Virgo_ST/VirgoRT/Modules/PMs/PMMfcVerificationRoutine.cs

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.DBCore;
using System;
using System.Collections.Generic;
using VirgoRT.Devices;
using VirgoRT.Devices.IODevices;

namespace VirgoRT.Modules.PMs
{
    public enum VerifyMode
    {
        OnePoint,
        TenPoint,
    }
    class PMMfcVerificationRoutine : PMRoutineBase, IRoutine
    {
        enum RoutineStep
        {

            CheckNeedPumpDown1,
            CheckNeedPumpDown2,
            RunPumpRoutine1,
            RunPumpRoutine2,
            RunPumpRoutine3,

            CheckThrottleValveStatus,
            ClosePumpValve,

            GetBeginPressure,
            SetGasFlow,

            CalcMfcCalibration,
            Delay1,
            Delay2,
            StopGasFlow,

            CheckFinished,

            Loop,
            EndLoop,

            CheckFlowStable,

        }

        private readonly PumpDownRoutine _pumpdownRoutine;
        private int _paramContinuePumpTime;

        private double _beginPressure;
        private double _endPressure;
        private double _elapsedTime;
        private DeviceTimer _verificationDeviceTimer = new DeviceTimer();

        private int _mfcIndex;
        private float _mfcFlow;
        private double _flowTime;
        private double _mfcActualFlow;
        private double _getBeginPressureDelayTime;
        private double _maxPressure;

        private MfcBase1 _mfcDevice;
        private VerifyMode _paramMode;
        private Dictionary<int, float> _paramFlowSet = new Dictionary<int, float>();
        private Dictionary<float, Tuple<float, float>> _calibrationResult = new Dictionary<float, Tuple<float, float>>();
        private bool _isPumpDownNeed;
        private float _pressureStableTolerance = 2;//2mTorr
        private float _flowStableTolerance = 0.02f;//2%
        private int _stableTime = 1;//1s
        private double _chamberVolume;
        private double _gasTemperature;
        private double _leakRate;

        private double _maxDeviation;

        public PMMfcVerificationRoutine(JetPM chamber, PumpDownRoutine pumpDownRoutine) : base(chamber)
        {
            Name = "MFC Verification";
            bUINotify = true;
            _pumpdownRoutine = pumpDownRoutine;
        }

        internal void Init(string mfc, double flow, int flowCount)
        {
            int.TryParse(mfc.Replace("MFC", ""), out _mfcIndex);

            _mfcDevice = DEVICE.GetDevice<MfcBase1>($"{Module}.MfcGas{_mfcIndex}");
            _mfcIndex -= 1;//start from 0
            _mfcFlow = (float)flow;

            if (flowCount == 10)
                _paramMode = VerifyMode.TenPoint;
            else
                _paramMode = VerifyMode.OnePoint;
        }

        public Result Start(params object[] objs)
        {
            Reset();
            if (CheckLid() != Result.RUN)
            {
                return Result.FAIL;
            }
            if (CheckSlitDoor() != Result.RUN)
            {
                return Result.FAIL;
            }
            if (CheckDryPump() != Result.RUN)
            {
                return Result.FAIL;
            }

            _calibrationResult.Clear();
            _paramFlowSet.Clear();

            _chamberVolume = SC.GetValue<double>($"{Module}.MFCVerification.ChamberVolume");

            _gasTemperature = SC.GetValue<double>($"{Module}.MFCVerification.GasTemperature");

            _flowTime = SC.GetValue<double>($"{Module}.MFCVerification.GasFlowTime");

            _maxDeviation = SC.GetValue<double>($"{Module}.MFCVerification.MaxDeviation");

            _paramContinuePumpTime = 20;//20s

            _getBeginPressureDelayTime = 2;//2s

            _pressureStableTolerance = (float)SC.GetValue<double>($"{Module}.MFCVerification.PressureStableTolerance");

            _flowStableTolerance = (float) (SC.GetValue<double>($"{Module}.MFCVerification.FlowStableTolerance") / 100.0);

            _stableTime = 1;//1s

            _maxPressure = SC.GetValue<double>($"{Module}.MFCVerification.TargetPressure");

            if (_paramMode == VerifyMode.TenPoint)
            {
                for (int i = 0; i < 10; i++)
                {
                    _paramFlowSet.Add(i, (float)_mfcDevice.Scale * (i + 1) / 10);
                }
            }
            else
            {
                if (_mfcFlow <= 0 || _mfcFlow > _mfcDevice.Scale)
                {
                    EV.PostWarningLog(Module, $"MFC set value {_mfcFlow} not valid");
                    return Result.FAIL;
                }
                _paramFlowSet.Add(0, _mfcFlow);
            }

            _mfcDevice.ResetVerificationData();
            _isPumpDownNeed = true;
            _leakRate = 0;
            var dbData = DataQuery.Query($"SELECT * FROM \"leak_check_data\" where \"module_name\" = '{Module}' order by \"operate_time\" DESC;");
            if (dbData != null && dbData.Rows.Count > 0 && !dbData.Rows[0]["leak_rate"].Equals(DBNull.Value))
            {
                _leakRate = Convert.ToDouble(dbData.Rows[0]["leak_rate"]);
            }

            return Result.RUN;
        }

        public Result Monitor()
        {
            try
            {
                if (_isPumpDownNeed)
                {
                    ExecuteRoutine((int)RoutineStep.RunPumpRoutine1, _pumpdownRoutine);
                }

                CheckThrottleValveFullOpen((int)RoutineStep.CheckThrottleValveStatus);

                StartLoop((int)RoutineStep.Loop, "", _paramFlowSet.Count, Notify, Stop);

                //抽到底压
                CheckNeedPumpDown((int)RoutineStep.CheckNeedPumpDown1);

                if (_isPumpDownNeed)
                {
                    ExecuteRoutine((int)RoutineStep.RunPumpRoutine2, _pumpdownRoutine);
                }

                //流气
                SetGasFlow((int)RoutineStep.SetGasFlow, _mfcIndex, _paramMode == VerifyMode.TenPoint ? _paramFlowSet[LoopCounter] : _mfcFlow);

                //等待，稳定一下
                Delay((int)RoutineStep.Delay1, _paramContinuePumpTime);

                //检查Stable
                CheckFlowStable((int)RoutineStep.CheckFlowStable, _mfcDevice, _flowStableTolerance, _pressureStableTolerance, _stableTime);

                //关闭抽气阀
                SetValve((int)RoutineStep.ClosePumpValve, ValveType.FAST_PUMP, false);

                //稳压
                Delay((int)RoutineStep.Delay2, _getBeginPressureDelayTime);

                //得到初始压力值
                GetBeginPressure((int)RoutineStep.GetBeginPressure);

                //等待,流气时间或者压力到设定值
                CheckFinished((int)RoutineStep.CheckFinished, _flowTime, _maxPressure);

                //计算Flow
                CalcMfcCalibration((int)RoutineStep.CalcMfcCalibration, _paramMode == VerifyMode.TenPoint ? _paramFlowSet[LoopCounter] : _mfcFlow);

                StopGasFlow((int)RoutineStep.StopGasFlow, _mfcIndex);

                EndLoop((int)RoutineStep.EndLoop, Notify, Stop);

                CheckNeedPumpDown((int)RoutineStep.CheckNeedPumpDown2);

                if (_isPumpDownNeed)
                {
                    ExecuteRoutine((int)RoutineStep.RunPumpRoutine3, _pumpdownRoutine);
                }
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                _verificationDeviceTimer.Stop();
                _chamber.StopAllGases();
                _chamber.SetValveOnOff(ValveType.PROCESS, false);
                _mfcDevice.ResetVerificationData();
                return Result.FAIL;
            }

            return Result.DONE;
        }

        public new void Abort()
        {
            _verificationDeviceTimer.Stop();
            _chamber.StopAllGases();
            _chamber.SetValveOnOff(ValveType.PROCESS, false);
            _mfcDevice.ResetVerificationData();
        }

        private void CheckNeedPumpDown(int id)
        {
            string reason = string.Empty;
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Check {Module} need pump down");

                _isPumpDownNeed = _chamber.ChamberPressure > SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void SetGasFlow(int id, int mfcId, double flow)
        {
            string reason = string.Empty;
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Set gas {mfcId} flow to {flow} sccm");

                _chamber.SetValveOnOff(ValveType.PROCESS, true);
                if (!_chamber.FlowGas(mfcId, flow))
                {
                    return false;
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop($"Set gas {mfcId} flow to {flow} sccm failed, for {reason}");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void StopGasFlow(int id, int mfcId)
        {
            string reason = string.Empty;
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Stop gas {mfcId} flow");

                _chamber.SetValveOnOff(ValveType.PROCESS, false);
                if (!_chamber.FlowGas(mfcId, 0))
                {
                    return false;
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop($"Stop gas {mfcId} flow failed, for {reason}");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void CalcMfcCalibration(int id, float flow)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                _mfcActualFlow = 273.15 * _chamberVolume / ((273.15 + _gasTemperature) * 760000) * ((_endPressure - _beginPressure) / _elapsedTime - _leakRate);
                EV.PostInfoLog(Module, $"Calculate flow: calculate flow={_mfcActualFlow}, setpoint={flow}, begin pressure(torr)={_beginPressure:f3}, end pressure(torr)={_endPressure:f3}," +
                    $"elapsed time(minute)={_elapsedTime:f3}");


                double deviation = (Math.Abs(_mfcActualFlow) - Math.Abs(flow)) / Math.Abs(flow) * 100;
                bool isOk = Math.Abs(deviation) <= Math.Abs(_maxDeviation);
                if (!isOk)
                {
                    EV.PostWarningLog(Module, $"MFC {_mfcDevice.DisplayName} verify failed, deviation is {deviation}%, exceed max tolerance {_maxDeviation}%");
                }

                if (_paramMode == VerifyMode.TenPoint)
                {
                    _calibrationResult[flow] = Tuple.Create((float)_mfcActualFlow, (float)_elapsedTime);

                    _mfcDevice.SetVerificationResult((float)flow, (float)_mfcActualFlow, _calibrationResult.Count == 10, _elapsedTime*60, deviation, isOk);
                }
                else
                {
                    _mfcDevice.SetVerificationResult((float)flow, (float)_mfcActualFlow, true, _elapsedTime*60, deviation, isOk);
                }

                return true;
            });
        }

        private void GetBeginPressure(int id)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Get begin pressure {_chamber.ChamberPressure.ToString("f1")}");
                _beginPressure = _chamber.ChamberPressure;
                _verificationDeviceTimer.Start(0);
                return true;
            });
        }

        private void CheckFlowStable(int id, MfcBase1 mfc, float flowStable, float pressureStable, int time)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Check {mfc.Name} flow stable");
                _verificationDeviceTimer.Start(0);
                _beginPressure = _chamber.ChamberPressure;
                return true;
            }, () =>
            {
                if (_verificationDeviceTimer.GetElapseTime() > time * 1000 && Math.Abs(_chamber.ChamberPressure - _beginPressure) <= pressureStable &&
                    Math.Abs(mfc.SetPoint - mfc.FeedBack) / mfc.SetPoint < flowStable)
                {
                    return true;
                }
                return false;
            }, time * 2 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop($"Check {mfc.Name} flow {mfc.SetPoint} stable failed.");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"Check {mfc.Name} flow stable timeout in {time * 2} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void CheckFinished(int id, double flowTime, double maxPressure)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Check finished one point");

                return true;
            }, () =>
            {
                if (_verificationDeviceTimer.GetElapseTime() > flowTime * 1000 || _chamber.ChamberPressure / 1000 > maxPressure)
                {
                    _endPressure = _chamber.ChamberPressure;//mTorr

                    _elapsedTime = _verificationDeviceTimer.GetElapseTime() / (1000 * 60);//unit minutes
                    return true;
                }
                return false;
            }, flowTime * 2 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"Check finished one point can not finished in {flowTime * 2} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }
    }
}