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_ioDefineVirgo.xml

_ioDefineVirgo.xml 16 KB
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  1. <?xml version='1.0'?>
    2. 

  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
    3. 

  3. 	<Dig_In>
    4. 

  4. 		<DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
    5. 

  5. 		<DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
    6. 

  6. 		<DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
    7. 

  7. 		<DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW" />
    8. 

  8.     <DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />
    9. 

  9. 		<DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
    10. 

  10. 		<DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
    11. 

  11. 		<DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
    12. 

  12. 		<DI_ITEM Index="8" Name="DI_Lift_Pin_Up" Device="" Addr="w20.08" Note="1=on,0=off" />
    13. 

  13. 		<DI_ITEM Index="9" Name="DI_Lift_Pin_Down" Device="" Addr="w20.09" Note="1=on,0=off" />
    14. 

  14.     <DI_ITEM Index="10" Name="DI_Guide_Pin_Small_Lifter_Up_Pos" Device="" Addr="w20.10" />
    15. 

  15.     <DI_ITEM Index="11" Name="DI_Guide_Pin_Small_Lifter_Down_Pos" Device="" Addr="w20.11" />
    16. 

  16. 		<DI_ITEM Index="12" Name="DI_Guide_Pin_Medium_Lifter_Up_Pos" Device="" Addr="w20.12" />
    17. 

  17. 		<DI_ITEM Index="13" Name="DI_Guide_Pin_Medium_Lifter_Down_Pos" Device="" Addr="w20.13" />
    18. 

  18. 		<DI_ITEM Index="14" Name="DI_ARM_Not_Extend_to_PM" Device="" Addr="w20.14" Note="Interlock-PLC" />
    19. 

  19. 		<DI_ITEM Index="15" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.15" Note="1=rf interlock ok,0=rf interlock off" />
    20. 

  20. 		<!--<DI_ITEM Index="16" Name="DI_Generator_Power_Status" Device="" Addr="w21.00" Note="1=on,0=off" />-->
    21. 

  21. 		<DI_ITEM Index="17" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w21.01" />
    22. 

  22. 		<DI_ITEM Index="18" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w21.02" />
    23. 

  23. 		<DI_ITEM Index="19" Name="DI_Substrate_Control_TC_Broken_Alarm" Device="" Addr="w21.03" Note="0=OK,1=alarm" />
    24. 

  24. 		<DI_ITEM Index="20" Name="DI_Substrate_Monitor_TC_Broken_Alarm" Device="" Addr="w21.04" Note="0=OK,1=alarm" />
    25. 

  25. 		<DI_ITEM Index="21" Name="DI_Substrate_Heater_On_FB" Device="" Addr="w21.05" Note="0=OFF,1=ON" />
    26. 

  26. 		<DI_ITEM Index="22" Name="DI_CDA_Pressure" Device="" Addr="w21.06" />
    27. 

  27. 		<DI_ITEM Index="23" Name="" />
    28. 

  28. 		<DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
    29. 

  29. 		<DI_ITEM Index="25" Name="DI_SourceFan2" Device="" Addr="w21.09" />
    30. 

  30. 		<DI_ITEM Index="26" Name="" />
    31. 

  31. 		<DI_ITEM Index="27" Name="" />
    32. 

  32. 		<DI_ITEM Index="28" Name="" />
    33. 

  33.     <DI_ITEM Index="29" Name="DI_GB_Pressure_SW_Alarm" Device="" Addr="w21.13" Note="0=OK，1=Warning" />
    34. 

  34.     <DI_ITEM Index="30" Name="DI_GB_Door_SW_Alarm" Device="" Addr="w21.14" Note="0=OK，1=Warning" />
    35. 

  35.     <DI_ITEM Index="31" Name="" />
    36. 

  36.     <DI_ITEM Index="32" Name="" />
    37. 

  37.     <DI_ITEM Index="33" Name="" />
    38. 

  38.     <DI_ITEM Index="34" Name="" />
    39. 

  39.     <DI_ITEM Index="35" Name="" />
    40. 

  40.     <DI_ITEM Index="36" Name="DI_Substrate_TC_Deviation_out_of_range" Device="" Addr="w22.04" Note="0=OK，1=alarm" />
    41. 

  41.     <DI_ITEM Index="37" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w22.05" Note="0=OK，1=alarm" />
    42. 

  42. 		<DI_ITEM Index="38" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w22.06" Note="0=OK，1=alarm" />
    43. 

  43. 		<DI_ITEM Index="39" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w22.07" Note="0=OK，1=alarm" />
    44. 

  44. 		<DI_ITEM Index="40" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w22.08" Note="0=OFF,1=ON" />
    45. 

  45. 		<DI_ITEM Index="41" Name="" />
    46. 

  46. 		<DI_ITEM Index="42" Name="" />
    47. 

  47. 		<DI_ITEM Index="43" Name="DI_EFEM_Side_Panel_Closed" Device="" Addr="w22.11" Note="Interlock-HW" />
    48. 

  48. 		<DI_ITEM Index="44" Name="" />
    49. 

  49. 		<!--<DI_ITEM Index="45" Name="DI_Fast_Pumping_SW" Device="" Addr="w22.13" />-->
    50. 

  50. 		<DI_ITEM Index="46" Name="" />
    51. 

  51. 		<DI_ITEM Index="47" Name="" />
    52. 

  52. 		<DI_ITEM Index="48" Name="DI_MFC1_Pressure" Device="" Addr="w23.00" />
    53. 

  53. 		<DI_ITEM Index="49" Name="DI_MFC2_Pressure" Device="" Addr="w23.01" />
    54. 

  54. 		<DI_ITEM Index="50" Name="DI_MFC3_Pressure" Device="" Addr="w23.02" />
    55. 

  55. 		<DI_ITEM Index="51" Name="DI_MFC4_Pressure" Device="" Addr="w23.03" />
    56. 

  56. 		<DI_ITEM Index="52" Name="DI_MFC5_Pressure" Device="" Addr="w23.04" />
    57. 

  57.     <DI_ITEM Index="53" Name="DI_N2_Pressure" Device="" Addr="w23.05"  />
    58. 

  58.     <DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />
    59. 

  59.     <DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />
    60. 

  60.     <DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />
    61. 

  61. 		<DI_ITEM Index="57" Name="" />
    62. 

  62. 		<DI_ITEM Index="58" Name="" />
    63. 

  63. 		<DI_ITEM Index="59" Name="" />
    64. 

  64. 

  65. 		<DI_ITEM Index="60" Name="" Device="" Addr="w23.12" />
    66. 

  66. 		<DI_ITEM Index="61" Name="" Device="" Addr="w23.13" />
    67. 

  67. 		<DI_ITEM Index="62" Name="" Device="" Addr="w23.14" />
    68. 

  68. 		<DI_ITEM Index="63" Name="" Device="" Addr="w23.15"  />
    69. 

  69. 		<DI_ITEM Index="64" Name="" Addr="w24.00" />
    70. 

  70. 		<DI_ITEM Index="65" Name="" Addr="w24.01" />
    71. 

  71. 		<DI_ITEM Index="66" Name="" Addr="w24.02" />
    72. 

  72. 		<DI_ITEM Index="67" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Addr="w24.03"  />
    73. 

  73. 		<DI_ITEM Index="68" Name="DI_Grid_TC_Broken_Alarm" Addr="w24.04"  />
    74. 

  74. 		<DI_ITEM Index="69" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Addr="w24.05"  />
    75. 

  75. 

  76. 		<DI_ITEM Index="70" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w24.06" />
    77. 

  77. 		<DI_ITEM Index="71" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="w24.07" />
    78. 

  78. 		<DI_ITEM Index="72" Name="" Device="" Addr="w24.08" />
    79. 

  79. 		<DI_ITEM Index="73" Name="" Device="" Addr="w24.09"  />
    80. 

  80. 		<DI_ITEM Index="74" Name="DI_Dry_Pump_Running" Device="" Addr="w24.10" Note="1=on,0=off" />
    81. 

  81. 		<DI_ITEM Index="75" Name="DI_Pump_Alarm" Device="" Addr="w24.11" Note="1=on,0=off" />
    82. 

  82. 		<DI_ITEM Index="76" Name="DI_Pump_Remote_Status" Device="" Addr="w24.12" Note="1=on,0=off" />
    83. 

  83. 		<DI_ITEM Index="77" Name="DI_Booster_Pump_Running" Device=""  Addr="w24.13" Note="1=on,0=off"/>
    84. 

  84. 		<DI_ITEM Index="78" Name="" />
    85. 

  85. 		<DI_ITEM Index="79" Name="" />
    86. 

  86. 

  87. 		<DI_ITEM Index="80" Name="" Device="" Addr="w25.00" />
    88. 

  88. 		<DI_ITEM Index="81" Name="" Device="" Addr="w25.01" />
    89. 

  89. 		<DI_ITEM Index="82" Name="" Device="" Addr="w25.02" />
    90. 

  90. 		<DI_ITEM Index="83" Name="" Device="" Addr="w25.03"  />
    91. 

  91. 		<DI_ITEM Index="84" Name="" Addr="w25.04" />
    92. 

  92. 		<DI_ITEM Index="85" Name="" Addr="w25.05" />
    93. 

  93. 		<DI_ITEM Index="86" Name="" Addr="w25.06" />
    94. 

  94. 		<DI_ITEM Index="87" Name="" />
    95. 

  95. 		<DI_ITEM Index="88" Name="" />
    96. 

  96. 		<DI_ITEM Index="89" Name="" />
    97. 

  97. 	</Dig_In>
    98. 

  98. 	<Dig_Out>
    99. 

  99. 		<DO_ITEM Index="0" Name="DO_Soft_Pumping_Valve" Device="" Addr="w0.00" />
    100. 

  100. 		<DO_ITEM Index="1" Name="DO_Fast_Pumping_Valve" Device="" Addr="w0.01" />
    101. 

  101. 		<DO_ITEM Index="2" Name="" />
    102. 

  102. 		<DO_ITEM Index="3" Name="" />
    103. 

  103. 		<DO_ITEM Index="4" Name="DO_Slit_Door_Open" Device="" Addr="w0.04" />
    104. 

  104. 		<DO_ITEM Index="5" Name="DO_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
    105. 

  105. 		<DO_ITEM Index="6" Name="DO_Lift_Pin_Up" Device="" Addr="w0.06" />
    106. 

  106. 		<DO_ITEM Index="7" Name="DO_Lift_Pin_Down" Device="" Addr="w0.07" />
    107. 

  107.     <DO_ITEM Index="8" Name="DO_Guide_Pin_Small_Lifter_Up" Device="" Addr="w0.08" />
    108. 

  108.     <DO_ITEM Index="9" Name="DO_Guide_Pin_Small_Lifter_Down" Device="" Addr="w0.09" />
    109. 

  109. 		<DO_ITEM Index="10" Name="DO_Guide_Pin_Medium_Lifter_Up" Device="" Addr="w0.10" />
    110. 

  110. 		<DO_ITEM Index="11" Name="DO_Guide_Pin_Medium_Lifter_Down" Device="" Addr="w0.11" />
    111. 

  111.     <DO_ITEM Index="12" Name="" />
    112. 

  112.     <DO_ITEM Index="13" Name="" />
    113. 

  113. 		<DO_ITEM Index="14" Name="DO_MFC1_Valve" Device="" Addr="w0.14" />
    114. 

  114. 		<DO_ITEM Index="15" Name="DO_MFC2_Valve" Device="" Addr="w0.15" />
    115. 

  115. 		<DO_ITEM Index="16" Name="DO_MFC3_Valve" Device="" Addr="w1.00" />
    116. 

  116. 		<DO_ITEM Index="17" Name="DO_MFC4_Valve" Device="" Addr="w1.01" />
    117. 

  117. 		<DO_ITEM Index="18" Name="DO_MFC5_Valve" Device="" Addr="w1.02" />
    118. 

  118. 		<DO_ITEM Index="19" Name="" />
    119. 

  119. 		<DO_ITEM Index="20" Name="" />
    120. 

  120. 		<DO_ITEM Index="21" Name="" />
    121. 

  121. 		<DO_ITEM Index="22" Name="" />
    122. 

  122. 		<DO_ITEM Index="23" Name="DO_Chamber_purge_valve" Device="" Addr="w1.07" />
    123. 

  123. 		<DO_ITEM Index="24" Name="DO_Chamber_vent_valve" Device="" Addr="w1.08" />
    124. 

  124. 		<DO_ITEM Index="25" Name="DO_Process_gas_final_valve" Device="" Addr="w1.09" />
    125. 

  125. 		<DO_ITEM Index="26" Name="" />
    126. 

  126. 		<DO_ITEM Index="27" Name="" />
    127. 

  127. 		<DO_ITEM Index="28" Name="" />
    128. 

  128. 		<DO_ITEM Index="29" Name="" />
    129. 

  129. 		<DO_ITEM Index="30" Name="" />
    130. 

  130. 		<DO_ITEM Index="31" Name="" />
    131. 

  131. 		<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" Note="Reset RFG" />
    132. 

  132. 		<DO_ITEM Index="33" Name="" />
    133. 

  133. 		<DO_ITEM Index="34" Name="" />
    134. 

  134. 		<DO_ITEM Index="35" Name="DO_Forline_Heater_Enable" Device="" Addr="w2.03" />
    135. 

  135. 		<DO_ITEM Index="36" Name="DO_Forline_Heater_On" Device="" Addr="w2.04" />
    136. 

  136. 		<DO_ITEM Index="37" Name="DO_Substrate_Heater_On" Device="" Addr="w2.05" Note="Interlock-HW" />
    137. 

  137. 		<DO_ITEM Index="38" Name="" />
    138. 

  138. 		<DO_ITEM Index="39" Name="" />
    139. 

  139.     <DO_ITEM Index="40" Name="" />
    140. 

  140.     <DO_ITEM Index="41" Name="" />
    141. 

  141. 		<DO_ITEM Index="42" Name="DO_Generator_Power_ON" Device="" Addr="w2.10" Note="Generator" />
    142. 

  142. 		<DO_ITEM Index="43" Name="" />
    143. 

  143. 		<DO_ITEM Index="44" Name="" />
    144. 

  144. 		<DO_ITEM Index="45" Name="" />
    145. 

  145. 		<DO_ITEM Index="46" Name="" />
    146. 

  146. 		<DO_ITEM Index="47" Name="DO_CHB_Wall_Heater_On"  Device="" Addr="w2.15" Note="Heater On==1,Heater Off ==0" />
    147. 

  147. 		<DO_ITEM Index="48" Name="DO_Pump_Run" Device="" Addr="w3.00" Note="DI-64做反馈信号，启动条件：DI-65为0，DI-66为1"/>
    148. 

  148. 		<DO_ITEM Index="49" Name="DO_Pump_Stop" Device="" Addr="w3.01" Note="DI-64做反馈信号" />
    149. 

  149. 		<DO_ITEM Index="50" Name="" />
    150. 

  150. 		<DO_ITEM Index="51" Name="" />
    151. 

  151. 		<DO_ITEM Index="52" Name="" />
    152. 

  152. 		<DO_ITEM Index="53" Name="" />
    153. 

  153. 		<DO_ITEM Index="54" Name="" />
    154. 

  154. 		<DO_ITEM Index="55" Name="" />
    155. 

  155. 		<DO_ITEM Index="56" Name="" />
    156. 

  156. 		<DO_ITEM Index="57" Name="" />
    157. 

  157. 		<DO_ITEM Index="58" Name="" />
    158. 

  158. 		<DO_ITEM Index="59" Name="" />
    159. 

  159. 	</Dig_Out>
    160. 

  160. 	<Ana_Out>
    161. 

  161. 		<AO_ITEM Index="0" Name="AO_Generator_Power_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="0-6000W" />
    162. 

  162. 		<AO_ITEM Index="1" Name="" />
    163. 

  163. 		<AO_ITEM Index="2" Name="AO_MFC1_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
    164. 

  164. 		<AO_ITEM Index="3" Name="AO_MFC2_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
    165. 

  165. 		<AO_ITEM Index="4" Name="AO_MFC3_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
    166. 

  166. 		<AO_ITEM Index="5" Name="AO_MFC4_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
    167. 

  167. 		<AO_ITEM Index="6" Name="AO_MFC5_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
    168. 

  168. 		<AO_ITEM Index="7" Name="AO_Throttle_Valve_Work_Mode" BufferOffset="14" Device="" Addr="d1014" Note="Throttle valve only" />
    169. 

  169. 		<AO_ITEM Index="8" Name="AO_Throttle_Valve_Pressure_Setpoint" BufferOffset="16" Device="" Addr="d1016" />
    170. 

  170. 		<AO_ITEM Index="9" Name="AO_Throttle_Valve_Position_Setpoint" BufferOffset="18" Device="" Addr="d1018" />
    171. 

  171. 		<AO_ITEM Index="10" Name="" />
    172. 

  172. 		<AO_ITEM Index="11" Name="AO_Substrate_Temperature_Setpoint" BufferOffset="22" Device="" Addr="d1022" Note="基座设定温度" />
    173. 

  173. 		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
    174. 

  174. 		<AO_ITEM Index="13" Name="AO_Heartbeat" BufferOffset="26" Device="" Addr="d1026" Note="Check 通讯" />
    175. 

  175. 		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"  BufferOffset="28" Device="" Addr="d1028" Note="CHB Wall设定温度" />
    176. 

  176. 		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"  BufferOffset="30" Device="" Addr="d1030" Note="CHB Wall限制温度" />
    177. 

  177. 		<AO_ITEM Index="16" Name="" />
    178. 

  178. 		<AO_ITEM Index="17" Name="" />
    179. 

  179. 		<AO_ITEM Index="18" Name="" />
    180. 

  180. 		<AO_ITEM Index="19" Name="" />
    181. 

  181. 		<AO_ITEM Index="20" Name="AO_Substrate_Temp_Limit_Setpoint" BufferOffset="40" Device="" Addr="d1040" Note="Temp Limit" />
    182. 

  182. 		<AO_ITEM Index="21" Name="AO_Foreline_Temp_Limit_Setpoint" BufferOffset="42" Device="" Addr="d1042" Note="Temp Limit" />
    183. 

  183. 		<AO_ITEM Index="22" Name="AO_Process_Pressure_Offset_Value" BufferOffset="44" Device="" Addr="d1044" Note="0-20" />
    184. 

  184. 		<AO_ITEM Index="23" Name="" />
    185. 

  185. 		<AO_ITEM Index="24" Name="" />
    186. 

  186. 		<AO_ITEM Index="25" Name="AO_BaisRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
    187. 

  187. 		<AO_ITEM Index="26" Name="AO_Pump_IO_CTRL_Enable" BufferOffset="52" Addr="d1052" Note="0=Comm CTRL ,1=IO CTRL" />
    188. 

  188. 		<AO_ITEM Index="27" Name="" />
    189. 

  189. 		<AO_ITEM Index="28" Name="" />
    190. 

  190. 		<AO_ITEM Index="29" Name="" />
    191. 

  191. 		<AO_ITEM Index="30" Name="" />
    192. 

  192. 		<AO_ITEM Index="31" Name="" />
    193. 

  193. 		<AO_ITEM Index="32" Name="" />
    194. 

  194. 		<AO_ITEM Index="33" Name="" />
    195. 

  195. 		<AO_ITEM Index="34" Name="" />
    196. 

  196. 		<AO_ITEM Index="35" Name="" />
    197. 

  197. 		<AO_ITEM Index="36" Name="" />
    198. 

  198. 		<AO_ITEM Index="37" Name="" />
    199. 

  199. 		<AO_ITEM Index="38" Name="" />
    200. 

  200. 		<AO_ITEM Index="39" Name="" />
    201. 

  201. 		<AO_ITEM Index="40" Name="" />
    202. 

  202. 		<AO_ITEM Index="41" Name="" />
    203. 

  203. 		<AO_ITEM Index="42" Name="" />
    204. 

  204. 		<AO_ITEM Index="43" Name="" />
    205. 

  205. 		<AO_ITEM Index="44" Name="" />
    206. 

  206. 		<AO_ITEM Index="45" Name="" />
    207. 

  207. 		<AO_ITEM Index="46" Name="" />
    208. 

  208. 		<AO_ITEM Index="47" Name="" />
    209. 

  209. 		<AO_ITEM Index="48" Name="" />
    210. 

  210. 		<AO_ITEM Index="49" Name="" />
    211. 

  211. 	</Ana_Out>
    212. 

  212. 	<Ana_In>
    213. 

  213. 		<AI_ITEM Index="0" Name="AI_Process_pressure" BufferOffset="0" Device="" Addr="d2000" Note="Process pressure" />
    214. 

  214. 		<AI_ITEM Index="1" Name="AI_Chamber_pressure" BufferOffset="2" Device="" Addr="d2002" />
    215. 

  215. 		<AI_ITEM Index="2" Name="AI_Foreline_pressure" BufferOffset="4" Device="" Addr="d2004" />
    216. 

  216. 		<AI_ITEM Index="3" Name="" />
    217. 

  217. 		<AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="MFC" />
    218. 

  218. 		<AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="MFC" />
    219. 

  219. 		<AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC" />
    220. 

  220. 		<AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC" />
    221. 

  221. 		<AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC" />
    222. 

  222.     <AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />
    223. 

  223.     <AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />
    224. 

  224. 		<AI_ITEM Index="11" Name="AI_Substrate_Control_TC_Temp" BufferOffset="22" Device="" Addr="d2022" Note="TC temp" />
    225. 

  225. 		<AI_ITEM Index="12" Name="AI_Substrate_Monitor_TC_Temp" BufferOffset="24" Device="" Addr="d2024" Note="TC temp" />
    226. 

  226. 		<AI_ITEM Index="13" Name="" />
    227. 

  227. 		<AI_ITEM Index="14" Name="AI_Throttle_Valve_Real_Position" BufferOffset="28" Device="" Addr="d2028" Note="Throttle valve only" />
    228. 

  228. 		<AI_ITEM Index="15" Name="AI_Throttle_Valve_Real_Pressure" BufferOffset="30" Device="" Addr="d2030" />
    229. 

  229. 		<AI_ITEM Index="16" Name="AI_Throttle_Valve_State" BufferOffset="32" Device="" Addr="d2032" />
    230. 

  230. 		<AI_ITEM Index="17" Name="" />
    231. 

  231. 		<AI_ITEM Index="18" Name="AI_Heartbeat_FB" BufferOffset="36" Device="" Addr="d2036" />
    232. 

  232. 		<AI_ITEM Index="19" Name="" />
    233. 

  233. 		<AI_ITEM Index="20" Name="" />
    234. 

  234. 		<AI_ITEM Index="21" Name="AI_Second" BufferOffset="42" Device="" Addr="d2042" />
    235. 

  235. 		<AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44" Device="" Addr="d2044" />
    236. 

  236. 		<AI_ITEM Index="23" Name="AI_Time" BufferOffset="46" Device="" Addr="d2046" />
    237. 

  237. 		<AI_ITEM Index="24" Name="AI_Day" BufferOffset="48" Device="" Addr="d2048" />
    238. 

  238. 		<AI_ITEM Index="25" Name="AI_Month" BufferOffset="50" Device="" Addr="d2050" />
    239. 

  239. 		<AI_ITEM Index="26" Name="AI_Year" BufferOffset="52" Device="" Addr="d2052" />
    240. 

  240. 		<AI_ITEM Index="27" Name="" />
    241. 

  241. 		<AI_ITEM Index="28" Name="" />
    242. 

  242. 		<AI_ITEM Index="29" Name="" />
    243. 

  243. 		<AI_ITEM Index="30" Name="AI_Foreline_Control_TC_Temp" BufferOffset="60" Device="" Addr="d2060" Note="TC temp" />
    244. 

  244. 		<AI_ITEM Index="31" Name="AI_Foreline_Monitor_TC_Temp" BufferOffset="62" Device="" Addr="d2062" Note="TC temp" />
    245. 

  245. 		<AI_ITEM Index="32" Name="" />
    246. 

  246. 		<AI_ITEM Index="33" Name="" />
    247. 

  247. 		<AI_ITEM Index="34" Name="" />
    248. 

  248. 		<AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />
    249. 

  249. 		<AI_ITEM Index="36" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="72" Device="" Addr="d2072" Note="TC temp" />
    250. 

  250. 		<AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
    251. 

  251. 		<AI_ITEM Index="38" Name="" />
    252. 

  252. 		<AI_ITEM Index="39" Name="" />
    253. 

  253. 		<AI_ITEM Index="40" Name="" />
    254. 

  254. 		<AI_ITEM Index="41" Name="" />
    255. 

  255. 		<AI_ITEM Index="42" Name="AI_Generator_Forward_Power" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
    256. 

  256. 		<AI_ITEM Index="43" Name="AI_Generator_Reflect_Power" BufferOffset="86" Device="" Addr="d2086" />
    257. 

  257. 		<AI_ITEM Index="44" Name="" />
    258. 

  258. 		<AI_ITEM Index="45" Name="" />
    259. 

  259. 		<AI_ITEM Index="46" Name="" />
    260. 

  260. 		<AI_ITEM Index="47" Name="" />
    261. 

  261. 		<AI_ITEM Index="48" Name="" />
    262. 

  262. 		<AI_ITEM Index="49" Name="" />
    263. 

  263. 	</Ana_In>
    264. 

  264. </IO_DEFINE>
    265. 

  265.