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- using System;
- using System.Text.RegularExpressions;
- using System.Threading;
- using System.Threading.Tasks;
- using Aitex.Core.UI.Control;
- using MECF.Framework.Simulator.Core.Driver;
- using Aitex.Core.Util;
- using VirgoCommon;
- namespace VirgoSimulator.Devices
- {
- class EfemSimulatorServer : SocketDeviceSimulator
- {
- private const string CMD_PATTERN = "^MOV|^SET|^GET";
- private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
- private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
- private const string ACK = "ACK";
- private string[] _slotMap = new string[25];
- private PeriodicJob _HwThread;
- private bool _bCommReady;
- private bool _isDoorOpen;
- private bool _isPlaced;
- public int WaferSize = 3;
- public string SlotMap
- {
- get { return string.Join("", _slotMap); }
- }
- public bool _isVacuumError { get; set; }
- public bool _isAirError { get; set; }
- public bool _isFlowError { get; set; }
- public bool _isLeak { get; set; }
- public bool _isMaintain { get; set; }
- public bool _isWaferPresent { get; set; }
- public bool _isMaintainDoorOpen { get; private set; }
- public bool _isProtrude1 { get; set; }
- public bool _isProtrude2 { get; set; }
- public EfemSimulatorServer() : base(13001, -1, "\r", ' ')
- {
- for (int i = 0; i < _slotMap.Length; i++)
- _slotMap[i] = "0";
- _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
- }
- private bool OnSendEvent()
- {
- if (!_bCommReady)
- {
- OnWriteMessage("INF:READY/COMM;");
- }
- return true;
- }
- protected override void ProcessUnsplitMessage(string str)
- {
- if (!_bCommReady && str.Contains("ACK:READY/COMM"))
- {
- _bCommReady = true;
- }
- if (!Regex.IsMatch(str, CMD_PATTERN))
- return;
- // 发送ACK 表示收到
- string ack = Regex.Replace(str, CMD_PATTERN, ACK);
- OnWriteMessage(ack);
- // 处理INF
- var a = OnWork(ack);
- }
- internal void SetCassetteDoor(bool doorOpen)
- {
- if (doorOpen != _isDoorOpen)
- {
- _isDoorOpen = doorOpen;
- SendSystemData();
- }
- }
- internal void SetMaintain(bool maintain)
- {
- if (maintain != _isMaintain)
- {
- _isMaintain = maintain;
- SendSystemData();
- }
- }
- internal void SetProtrude1(bool protrude)
- {
- if (protrude != _isProtrude1)
- {
- _isProtrude1 = protrude;
- SendLP1Data();
- }
- }
- internal void SetProtrude2(bool protrude)
- {
- if (protrude != _isProtrude2)
- {
- _isProtrude2 = protrude;
- SendLP2Data();
- }
- }
-
- private async Task OnWork(string strACK)
- {
- // match basic
- Match m1 = Regex.Match(strACK, SCMD);
- // get mock delay time
- string sBasic = m1.Groups[1].Value;
- if (string.IsNullOrEmpty(sBasic))
- return;
- EfemOperation op = EfemConstant.ToOperation(sBasic);
- ushort millionSec = this.SimuOperationTime(op);
- // Sleep
- await Task.Run(() => Thread.Sleep(millionSec));
- // build the INF string
- string strINF = string.Empty;
- switch (EfemConstant.ToOperation(sBasic))
- {
- case EfemOperation.GetWaferInfo:
- strINF = strACK.Replace(ACK, "INF");
- strINF = strINF.TrimEnd(';');
- strINF += "/1111111111111110001111111;";
- break;
- case EfemOperation.Home:
- //string s1 = "EVT:SIGSTAT/P1/00000381/00000000;\rEVT:SIGSTAT/P2/00000381/00000000;\rEVT:SIGSTAT/System/0000FFF7/00000004;\r";
- //strINF = s1 + strACK.Replace(ACK, "INF");
- SendSystemData();
- SendLP1Data();
- SendLP2Data();
- return;
- case EfemOperation.Map:
- Match m2 = Regex.Match(strACK, SFOUP);
- if (m2.Success)
- {
- string map = string.Join("", _slotMap);
- string s2 = $"EVT:MAPDT/P{m2.Groups[1].Value}/{map};\r";
- strINF = s2 + strACK.Replace(ACK, "INF");
- }
- break;
- case EfemOperation.Align:
- case EfemOperation.Pick:
- case EfemOperation.Place:
- case EfemOperation.Orgsh:
- case EfemOperation.Light:
- case EfemOperation.SigStatus:
- default:
- strINF = strACK.Replace(ACK, "INF");
- break;
- }
- OnWriteMessage(strINF);
- }
- private void SendLP1Data()
- {
- uint data = GetLP1Data1();
- string msg = $"EVT:SIGSTAT/P1/{data:X8}/00000000;";
- OnWriteMessage(msg);
- }
- private void SendLP2Data()
- {
- uint data = GetLP2Data1();
- string msg = $"EVT:SIGSTAT/P2/{data:X8}/00000000;";
- OnWriteMessage(msg);
- }
- private void SendSystemData()
- {
- uint data = GetSystemData1();
- string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
- OnWriteMessage(msg);
- }
- private ushort SimuOperationTime(EfemOperation op)
- {
- ushort sec = 0;
- switch (op)
- {
- case EfemOperation.Map:
- case EfemOperation.GetWaferInfo:
- case EfemOperation.Align:
- sec = 300;
- break;
- case EfemOperation.Pick:
- case EfemOperation.Place:
- case EfemOperation.Orgsh:
- sec = 400;
- break;
- case EfemOperation.Light:
- case EfemOperation.SigStatus:
- sec = 200;
- break;
- default:
- sec = 100;
- break;
- }
- return sec;
- }
- public void PlaceCarrier1()
- {
- _isPlaced = true;
- SendLP1Data();
- }
- public void RemoveCarrier1()
- {
- _isPlaced = false;
- SendLP1Data();
- }
- public void PlaceCarrier2()
- {
- _isPlaced = true;
- SendLP2Data();
- }
- public void RemoveCarrier2()
- {
- _isPlaced = false;
- SendLP2Data();
- }
- public void ClearWafer()
- {
- for (int i = 0; i < _slotMap.Length; i++)
- {
- _slotMap[i] = "0";
- }
- }
- public void SetAllWafer()
- {
- for (int i = 0; i < _slotMap.Length; i++)
- {
- _slotMap[i] = "1";
- }
- }
- public void SetUpWafer()
- {
- for (int i = 0; i < _slotMap.Length; i++)
- {
- _slotMap[i] = i > 15 ? "1" : "0";
- }
- }
- public void SetLowWafer()
- {
- for (int i = 0; i < _slotMap.Length; i++)
- {
- _slotMap[i] = i < 10 ? "1" : "0";
- }
- }
- public void RandomWafer()
- {
- Random _rd = new Random();
- for (int i = 0; i < _slotMap.Length; i++)
- {
- _slotMap[i] = (i % 9).ToString();// _rd.Next(0, 10) < 6 ? "0" : "1";
- }
- }
- private uint GetLP1Data1()
- {
- uint data1 = 0x0u;
- data1 |= (_isPlaced ? 0x00000001u : 0x0);
- data1 |= (!_isPlaced ? 0x00000002u : 0x0);
- switch (WaferSize)
- {
- case 3:
- //data1 |= 0x00000040u;
- data1 |= 0x00000080u;
- data1 |= 0x00000100u;
- break;
- case 4:
- data1 |= 0x00000040u;
- //data1 |= 0x00000080u;
- data1 |= 0x00000100u;
- break;
- case 6:
- data1 |= 0x00000040u;
- data1 |= 0x00000080u;
- //data1 |= 0x00000100u;
- break;
- }
- data1 |= (!_isProtrude1) ? 0x00000200u : 0x0;
- return data1;
- }
-
- private uint GetLP2Data1()
- {
- uint data1 = 0x0u;
- data1 |= (_isPlaced ? 0x00000001u : 0x0);
- data1 |= (!_isPlaced ? 0x00000002u : 0x0);
- switch (WaferSize)
- {
- case 3:
- //data1 |= 0x00000040u;
- data1 |= 0x00000080u;
- data1 |= 0x00000100u;
- break;
- case 4:
- data1 |= 0x00000040u;
- //data1 |= 0x00000080u;
- data1 |= 0x00000100u;
- break;
- case 6:
- data1 |= 0x00000040u;
- data1 |= 0x00000080u;
- //data1 |= 0x00000100u;
- break;
- }
- data1 |= (!_isProtrude2) ? 0x00000200u : 0x0;
- return data1;
- }
- private uint GetSystemData1()
- {
- uint data1 = 0x0u;
- //0:
- data1 |= (!_isVacuumError ? 0x00000001u : 0x0);
- //3:
- data1 |= (!_isAirError ? 0x00000004u : 0x0);
- //4 Flow gauge Sensor Warning
- data1 |= (_isFlowError ? 0x00000010u : 0x0);
- //5 Leakage Sensor Warning
- data1 |= (_isLeak ? 0x00000020u : 0x0);
- //6:Door switch Door close
- data1 |= (!_isMaintainDoorOpen ? 0x00000040u : 0x0);
- //7 Drive power Normal
- data1 |= 0x00000080u;
- //8 Differential pressure sensor setting 1 Normal
- data1 |= 0x00000100u;
- //9 Differential pressure sensor setting 1 Normal
- data1 |= 0x00000200u;
- //10 Ionizer alarm Normal
- data1 |= 0x00000400u;
- //11 FFU alarm Normal
- data1 |= 0x00000800u;
- //12 Area sensor(Reserved) Not blocked
- data1 |= 0x00001000u;
- //13 Mode switch RUN
- data1 |= (!_isMaintain ? 0x00002000u : 0x0);
- //14 Robot Wafer Present No presence
- data1 |= (!_isWaferPresent ? 0x00004000u : 0x0);
- ////15 Cassette Door Door Closed
- //data1 |= (!_isDoorOpen ? 0x00008000u : 0x0);
- //15 Cassette Door Door Closed
- data1 |= (!_isDoorOpen ? 0x00080000u : 0x0);
- return data1;
- }
- }
- }
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