Virgo_ST/VirgoRT/Config/SequenceFormat.xml

<?xml version="1.0" encoding="utf-8"?>
<Aitex>
  <TableSequenceFormat RecipeVersion="Cluster">
    <Catalog Type="Position">
      <Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection"   >
        
        <Selection Name="PM" DisplayName="PM" Parameter="PMSelection,PMARecipe" />
        <Selection Name="Cooling" DisplayName="Cooling" Parameter="CoolingSelection,CoolingTime" />
        <Selection Name="EfemRobot" DisplayName="EfemRobot" Parameter="SlotSelection" />
      </Item>
    </Catalog>

    <Catalog Type="Parameter">

    

      <Item Name="CoolingSelection" DisplayName="Cooling Selection" InputType="MultiSelection" >
        <Selection Name="Cooling1" DisplayName="Cooling1"/>
        
      </Item>

      <Item Name="SlotSelection" DisplayName="SlotSelection" InputType="MultiSelection" >
        <Selection Name="0" DisplayName="0"/>
        <Selection Name="1" DisplayName="1"/>
      </Item>

      <Item Name="PMSelection" DisplayName="PM Selection" InputType="MultiSelection" >
        <Selection Name="PMA" DisplayName="PMA"/>
       
      </Item>

      <Item Name="PMARecipe" DisplayName="PMA Recipe" InputType="RecipeSelection" RecipeFilePath="PMA"  RelatedParameter=""    Min="0" Max="999999"  />

     
      <Item Name="CoolingTime" DisplayName="Cooling Time(s)" InputType="NumInput"   Min="0" Max="360"  />
    </Catalog>
  </TableSequenceFormat>
  <TableSequenceData RecipeVersion="Cluster" CreatedBy="System" Barcode="" ThicknessType="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
    <Step></Step>
  </TableSequenceData>
  <TableRecipeSchema>
    <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">  
      <xs:simpleType name="booleanType">
        <xs:restriction base="xs:string">
          <xs:enumeration value="0" />
          <xs:enumeration value="1" />
          <xs:enumeration value="False" />
          <xs:enumeration value="True" />
          <xs:enumeration value="false" />
          <xs:enumeration value="true" />
        </xs:restriction>
      </xs:simpleType>
      <xs:element name="TableSequenceData">
        <xs:complexType>
          <xs:sequence>
            <xs:element maxOccurs="unbounded" name="Step">

            </xs:element>
          </xs:sequence>
          <xs:attribute name="RecipeVersion" type="xs:string" fixed="Cluster" use="required" />
          <xs:attribute name="CreatedBy" type="xs:string" use="required" />
          <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
          <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
          <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
          <xs:attribute name="Barcode" type="xs:string" use="required" />
          <xs:attribute name="Description" type="xs:string" use="required" />
        </xs:complexType>
      </xs:element>
    </xs:schema>
  </TableRecipeSchema>
  <Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
</Aitex>