Virgo_ST/VirgoRT/Modules/PMs/PMLeakCheckRoutine.cs

using System;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using VirgoCommon;
using VirgoRT.Devices;

namespace VirgoRT.Modules.PMs
{
    class LeakCheckRoutine : PMRoutineBase
    {
        private enum LeakCheckStep
        {
            PumpDown,
            CheckDoor,
            CheckDryPump,

            CloseAllValve,

            OpenPumpingValve,

            OpenGasFinalValve,
            CloseGasFinalValve,

            OpenMfc1Valve,
            OpenMfc2Valve,
            OpenMfc3Valve,
            OpenMfc4Valve,
            OpenMfc5Valve,
            CloseMfc1Valve,
            CloseMfc2Valve,
            CloseMfc3Valve,
            CloseMfc4Valve,
            CloseMfc5Valve,
            StartFlow,
            StopFlow,
            RecordStartPressure,

            RecordEndPressure,

            PumpDownDelay,

            StartPressureDelay,

            EndPressureDelay,

            ClosePumpValve,

            LeakCheckDelay,

            CalcLeakCheck,

            End,
            EndLeakCheck,
            AbortLeakCheck,
            CheckPressure
        };

        // Fields
        private double _beginPressure = 0;
        private double _endPressure = 0;
        private double _leakRate;
        public double LeakRate { get; private set; }
        private int _leakCheckPumpDownTime;
        private int _leakCheckWaitTime;
        private LeakCheckMode _mode;
        private bool[] _enableGasLine = new bool[5];
        private double[] _mfcFlow = new double[5];
        private readonly PumpDownRoutine _pumpdownRoutine;

        // Properties
        //
        public int ElapseTime => (int)(delayTimer.GetElapseTime() / 1000.0);

        // Constructor
        //
        public LeakCheckRoutine(JetPM chamber, PumpDownRoutine _pdRoutine) : base(chamber)
        {
            Name = "leak check";
            bUINotify = true;
            _pumpdownRoutine = _pdRoutine;
        }

        public void Terminate()
        {
        }

        public Result Start(params object[] objs)
        {
            // 预检查
            if (CheckLid() == Result.RUN &&
                CheckSlitDoor() == Result.RUN &&
                CheckDryPump() == Result.RUN)
            {
                _enableGasLine = new bool[5] { false, false, false, false, false };
                _mfcFlow = new double[5] { 0.0, 0.0, 0.0, 0.0, 0.0 };

                Reset();

                delayTimer.Start(0);

                try
                {
                    if (objs.Length == 0)
                    {
                        _leakCheckPumpDownTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckPumpingTime");
                        _leakCheckWaitTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckWaitTime");
                        _leakRate = SC.GetValue<double>($"{Module}.Pump.LeakRate");
                        _mode = LeakCheckMode.ChamberOnly;
                    }
                    else
                    {
                        _leakCheckPumpDownTime = Convert.ToInt32(objs[0].ToString());
                        _leakCheckWaitTime = Convert.ToInt32(objs[1].ToString());
                        _mode = (LeakCheckMode)Enum.Parse(typeof(LeakCheckMode), objs[2].ToString());
                        _leakRate = Convert.ToInt32(objs[3].ToString());
                        for (int i = 0; i < 5; i++)
                            _enableGasLine[i] = Convert.ToBoolean(objs[4 + i].ToString());
                    }
                    for (int i = 0; i < 5; i++)
                    {
                        if (_enableGasLine[i]) _mfcFlow[i] = SC.GetValue<int>($"{Module}.MfcGas{i + 1}.MfcN2Scale");
                    }
                }
                catch (Exception ex)
                {
                    LOG.Write(ex);
                    return Result.FAIL;
                }
                
                return Result.RUN;
            }

            return Result.FAIL;
        }

        public Result Monitor()
        {
            try
            {
                ExecuteRoutine((int)LeakCheckStep.PumpDown, _pumpdownRoutine);

                if (_mode == LeakCheckMode.ChamberOnly)
                {
                    ;
                }
                else if (_mode == LeakCheckMode.ChamberAndGasLine)
                {
                    SetValve((int)LeakCheckStep.OpenGasFinalValve, ValveType.PROCESS, true);
                    if (_enableGasLine[0]) SetValve((int)LeakCheckStep.OpenMfc1Valve, ValveType.Mfc1, true);
                    if (_enableGasLine[1]) SetValve((int)LeakCheckStep.OpenMfc2Valve, ValveType.Mfc2, true);
                    if (_enableGasLine[2]) SetValve((int)LeakCheckStep.OpenMfc3Valve, ValveType.Mfc3, true);
                    if (_enableGasLine[3]) SetValve((int)LeakCheckStep.OpenMfc4Valve, ValveType.Mfc4, true);
                    if (_enableGasLine[4]) SetValve((int)LeakCheckStep.OpenMfc5Valve, ValveType.Mfc5, true);
                }
                else if (_mode == LeakCheckMode.ChamberAndGasLineAndFAC)
                {
                    SetValve((int)LeakCheckStep.OpenGasFinalValve, ValveType.PROCESS, true);
                    if (_enableGasLine[0]) SetValve((int)LeakCheckStep.OpenMfc1Valve, ValveType.Mfc1, true);
                    if (_enableGasLine[1]) SetValve((int)LeakCheckStep.OpenMfc2Valve, ValveType.Mfc2, true);
                    if (_enableGasLine[2]) SetValve((int)LeakCheckStep.OpenMfc3Valve, ValveType.Mfc3, true);
                    if (_enableGasLine[3]) SetValve((int)LeakCheckStep.OpenMfc4Valve, ValveType.Mfc4, true);
                    if (_enableGasLine[4]) SetValve((int)LeakCheckStep.OpenMfc5Valve, ValveType.Mfc5, true);

                    StartFlowMFC((int)LeakCheckStep.StartFlow, _mfcFlow);
                }

                TimeDelay((int)LeakCheckStep.PumpDownDelay, _leakCheckPumpDownTime);

                SetValve((int)LeakCheckStep.ClosePumpValve, ValveType.FAST_PUMP, false);

                
                //记录腔体Start pressure P1
                RecordBeginPressure((int)LeakCheckStep.RecordStartPressure);

                //pump down delay
                TimeDelay((int)LeakCheckStep.EndPressureDelay, _leakCheckWaitTime);

                //记录腔体End pressure P2
                RecordEndPressure((int)LeakCheckStep.RecordEndPressure);

                CalcLeakCheck((int)LeakCheckStep.CalcLeakCheck, _leakRate, _leakCheckWaitTime, 0);

                if (_mode == LeakCheckMode.ChamberOnly)
                {
                    ;
                }
                else if (_mode == LeakCheckMode.ChamberAndGasLine)
                {
                    SetValve((int)LeakCheckStep.CloseGasFinalValve, ValveType.PROCESS, false);
                    if (_enableGasLine[0]) SetValve((int)LeakCheckStep.CloseMfc1Valve, ValveType.Mfc1, false);
                    if (_enableGasLine[1]) SetValve((int)LeakCheckStep.CloseMfc2Valve, ValveType.Mfc2, false);
                    if (_enableGasLine[2]) SetValve((int)LeakCheckStep.CloseMfc3Valve, ValveType.Mfc3, false);
                    if (_enableGasLine[3]) SetValve((int)LeakCheckStep.CloseMfc4Valve, ValveType.Mfc4, false);
                    if (_enableGasLine[4]) SetValve((int)LeakCheckStep.CloseMfc5Valve, ValveType.Mfc5, false);
                }
                else if (_mode == LeakCheckMode.ChamberAndGasLineAndFAC)
                {
                    SetValve((int)LeakCheckStep.CloseGasFinalValve, ValveType.PROCESS, false);
                    if (_enableGasLine[0]) SetValve((int)LeakCheckStep.CloseMfc1Valve, ValveType.Mfc1, false);
                    if (_enableGasLine[1]) SetValve((int)LeakCheckStep.CloseMfc2Valve, ValveType.Mfc2, false);
                    if (_enableGasLine[2]) SetValve((int)LeakCheckStep.CloseMfc3Valve, ValveType.Mfc3, false);
                    if (_enableGasLine[3]) SetValve((int)LeakCheckStep.CloseMfc4Valve, ValveType.Mfc4, false);
                    if (_enableGasLine[4]) SetValve((int)LeakCheckStep.CloseMfc5Valve, ValveType.Mfc5, false);

                    StopFlowMFC((int)LeakCheckStep.StopFlow);
                }


                End((int)LeakCheckStep.End);

                //ExecuteRoutine((int)LeakCheckStep.EndLeakCheck, _pumpDownRoutine);

            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }

            return Result.DONE;
        }

        public void DelayLeakCheck(int id, string name, double time)
        {
            bool Func()
            {
                Notify(name);
                return true;
            }

            Tuple<bool, Result> ret = Delay(id, Func, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.RUN)
                {
                    throw new RoutineBreakException();
                }
            }
        }

        public void CheckChamberPressure(int id, double target, out double pressure, int time)
        {
            bool Func()
            {
                return true;
            }

            bool? Check1()
            {
                if (_chamber.ChamberPressure < target)
                {
                    Notify($"腔体压力 [{_chamber.ChamberPressure}] mt, 低于 [{target}] mt");
                    return true;
                }
                Stop($"腔体压力 [{_chamber.ChamberPressure}], 高于 [{target}]");
                return false;
            }

            pressure = _chamber.ChamberPressure;

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {

                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void RecordBeginPressure(int id)
        {
            bool Func()
            {
                _beginPressure = _chamber.ChamberPressure;
                Notify($"腔体压力初始值 {_beginPressure} mt");
                return true;
            }

            bool? Check1()
            {
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, 1 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void RecordEndPressure(int id)
        {
            bool Func()
            {
                _endPressure = _chamber.ChamberPressure;
                Notify($"腔体压力结束值 {_endPressure} mt");
                return true;
            }

            bool? Check1()
            {
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, 1 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void CalcLeakCheck(int id, double target, int timeRate, int time)
        {
            bool Func()
            {
                return true;
            }

            bool? Check1()
            {
                LeakRate = (_endPressure - _beginPressure) / (timeRate / 60.0);
                if (LeakRate < target)
                {
                    Notify($"腔体漏率 [{LeakRate}] mt/min, 低于 [{target}] mt/min");
                    LeakCheckResultManager.Instance.AddLeakCheck(Module, DateTime.Now, ElapseTime, (double)_beginPressure, (double)_endPressure, LeakRate, LeakCheckStatus.Succeed.ToString(), _mode.ToString());
                    return true;
                }
                Stop($"腔体漏率 [{LeakRate}] mt/min, 高于 [{target}] mt/min");
                LeakCheckResultManager.Instance.AddLeakCheck(Module, DateTime.Now, ElapseTime, (double)_beginPressure, (double)_endPressure, LeakRate, LeakCheckStatus.Failed.ToString(), _mode.ToString());
                return false;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void StopFlowMFC(int id)
        {
            bool Func()
            {
                _chamber.StopAllGases();
                return true;
            }

            bool? Check1()
            {
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, 1 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void StartFlowMFC(int id, double[] mfcValues)
        {
            bool Func()
            {
                for (int index = 0; index < mfcValues.Length; index++)
                {
                    _chamber.FlowGas(index, mfcValues[index]);
                }
                return true;
            }

            bool? Check1()
            {
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, 1 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void DeleteLeadCheck(object[] args)
        {
            LeakCheckResultManager.Instance.Delete(Module, args[0].ToString());
        }

        public override void Abort()
        {
            try
            {
                _chamber.CloseValves();
                LeakCheckResultManager.Instance.AddLeakCheck(Module, DateTime.Now, ElapseTime, (double)_beginPressure, (double)_chamber.ChamberPressure, 0, LeakCheckStatus.Aborted.ToString(), _mode.ToString());
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
            }

        }
    }
}