1.修改腔体压力tolerance报警

2.腔体放完片，手臂缩回，liftpin升的状态并delay配置时间，然后关门。

VirgoRT/Devices/EFEM/Efem.cs

@@ -391,7 +391,7 @@ namespace VirgoRT.Devices.EFEM
                 _robotMoveAction = string.Format($"{mp.DestModule}.Placing");
                 AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Up, true, mp.Arm, false));
                 AddAction(new ExtendAction(this, pM, new ExtendParam { Module = mp.DestModule, Arm = mp.Arm, Pos = ExtendPos.P4 }));
-                AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Up, false, mp.Arm, false));
+                AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Up, false, mp.Arm, false, true));
             }
             else
             {
@@ -429,7 +429,7 @@ namespace VirgoRT.Devices.EFEM
                 _robotMoveAction = string.Format($"{placeParam.DestModule}.Placing");
                 AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Up, true, placeParam.Arm, false));
                 AddAction(new ExtendAction(this, pM, new ExtendParam { Module = placeParam.DestModule, Arm = placeParam.Arm, Pos = ExtendPos.P4 }));
-                AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Up, false, placeParam.Arm, false));
+                AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Up, false, placeParam.Arm, false, true));
             }
             else
             {

VirgoRT/Devices/IODevices/IoPressureControl.cs

@@ -4,6 +4,7 @@ using Aitex.Core.Common.DeviceData;
 using Aitex.Core.RT.Device;
 using Aitex.Core.RT.Event;
 using Aitex.Core.RT.IOCore;
+using Aitex.Core.RT.Log;
 using Aitex.Core.RT.OperationCenter;
 using Aitex.Core.RT.SCCore;
 using Aitex.Core.RT.Tolerance;
@@ -200,6 +201,8 @@ namespace VirgoRT.Devices
 
             ThrottleValve.PressureSetpoint = (short)target;
             ThrottleValve.PositionSetpoint = 0.0f;
+
+            TargetPressure = ThrottleValve.PressureSetpoint;
             reason = $"TV pressure set to {target} mTorr";
             return true;
         }

VirgoRT/Devices/JetPM.cs

@@ -809,14 +809,16 @@ namespace VirgoRT.Devices
 
         private Hand _blade;
         private bool _isPick;
+        private bool _isDelay;
 
-        public PinAction(ModuleName mod, JetPM pm, MovementPosition pos, bool isTransferWafer, Hand blade, bool isPick) : base(mod, pm)
+        public PinAction(ModuleName mod, JetPM pm, MovementPosition pos, bool isTransferWafer, Hand blade, bool isPick, bool isDelay = false) : base(mod, pm)
         {
             this.Pos = pos;
             IsWaferTransfered = isTransferWafer;
 
             _blade = blade;
             _isPick = isPick;
+            _isDelay = isDelay;
         }
 
         public override void Execute()
@@ -828,7 +830,7 @@ namespace VirgoRT.Devices
 
             if (PmEntity != null)
             {
-                PmEntity.PostMsg(PMEntity.MSG.MoveLiftPin, Pos, ID, _isPick);
+                PmEntity.PostMsg(PMEntity.MSG.MoveLiftPin, Pos, ID, _isPick, _isDelay);
             }
         }
 

VirgoRT/Modules/PMs/PMEntity.cs

@@ -1011,8 +1011,12 @@ namespace VirgoRT.Module
             MovementPosition pos = (MovementPosition)param[0];
             _ActivatedActionID = (ushort)param[1];
             bool isPick = (bool) param[2];
-
-            if (pos == MovementPosition.Down)   //增加Place & Pick的Delay功能
+            bool isDelay = false;
+            if(param.Length > 3)
+            {
+                isDelay = (bool)param[3];
+            }
+            if (pos == MovementPosition.Down || isDelay)   //增加Place & Pick的Delay功能
             {
                 int pinDownDelayTime = SC.GetValue<int>($"{Module}.PinDownDelayTimePick") * 1000;
 

VirgoRT/Properties/AssemblyInfo.cs

@@ -51,5 +51,5 @@ using System.Windows;
 // 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
 // 方法是按如下所示使用“*”: :
 // [assembly: AssemblyVersion("1.0.*")]
-[assembly: AssemblyVersion("1.0.0.81")]
+[assembly: AssemblyVersion("1.0.0.82")]
 //[assembly: AssemblyFileVersion("1.0.4")]

VirgoRT/ReleaseNotes.txt

@@ -6,6 +6,10 @@
 					 VirgoA 系统更新历史记录
 
 ---------------------------------------------------------------------------------
+2025-10-30 version 1.0.0.82
+1.修改腔体压力tolerance报警
+2.腔体放完片，手臂缩回，liftpin升的状态并delay配置时间，然后关门。
+
 2025-07-27 version 1.0.0.81
 1.PMA 增加430068,430069,430070,430071,430073,430074 SVID
 2.PMB 增加440068,440069,440070,440071,440073,440074 SVID

VirgoUI/Properties/AssemblyInfo.cs

@@ -51,5 +51,5 @@ using System.Windows;
 // You can specify all the values or you can default the Build and Revision Numbers 
 // by using the '*' as shown below:
 // [assembly: AssemblyVersion("1.0.*")]
-[assembly: AssemblyVersion("1.0.0.81")]
+[assembly: AssemblyVersion("1.0.0.82")]
 //[assembly: AssemblyFileVersion("1.0.0.0")]