Virgo_ST/VirgoRT/Modules/PMs/RfPowerRoutine.cs

using System;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using VirgoCommon;
using VirgoRT.Devices;

namespace VirgoRT.Modules.PMs
{
    class RfPowerRoutine : PMRoutineBase, IRoutine
    {
        private enum RoutineStep
        {
            kRFPowerOn,
            kRFPowerOFF,
            MatchOn,
            End,
        };

        private bool _enableBias;
        private readonly bool _ON;
        private double _rfPower;
        private double _rfPowerBias;
        private BiasRfMatchMode _matchMode;
        private double _matchC1;
        private double _matchC2;
        private double _rfPowerOnTime;

        public RfPowerRoutine(JetPM chamber, bool bON) : base(chamber)
        {
            Name = "RF Power";
            _ON = bON;
        }

        public Result Start(params object[] objs)
        {
            if (!_chamber.IsFastPumpOpened)
            {
                Stop("Pump 阀没有打开");
                return Result.FAIL;
            }

            //if (_chamber.TotalGasSetpoint <= 0)
            //{
            //    Stop("No gas flowing for RF power on");
            //    return Result.FAIL;
            //}

            Reset();
            _enableBias = SC.GetValue<bool>($"{_chamber.Module}.BiasRf.EnableBiasRF");
            if (_ON)
            {
                if (objs == null || objs.Length < 3)
                    throw new ArgumentException("RF routine argument error");

                _rfPower = Convert.ToDouble(objs[0]);
                _rfPowerBias = Convert.ToDouble(objs[1]);
                _rfPowerOnTime = Convert.ToDouble(objs[2]);
                _matchMode = Convert.ToInt32(objs[3]) == 1 ? BiasRfMatchMode.Preset : BiasRfMatchMode.Hold;
                _matchC1 = Convert.ToDouble(objs[4]);
                _matchC2 = Convert.ToDouble(objs[5]);
            }
            else
            {
                _rfPower = 0.0;
                _rfPowerBias = 0.0;
                _matchMode = BiasRfMatchMode.Preset;
                _matchC1 = 0.0;
                _matchC2 = 0.0;
                _rfPowerOnTime = 0.0;
            }

            return Result.RUN;
        }

        public Result Monitor()
        {
            try
            {
                if (_ON)
                {
                    RFPowerOn((int)RoutineStep.kRFPowerOn, "RF Power On");
                }
                else
                {
                    RFPowerOFF((int)RoutineStep.kRFPowerOFF, "RF Power OFF");
                }

                //MatchOn((int)RoutineStep.MatchOn, "Match On");

                End((int)RoutineStep.End);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }
            catch (Exception ex)
            {
                Stop(ex.Message);
                return Result.FAIL;
            }

            return Result.DONE;
        }

        public void RFPowerOn(int id, string name)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                if (_enableBias)
                    Notify($"放电开始, 源射频设定值 {_rfPower}, 偏压射频设定值 {_rfPowerBias}");
                else
                    Notify($"放电开始, 源射频设定值 {_rfPower}");
                if (Math.Abs(_rfPower) > 0.01 && Math.Abs(_rfPowerBias) > 0.01)
                {
                    _chamber.GeneratorSetpower((float)_rfPower);
                    _chamber.GeneratorBiasSetpower((float)_rfPowerBias);
                    if (_matchMode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBiasSetMatchMode(true);
                        Notify($"Bias RF Match C1设定值 {_matchC1}, Bias RF Match C2设定值 {_matchC2}");
                        _chamber.SetBiasMatchPosition((float)_matchC1, (float)_matchC2);
                    }
                    else if (_matchMode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBiasSetMatchMode(false);
                    }
                    return _chamber.GeneratorPowerOn(true) && _chamber.GeneratorBiasPowerOn(true);
                }
                else if (Math.Abs(_rfPower) < 0.01 && Math.Abs(_rfPowerBias) > 0.01)
                {
                    if (_matchMode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBiasSetMatchMode(true);
                        Notify($"Bias RF Match C1设定值 {_matchC1}, Bias RF Match C2设定值 {_matchC2}");
                        _chamber.SetBiasMatchPosition((float)_matchC1, (float)_matchC2);
                    }
                    else if (_matchMode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBiasSetMatchMode(false);
                    }
                    _chamber.GeneratorBiasSetpower((float)_rfPowerBias);
                    return _chamber.GeneratorBiasPowerOn(true);
                }
                else if (Math.Abs(_rfPower) > 0.01 && Math.Abs(_rfPowerBias) < 0.01)
                {
                    _chamber.GeneratorSetpower((float)_rfPower);
                    return _chamber.GeneratorPowerOn(true);
                }
                else
                {
                    Notify("放电结束");
                    return false;
                }

            }, () =>
            {
                if (Elapsed >= _rfPowerOnTime)
                {
                    Notify("放电结束");

                    _chamber.StopAllGases();
                    _chamber.SetValveOnOff(ValveType.PROCESS, false);
                    _chamber.GeneratorPowerOn(false);
                    _chamber.GeneratorBiasPowerOn(false);

                    return true;
                }
                return false;
            }, _rfPowerOnTime * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _chamber.StopAllGases();
                    _chamber.SetValveOnOff(ValveType.PROCESS, false);
                    _chamber.GeneratorPowerOn(false);
                    _chamber.GeneratorBiasPowerOn(false);

                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void RFPowerOFF(int id, string name)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify("放电停止");
                if (!_enableBias)
                    return _chamber.GeneratorPowerOn(false);
                return _chamber.GeneratorPowerOn(false) && _chamber.GeneratorBiasPowerOn(false);
            }, () => true, 2000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _chamber.StopAllGases();
                    _chamber.SetValveOnOff(ValveType.PROCESS, false);

                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void MatchOn(int id, string name)
        {
            bool Func()
            {
                Notify($"Match C1设定值 {_matchC1}, Match C2设定值 {_matchC2}");

                if (_chamber.SetMatchPosition((float)_matchC1, (float)_matchC2))
                {
                    return true;
                }
                return false;
            }

            bool? Check1()
            {
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, 0);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void BiasMatchOn(int id, string name)
        {
            bool Func()
            {
                Notify($"Bias RF Match C1设定值 {_matchC1}, Bias RF Match C2设定值 {_matchC2}");

                if (_chamber.SetBiasMatchPosition((float)_matchC1, (float)_matchC2))
                {
                    return true;
                }
                return false;
            }

            bool? Check1()
            {
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, 0);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public override void Abort()
        {
            _chamber.GeneratorSetpower(0);
            _chamber.GeneratorBiasSetpower(0);
            _chamber.GeneratorPowerOn(false);
            _chamber.GeneratorBiasPowerOn(false);
        }
    }
}