JetPlasma
/
Virgo_ST


			
				
					
						
						
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							<?xml version="1.0"?>
<TableRecipeData RecipeVersion="Virgo" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2023-03-08T10:06:17" PressureMode="TV" BasePressure="100.0" SubstrateTemp="250" PumpingPinState="Down" VentingPinState="Down" PinDownPressure="1000" PumpDownLimit="120" PurgeActive="false" NotToPurgeOrVent="false" Barcode="" Description="（Empty）">
  <Step StepNo="第1步" Name="initial" Loop=" " EndBy="EndByStepTime" Time="5">
    <Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="600" />
    <Pin LiftPin.SetState="Down" />
    <RF Rf.SetPowerOnTime="0" Rf.SetPower="200" />
    <Mfc MfcGas1="2000" MfcGas2="500" MfcGas3="0" MfcGas4="0" MfcGas5="0" />
    <SoftTolerance MfcGas1.SoftTolerance="0" MfcGas2.SoftTolerance="0" MfcGas3.SoftTolerance="0" MfcGas4.SoftTolerance="0" MfcGas5.SoftTolerance="0" PressureControl.SoftTolerance="0" Rf.SoftTolerance="0" />
    <HardTolerance MfcGas1.HardTolerance="0" MfcGas2.HardTolerance="0" MfcGas3.HardTolerance="0" MfcGas4.HardTolerance="0" MfcGas5.HardTolerance="0" PressureControl.HardTolerance="0" Rf.HardTolerance="0" />
    <EndPoint EPD.SetConfig="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" />
  </Step>
  <Step StepNo="第2步" Name="initial" Loop=" " EndBy="EndByStepTime" Time="5">
    <Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="600" />
    <Pin LiftPin.SetState="Down" />
    <RF Rf.SetPowerOnTime="0" Rf.SetPower="500" />
    <Mfc MfcGas1="2000" MfcGas2="500" MfcGas3="0" MfcGas4="0" MfcGas5="0" />
    <SoftTolerance MfcGas1.SoftTolerance="0" MfcGas2.SoftTolerance="0" MfcGas3.SoftTolerance="0" MfcGas4.SoftTolerance="0" MfcGas5.SoftTolerance="0" PressureControl.SoftTolerance="0" Rf.SoftTolerance="0" />
    <HardTolerance MfcGas1.HardTolerance="0" MfcGas2.HardTolerance="0" MfcGas3.HardTolerance="0" MfcGas4.HardTolerance="0" MfcGas5.HardTolerance="0" PressureControl.HardTolerance="0" Rf.HardTolerance="0" />
    <EndPoint EPD.SetConfig="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" />
  </Step>
  <Step StepNo="第3步" Name="initial" Loop=" " EndBy="EndByStepTime" Time="10">
    <Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="600" />
    <Pin LiftPin.SetState="Down" />
    <RF Rf.SetPowerOnTime="0" Rf.SetPower="1000" />
    <Mfc MfcGas1="2000" MfcGas2="500" MfcGas3="0" MfcGas4="0" MfcGas5="0" />
    <SoftTolerance MfcGas1.SoftTolerance="0" MfcGas2.SoftTolerance="0" MfcGas3.SoftTolerance="0" MfcGas4.SoftTolerance="0" MfcGas5.SoftTolerance="0" PressureControl.SoftTolerance="0" Rf.SoftTolerance="0" />
    <HardTolerance MfcGas1.HardTolerance="0" MfcGas2.HardTolerance="0" MfcGas3.HardTolerance="0" MfcGas4.HardTolerance="0" MfcGas5.HardTolerance="0" PressureControl.HardTolerance="0" Rf.HardTolerance="0" />
    <EndPoint EPD.SetConfig="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" />
  </Step>
</TableRecipeData>