Virgo_scheduler/VirgoRT/Modules/PMs/PMPrepareTransferRoutine.cs

using System;
using Aitex.Core.Common;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using VirgoCommon;
using VirgoRT.Devices;

namespace VirgoRT.Modules.PMs
{
    class PMPrepareTransferRoutine : PMRoutineBase, IRoutine
    {
        enum RoutineStep
        {
            LiftUpDown,
            Vent,
            VentDelay,
            SetGuidePin,
            CheckTemp,
            SetSlitDoor,
            SlitDoorDelay,
            PrepareTransferPlace,
            PrepareTransferPick,
            kEnd
        }

        private EnumTransferType _TransferType;

        private int _timeout;
        private readonly VentRoutine _ventRoutine;
        private WaferSize _ws;
        private float _temp;
        private double _tolerance;
        private double _OffsetTemp = 0.0f;

        public PMPrepareTransferRoutine(JetPM chamber, VentRoutine _vRoutine) : base(chamber)
        {
            Name = "PrepareTransfer";

            _ventRoutine = _vRoutine;
        }

        public Result Init(EnumTransferType type, float temp, WaferSize size)
        {
            if (type == EnumTransferType.Place)
            {
                Name = $"Prepare Place {_ws}";
            }
            else if (type == EnumTransferType.Pick)
            {
                size = WaferManager.Instance.GetWafer(_chamber.Module, 0).Size;
                Name = $"Prepare Pick {_ws}";
            }

            _TransferType = type;
            _ws = size;
            _temp = temp;

            return Result.DONE;
        }
        public Result Init(EnumTransferType type, float temp)
        {
            WaferSize ws = WaferSize.WS0;
            if (type == EnumTransferType.Place)
            {
                ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size;
            }
            else if (_TransferType == EnumTransferType.Pick)
            {
                ws = WaferManager.Instance.GetWafer(_chamber.Module, 0).Size;
            }

            return Init(type, temp, ws);
        }

        public Result Start(params object[] objs)
        {
            Reset();

            _timeout = SC.GetValue<int>($"{Module}.PrepareTransferTimeout");

            _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceToTarget");
            _OffsetTemp = SC.GetValue<double>($"{Module}.Chiller.ChillerTemperatureOffset");
            Notify($"开始, 准备 {(_TransferType == EnumTransferType.Place ? "放" : _TransferType == EnumTransferType.Pick ? "取" : "动作未知")}{_ws} 寸片, ");
            return Result.RUN;
        }

        public Result Monitor()
        {
            try
            {
                // vent
                if (!SC.GetValue<bool>("System.IsATMMode") && _chamber.IsSlitDoorClosed)
                {
                    ExecuteRoutine((int)RoutineStep.Vent, _ventRoutine);
                }

                if (_TransferType == EnumTransferType.Place)
                {
                    if (_temp > 10)
                    {
                        if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
                        {
                            CheckCoolantTemp((int)RoutineStep.CheckTemp, _temp, _OffsetTemp, _timeout, _tolerance);
                        }
                        else
                        {
                            CheckSubstrateTemp((int)RoutineStep.CheckTemp, _temp, _timeout, _tolerance);
                        }
                    }
                    PMPreparePlace((int)RoutineStep.PrepareTransferPlace, false, _ws, true, _timeout);
                }
                else if (_TransferType == EnumTransferType.Pick)
                {
                    PMPreparePick((int)RoutineStep.PrepareTransferPick, _TransferType == EnumTransferType.Pick, _ws, true, _timeout);
                }

                End((int)RoutineStep.kEnd);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                Notify("出错");
                return Result.FAIL;
            }
            catch (Exception ex)
            {
                Stop(ex.Message);
                return Result.FAIL;
            }

            Notify("结束");
            return Result.DONE;
        }

        public override void Abort()
        {
        }

        public void PMPreparePlace(int id, bool isUp, WaferSize ws, bool isOpen, int timeout)
        {
            bool Func()
            {
                Notify($"设置 liftPin {(isUp ? "升" : "降")}, 设置 {ws} Pin 升, 设置 SlitDoor {(isOpen ? "开" : "关")}");

                if (!_chamber.SetLiftPin(isUp ? MovementPosition.Up : MovementPosition.Down, out string reason))
                {
                    Stop(reason);
                    return false;
                }

                _chamber.PrepareGuidePinForPlace(ws);

                //_chamber.SetSlitDoor(isOpen, out string reason1);

                return true;
            }
            bool? Check1()
            {
                bool res1 = isUp ? _chamber.CheckLiftUp() : _chamber.CheckLiftDown();
                bool res2 = _chamber.CheckGuidePinIsReadyForTransfer(ws);

                //bool res3 = isOpen ? _chamber.CheckSlitDoorOpen() : _chamber.CheckSlitDoorClose();

                return res1 && res2 /*&& res3*/;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"无法 放片准备 in {timeout} seconds");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void PMPreparePick(int id, bool isUp, WaferSize ws, bool isOpen, int timeout)
        {
            bool Func()
            {
                Notify($"设置 LiftPin {(isUp ? "升" : "降")}, 设置 SlitDoor {(isOpen ? "开" : "关")}");

                if (!_chamber.SetLiftPin(isUp ? MovementPosition.Up : MovementPosition.Down, out string reason))
                {
                    Stop(reason);
                    return false;
                }

                _chamber.PrepareGuidePinForPlace(ws);


                //_chamber.SetSlitDoor(isOpen, out string reason1);

                return true;
            }
            bool? Check1()
            {
                bool res1 = isUp ? _chamber.CheckLiftUp() : _chamber.CheckLiftDown();
               
                //bool res2 = isOpen ? _chamber.CheckSlitDoorOpen() : _chamber.CheckSlitDoorClose();

                bool res3 = _chamber.CheckGuidePinIsReadyForTransfer(ws);

                return res1 /*&& res2*/ && res3;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"无法 取片准备 in {timeout} seconds");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }
 

        public void SetGuidePinUp(int id, WaferSize ws, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
                {
                    Notify($"set Guide pin {_chamber.Name} " + "升");

                    _chamber.PrepareGuidePinForPlace(ws);

                    return true;
                }, () =>
                {
                    return _chamber.CheckGuidePinIsReadyForTransfer(ws);
                }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"can not complete in {timeout} seconds");
                    throw new RoutineFaildException();
                }
                else
                    throw new RoutineBreakException();
            }
        }
    }
}