SchedulerPM.cs 21 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using VirgoRT.Module;
  17. using VirgoRT.Modules;
  18. using MECF.Framework.Common.Equipment;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using VirgoRT.Devices;
  22. namespace VirgoRT.Scheduler
  23. {
  24. public class SchedulerPM : SchedulerModule
  25. {
  26. public override bool IsAvailable
  27. {
  28. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !_waitCompletejobClean; }
  29. }
  30. public override bool IsOnline
  31. {
  32. get { return _entity != null && _entity.IsOnline; }
  33. }
  34. public override bool IsError
  35. {
  36. get { return _entity.IsError; }
  37. }
  38. public bool IsIdle
  39. {
  40. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  41. }
  42. public TaskType Task => _task;
  43. private PMEntity _entity = null;
  44. private ModuleName _taskRobot;
  45. private EnumTransferType _taskTransferType;
  46. //private Hand _taskBlade;
  47. private int _taskSlot;
  48. private int _entityTaskToken = (int)FSM_MSG.NONE;
  49. private DeviceTimer _timerProcess = new DeviceTimer();
  50. private JetPM _pm;
  51. private WaferSize _taskSize;
  52. private float _paramTemp;
  53. public float Temperature
  54. {
  55. get
  56. {
  57. if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  58. {
  59. return _pm.CoolantOutletTempFB;
  60. }
  61. return _pm.SubstrateTempFB;
  62. }
  63. }
  64. public RD_TRIG IdlePurgeTrig { get; set; }
  65. public Stopwatch IdlePurgeTimer { get; set; }
  66. public int IdlePurgeTime { get; set; }
  67. public int IdlePurgeNextRunTime { get; set; }
  68. public RD_TRIG IdleCleanTrig { get; set; }
  69. public Stopwatch IdleCleanTimer { get; set; }
  70. public int IdleCleanTime { get; set; }
  71. public int IdleCleanNextRunTime { get; set; }
  72. private bool _waitPreJobClean;
  73. private bool _waitCompletejobClean;
  74. private R_TRIG _trigIdleCleanFailed = new R_TRIG();
  75. private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
  76. public RD_TRIG PreJobCleanTrig { get; set; }
  77. public Stopwatch PreJobCleanTimer { get; set; }
  78. public int PreJobCleanTime { get; set; }
  79. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  80. {
  81. switch (chamber)
  82. {
  83. case ModuleName.PMA:
  84. _entity = Singleton<RouteManager>.Instance.PMA;
  85. break;
  86. case ModuleName.PMB:
  87. _entity = Singleton<RouteManager>.Instance.PMB;
  88. break;
  89. }
  90. _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
  91. IdlePurgeTrig = new RD_TRIG();
  92. IdlePurgeTimer = new Stopwatch();
  93. IdleCleanTrig = new RD_TRIG();
  94. IdleCleanTimer = new Stopwatch();
  95. PreJobCleanTrig = new RD_TRIG();
  96. PreJobCleanTimer = new Stopwatch();
  97. }
  98. public void InitClean()
  99. {
  100. DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  101. DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  102. }
  103. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  104. {
  105. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, WaferManager.Instance.GetWafer(ModuleHelper.Converter(_module),0).Size)
  106. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  107. }
  108. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  109. {
  110. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, WaferManager.Instance.GetWafer(robot, 0).Size)
  111. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  112. }
  113. public bool IsReadyForPlace(ModuleName robot, int slot, Hand blade, WaferSize size)
  114. {
  115. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, size)
  116. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  117. }
  118. public bool IsTemperatureReady(float temp)
  119. {
  120. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  121. }
  122. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  123. {
  124. _task = TaskType.PrepareTransfer;
  125. _taskRobot = robot;
  126. _taskSlot = slot;
  127. _taskTransferType = type;
  128. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  129. if (type == EnumTransferType.Pick)
  130. {
  131. _taskSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(_module), 0).Size;
  132. }
  133. else
  134. {
  135. _taskSize = WaferManager.Instance.GetWafer(robot, 0).Size;
  136. }
  137. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  138. return _entityTaskToken != (int)FSM_MSG.NONE;
  139. }
  140. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  141. {
  142. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  143. _taskTransferType == type;
  144. }
  145. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  146. {
  147. _task = TaskType.PrepareTransfer;
  148. _taskRobot = robot;
  149. _taskSlot = slot;
  150. _taskSize = size;
  151. _taskTransferType = type;
  152. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  153. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  154. return _entityTaskToken != (int)FSM_MSG.NONE;
  155. }
  156. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  157. {
  158. StopWaitTransfer(robot);
  159. _task = TaskType.PostTransfer;
  160. _taskRobot = robot;
  161. _taskSlot = slot;
  162. _taskTransferType = type;
  163. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  164. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  165. return _entityTaskToken != (int)FSM_MSG.NONE;
  166. }
  167. public override bool PostTransfer(ModuleName robot)
  168. {
  169. StopWaitTransfer(robot);
  170. _task = TaskType.PostTransfer;
  171. _taskRobot = robot;
  172. _taskSlot = _inTransferSlot;
  173. _taskTransferType = _inTransferType;
  174. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  175. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  176. return _entityTaskToken != (int)FSM_MSG.NONE;
  177. }
  178. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  179. {
  180. _task = TaskType.Process;
  181. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  182. if (SC.GetValue<bool>("System.IsATMMode"))
  183. {
  184. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  185. _timerProcess.Start(time * 1000);
  186. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  187. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  188. return true;
  189. }
  190. else
  191. {
  192. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
  193. return _entityTaskToken != (int)FSM_MSG.NONE;
  194. }
  195. }
  196. public override bool Preheating(float temperature)
  197. {
  198. _task = TaskType.Heating;
  199. _paramTemp = temperature;
  200. _entityTaskToken = _entity.InvokePreHeat(temperature);
  201. LogTaskStart(_task, $"preheat to {temperature}");
  202. return _entityTaskToken != (int)FSM_MSG.NONE;
  203. }
  204. public bool CheckTaskDone()
  205. {
  206. bool ret = false;
  207. switch (_task)
  208. {
  209. case TaskType.None:
  210. ret = true;
  211. break;
  212. case TaskType.PrepareTransfer:
  213. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType, _taskSlot, _taskSize);
  214. break;
  215. case TaskType.PostTransfer:
  216. ret = _entity.CheckAcked(_entityTaskToken);
  217. break;
  218. case TaskType.Heating:
  219. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  220. break;
  221. case TaskType.Process:
  222. case TaskType.IdlePurgeProcess:
  223. case TaskType.IdleCleanProcess:
  224. case TaskType.PreJobProcess:
  225. case TaskType.CompleteJobProcess:
  226. if (SC.GetValue<bool>("System.IsATMMode"))
  227. {
  228. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  229. if (ret)
  230. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  231. }
  232. else
  233. {
  234. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsProcessed();
  235. }
  236. break;
  237. }
  238. if (ret && _task != TaskType.None)
  239. {
  240. LogTaskDone(_task, "");
  241. _task = TaskType.None;
  242. }
  243. return ret;
  244. }
  245. public bool Monitor()
  246. {
  247. return true;
  248. }
  249. public void SetPMAuto()
  250. {
  251. _entity.SetAuto();
  252. }
  253. public bool IdlePurgeProcess(string recipeName)
  254. {
  255. _task = TaskType.IdlePurgeProcess;
  256. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  257. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  258. return _entityTaskToken != (int)FSM_MSG.NONE;
  259. }
  260. public bool IdleCleanProcess(string recipeName)
  261. {
  262. _task = TaskType.IdleCleanProcess;
  263. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  264. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  265. return _entityTaskToken != (int)FSM_MSG.NONE;
  266. }
  267. public void PreJobClean()
  268. {
  269. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  270. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  271. // var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  272. _waitPreJobClean = enableJobClean && enablePreJobClean;
  273. }
  274. public bool PreJobProcess(string recipeName)
  275. {
  276. _task = TaskType.PreJobProcess;
  277. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  278. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  279. return _entityTaskToken != (int)FSM_MSG.NONE;
  280. }
  281. public void CompleteJobClean()
  282. {
  283. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  284. // var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  285. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  286. _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
  287. }
  288. public bool CompleteJobProcess(string recipeName)
  289. {
  290. _task = TaskType.CompleteJobProcess;
  291. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  292. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  293. return _entityTaskToken != (int)FSM_MSG.NONE;
  294. }
  295. #region clean task
  296. internal void ResetIdlePurgeTime()
  297. {
  298. IdlePurgeTimer.Restart();
  299. }
  300. internal void ResetIdleCleanTime()
  301. {
  302. IdleCleanTimer.Restart();
  303. }
  304. public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
  305. {
  306. if (resetPurge)
  307. {
  308. IdlePurgeTrig.RST = true;
  309. IdlePurgeTimer.Stop();
  310. IdlePurgeTime = 0;
  311. }
  312. if (resetClean)
  313. {
  314. IdleCleanTrig.RST = true;
  315. IdleCleanTimer.Stop();
  316. IdleCleanTime = 0;
  317. }
  318. if (jobClean)
  319. {
  320. _waitPreJobClean = false;
  321. _waitCompletejobClean = false;
  322. PreJobCleanTrig.RST = true;
  323. PreJobCleanTimer.Stop();
  324. }
  325. return true;
  326. }
  327. public void MonitorCleanTasks()
  328. {
  329. var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
  330. var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
  331. var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
  332. #region Idle Purge
  333. IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
  334. if (IdlePurgeTrig.R)
  335. {
  336. LOG.Write($"{Module} idle purge start calc elapse time");
  337. IdlePurgeTimer.Restart();
  338. }
  339. if (IdlePurgeTrig.T)
  340. {
  341. LOG.Write($"{Module} idle purge stopped calc elapse time");
  342. ResetClean(true, false, false);
  343. }
  344. if (IdlePurgeTimer.IsRunning)
  345. {
  346. IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
  347. int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
  348. var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
  349. if (nextRunTime < 0)
  350. nextRunTime = 0;
  351. if (enablePurge)
  352. {
  353. if (nextRunTime <= 0 && IsAvailable)
  354. {
  355. var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
  356. if (string.IsNullOrEmpty(recipe))
  357. {
  358. _trigIdlePurgeFailed.CLK = true;
  359. LOG.Write($"{Module} Idle purge can not run, recipe is empty");
  360. ResetClean(true, false, false);
  361. }
  362. else if (hasWafer)
  363. {
  364. _trigIdlePurgeFailed.CLK = true;
  365. LOG.Write($"{Module} Idle purge can not run, has wafer");
  366. ResetClean(true, false, false);
  367. }
  368. else
  369. {
  370. _trigIdlePurgeFailed.CLK = false;
  371. LOG.Write($"{Module} Start run idle purge recipe {recipe}");
  372. IdlePurgeProcess("ALD\\Process\\" + recipe);
  373. }
  374. if (_trigIdlePurgeFailed.Q)
  375. {
  376. EV.PostWarningLog(Module.ToString(), "Can not run idle purge recipe");
  377. }
  378. }
  379. }
  380. else
  381. {
  382. nextRunTime = 0;
  383. }
  384. IdlePurgeNextRunTime = nextRunTime;
  385. }
  386. else
  387. {
  388. IdlePurgeNextRunTime = 0;
  389. }
  390. #endregion
  391. #region Idle Clean
  392. IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
  393. if (IdleCleanTrig.R)
  394. {
  395. LOG.Write($"{Module} idle clean start calc elapse time");
  396. IdleCleanTimer.Restart();
  397. }
  398. if (IdleCleanTrig.T)
  399. {
  400. LOG.Write($"{Module} idle clean stopped calc elapse time");
  401. ResetClean(false, true, false);
  402. }
  403. if (IdleCleanTimer.IsRunning)
  404. {
  405. IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
  406. int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  407. var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
  408. if (nextRunTime < 0)
  409. nextRunTime = 0;
  410. if (enableClean)
  411. {
  412. if (nextRunTime <= 0 && IsAvailable)
  413. {
  414. var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  415. if (string.IsNullOrEmpty(recipe))
  416. {
  417. _trigIdleCleanFailed.CLK = true;
  418. LOG.Write($"{Module} Idle clean can not run, recipe is empty");
  419. ResetClean(false, true, false);
  420. }
  421. else if (hasWafer)
  422. {
  423. _trigIdleCleanFailed.CLK = true;
  424. LOG.Write($"{Module} Idle clean can not run, has wafer");
  425. ResetClean(false, true, false);
  426. }
  427. else
  428. {
  429. _trigIdleCleanFailed.CLK = false;
  430. LOG.Write($"{Module} Start run idle Clean recipe {recipe}");
  431. IdleCleanProcess($"{Module}\\" + recipe);
  432. }
  433. if (_trigIdleCleanFailed.Q)
  434. {
  435. EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
  436. }
  437. }
  438. }
  439. else
  440. {
  441. nextRunTime = 0;
  442. }
  443. IdleCleanNextRunTime = nextRunTime;
  444. }
  445. else
  446. {
  447. IdleCleanNextRunTime = 0;
  448. }
  449. #endregion
  450. #region PreJob Clean
  451. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  452. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  453. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  454. if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
  455. {
  456. var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
  457. if (string.IsNullOrEmpty(recipe))
  458. {
  459. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
  460. }
  461. else if (hasWafer)
  462. {
  463. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
  464. }
  465. else
  466. {
  467. EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
  468. CompleteJobProcess($"{Module}\\" + recipe);
  469. }
  470. _waitCompletejobClean = false;
  471. }
  472. PreJobCleanTrig.CLK = enableJobClean && enablePreJobClean && IsIdle;
  473. if (PreJobCleanTrig.R)
  474. {
  475. PreJobCleanTimer.Restart();
  476. }
  477. if (PreJobCleanTrig.T)
  478. {
  479. ResetClean(false, false, true);
  480. }
  481. if (PreJobCleanTimer.IsRunning && _waitPreJobClean)
  482. {
  483. PreJobCleanTime = (int)PreJobCleanTimer.ElapsedMilliseconds / 1000;
  484. int PreJobCleanIdleTimeSP = SC.GetValue<int>($"{Module}.JobClean.IdleCleanTime");
  485. if (PreJobCleanTime >= PreJobCleanIdleTimeSP)
  486. {
  487. var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
  488. if (string.IsNullOrEmpty(recipe))
  489. {
  490. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
  491. }
  492. else if (hasWafer)
  493. {
  494. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
  495. }
  496. else
  497. {
  498. EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
  499. PreJobProcess($"{Module}\\" + recipe);
  500. }
  501. }
  502. }
  503. #endregion
  504. }
  505. #endregion
  506. }
  507. }