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- using System;
- using System.Collections.Generic;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.DBCore;
- using MECF.Framework.Common.Equipment;
- using VirgoRT.Devices;
- namespace VirgoRT.Modules.PMs
- {
- class CleanRoutine : PMRoutineBase
- {
- public CleanRoutine(JetPM chamber) : base(chamber)
- {
- Name = "Clean";
- }
- public object[] param;
- }
- }
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