Virgo_ST/VirgoSetup/Packages/VirgoRT/Config/_sc.data.bak

<?xml version="1.0" encoding="utf-8"?>
<root>
  <scdata name="System.FA.ConnectionMode" value="Passive" />
  <scdata name="System.FA.LocalIpAddress" value="127.0.0.1" />
  <scdata name="System.FA.LocalPortNumber" value="5000" />
  <scdata name="System.FA.RemoteIpAddress" value="127.0.0.1" />
  <scdata name="System.FA.RemotePortNumber" value="5001" />
  <scdata name="System.FA.T3Timeout" value="45" />
  <scdata name="System.FA.T5Timeout" value="10" />
  <scdata name="System.FA.T6Timeout" value="5" />
  <scdata name="System.FA.T7Timeout" value="10" />
  <scdata name="System.FA.T8Timeout" value="5" />
  <scdata name="System.FA.EnableSpooling" value="False" />
  <scdata name="System.FA.LinkTestInterval" value="30" />
  <scdata name="System.FA.DeviceId" value="0" />
  <scdata name="System.FA.DefaultToOnline" value="True" />
  <scdata name="System.FA.DefaultToRemote" value="True" />
  <scdata name="System.SetUp.EPDInstalled" value="True" />
  <scdata name="System.EndPoint.EndPointDefaultValue" value="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" />
  <scdata name="System.FDC.DataGroupName" value="Fdc" />
  <scdata name="System.FDC.DelayTime" value="1000" />
  <scdata name="System.FDC.SampleInterval" value="100" />
  <scdata name="System.WaferThickness.EnableThickness" value="False" />
  <scdata name="System.WaferThickness.LP1WaferThicknessType" value="Thick" />
  <scdata name="System.WaferThickness.LP2WaferThicknessType" value="Thick" />
  <scdata name="System.Job.BuzzerTimeWhenJobDone" value="10" />
  <scdata name="System.IsSimulatorMode" value="True" />
  <scdata name="System.IsATMMode" value="True" />
  <scdata name="System.IsCycleMode" value="True" />
  <scdata name="System.CycleCount" value="25" />
  <scdata name="System.PMAIsInstalled" value="True" />
  <scdata name="System.PMBIsInstalled" value="False" />
  <scdata name="System.ATMCyclePMDelayTime" value="25" />
  <scdata name="System.MaxTemperatureToleranceTransferWafer" value="25" />
  <scdata name="System.MaxTemperatureToleranceToTarget" value="10" />
  <scdata name="System.SmallGuidePinEnable" value="False" />
  <scdata name="System.MediumGuidePinEnable" value="False" />
  <scdata name="System.EnableTransferFromWS3Slot1" value="False" />
  <scdata name="System.SmallWafer" value="4" />
  <scdata name="System.MidWafer" value="6" />
  <scdata name="System.BigWafer" value="8" />
  <scdata name="System.DisplayPopDialogWhenJobComplete" value="True" />
  <scdata name="System.RecipeSplit" value="True" />
  <scdata name="System.CoolingTimeLimit" value="2" />
  <scdata name="System.EnableDataClean" value="True" />
  <scdata name="System.DataKeepDays" value="90" />
  <scdata name="System.LogsSaveDays" value="90" />
  <scdata name="System.IsEnableCompressLogFileFunc" value="True" />
  <scdata name="System.SingleLogFileMaxSize" value="10" />
  <scdata name="System.LPSlot1UnSupportedWaferSize" value="0" />
  <scdata name="EFEM.EfemRobot.UpperBladeEnable" value="True" />
  <scdata name="EFEM.EfemRobot.LowerBladeEnable" value="True" />
  <scdata name="EFEM.LoadPort.MotionTimeout" value="30" />
  <scdata name="EFEM.LoadPort.HomeTimeout" value="30" />
  <scdata name="EFEM.HomeTimeout" value="30" />
  <scdata name="EFEM.MotionTimeout" value="60" />
  <scdata name="EFEM.AlignTimeout" value="100" />
  <scdata name="EFEM.IPAddress" value="127.0.0.1:13000" />
  <scdata name="EFEM.CheckSideDoorOnEAPMap" value="True" />
  <scdata name="EFEM.CheckCassetteDoorOnEAPMap" value="True" />
  <scdata name="EFEM.EnableGrip" value="True" />
  <scdata name="EFEM.EfemType" value="1" />
  <scdata name="EFEM.IsOpenCST" value="True" />
  <scdata name="EFEM.AutoUnlockAfterUnload" value="False" />
  <scdata name="EFEM.IgnoreWaterFlowError" value="False" />
  <scdata name="EFEM.IgnoreIonizerError" value="False" />
  <scdata name="EFEM.DelayTimeBeforeLiftDown" value="10" />
  <scdata name="Scheduler.GroupWaferBySequence" value="True" />
  <scdata name="Scheduler.IsRunInParallelMode" value="True" />
  <scdata name="PMA.MFCVerification.ChamberVolume" value="7500" />
  <scdata name="PMA.MFCVerification.GasTemperature" value="25" />
  <scdata name="PMA.MFCVerification.TargetPressure" value="9" />
  <scdata name="PMA.MFCVerification.GasFlowTime" value="180" />
  <scdata name="PMA.MFCVerification.MaxDeviation" value="30" />
  <scdata name="PMA.MFCVerification.PressureStableTolerance" value="20" />
  <scdata name="PMA.MFCVerification.FlowStableTolerance" value="20" />
  <scdata name="PMA.MFCVerification.CheckStableTimeout" value="5" />
  <scdata name="PMA.Chiller.EnableChiller" value="False" />
  <scdata name="PMA.Chiller.MFG" value="1" />
  <scdata name="PMA.Chiller.CommunicationType" value="1" />
  <scdata name="PMA.Chiller.Port" value="COM12" />
  <scdata name="PMA.Chiller.ChillerTemperatureOffset" value="10" />
  <scdata name="PMA.Chiller.SetPointLimitMax" value="300" />
  <scdata name="PMA.Chiller.SetPointLimitMin" value="0" />
  <scdata name="PMA.Chiller.EnableToleranceAlarm" value="True" />
  <scdata name="PMA.Chiller.ToleranceAlarmRange" value="20" />
  <scdata name="PMA.Chiller.ToleranceAlarmTime" value="60" />
  <scdata name="PMA.GridChiller.EnableChiller" value="False" />
  <scdata name="PMA.GridChiller.MFG" value="1" />
  <scdata name="PMA.GridChiller.CommunicationType" value="1" />
  <scdata name="PMA.GridChiller.Port" value="COM13" />
  <scdata name="PMA.GridChiller.ChillerTemperatureOffset" value="10" />
  <scdata name="PMA.GridChiller.SetPointLimitMax" value="300" />
  <scdata name="PMA.GridChiller.SetPointLimitMin" value="0" />
  <scdata name="PMA.DryPump.MFG" value="1" />
  <scdata name="PMA.DryPump.CommunicationType" value="1" />
  <scdata name="PMA.DryPump.Port" value="COM32" />
  <scdata name="PMA.DryPump.ChamberForelinePressureThreshold" value="1000" />
  <scdata name="PMA.DryPump.ChamberForelinePressureTimeout" value="20" />
  <scdata name="PMA.Rf.MFG" value="1" />
  <scdata name="PMA.Rf.CommunicationType" value="1" />
  <scdata name="PMA.Rf.Port" value="COM38" />
  <scdata name="PMA.Rf.IPAddress" value="192.168.10.21:502" />
  <scdata name="PMA.Rf.PowerAlarmRange" value="1000" />
  <scdata name="PMA.Rf.PowerAlarmTime" value="10" />
  <scdata name="PMA.Rf.PowerWarningRange" value="1000" />
  <scdata name="PMA.Rf.PowerWarningTime" value="10" />
  <scdata name="PMA.Rf.ReflectPowerAlarmRange" value="1000" />
  <scdata name="PMA.Rf.ReflectPowerAlarmTime" value="10" />
  <scdata name="PMA.Rf.PowerRange" value="3000" />
  <scdata name="PMA.Rf.Coefficient" value="10" />
  <scdata name="PMA.Rf.EnablePulsingFunction" value="False" />
  <scdata name="PMA.Rf.EnableReflectPower" value="False" />
  <scdata name="PMA.Rf.EnableVoltageCurrent" value="False" />
  <scdata name="PMA.Rf.PowerRegulationFactor" value="10" />
  <scdata name="PMA.Rf.RfPowerAlarmRange" value="1000" />
  <scdata name="PMA.Rf.RfPowerAlarmTime" value="3000" />
  <scdata name="PMA.Rf.RFTurnOnTimeout" value="3" />
  <scdata name="PMA.Rf.GeneratorSerialNumber" value="" />
  <scdata name="PMA.Rf.SensorSerialNumber" value="" />
  <scdata name="PMA.Rf.RFPhysicalMaxPower" value="2000" />
  <scdata name="PMA.Rf.CurrentRFMaxPower" value="2000" />
  <scdata name="PMA.Rf.RFCalibratedMaxPower" value="2000" />
  <scdata name="PMA.Rf.EnableCalibration" value="False" />
  <scdata name="PMA.Rf.CalibrationTable" value="100#100;200#200;" />
  <scdata name="PMA.Rf.CalibrationTableDetail" value="" />
  <scdata name="PMA.match.EnableMatch" value="True" />
  <scdata name="PMA.match.MFG" value="1" />
  <scdata name="PMA.match.CommunicationType" value="1" />
  <scdata name="PMA.match.Port" value="COM18" />
  <scdata name="PMA.match.IPAddress" value="192.168.10.21:502" />
  <scdata name="PMA.match.MatchMode" value="1" />
  <scdata name="PMA.match.EnableC1C2Position" value="False" />
  <scdata name="PMA.BiasRf.EnableBiasRF" value="False" />
  <scdata name="PMA.BiasRf.MFG" value="1" />
  <scdata name="PMA.BiasRf.CommunicationType" value="1" />
  <scdata name="PMA.BiasRf.Port" value="COM17" />
  <scdata name="PMA.BiasRf.IPAddress" value="127.0.0.1:502" />
  <scdata name="PMA.BiasRf.PowerAlarmRange" value="500" />
  <scdata name="PMA.BiasRf.PowerAlarmTime" value="10" />
  <scdata name="PMA.BiasRf.PowerWarningRange" value="500" />
  <scdata name="PMA.BiasRf.PowerWarningTime" value="10" />
  <scdata name="PMA.BiasRf.ReflectPowerAlarmRange" value="1" />
  <scdata name="PMA.BiasRf.ReflectPowerAlarmTime" value="1" />
  <scdata name="PMA.BiasRf.PowerRange" value="3000" />
  <scdata name="PMA.BiasRf.Coefficient" value="1" />
  <scdata name="PMA.BiasRf.EnablePulsingFunction" value="False" />
  <scdata name="PMA.BiasRf.EnableReflectPower" value="False" />
  <scdata name="PMA.BiasRf.EnableVoltageCurrent" value="False" />
  <scdata name="PMA.BiasRf.PowerRegulationFactor" value="1" />
  <scdata name="PMA.BiasRf.RfPowerAlarmRange" value="1000" />
  <scdata name="PMA.BiasRf.RfPowerAlarmTime" value="3000" />
  <scdata name="PMA.BiasRf.GeneratorSerialNumber" value="" />
  <scdata name="PMA.BiasRf.SensorSerialNumber" value="" />
  <scdata name="PMA.BiasRf.RFPhysicalMaxPower" value="600" />
  <scdata name="PMA.BiasRf.CurrentRFMaxPower" value="600" />
  <scdata name="PMA.BiasRf.RFCalibratedMaxPower" value="600" />
  <scdata name="PMA.BiasRf.EnableCalibration" value="False" />
  <scdata name="PMA.BiasRf.CalibrationTable" value="100#100;200#200;" />
  <scdata name="PMA.BiasRf.CalibrationTableDetail" value="" />
  <scdata name="PMA.BiasMatch.EnableBiasMatch" value="False" />
  <scdata name="PMA.BiasMatch.MFG" value="1" />
  <scdata name="PMA.BiasMatch.CommunicationType" value="1" />
  <scdata name="PMA.BiasMatch.Port" value="COM19" />
  <scdata name="PMA.BiasMatch.IPAddress" value="127.0.0.1:502" />
  <scdata name="PMA.BiasMatch.MatchMode" value="1" />
  <scdata name="PMA.BiasMatch.EnableBiasC1C2Position" value="True" />
  <scdata name="PMA.MfcGas1.Enable" value="True" />
  <scdata name="PMA.MfcGas1.GasName" value="O2" />
  <scdata name="PMA.MfcGas1.MfcN2Scale" value="5000" />
  <scdata name="PMA.MfcGas1.MfcScaleFactor" value="1" />
  <scdata name="PMA.MfcGas1.DefaultSetPoint" value="100" />
  <scdata name="PMA.MfcGas1.FlowRegulationFactor" value="1" />
  <scdata name="PMA.MfcGas1.MfcEnableAlarm" value="True" />
  <scdata name="PMA.MfcGas1.MfcAlarmRange" value="10" />
  <scdata name="PMA.MfcGas1.MfcAlarmTime" value="10" />
  <scdata name="PMA.MfcGas1.MfcWarningRange" value="10" />
  <scdata name="PMA.MfcGas1.MfcWarningTime" value="10" />
  <scdata name="PMA.MfcGas2.Enable" value="True" />
  <scdata name="PMA.MfcGas2.GasName" value="N2" />
  <scdata name="PMA.MfcGas2.MfcN2Scale" value="2000" />
  <scdata name="PMA.MfcGas2.MfcScaleFactor" value="1" />
  <scdata name="PMA.MfcGas2.DefaultSetPoint" value="100" />
  <scdata name="PMA.MfcGas2.FlowRegulationFactor" value="1" />
  <scdata name="PMA.MfcGas2.MfcEnableAlarm" value="True" />
  <scdata name="PMA.MfcGas2.MfcAlarmRange" value="10" />
  <scdata name="PMA.MfcGas2.MfcAlarmTime" value="10" />
  <scdata name="PMA.MfcGas2.MfcWarningRange" value="10" />
  <scdata name="PMA.MfcGas2.MfcWarningTime" value="10" />
  <scdata name="PMA.MfcGas3.Enable" value="True" />
  <scdata name="PMA.MfcGas3.GasName" value="AR" />
  <scdata name="PMA.MfcGas3.MfcN2Scale" value="2000" />
  <scdata name="PMA.MfcGas3.MfcScaleFactor" value="1" />
  <scdata name="PMA.MfcGas3.DefaultSetPoint" value="100" />
  <scdata name="PMA.MfcGas3.FlowRegulationFactor" value="1" />
  <scdata name="PMA.MfcGas3.MfcEnableAlarm" value="True" />
  <scdata name="PMA.MfcGas3.MfcAlarmRange" value="10" />
  <scdata name="PMA.MfcGas3.MfcAlarmTime" value="10" />
  <scdata name="PMA.MfcGas3.MfcWarningRange" value="10" />
  <scdata name="PMA.MfcGas3.MfcWarningTime" value="10" />
  <scdata name="PMA.MfcGas4.Enable" value="False" />
  <scdata name="PMA.MfcGas4.GasName" value="CF4" />
  <scdata name="PMA.MfcGas4.MfcN2Scale" value="2000" />
  <scdata name="PMA.MfcGas4.MfcScaleFactor" value="0.42" />
  <scdata name="PMA.MfcGas4.DefaultSetPoint" value="100" />
  <scdata name="PMA.MfcGas4.FlowRegulationFactor" value="1" />
  <scdata name="PMA.MfcGas4.MfcEnableAlarm" value="False" />
  <scdata name="PMA.MfcGas4.MfcAlarmRange" value="10" />
  <scdata name="PMA.MfcGas4.MfcAlarmTime" value="10" />
  <scdata name="PMA.MfcGas4.MfcWarningRange" value="10" />
  <scdata name="PMA.MfcGas4.MfcWarningTime" value="10" />
  <scdata name="PMA.MfcGas5.Enable" value="False" />
  <scdata name="PMA.MfcGas5.GasName" value="H2N2" />
  <scdata name="PMA.MfcGas5.MfcN2Scale" value="2000" />
  <scdata name="PMA.MfcGas5.MfcScaleFactor" value="1" />
  <scdata name="PMA.MfcGas5.DefaultSetPoint" value="100" />
  <scdata name="PMA.MfcGas5.FlowRegulationFactor" value="1" />
  <scdata name="PMA.MfcGas5.MfcEnableAlarm" value="True" />
  <scdata name="PMA.MfcGas5.MfcAlarmRange" value="10" />
  <scdata name="PMA.MfcGas5.MfcAlarmTime" value="10" />
  <scdata name="PMA.MfcGas5.MfcWarningRange" value="10" />
  <scdata name="PMA.MfcGas5.MfcWarningTime" value="10" />
  <scdata name="PMA.Pump.LeakRate" value="30" />
  <scdata name="PMA.Pump.LeakCheckPumpingTime" value="180" />
  <scdata name="PMA.Pump.LeakCheckWaitTime" value="180" />
  <scdata name="PMA.Pump.PumpBasePressure" value="150" />
  <scdata name="PMA.Pump.PumpTimeLimit" value="120" />
  <scdata name="PMA.Pump.PumpValveDelay" value="1" />
  <scdata name="PMA.Purge.PurgeCycleCount" value="3" />
  <scdata name="PMA.Purge.PurgeVentPressure" value="700000" />
  <scdata name="PMA.Purge.PurgePumpPressure" value="10" />
  <scdata name="PMA.Purge.PurgeVentTimeLimit" value="60" />
  <scdata name="PMA.Purge.PurgePumpTimeLimit" value="60" />
  <scdata name="PMA.Purge.PurgeVentStableTime" value="10" />
  <scdata name="PMA.Purge.PurgePumpStableTime" value="10" />
  <scdata name="PMA.HeaterChamber.HeaterEnableTolerance" value="True" />
  <scdata name="PMA.HeaterChamber.HeaterAlarmRange" value="200" />
  <scdata name="PMA.HeaterChamber.HeaterAlarmTime" value="10" />
  <scdata name="PMA.HeaterChamber.HeaterWarningRange" value="100" />
  <scdata name="PMA.HeaterChamber.HeaterWarningTime" value="10" />
  <scdata name="PMA.HeaterChamber.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMA.HeaterChamber.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_1" value="50" />
  <scdata name="PMA.HeaterChamber.OffsetValue_1" value="2" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_2" value="90" />
  <scdata name="PMA.HeaterChamber.OffsetValue_2" value="4" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_3" value="120" />
  <scdata name="PMA.HeaterChamber.OffsetValue_3" value="5" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_4" value="150" />
  <scdata name="PMA.HeaterChamber.OffsetValue_4" value="7" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_5" value="200" />
  <scdata name="PMA.HeaterChamber.OffsetValue_5" value="8" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_6" value="250" />
  <scdata name="PMA.HeaterChamber.OffsetValue_6" value="9" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_7" value="0" />
  <scdata name="PMA.HeaterChamber.OffsetValue_7" value="0" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_8" value="0" />
  <scdata name="PMA.HeaterChamber.OffsetValue_8" value="0" />
  <scdata name="PMA.HeaterChamber.TempOffsetPoint_9" value="0" />
  <scdata name="PMA.HeaterChamber.OffsetValue_9" value="0" />
  <scdata name="PMA.WallHeater.HeaterEnableTolerance" value="True" />
  <scdata name="PMA.WallHeater.HeaterAlarmRange" value="200" />
  <scdata name="PMA.WallHeater.HeaterAlarmTime" value="10" />
  <scdata name="PMA.WallHeater.HeaterWarningRange" value="100" />
  <scdata name="PMA.WallHeater.HeaterWarningTime" value="10" />
  <scdata name="PMA.WallHeater.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMA.WallHeater.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_1" value="90" />
  <scdata name="PMA.WallHeater.OffsetValue_1" value="3" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_2" value="120" />
  <scdata name="PMA.WallHeater.OffsetValue_2" value="5" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_3" value="150" />
  <scdata name="PMA.WallHeater.OffsetValue_3" value="6" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_4" value="0" />
  <scdata name="PMA.WallHeater.OffsetValue_4" value="0" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_5" value="0" />
  <scdata name="PMA.WallHeater.OffsetValue_5" value="0" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_6" value="0" />
  <scdata name="PMA.WallHeater.OffsetValue_6" value="0" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_7" value="0" />
  <scdata name="PMA.WallHeater.OffsetValue_7" value="0" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_8" value="0" />
  <scdata name="PMA.WallHeater.OffsetValue_8" value="0" />
  <scdata name="PMA.WallHeater.TempOffsetPoint_9" value="0" />
  <scdata name="PMA.WallHeater.OffsetValue_9" value="0" />
  <scdata name="PMA.ForelineHeater.HeaterEnableTolerance" value="False" />
  <scdata name="PMA.ForelineHeater.HeaterAlarmRange" value="200" />
  <scdata name="PMA.ForelineHeater.HeaterAlarmTime" value="10" />
  <scdata name="PMA.ForelineHeater.HeaterWarningRange" value="100" />
  <scdata name="PMA.ForelineHeater.HeaterWarningTime" value="10" />
  <scdata name="PMA.ForelineHeater.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMA.ForelineHeater.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_1" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_1" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_2" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_2" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_3" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_3" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_4" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_4" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_5" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_5" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_6" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_6" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_7" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_7" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_8" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_8" value="0" />
  <scdata name="PMA.ForelineHeater.TempOffsetPoint_9" value="0" />
  <scdata name="PMA.ForelineHeater.OffsetValue_9" value="0" />
  <scdata name="PMA.GridHeater.HeaterEnableTolerance" value="False" />
  <scdata name="PMA.GridHeater.HeaterAlarmRange" value="200" />
  <scdata name="PMA.GridHeater.HeaterAlarmTime" value="10" />
  <scdata name="PMA.GridHeater.HeaterWarningRange" value="100" />
  <scdata name="PMA.GridHeater.HeaterWarningTime" value="10" />
  <scdata name="PMA.GridHeater.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMA.GridHeater.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_1" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_1" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_2" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_2" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_3" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_3" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_4" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_4" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_5" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_5" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_6" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_6" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_7" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_7" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_8" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_8" value="0" />
  <scdata name="PMA.GridHeater.TempOffsetPoint_9" value="0" />
  <scdata name="PMA.GridHeater.OffsetValue_9" value="0" />
  <scdata name="PMA.IdleClean.IsEnabled" value="False" />
  <scdata name="PMA.IdleClean.IdleCleanRecipe" value="Clean\preclean" />
  <scdata name="PMA.IdleClean.IdleCleanTime" value="20" />
  <scdata name="PMA.JobClean.IsEnabled" value="False" />
  <scdata name="PMA.JobClean.PreJobCleanRecipe" value="Clean\preclean" />
  <scdata name="PMA.JobClean.CompleteJobCleanRecipe" value="Clean\postclean" />
  <scdata name="PMA.JobClean.EnablePreJobClean" value="True" />
  <scdata name="PMA.JobClean.EnableCompleteJobClean" value="True" />
  <scdata name="PMA.JobClean.IdleCleanTime" value="1" />
  <scdata name="PMA.EPD.IsEnabled" value="False" />
  <scdata name="PMA.EPD.ChannelNumber" value="0" />
  <scdata name="PMA.SupportedWaferSize" value="3,4,6,8" />
  <scdata name="PMA.SupportedGuidePinSize" value="3,4,6,8" />
  <scdata name="PMA.PrepareTransferTimeout" value="120" />
  <scdata name="PMA.OpenGasValveTimeout" value="1" />
  <scdata name="PMA.TimeLimitOfCloseGasValve" value="1" />
  <scdata name="PMA.OpenCloseSlitValveTimeout" value="1" />
  <scdata name="PMA.VentTime" value="180" />
  <scdata name="PMA.GasFlowPressureAlarmRange" value="500" />
  <scdata name="PMA.GasFlowPressureAlarmTime" value="60" />
  <scdata name="PMA.GasFlowPressureWarningRange" value="200" />
  <scdata name="PMA.GasFlowPressureWarningTime" value="60" />
  <scdata name="PMA.EnableThrottleValve" value="True" />
  <scdata name="PMA.ChamberHeaterSetPointLimit" value="300" />
  <scdata name="PMA.ForeLineHeaterSetPointLimit" value="140" />
  <scdata name="PMA.CheckSubstrateTempTimeout" value="120" />
  <scdata name="PMA.CheckATMTimeout" value="90" />
  <scdata name="PMA.VentTimeDelay" value="1" />
  <scdata name="PMA.ChamberBasePressureThreshold" value="780000" />
  <scdata name="PMA.ChamberBaseTemperatureThreshold" value="280" />
  <scdata name="PMA.ProcessPressureOffset" value="0" />
  <scdata name="PMA.ChamberVolume" value="7500" />
  <scdata name="PMA.GasTemperature" value="25" />
  <scdata name="PMA.TargetPressureInMFCVerification" value="9" />
  <scdata name="PMA.GasFlowTimeInMFCVerification" value="180" />
  <scdata name="PMA.PinDownDelayTimePick" value="0" />
  <scdata name="PMA.PinDownDelayTimePlace" value="0" />
  <scdata name="PMA.ChamberLabel" value="Strip" />
  <scdata name="PMA.MaxDeviationInMFCVerification" value="30" />
  <scdata name="PMA.WallHeaterSetPointLimit" value="150" />
  <scdata name="PMA.EnableWallHeater" value="True" />
  <scdata name="PMA.EnableGridHeater" value="False" />
  <scdata name="PMA.RecipeToleranceIgnoreTime" value="5" />
  <scdata name="PMB.MFCVerification.ChamberVolume" value="7500" />
  <scdata name="PMB.MFCVerification.GasTemperature" value="25" />
  <scdata name="PMB.MFCVerification.TargetPressure" value="9" />
  <scdata name="PMB.MFCVerification.GasFlowTime" value="180" />
  <scdata name="PMB.MFCVerification.MaxDeviation" value="30" />
  <scdata name="PMB.MFCVerification.PressureStableTolerance" value="20" />
  <scdata name="PMB.MFCVerification.FlowStableTolerance" value="20" />
  <scdata name="PMB.MFCVerification.CheckStableTimeout" value="5" />
  <scdata name="PMB.Chiller.ChillerSameWithPMA" value="False" />
  <scdata name="PMB.Chiller.EnableChiller" value="True" />
  <scdata name="PMB.Chiller.MFG" value="1" />
  <scdata name="PMB.Chiller.CommunicationType" value="1" />
  <scdata name="PMB.Chiller.Port" value="COM22" />
  <scdata name="PMB.Chiller.ChillerTemperatureOffset" value="10" />
  <scdata name="PMB.Chiller.SetPointLimitMax" value="300" />
  <scdata name="PMB.Chiller.SetPointLimitMin" value="0" />
  <scdata name="PMB.Chiller.EnableToleranceAlarm" value="True" />
  <scdata name="PMB.Chiller.ToleranceAlarmRange" value="20" />
  <scdata name="PMB.Chiller.ToleranceAlarmTime" value="60" />
  <scdata name="PMB.GridChiller.EnableChiller" value="True" />
  <scdata name="PMB.GridChiller.MFG" value="1" />
  <scdata name="PMB.GridChiller.CommunicationType" value="1" />
  <scdata name="PMB.GridChiller.Port" value="COM12" />
  <scdata name="PMB.GridChiller.ChillerTemperatureOffset" value="10" />
  <scdata name="PMB.GridChiller.SetPointLimitMax" value="300" />
  <scdata name="PMB.GridChiller.SetPointLimitMin" value="0" />
  <scdata name="PMB.DryPump.MFG" value="1" />
  <scdata name="PMB.DryPump.CommunicationType" value="1" />
  <scdata name="PMB.DryPump.Port" value="COM23" />
  <scdata name="PMB.DryPump.ChamberForelinePressureThreshold" value="1000" />
  <scdata name="PMB.DryPump.ChamberForelinePressureTimeout" value="20" />
  <scdata name="PMB.Rf.MFG" value="1" />
  <scdata name="PMB.Rf.CommunicationType" value="1" />
  <scdata name="PMB.Rf.Port" value="COM24" />
  <scdata name="PMB.Rf.IPAddress" value="127.0.0.1:502" />
  <scdata name="PMB.Rf.PowerAlarmRange" value="500" />
  <scdata name="PMB.Rf.PowerAlarmTime" value="10" />
  <scdata name="PMB.Rf.PowerWarningRange" value="500" />
  <scdata name="PMB.Rf.PowerWarningTime" value="10" />
  <scdata name="PMB.Rf.ReflectPowerAlarmRange" value="1" />
  <scdata name="PMB.Rf.ReflectPowerAlarmTime" value="1" />
  <scdata name="PMB.Rf.PowerRange" value="3000" />
  <scdata name="PMB.Rf.Coefficient" value="1" />
  <scdata name="PMB.Rf.EnablePulsingFunction" value="False" />
  <scdata name="PMB.Rf.EnableReflectPower" value="False" />
  <scdata name="PMB.Rf.EnableVoltageCurrent" value="False" />
  <scdata name="PMB.Rf.PowerRegulationFactor" value="1" />
  <scdata name="PMB.Rf.RfPowerAlarmRange" value="1000" />
  <scdata name="PMB.Rf.RfPowerAlarmTime" value="3000" />
  <scdata name="PMB.Rf.RFTurnOnTimeout" value="3" />
  <scdata name="PMB.Rf.GeneratorSerialNumber" value="" />
  <scdata name="PMB.Rf.SensorSerialNumber" value="" />
  <scdata name="PMB.Rf.RFPhysicalMaxPower" value="2000" />
  <scdata name="PMB.Rf.CurrentRFMaxPower" value="2000" />
  <scdata name="PMB.Rf.RFCalibratedMaxPower" value="2000" />
  <scdata name="PMB.Rf.EnableCalibration" value="False" />
  <scdata name="PMB.Rf.CalibrationTable" value="100#100;200#200;" />
  <scdata name="PMB.Rf.CalibrationTableDetail" value="" />
  <scdata name="PMB.match.EnableMatch" value="False" />
  <scdata name="PMB.match.MFG" value="1" />
  <scdata name="PMB.match.CommunicationType" value="1" />
  <scdata name="PMB.match.Port" value="COM25" />
  <scdata name="PMB.match.IPAddress" value="127.0.0.1:502" />
  <scdata name="PMB.match.MatchMode" value="1" />
  <scdata name="PMB.match.EnableC1C2Position" value="False" />
  <scdata name="PMB.BiasRf.EnableBiasRF" value="True" />
  <scdata name="PMB.BiasRf.MFG" value="2" />
  <scdata name="PMB.BiasRf.CommunicationType" value="2" />
  <scdata name="PMB.BiasRf.Port" value="COM14" />
  <scdata name="PMB.BiasRf.IPAddress" value="192.168.10.22:502" />
  <scdata name="PMB.BiasRf.PowerAlarmRange" value="500" />
  <scdata name="PMB.BiasRf.PowerAlarmTime" value="10" />
  <scdata name="PMB.BiasRf.PowerWarningRange" value="500" />
  <scdata name="PMB.BiasRf.PowerWarningTime" value="10" />
  <scdata name="PMB.BiasRf.ReflectPowerAlarmRange" value="1" />
  <scdata name="PMB.BiasRf.ReflectPowerAlarmTime" value="1" />
  <scdata name="PMB.BiasRf.PowerRange" value="3000" />
  <scdata name="PMB.BiasRf.Coefficient" value="1" />
  <scdata name="PMB.BiasRf.EnablePulsingFunction" value="False" />
  <scdata name="PMB.BiasRf.EnableReflectPower" value="False" />
  <scdata name="PMB.BiasRf.EnableVoltageCurrent" value="False" />
  <scdata name="PMB.BiasRf.PowerRegulationFactor" value="1" />
  <scdata name="PMB.BiasRf.RfPowerAlarmRange" value="1000" />
  <scdata name="PMB.BiasRf.RfPowerAlarmTime" value="3000" />
  <scdata name="PMB.BiasRf.GeneratorSerialNumber" value="" />
  <scdata name="PMB.BiasRf.SensorSerialNumber" value="" />
  <scdata name="PMB.BiasRf.RFPhysicalMaxPower" value="600" />
  <scdata name="PMB.BiasRf.CurrentRFMaxPower" value="600" />
  <scdata name="PMB.BiasRf.RFCalibratedMaxPower" value="600" />
  <scdata name="PMB.BiasRf.EnableCalibration" value="False" />
  <scdata name="PMB.BiasRf.CalibrationTable" value="100#100;200#200;" />
  <scdata name="PMB.BiasRf.CalibrationTableDetail" value="" />
  <scdata name="PMB.BiasMatch.EnableBiasMatch" value="False" />
  <scdata name="PMB.BiasMatch.MFG" value="2" />
  <scdata name="PMB.BiasMatch.CommunicationType" value="2" />
  <scdata name="PMB.BiasMatch.Port" value="COM15" />
  <scdata name="PMB.BiasMatch.IPAddress" value="192.168.10.22:502" />
  <scdata name="PMB.BiasMatch.MatchMode" value="1" />
  <scdata name="PMB.BiasMatch.EnableBiasC1C2Position" value="False" />
  <scdata name="PMB.MfcGas1.Enable" value="True" />
  <scdata name="PMB.MfcGas1.GasName" value="O2" />
  <scdata name="PMB.MfcGas1.MfcN2Scale" value="100" />
  <scdata name="PMB.MfcGas1.MfcScaleFactor" value="1" />
  <scdata name="PMB.MfcGas1.DefaultSetPoint" value="100" />
  <scdata name="PMB.MfcGas1.FlowRegulationFactor" value="1" />
  <scdata name="PMB.MfcGas1.MfcEnableAlarm" value="True" />
  <scdata name="PMB.MfcGas1.MfcAlarmRange" value="10" />
  <scdata name="PMB.MfcGas1.MfcAlarmTime" value="10" />
  <scdata name="PMB.MfcGas1.MfcWarningRange" value="10" />
  <scdata name="PMB.MfcGas1.MfcWarningTime" value="10" />
  <scdata name="PMB.MfcGas2.Enable" value="True" />
  <scdata name="PMB.MfcGas2.GasName" value="N2" />
  <scdata name="PMB.MfcGas2.MfcN2Scale" value="100" />
  <scdata name="PMB.MfcGas2.MfcScaleFactor" value="1" />
  <scdata name="PMB.MfcGas2.DefaultSetPoint" value="100" />
  <scdata name="PMB.MfcGas2.FlowRegulationFactor" value="1" />
  <scdata name="PMB.MfcGas2.MfcEnableAlarm" value="True" />
  <scdata name="PMB.MfcGas2.MfcAlarmRange" value="10" />
  <scdata name="PMB.MfcGas2.MfcAlarmTime" value="10" />
  <scdata name="PMB.MfcGas2.MfcWarningRange" value="10" />
  <scdata name="PMB.MfcGas2.MfcWarningTime" value="10" />
  <scdata name="PMB.MfcGas3.Enable" value="True" />
  <scdata name="PMB.MfcGas3.GasName" value="AR" />
  <scdata name="PMB.MfcGas3.MfcN2Scale" value="100" />
  <scdata name="PMB.MfcGas3.MfcScaleFactor" value="1" />
  <scdata name="PMB.MfcGas3.DefaultSetPoint" value="100" />
  <scdata name="PMB.MfcGas3.FlowRegulationFactor" value="1" />
  <scdata name="PMB.MfcGas3.MfcEnableAlarm" value="True" />
  <scdata name="PMB.MfcGas3.MfcAlarmRange" value="10" />
  <scdata name="PMB.MfcGas3.MfcAlarmTime" value="10" />
  <scdata name="PMB.MfcGas3.MfcWarningRange" value="10" />
  <scdata name="PMB.MfcGas3.MfcWarningTime" value="10" />
  <scdata name="PMB.MfcGas4.Enable" value="True" />
  <scdata name="PMB.MfcGas4.GasName" value="Gas4" />
  <scdata name="PMB.MfcGas4.MfcN2Scale" value="100" />
  <scdata name="PMB.MfcGas4.MfcScaleFactor" value="1" />
  <scdata name="PMB.MfcGas4.DefaultSetPoint" value="100" />
  <scdata name="PMB.MfcGas4.FlowRegulationFactor" value="1" />
  <scdata name="PMB.MfcGas4.MfcEnableAlarm" value="True" />
  <scdata name="PMB.MfcGas4.MfcAlarmRange" value="10" />
  <scdata name="PMB.MfcGas4.MfcAlarmTime" value="10" />
  <scdata name="PMB.MfcGas4.MfcWarningRange" value="10" />
  <scdata name="PMB.MfcGas4.MfcWarningTime" value="10" />
  <scdata name="PMB.MfcGas5.Enable" value="True" />
  <scdata name="PMB.MfcGas5.GasName" value="Gas5" />
  <scdata name="PMB.MfcGas5.MfcN2Scale" value="100" />
  <scdata name="PMB.MfcGas5.MfcScaleFactor" value="1" />
  <scdata name="PMB.MfcGas5.DefaultSetPoint" value="100" />
  <scdata name="PMB.MfcGas5.FlowRegulationFactor" value="1" />
  <scdata name="PMB.MfcGas5.MfcEnableAlarm" value="True" />
  <scdata name="PMB.MfcGas5.MfcAlarmRange" value="10" />
  <scdata name="PMB.MfcGas5.MfcAlarmTime" value="10" />
  <scdata name="PMB.MfcGas5.MfcWarningRange" value="10" />
  <scdata name="PMB.MfcGas5.MfcWarningTime" value="10" />
  <scdata name="PMB.Pump.LeakRate" value="30" />
  <scdata name="PMB.Pump.LeakCheckPumpingTime" value="180" />
  <scdata name="PMB.Pump.LeakCheckWaitTime" value="180" />
  <scdata name="PMB.Pump.PumpBasePressure" value="150" />
  <scdata name="PMB.Pump.PumpTimeLimit" value="120" />
  <scdata name="PMB.Pump.PumpValveDelay" value="5" />
  <scdata name="PMB.Purge.PurgeCycleCount" value="3" />
  <scdata name="PMB.Purge.PurgeVentPressure" value="700000" />
  <scdata name="PMB.Purge.PurgePumpPressure" value="10" />
  <scdata name="PMB.Purge.PurgeVentTimeLimit" value="60" />
  <scdata name="PMB.Purge.PurgePumpTimeLimit" value="60" />
  <scdata name="PMB.Purge.PurgeVentStableTime" value="10" />
  <scdata name="PMB.Purge.PurgePumpStableTime" value="10" />
  <scdata name="PMB.HeaterChamber.HeaterEnableTolerance" value="False" />
  <scdata name="PMB.HeaterChamber.HeaterAlarmRange" value="200" />
  <scdata name="PMB.HeaterChamber.HeaterAlarmTime" value="10" />
  <scdata name="PMB.HeaterChamber.HeaterWarningRange" value="100" />
  <scdata name="PMB.HeaterChamber.HeaterWarningTime" value="10" />
  <scdata name="PMB.HeaterChamber.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMB.HeaterChamber.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_1" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_1" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_2" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_2" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_3" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_3" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_4" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_4" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_5" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_5" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_6" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_6" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_7" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_7" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_8" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_8" value="0" />
  <scdata name="PMB.HeaterChamber.TempOffsetPoint_9" value="0" />
  <scdata name="PMB.HeaterChamber.OffsetValue_9" value="0" />
  <scdata name="PMB.WallHeater.HeaterEnableTolerance" value="False" />
  <scdata name="PMB.WallHeater.HeaterAlarmRange" value="200" />
  <scdata name="PMB.WallHeater.HeaterAlarmTime" value="10" />
  <scdata name="PMB.WallHeater.HeaterWarningRange" value="100" />
  <scdata name="PMB.WallHeater.HeaterWarningTime" value="10" />
  <scdata name="PMB.WallHeater.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMB.WallHeater.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_1" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_1" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_2" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_2" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_3" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_3" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_4" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_4" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_5" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_5" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_6" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_6" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_7" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_7" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_8" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_8" value="0" />
  <scdata name="PMB.WallHeater.TempOffsetPoint_9" value="0" />
  <scdata name="PMB.WallHeater.OffsetValue_9" value="0" />
  <scdata name="PMB.ForelineHeater.HeaterEnableTolerance" value="False" />
  <scdata name="PMB.ForelineHeater.HeaterAlarmRange" value="200" />
  <scdata name="PMB.ForelineHeater.HeaterAlarmTime" value="10" />
  <scdata name="PMB.ForelineHeater.HeaterWarningRange" value="100" />
  <scdata name="PMB.ForelineHeater.HeaterWarningTime" value="10" />
  <scdata name="PMB.ForelineHeater.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMB.ForelineHeater.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_1" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_1" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_2" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_2" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_3" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_3" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_4" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_4" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_5" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_5" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_6" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_6" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_7" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_7" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_8" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_8" value="0" />
  <scdata name="PMB.ForelineHeater.TempOffsetPoint_9" value="0" />
  <scdata name="PMB.ForelineHeater.OffsetValue_9" value="0" />
  <scdata name="PMB.GridHeater.HeaterEnableTolerance" value="False" />
  <scdata name="PMB.GridHeater.HeaterAlarmRange" value="200" />
  <scdata name="PMB.GridHeater.HeaterAlarmTime" value="10" />
  <scdata name="PMB.GridHeater.HeaterWarningRange" value="100" />
  <scdata name="PMB.GridHeater.HeaterWarningTime" value="10" />
  <scdata name="PMB.GridHeater.MonitorTcFeedbackOffset" value="0" />
  <scdata name="PMB.GridHeater.ControlTcFeedbackOffset" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_1" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_1" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_2" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_2" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_3" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_3" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_4" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_4" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_5" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_5" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_6" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_6" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_7" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_7" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_8" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_8" value="0" />
  <scdata name="PMB.GridHeater.TempOffsetPoint_9" value="0" />
  <scdata name="PMB.GridHeater.OffsetValue_9" value="0" />
  <scdata name="PMB.IdleClean.IsEnabled" value="False" />
  <scdata name="PMB.IdleClean.IdleCleanRecipe" value="" />
  <scdata name="PMB.IdleClean.IdleCleanTime" value="3000" />
  <scdata name="PMB.JobClean.IsEnabled" value="False" />
  <scdata name="PMB.JobClean.PreJobCleanRecipe" value="" />
  <scdata name="PMB.JobClean.CompleteJobCleanRecipe" value="" />
  <scdata name="PMB.JobClean.EnablePreJobClean" value="False" />
  <scdata name="PMB.JobClean.EnableCompleteJobClean" value="False" />
  <scdata name="PMB.JobClean.IdleCleanTime" value="3000" />
  <scdata name="PMB.EPD.IsEnabled" value="True" />
  <scdata name="PMB.EPD.ChannelNumber" value="1" />
  <scdata name="PMB.SupportedWaferSize" value="3,4,6,8" />
  <scdata name="PMB.SupportedGuidePinSize" value="3,4,6,8" />
  <scdata name="PMB.PrepareTransferTimeout" value="120" />
  <scdata name="PMB.OpenGasValveTimeout" value="1" />
  <scdata name="PMB.TimeLimitOfCloseGasValve" value="1" />
  <scdata name="PMB.OpenCloseSlitValveTimeout" value="1" />
  <scdata name="PMB.VentTime" value="180" />
  <scdata name="PMB.GasFlowPressureAlarmRange" value="100" />
  <scdata name="PMB.GasFlowPressureAlarmTime" value="60" />
  <scdata name="PMB.GasFlowPressureWarningRange" value="100" />
  <scdata name="PMB.GasFlowPressureWarningTime" value="60" />
  <scdata name="PMB.EnableThrottleValve" value="True" />
  <scdata name="PMB.ChamberHeaterSetPointLimit" value="150" />
  <scdata name="PMB.ForeLineHeaterSetPointLimit" value="140" />
  <scdata name="PMB.CheckSubstrateTempTimeout" value="120" />
  <scdata name="PMB.CheckATMTimeout" value="90" />
  <scdata name="PMB.VentTimeDelay" value="1" />
  <scdata name="PMB.ChamberBasePressureThreshold" value="780000" />
  <scdata name="PMB.ChamberBaseTemperatureThreshold" value="120" />
  <scdata name="PMB.ProcessPressureOffset" value="10" />
  <scdata name="PMB.ChamberVolume" value="7500" />
  <scdata name="PMB.GasTemperature" value="25" />
  <scdata name="PMB.TargetPressureInMFCVerification" value="9" />
  <scdata name="PMB.GasFlowTimeInMFCVerification" value="180" />
  <scdata name="PMB.PinDownDelayTimePick" value="0" />
  <scdata name="PMB.PinDownDelayTimePlace" value="0" />
  <scdata name="PMB.ChamberLabel" value="Strip" />
  <scdata name="PMB.MaxDeviationInMFCVerification" value="30" />
  <scdata name="PMB.WallHeaterSetPointLimit" value="150" />
  <scdata name="PMB.EnableWallHeater" value="False" />
  <scdata name="PMB.EnableGridHeater" value="False" />
  <scdata name="PMB.RecipeToleranceIgnoreTime" value="5" />
</root>