Virgo_ST/VirgoRT/Config/Interlock.Virgo.xml

<?xml version="1.0" encoding="utf-16"?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
<Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-4" >
    <Limit di="PMA.DI_EFEM_Side_Panel_Closed" value="true" tip="EFEM Side Panel Closed" tip.zh-CN="" tip.en-US="DI-43" />
    <Limit di="PMA.DI_PM_ATM_SW" value="true" tip="PM ATM SW" tip.zh-CN="" tip.en-US="DI-1" />
  </Action>

  <Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-5" >
    <Limit di="PMA.DI_EFEM_Side_Panel_Closed" value="true" tip="EFEM Side Panel Closed" tip.zh-CN="" tip.en-US="DI-43" />
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="LID closed" tip.zh-CN="" tip.en-US="DI-0" />
  </Action>

  <Action do="PMA.DO_Substrate_Heater_On" value="true" tip="Substrate Heater On" tip.zh-CN="" tip.en-US="DO-37" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_Cooling_Water_Flow_SW" value="true" tip="Cooling Water Flow" tip.zh-CN="" tip.en-US="DI-3" />
    <Limit di="PMA.DI_LE_OT_SW_Alarm" value="false" tip="LE OT SW Alarm" tip.zh-CN="" tip.en-US="DI-4" />
  </Action>
  
  <Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-0" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DI-7" />
  </Action>

  <Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-1" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DI-7" />
  </Action>
  
  <Action do="PMA.DO_MFC1_Valve" value="true" tip="open mfc1 valve" tip.zh-CN="打开气路阀门MFC1" tip.en-US="DO-14" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMA.DI_MFC1_Pressure" value="true" tip="MFC1 Pressure" tip.zh-CN="" tip.en-US="DI-48" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMA.DO_MFC2_Valve" value="true" tip="open mfc2 valve" tip.zh-CN="打开气路阀门MFC2" tip.en-US="DO-15" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMA.DI_MFC2_Pressure" value="true" tip="MFC2 Pressure" tip.zh-CN="" tip.en-US="DI-49" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMA.DO_MFC3_Valve" value="true" tip="open mfc3 valve" tip.zh-CN="打开气路阀门MFC3" tip.en-US="DO-16" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMA.DI_MFC3_Pressure" value="true" tip="MFC3 Pressure" tip.zh-CN="" tip.en-US="DI-50" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMA.DO_MFC4_Valve" value="true" tip="open mfc4 valve" tip.zh-CN="打开气路阀门MFC4" tip.en-US="DO-17" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMA.DI_MFC4_Pressure" value="true" tip="MFC4 Pressure" tip.zh-CN="" tip.en-US="DI-51" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>
  
  <Action do="PMA.DO_MFC5_Valve" value="true" tip="open mfc5 valve" tip.zh-CN="打开气路阀门MFC5" tip.en-US="DO-18" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMA.DI_MFC5_Pressure" value="true" tip="MFC5 Pressure" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMA.DO_Chamber_purge_valve" value="true" tip="Chamber purge valve" tip.zh-CN="" tip.en-US="DO-23" >
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_N2_Pressure" value="true" tip="N2 Pressure" tip.zh-CN="" tip.en-US="DI-53" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMA.DO_Chamber_vent_valve" value="true" tip="Chamber vent valve" tip.zh-CN="" tip.en-US="DO-24" >
    <Limit di="PMA.DI_N2_Pressure" value="true" tip="N2 Pressure" tip.zh-CN="" tip.en-US="DI-53" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMA.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMA.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMA.DO_Process_gas_final_valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-25" >
    <Limit di="PMA.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
  </Action>

  <!--================================PMB================================-->
  <Action do="PMB.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-4" >
    <Limit di="PMB.DI_EFEM_Side_Panel_Closed" value="true" tip="EFEM Side Panel Closed" tip.zh-CN="" tip.en-US="DI-43" />
    <Limit di="PMB.DI_PM_ATM_SW" value="true" tip="PM ATM SW" tip.zh-CN="" tip.en-US="DI-1" />
  </Action>

  <Action do="PMB.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-5" >
    <Limit di="PMB.DI_EFEM_Side_Panel_Closed" value="true" tip="EFEM Side Panel Closed" tip.zh-CN="" tip.en-US="DI-43" />
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="LID closed" tip.zh-CN="" tip.en-US="DI-0" />
  </Action>

  <Action do="PMB.DO_Substrate_Heater_On" value="true" tip="Substrate Heater On" tip.zh-CN="" tip.en-US="DO-37" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_Cooling_Water_Flow_SW" value="true" tip="Cooling Water Flow" tip.zh-CN="" tip.en-US="DI-3" />
    <Limit di="PMB.DI_LE_OT_SW_Alarm" value="false" tip="LE OT SW Alarm" tip.zh-CN="" tip.en-US="DI-37" />
  </Action>

  <Action do="PMB.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-0" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
  </Action>

  <Action do="PMB.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-1" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
  </Action>

  <Action do="PMB.DO_MFC1_Valve" value="true" tip="open mfc1 valve" tip.zh-CN="打开气路阀门MFC1" tip.en-US="DO-14" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_MFC1_Pressure" value="true" tip="MFC1 Pressure" tip.zh-CN="" tip.en-US="DI-48" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_MFC2_Valve" value="true" tip="open mfc2 valve" tip.zh-CN="打开气路阀门MFC2" tip.en-US="DO-15" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_MFC2_Pressure" value="true" tip="MFC2 Pressure" tip.zh-CN="" tip.en-US="DI-49" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_MFC3_Valve" value="true" tip="open mfc3 valve" tip.zh-CN="打开气路阀门MFC3" tip.en-US="DO-16" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_MFC3_Pressure" value="true" tip="MFC3 Pressure" tip.zh-CN="" tip.en-US="DI-50" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_MFC4_Valve" value="true" tip="open mfc4 valve" tip.zh-CN="打开气路阀门MFC4" tip.en-US="DO-17" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_MFC4_Pressure" value="true" tip="MFC4 Pressure" tip.zh-CN="" tip.en-US="DI-51" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_MFC5_Valve" value="true" tip="open mfc5 valve" tip.zh-CN="打开气路阀门MFC5" tip.en-US="DO-18" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_PM_VAC_SW" value="true" tip="PM VAC SW" tip.zh-CN="" tip.en-US="DI-2" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_MFC5_Pressure" value="true" tip="MFC5 Pressure" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_Chamber_purge_valve" value="true" tip="Chamber purge valve" tip.zh-CN="" tip.en-US="DO-23" >
    <Limit di="PMB.DI_N2_Pressure" value="true" tip="N2 Pressure" tip.zh-CN="" tip.en-US="DI-53" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_Chamber_vent_valve" value="true" tip="Chamber vent valve" tip.zh-CN="" tip.en-US="DO-24" >
    <Limit di="PMB.DI_N2_Pressure" value="true" tip="N2 Pressure" tip.zh-CN="" tip.en-US="DI-53" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PMB.DI_GB_Pressure_SW_Alarm" value="false" tip="GB Pressure SW Alarm" tip.zh-CN="" tip.en-US="DI-29" />
    <Limit di="PMB.DI_GB_Door_SW_Alarm" value="false" tip="GB Door SW Alarm" tip.zh-CN="" tip.en-US="DI-30" />
  </Action>

  <Action do="PMB.DO_Process_gas_final_valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-25" >
    <Limit di="PMB.DI_Lid_Closed" value="true" tip="Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMB.DI_Slit_Door_Close_Pos" value="true" tip="Slit Door Close Pos" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PMB.DI_CDA_Pressure" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-22" />
  </Action>
</Interlock>