using System; using System.Collections.Generic; using System.Xml; using Aitex.Common.Util; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; namespace VirgoRT.Modules { /// /// Recipe head /// public class RecipeHead { public string RecipeVariation { get; set; } public string CreationTime { get; set; } public string LastRevisionTime { get; set; } public string CreatedBy { get; set; } public string LastModifiedBy { get; set; } public string PressureMode { get; set; } public string Description { get; set; } public string Barcode { get; set; } public string BasePressure { get; set; } public string PumpDownLimit { get; set; } //public string ElectrodeTemp { get; set; } //public string HeaterTemp { get; set; } public string PurgeActive { get; set; } public string MatchPositionC1 { get; set; } public string MatchPositionC2 { get; set; } public string SubstrateTemp { get; set; } public string PumpingPinState { get; set; } public string NotToPurgeOrVent { get; set; } //For keep vacuum after idle clean public string VentingPinState { get; set; } public string PinDownPressure { get; set; } } public class RecipeStep { public string StepName; public double StepTime; public bool IsJumpStep; public bool IsLoopStartStep; public bool IsLoopEndStep; public int LoopCount; public string EndBy; //public double EndByValue; public Dictionary RecipeCommands = new Dictionary(); } public class Recipe { /// /// 当前Recipe Run 记录对应的Guid /// 每个Recipe Run 都对应有一个唯一的Guid /// public static Guid CurrentRecipeRunGuid; /// /// 解析工艺程序文件 /// /// 工艺程序名 /// xml格式的工艺数据内容 /// 返回解析的工艺数据变量 /// True:解析成功 | False:解析失败 public static bool Parse(string recipe, out RecipeHead recipeHead, out List recipeData) { recipeHead = new RecipeHead(); recipeData = new List(); try { //获取工艺程序文件中允许的命令字符串列表 //目的:如果工艺程序文件中含有规定之外的命令,则被禁止执行 HashSet recipeAllowedCommands = new HashSet(); XmlDocument rcpFormatDoc = new XmlDocument(); string recipeSchema = PathManager.GetCfgDir() + "RecipeFormat.xml"; rcpFormatDoc.Load(recipeSchema); XmlNodeList rcpItemNodeList = rcpFormatDoc.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step"); foreach (XmlElement item in rcpItemNodeList) recipeAllowedCommands.Add(item.Attributes["ControlName"].Value); //获取工艺程序文件中所有步的内容 XmlDocument rcpDataDoc = new XmlDocument(); rcpDataDoc.LoadXml(recipe); recipeHead.PressureMode = rcpDataDoc.DocumentElement.HasAttribute("PressureMode") ? rcpDataDoc.DocumentElement.Attributes["PressureMode"].Value : ""; recipeHead.BasePressure = rcpDataDoc.DocumentElement.HasAttribute("BasePressure") ? rcpDataDoc.DocumentElement.Attributes["BasePressure"].Value : ""; recipeHead.PumpDownLimit = rcpDataDoc.DocumentElement.HasAttribute("PumpDownLimit") ? rcpDataDoc.DocumentElement.Attributes["PumpDownLimit"].Value : ""; recipeHead.PurgeActive = rcpDataDoc.DocumentElement.HasAttribute("PurgeActive") ? rcpDataDoc.DocumentElement.Attributes["PurgeActive"].Value : ""; recipeHead.MatchPositionC1 = rcpDataDoc.DocumentElement.HasAttribute("MatchPositionC1") ? rcpDataDoc.DocumentElement.Attributes["MatchPositionC1"].Value : ""; recipeHead.MatchPositionC2 = rcpDataDoc.DocumentElement.HasAttribute("MatchPositionC2") ? rcpDataDoc.DocumentElement.Attributes["MatchPositionC2"].Value : ""; recipeHead.Barcode = rcpDataDoc.DocumentElement.HasAttribute("Barcode") ? rcpDataDoc.DocumentElement.Attributes["Barcode"].Value : ""; recipeHead.SubstrateTemp = rcpDataDoc.DocumentElement.HasAttribute("SubstrateTemp") ? rcpDataDoc.DocumentElement.Attributes["SubstrateTemp"].Value : ""; recipeHead.PumpingPinState = rcpDataDoc.DocumentElement.HasAttribute("PumpingPinState") ? rcpDataDoc.DocumentElement.Attributes["PumpingPinState"].Value : "Down"; //For keep vacuum after idle clean recipeHead.NotToPurgeOrVent = rcpDataDoc.DocumentElement.HasAttribute("NotToPurgeOrVent") ? rcpDataDoc.DocumentElement.Attributes["NotToPurgeOrVent"].Value : ""; recipeHead.VentingPinState = rcpDataDoc.DocumentElement.HasAttribute("VentingPinState") ? rcpDataDoc.DocumentElement.Attributes["VentingPinState"].Value : "Down"; recipeHead.PinDownPressure = rcpDataDoc.DocumentElement.HasAttribute("PinDownPressure") ? rcpDataDoc.DocumentElement.Attributes["PinDownPressure"].Value : "1000"; XmlNodeList stepNodeList = rcpDataDoc.SelectNodes("/TableRecipeData/Step"); for (int i = 0; i < stepNodeList.Count; i++) { var recipeStep = new RecipeStep(); recipeData.Add(recipeStep); XmlElement stepNode = stepNodeList[i] as XmlElement; Dictionary dic = new Dictionary(); //遍历Step节点 foreach (XmlAttribute att in stepNode.Attributes) { if (recipeAllowedCommands.Contains(att.Name)) { dic.Add(att.Name, att.Value); } } //遍历Step子节点中所有的attribute属性节点 foreach (XmlElement subStepNode in stepNode.ChildNodes) { foreach (XmlAttribute att in subStepNode.Attributes) { if (recipeAllowedCommands.Contains(att.Name)) { dic.Add(att.Name, att.Value); } } //遍历Step子节点的子节点中所有的attribute属性节点 foreach (XmlElement subsubStepNode in subStepNode.ChildNodes) { foreach (XmlAttribute att in subsubStepNode.Attributes) { if (recipeAllowedCommands.Contains(att.Name)) { dic.Add(att.Name, att.Value); } } } } recipeStep.IsJumpStep = true;//!Convert.ToBoolean(dic["Ramp"]); recipeStep.StepName = dic["Name"]; recipeStep.StepTime = double.Parse(dic["Time"]); string loopStr = dic["Loop"]; recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success; recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success; if (recipeStep.IsLoopStartStep) recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty)); else recipeStep.LoopCount = 0; //recipeStep.EndByValue = Convert.ToDouble(dic["EndValue"]); recipeStep.EndBy = dic["EndBy"]; if (recipeStep.EndBy == "EndByRfTime") { recipeStep.StepTime = double.Parse(dic["Rf.SetPowerOnTime"]); if (recipeStep.StepTime <= 0) { LOG.Error("recipe 没有定义RF Power on的时间"); return false; } } int rfPower = (int)Convert.ToDouble(dic["Rf.SetPower"]); dic.Add("Rf.SetPowerOnOff", rfPower > 0 ? "true" : "false"); //dic.Remove("Ramp"); dic.Remove("StepNo"); dic.Remove("Name"); dic.Remove("Loop"); dic.Remove("Time"); dic.Remove("EndBy"); //dic.Remove("EndValue"); dic.Remove("Rf.SetPowerOnTime"); foreach (string key in dic.Keys) recipeStep.RecipeCommands.Add(key, dic[key]); } } catch (Exception ex) { LOG.Write(ex); return false; } return true; } } }