-12 version 1.0.0.57
- 1. add: Buzzer on when job done
- 2. fix: Job done pop dialog message text adjustment
- 2021-10-11 version 1.0.0.56
- 1. add: LotID input
- 2021-09-11 version 1.0.0.55
- 1. fix: process data history no end time of PMA
- 2021-08-27 version 1.0.0.53
- 1. add:post pop dialog message when any job done
- 2. enhance: disable clean job between cycle jobs.
- 3. enhance: display different color according pm online and offline
- 2021-08-23 version 1.0.0.52
- 1. fix:run stuck when cycle mode + clean
- 2. add:main view alarm combobox
- 2021-08-06 version 1.0.0.51
- 1. fix:同时跑两个Port的时候,有一个chamber会空闲的问题
- 2. fix:SVID 1101查询设备是否在自动模式
- 3. Enhancement:默认和EAP连接之后的状态online remote可以通过配置来完成。
- 2021-07-25 version 1.0.0.50
- 1. fix: DVID value not correct
- 2021-07-22 version 1.0.0.49
- 1.add:Recipe config:keep vacuum afer process
- 2.add:RF ignition failed alarm
- 3.fix:Signal tower light status
- 4.fix:Wafer protrusion、crossed and double change error level from warning to alarm
- 2021-07-19 version 1.0.0.48
- 1. FA add CEID
- 2021-06-29 version 1.0.0.47
- 1. enable FA
- 2021-06-16 version 1.0.0.46
- 1. add:Idle & PreJob/PostJob condition
- 2. add:GuidePin movement log
- 3. add:GuidePin state check before wafer placement
- 2021-05-28 version 1.0.0.45
- 1. fix:Recipe不能跳步的问题
- 2021-05-25 version 1.0.0.43
- 1. fix:GasLine不能跳号启用的问题
- 2021-05-17 1.0.0.42
- 1. SC项目+设定值导出
- 2021-05-12 version 1.0.0.41
- 1. Virgo系列增加GB Pressure SW、GB Door SW、LE OT SW
- 2.SC项目+设定值导出功能
- 2021-05-08 version 1.0.0.40
- 1. 新增PM Place & Pick的Delay功能
- 2021-01-31 version 1.0.0.17
- 1: EFEM 信息没处理的问题,导致伸进去PM,不动了
- 2:Cylinder报错 PLC Kept
- 2021-01-28 version 1.0.0.15
- 1:Cylinder报错 PLC Kept
- 2021-01-16 version 1.0.0.8
- 1:支持并行调度
- 2021-01-14 version 1.0.0.7
- 1:调度优化
- 2021-01-12 version 1.0.0.6
- 1:准备传片的过程中,会报超时错,而且报错之后,继续传片
- 2: return wafer, 弹出对话框可选是否cooling,参考Transfer wafer
- 3:sequence文件里面的cooling时间没生效
- 4:自动模式下,map不work
- 5:create job之后,禁止set/remove
- 6:auto runing-》auto idle
- 7:数据库没保存carrier信息
- 8: 提示3寸第一片不能跑货的问题
- 9:robot动画在Aligner位置有偏差
- 2020-12-20 version 1.0.0.1
- 1. 初始版本
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