ManualTransfer.cs 13 KB

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  1. using System.Collections.Generic;
  2. using System.Diagnostics;
  3. using Aitex.Core.Common;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.Util;
  6. using Aitex.Core.RT.Event;
  7. using Aitex.Core.RT.SCCore;
  8. using MECF.Framework.Common.Equipment;
  9. using VirgoRT.Scheduler;
  10. using Aitex.Sorter.Common;
  11. using MECF.Framework.Common.Schedulers;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using VirgoRT.Modules.PMs;
  14. using VirgoRT.Modules.Schedulers;
  15. namespace VirgoRT.Modules
  16. {
  17. internal interface IManualTransferRoutine : IRoutine
  18. {
  19. }
  20. public class MoveItemEx : MoveItem
  21. {
  22. public int CoolingTime { get; set; }
  23. public MoveItemEx(ModuleName sourceModule, int sourceSlot, ModuleName destinationModule, int destinationSlot, int coolingTime)
  24. : base(sourceModule, sourceSlot, destinationModule, destinationSlot, Hand.Blade1)
  25. {
  26. CoolingTime = coolingTime;
  27. }
  28. }
  29. public class ManualTransfer : TransferModule
  30. {
  31. private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();
  32. private IRoutine _activeTask;
  33. public Result Start(object[] objs)
  34. {
  35. _moveTaskQueue.Clear();
  36. ModuleName source = (ModuleName)objs[0];
  37. int ss = (int)objs[1];
  38. ModuleName target = (ModuleName)objs[2];
  39. int ds = (int)objs[3];
  40. bool autoAlign = (bool)objs[4];
  41. int alignAngle = (int)objs[5];
  42. bool autoCooling = (bool)objs[6];
  43. int coolingTime = (int)objs[7];
  44. if (!WaferManager.Instance.CheckWafer(source, ss, WaferStatus.Normal))
  45. {
  46. EV.PostWarningLog("System", $"source {source} slot {ss+1} no normal wafer");
  47. return Result.FAIL;
  48. }
  49. if (!WaferManager.Instance.CheckNoWafer(target, ds))
  50. {
  51. EV.PostWarningLog("System", "destination has wafer");
  52. return Result.FAIL;
  53. }
  54. if (source!=ModuleName.EfemRobot && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  55. {
  56. EV.PostWarningLog("System", "robot has wafer");
  57. return Result.FAIL;
  58. }
  59. if (autoAlign && !ModuleHelper.IsAligner(source) && !ModuleHelper.IsAligner(target) )
  60. {
  61. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  62. {
  63. EV.PostWarningLog("System", "Can not transfer, aligner has wafer, can not auto align");
  64. return Result.FAIL;
  65. }
  66. ModuleName aligner = WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0)
  67. ? ModuleName.Aligner2
  68. : ModuleName.Aligner1;
  69. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, aligner, 0, 1)));
  70. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, target, ds, 0)));
  71. }
  72. else if(autoCooling && !ModuleHelper.IsCooling(source) && !ModuleHelper.IsCooling(target))
  73. {
  74. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  75. {
  76. EV.PostWarningLog("System", "Can not transfer, cooling has wafer, can not auto cooling");
  77. return Result.FAIL;
  78. }
  79. ModuleName cooling = WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0)
  80. ? ModuleName.Cooling2
  81. : ModuleName.Cooling1;
  82. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, 0, coolingTime)));
  83. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, target, ds, 0)));
  84. }
  85. else
  86. {
  87. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, target, ds, coolingTime)));
  88. }
  89. _activeTask = _moveTaskQueue.Dequeue();
  90. return _activeTask.Start();
  91. }
  92. public Result Monitor(object[] objs)
  93. {
  94. System.Diagnostics.Debug.Assert(_activeTask != null, "mover should not be null, call start first");
  95. Result ret = _activeTask.Monitor();
  96. if (ret == Result.FAIL)
  97. return ret;
  98. if (ret == Result.DONE)
  99. {
  100. if (_moveTaskQueue.Count > 0)
  101. {
  102. _activeTask = _moveTaskQueue.Dequeue();
  103. return _activeTask.Start();
  104. }
  105. return Result.DONE;
  106. }
  107. return Result.RUN;
  108. }
  109. public void Clear()
  110. {
  111. _moveTaskQueue.Clear();
  112. _activeTask = null;
  113. }
  114. }
  115. public class EfemRobotMover : TransferModule, IRoutine
  116. {
  117. private MoveItemEx _moveTask;
  118. private SchedulerModule _source;
  119. private SchedulerModule _destination;
  120. public EfemRobotMover(MoveItemEx moveTask)
  121. {
  122. _moveTask = moveTask;
  123. }
  124. public Result Start()
  125. {
  126. _source = GetModule(_moveTask.SourceModule.ToString());
  127. _destination = GetModule(_moveTask.DestinationModule.ToString());
  128. System.Diagnostics.Debug.Assert(_source != null, $"{_moveTask.SourceModule} not valid");
  129. System.Diagnostics.Debug.Assert(_destination != null, $"{_moveTask.DestinationModule} not valid");
  130. if(!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  131. {
  132. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} slot {_moveTask.SourceSlot + 1} has not wafer");
  133. return Result.FAIL;
  134. }
  135. if (WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  136. {
  137. EV.PostWarningLog("System", $"Failed transfer, destination {_moveTask.DestinationModule} slot {_moveTask.DestinationSlot + 1} has wafer");
  138. return Result.FAIL;
  139. }
  140. if (!_source.IsAvailable)
  141. {
  142. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  143. return Result.FAIL;
  144. }
  145. if (ModuleHelper.IsLoadPort(_source.Module))
  146. {
  147. if (!(_source as SchedulerLoadPort).CheckReadyTransfer())
  148. {
  149. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  150. return Result.FAIL;
  151. }
  152. }
  153. if (!_destination.IsAvailable)
  154. {
  155. EV.PostWarningLog("System", $"Failed transfer, Destination {_moveTask.DestinationModule} not ready");
  156. return Result.FAIL;
  157. }
  158. if (ModuleHelper.IsLoadPort(_destination.Module))
  159. {
  160. if (!(_destination as SchedulerLoadPort).CheckReadyTransfer())
  161. {
  162. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.DestinationModule} not ready");
  163. return Result.FAIL;
  164. }
  165. }
  166. if (!_efemRobot.IsAvailable)
  167. {
  168. EV.PostWarningLog("System", $"Failed transfer, EFEM Robot not ready");
  169. return Result.FAIL;
  170. }
  171. //if (ModuleHelper.IsAligner(_source.Module) || ModuleHelper.IsCooling(_source.Module))
  172. // _source.Cooling(_moveTask.CoolingTime);
  173. //if (ModuleHelper.IsAligner(_destination.Module) || ModuleHelper.IsCooling(_destination.Module))
  174. // _destination.Cooling(_moveTask.CoolingTime);
  175. if (_moveTask.SourceModule == ModuleName.EfemRobot)
  176. _moveTask.RobotHand = (Hand)_moveTask.SourceSlot;
  177. if (_moveTask.DestinationModule == ModuleName.EfemRobot)
  178. _moveTask.RobotHand = (Hand)_moveTask.DestinationSlot;
  179. return Result.RUN;
  180. }
  181. public Result Start(params object[] objs)
  182. {
  183. return this.Start();
  184. }
  185. public Result Monitor()
  186. {
  187. if (_source.IsError || _destination.IsError || _efemRobot.IsError)
  188. return Result.FAIL;
  189. if (!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot) &&
  190. WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot) &&
  191. _efemRobot.IsAvailable)
  192. {
  193. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  194. {
  195. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  196. //_source.StopWaitTransfer(ModuleName.EfemRobot);
  197. }
  198. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  199. {
  200. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  201. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  202. }
  203. if (_source.IsAvailable && _destination.IsAvailable)
  204. {
  205. if (_moveTask.CoolingTime > 0 && ModuleHelper.IsCooling(_moveTask.DestinationModule))
  206. {
  207. _destination.Cooling(_moveTask.CoolingTime);
  208. _moveTask.CoolingTime = 0;
  209. return Result.RUN;
  210. }
  211. return Result.DONE;
  212. }
  213. return Result.RUN;
  214. }
  215. if (!_efemRobot.IsAvailable)
  216. return Result.RUN;
  217. //pick
  218. if (_moveTask.SourceModule != ModuleName.EfemRobot)
  219. {
  220. if (WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  221. {
  222. if (!_source.IsAvailable)
  223. return Result.RUN;
  224. if (!_source.IsReadyForPick(ModuleName.EfemRobot, _moveTask.SourceSlot, Hand.Blade1))
  225. {
  226. if (!_source.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, _moveTask.SourceSlot))
  227. return Result.FAIL;
  228. }
  229. if (!_source.IsAvailable)
  230. return Result.RUN;
  231. if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  232. {
  233. if (!_efemRobot.Pick(_moveTask.SourceModule, _moveTask.SourceSlot, _moveTask.RobotHand))
  234. {
  235. return Result.FAIL;
  236. }
  237. _source.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  238. }
  239. if (!_efemRobot.IsAvailable)
  240. return Result.RUN;
  241. }
  242. else
  243. {
  244. if (!_efemRobot.IsAvailable)
  245. return Result.RUN;
  246. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  247. {
  248. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  249. }
  250. }
  251. }
  252. //place
  253. if (_moveTask.DestinationModule != ModuleName.EfemRobot)
  254. {
  255. if (!_destination.IsAvailable)
  256. return Result.RUN;
  257. if (!WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  258. {
  259. if (!_destination.IsReadyForPlace(ModuleName.EfemRobot, _moveTask.DestinationSlot, Hand.Blade1))
  260. {
  261. if (!_destination.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place,
  262. _moveTask.DestinationSlot))
  263. return Result.FAIL;
  264. }
  265. if (!_destination.IsAvailable)
  266. return Result.RUN;
  267. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  268. {
  269. if (!_efemRobot.Place(_moveTask.DestinationModule, _moveTask.DestinationSlot, _moveTask.RobotHand))
  270. return Result.FAIL;
  271. _destination.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  272. }
  273. if (!_efemRobot.IsAvailable)
  274. return Result.RUN;
  275. }
  276. else
  277. {
  278. if (!_efemRobot.IsAvailable)
  279. return Result.RUN;
  280. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  281. {
  282. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  283. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  284. }
  285. }
  286. }
  287. return Result.RUN;
  288. }
  289. public void Abort()
  290. {
  291. Clear();
  292. }
  293. public void Clear()
  294. {
  295. _efemRobot.ResetTask();
  296. _source?.ResetTask();
  297. _destination?.ResetTask();
  298. }
  299. }
  300. }