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Virgo_ST
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ClusterGemModel.xml

ClusterGemModel.xml 54 KB
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  1. <?xml version="1.0" encoding="UTF-8"?>
    2. 

  2. <Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="true" schemaVersion="1.0.3" productInfo="Virgo">
    3. 

  3. 	<Nameable id="Virgo" description="Virgo" locator="" alias="Virgo" make="Virgo" model="Virgo" softwareRev="1.0" />
    4. 

  4. 	<GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="false" maxOpenTransactions="3">
    5. 

  5. 		<HSMS connectionMode="Passive" linktestInterval="0" localIPAddress="127.0.0.1" localPortNumber="5000" remoteIPAddress="127.0.0.1" remotePortNumber="5001" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
    6. 

  6. 		<RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
    7. 

  7. 	</GemConnection>
    8. 

  8. 	<SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
    9. 

  9. 	<Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
    10. 

  10. 	<Clock timeFormat="yymmddhhmmss" />
    11. 

  11. 	<RemoteCommand allowLocalMode="false">
    12. 

  12. 		<S2F21>
    13. 

  13. 			<S2F21Command name="100" logicalName="START" description=" " />
    14. 

  14. 			<S2F21Command name="101" logicalName="PAUSE" description=" " />
    15. 

  15. 			<S2F21Command name="102" logicalName="STOP" description=" " />
    16. 

  16. 			<S2F21Command name="103" logicalName="PP-SELECT" description=" " />
    17. 

  17. 			<S2F21Command name="104" logicalName="RESUME" description=" " />
    18. 

  18. 			<S2F21Command name="105" logicalName="ABORT" description=" " />
    19. 

  19. 		</S2F21>
    20. 

  20. 		<S2F41>
    21. 

  21. 			<S2F41Command name="ReadCarrierID" logicalName="ReadCarrierID" description=" " />
    22. 

  22. 		</S2F41>
    23. 

  23. 		<S2F49>
    24. 

  24. 			<S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
    25. 

  25. 			</S2F49Command>
    26. 

  26. 			<S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
    27. 

  27. 			</S2F49Command>
    28. 

  28. 			<S2F49Command name="START" logicalName="START" description=" ">
    29. 

  29. 			</S2F49Command>
    30. 

  30. 			<S2F49Command name="STOP" logicalName="STOP" description=" ">
    31. 

  31. 			</S2F49Command>
    32. 

  32. 			<S2F49Command name="ABORT" logicalName="ABORT" description=" ">
    33. 

  33. 			</S2F49Command>
    34. 

  34. 			<S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
    35. 

  35. 			</S2F49Command>
    36. 

  36. 			<S2F49Command name="RESUME" logicalName="RESUME" description=" ">
    37. 

  37. 			</S2F49Command>
    38. 

  38. 		</S2F49>
    39. 

  39. 	</RemoteCommand>
    40. 

  40. 	<StatusVariables>
    41. 

  41. 		<SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description=" " isArray="false" />
    42. 

  42. 		<SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" description=" " isArray="false" />
    43. 

  43. 		<SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" description=" " isArray="false" />
    44. 

  44. 		<SVID id="4" valueType="U4" logicalName="ControlState" value="1" eventTrigger="" description=" " isArray="false" />
    45. 

  45. 		<SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" description=" " isArray="false" />
    46. 

  46. 		<SVID id="6" valueType="Ascii" logicalName="PPExecName" value="PPExecName" eventTrigger="" description=" " isArray="false" />
    47. 

  47. 		<SVID id="7" valueType="U1" logicalName="PreviousProcessState" value="0" eventTrigger="" description=" " isArray="false" />
    48. 

  48. 		<SVID id="8" valueType="U1" logicalName="ProcessState" value="0" eventTrigger="" description=" " isArray="false" />
    49. 

  49. 		<SVID id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" description=" " isArray="false" />
    50. 

  50. 		<SVID id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" description=" " isArray="false" />
    51. 

  51. 		<SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" description=" " isArray="false" />
    52. 

  52. 		<SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" description=" " isArray="false" />
    53. 

  53. 		<SVID id="13" valueType="Ascii" logicalName="SpoolState" value="1" eventTrigger="" description=" " isArray="false" />
    54. 

  54. 		<SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="0" eventTrigger="" description=" " isArray="false"/>
    55. 

  55. 

  56. 		<SVID id="1101" valueType="U4" logicalName="EquipmentMode" value="" units="" description=" " eventTrigger=" " />
    57. 

  57. 		<SVID id="1102" valueType="U4" logicalName="EquipmentStatus" value="" units="" description=" " eventTrigger=" " />
    58. 

  58. 		<SVID id="1103" valueType="List" logicalName="RecipeList" value="" units="" description=" " eventTrigger=" " />
    59. 

  59. 

  60. 		<SVID id="1201" valueType="Ascii" logicalName="System.IoPressureMeter.PressureMeterChamber.Feedback" value="" units="" description=" " eventTrigger=" " />
    61. 

  61. 		<SVID id="1202" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPosition" value="" units="" description=" " eventTrigger=" " />
    62. 

  62. 		<SVID id="1203" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPositionSetPoint" value="" units="" description=" " eventTrigger=" " />
    63. 

  63. 		<SVID id="1204" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressure" value="" units="" description=" " eventTrigger=" " />
    64. 

  64. 		<SVID id="1205" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressureSetPoint" value="" units="" description=" " eventTrigger=" " />
    65. 

  65. 		<SVID id="1206" valueType="Ascii" logicalName="System.IoPump.MainPump.N2PressureValue" value="" units="" description=" " eventTrigger=" " />
    66. 

  66. 		<SVID id="1207" valueType="Ascii" logicalName="System.IoPump.MainPump.WaterFlowValue" value="" units="" description=" " eventTrigger=" " />
    67. 

  67. 		<SVID id="1208" valueType="Ascii" logicalName="System.IoRf.Rf.RFSetPoint" value="" units="" description=" " eventTrigger=" " />
    68. 

  68. 		<SVID id="1209" valueType="Ascii" logicalName="System.IoRf.Rf.RFForwardPower" value="" units="" description=" " eventTrigger=" " />
    69. 

  69. 		<SVID id="1210" valueType="Ascii" logicalName="System.IoRf.Rf.RFReflectPower" value="" units="" description=" " eventTrigger=" " />
    70. 

  70. 		<SVID id="1211" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1Feedback" value="" units="" description=" " eventTrigger=" " />
    71. 

  71. 		<SVID id="1212" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2Feedback" value="" units="" description=" " eventTrigger=" " />
    72. 

  72. 		<SVID id="1213" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1SetPoint" value="" units="" description=" " eventTrigger=" " />
    73. 

  73. 		<SVID id="1214" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2SetPoint" value="" units="" description=" " eventTrigger=" " />
    74. 

  74. 		<SVID id="1215" valueType="Ascii" logicalName="System.IoRf.Rf.RFFrequency" value="" units="" description=" " eventTrigger=" " />
    75. 

  75. 		<SVID id="1216" valueType="Ascii" logicalName="System.IoRf.Rf.RFDuty" value="" units="" description=" " eventTrigger=" " />
    76. 

  76. 		<SVID id="1217" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.FeedBack" value="" units="" description=" " eventTrigger=" " />
    77. 

  77. 		<SVID id="1218" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.SetPoint" value="" units="" description=" " eventTrigger=" " />
    78. 

  78. 		<SVID id="1219" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.FeedBack" value="" units="" description=" " eventTrigger=" " />
    79. 

  79. 		<SVID id="1220" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.SetPoint" value="" units="" description=" " eventTrigger=" " />
    80. 

  80. 		<SVID id="1221" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.FeedBack" value="" units="" description=" " eventTrigger=" " />
    81. 

  81. 		<SVID id="1222" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.SetPoint" value="" units="" description=" " eventTrigger=" " />
    82. 

  82. 		<SVID id="1223" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.FeedBack" value="" units="" description=" " eventTrigger=" " />
    83. 

  83. 		<SVID id="1224" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.SetPoint" value="" units="" description=" " eventTrigger=" " />
    84. 

  84. 		<SVID id="1225" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.FeedBack" value="" units="" description=" " eventTrigger=" " />
    85. 

  85. 		<SVID id="1226" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.SetPoint" value="" units="" description=" " eventTrigger=" " />
    86. 

  86. 

  87. 		<SVID id="10001" valueType="Ascii" logicalName="LP1.SlotMap" value="" units="" description=" " eventTrigger=" " />
    88. 

  88. 		<SVID id="10002" valueType="U4" logicalName="LP1.CassettePresent" value="" units="" description=" " eventTrigger=" " />
    89. 

  89. 		<SVID id="10003" valueType="U4" logicalName="LP1.IsWaferProtrude" value="" units="" description=" " eventTrigger=" " />
    90. 

  90. 		<SVID id="20001" valueType="Ascii" logicalName="LP2.SlotMap" value="" units="" description=" " eventTrigger=" " />
    91. 

  91. 		<SVID id="20002" valueType="U4" logicalName="LP2.CassettePresent" value="" units="" description=" " eventTrigger=" " />
    92. 

  92. 		<SVID id="20003" valueType="U4" logicalName="LP2.IsWaferProtrude" value="" units="" description=" " eventTrigger=" " />
    93. 

  93. 		<SVID id="430001" valueType="Ascii" logicalName="PMA.IoPressureMeter.PressureMeterChamber.Feedback" value="" units="" description=" " eventTrigger=" " />
    94. 

  94. 		<SVID id="430002" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPosition" value="" units="" description=" " eventTrigger=" " />
    95. 

  95. 		<SVID id="430003" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPositionSetPoint" value="" units="" description=" " eventTrigger=" " />
    96. 

  96. 		<SVID id="430004" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPressure" value="" units="" description=" " eventTrigger=" " />
    97. 

  97. 		<SVID id="430005" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPressureSetPoint" value="" units="" description=" " eventTrigger=" " />
    98. 

  98. 		<SVID id="430006" valueType="Ascii" logicalName="PMA.IoPump.MainPump.N2PressureValue" value="" units="" description=" " eventTrigger=" " />
    99. 

  99. 		<SVID id="430007" valueType="Ascii" logicalName="PMA.IoPump.MainPump.WaterFlowValue" value="" units="" description=" " eventTrigger=" " />
    100. 

  100. 		<SVID id="430008" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFSetPoint" value="" units="" description=" " eventTrigger=" " />
    101. 

  101. 		<SVID id="430009" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFForwardPower" value="" units="" description=" " eventTrigger=" " />
    102. 

  102. 		<SVID id="430010" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFReflectPower" value="" units="" description=" " eventTrigger=" " />
    103. 

  103. 		<SVID id="430011" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC1Feedback" value="" units="" description=" " eventTrigger=" " />
    104. 

  104. 		<SVID id="430012" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC2Feedback" value="" units="" description=" " eventTrigger=" " />
    105. 

  105. 		<SVID id="430013" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC1SetPoint" value="" units="" description=" " eventTrigger=" " />
    106. 

  106. 		<SVID id="430014" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC2SetPoint" value="" units="" description=" " eventTrigger=" " />
    107. 

  107. 		<SVID id="430015" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFFrequency" value="" units="" description=" " eventTrigger=" " />
    108. 

  108. 		<SVID id="430016" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFDuty" value="" units="" description=" " eventTrigger=" " />
    109. 

  109. 		<SVID id="430017" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas1.FeedBack" value="" units="" description=" " eventTrigger=" " />
    110. 

  110. 		<SVID id="430018" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas1.SetPoint" value="" units="" description=" " eventTrigger=" " />
    111. 

  111. 		<SVID id="430019" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas2.FeedBack" value="" units="" description=" " eventTrigger=" " />
    112. 

  112. 		<SVID id="430020" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas2.SetPoint" value="" units="" description=" " eventTrigger=" " />
    113. 

  113. 		<SVID id="430021" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas3.FeedBack" value="" units="" description=" " eventTrigger=" " />
    114. 

  114. 		<SVID id="430022" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas3.SetPoint" value="" units="" description=" " eventTrigger=" " />
    115. 

  115. 		<SVID id="430023" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas4.FeedBack" value="" units="" description=" " eventTrigger=" " />
    116. 

  116. 		<SVID id="430024" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas4.SetPoint" value="" units="" description=" " eventTrigger=" " />
    117. 

  117. 		<SVID id="430025" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas5.FeedBack" value="" units="" description=" " eventTrigger=" " />
    118. 

  118. 		<SVID id="430026" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas5.SetPoint" value="" units="" description=" " eventTrigger=" " />
    119. 

  119. 		<SVID id="430027" valueType="Ascii" logicalName="PMA.BiasMatch.C1" value="" units="" description=" " eventTrigger=" " />
    120. 

  120. 		<SVID id="430028" valueType="Ascii" logicalName="PMA.BiasMatch.C2" value="" units="" description=" " eventTrigger=" " />
    121. 

  121. 		<SVID id="430029" valueType="Ascii" logicalName="PMA.BiasMatch.MatchProcessMode" value="" units="" description=" " eventTrigger=" " />
    122. 

  122. 		<SVID id="430030" valueType="Ascii" logicalName="PMA.BiasMatch.VPP" value="" units="" description=" " eventTrigger=" " />
    123. 

  123. 		<SVID id="430031" valueType="Ascii" logicalName="PMA.BiasRf.ForwardPower" value="" units="" description=" " eventTrigger=" " />
    124. 

  124. 		<SVID id="430032" valueType="Ascii" logicalName="PMA.BiasRf.Frequency" value="" units="" description=" " eventTrigger=" " />
    125. 

  125. 		<SVID id="430033" valueType="Ascii" logicalName="PMA.BiasRf.PowerSetPoint" value="" units="" description=" " eventTrigger=" " />
    126. 

  126. 		<SVID id="430034" valueType="Ascii" logicalName="PMA.BiasRf.PulsingDutyCycle" value="" units="" description=" " eventTrigger=" " />
    127. 

  127. 		<SVID id="430035" valueType="Ascii" logicalName="PMA.BiasRf.PulsingFrequency" value="" units="" description=" " eventTrigger=" " />
    128. 

  128. 		<SVID id="430036" valueType="Ascii" logicalName="PMA.BiasRf.ReflectPower" value="" units="" description=" " eventTrigger=" " />
    129. 

  129. 		<SVID id="430037" valueType="Ascii" logicalName="PMA.ChamberPressure" value="" units="" description=" " eventTrigger=" " />
    130. 

  130. 		<SVID id="430038" valueType="Ascii" logicalName="PMA.Chiller.ControlTcFeedback" value="" units="" description=" " eventTrigger=" " />
    131. 

  131. 		<SVID id="430039" valueType="Ascii" logicalName="PMA.Chiller.ControlTcSetPoint" value="" units="" description=" " eventTrigger=" " />
    132. 

  132. 		<SVID id="430040" valueType="Ascii" logicalName="PMA.Chiller.CoolantInletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    133. 

  133. 		<SVID id="430041" valueType="Ascii" logicalName="PMA.Chiller.CoolantOutletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    134. 

  134. 		<SVID id="430042" valueType="Ascii" logicalName="PMA.Chiller.Temperature" value="" units="" description=" " eventTrigger=" " />
    135. 

  135. 		<SVID id="430043" valueType="Ascii" logicalName="PMA.ForelineGauge.Value" value="" units="" description=" " eventTrigger=" " />
    136. 

  136. 		<SVID id="430044" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.ControlTcFeedback" value="" units="" description=" " eventTrigger=" " />
    137. 

  137. 		<SVID id="430045" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.ControlTcSetPoint" value="" units="" description=" " eventTrigger=" " />
    138. 

  138. 		<SVID id="430046" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.ControlTcSetPointView" value="" units="" description=" " eventTrigger=" " />
    139. 

  139. 		<SVID id="430047" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.CoolantInletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    140. 

  140. 		<SVID id="430048" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.CoolantOutletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    141. 

  141. 		<SVID id="430049" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.MonitorTcFeedback" value="" units="" description=" " eventTrigger=" " />
    142. 

  142. 		<SVID id="430050" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.ControlTcFeedback" value="" units="" description=" " eventTrigger=" " />
    143. 

  143. 		<SVID id="430051" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.ControlTcSetPoint" value="" units="" description=" " eventTrigger=" " />
    144. 

  144. 		<SVID id="430052" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.ControlTcSetPointView" value="" units="" description=" " eventTrigger=" " />
    145. 

  145. 		<SVID id="430053" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.CoolantInletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    146. 

  146. 		<SVID id="430054" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.CoolantOutletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    147. 

  147. 		<SVID id="430055" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.MonitorTcFeedback" value="" units="" description=" " eventTrigger=" " />
    148. 

  148. 		<SVID id="430056" valueType="Ascii" logicalName="PMA.PressureGauge.Value" value="" units="" description=" " eventTrigger=" " />
    149. 

  149. 		<SVID id="430057" valueType="Ascii" logicalName="PMA.ProcessGauge.Value" value="" units="" description=" " eventTrigger=" " />
    150. 

  150. 		<SVID id="430058" valueType="Ascii" logicalName="PMA.Rf.ForwardPower" value="" units="" description=" " eventTrigger=" " />
    151. 

  151. 		<SVID id="430059" valueType="Ascii" logicalName="PMA.Rf.Frequency" value="" units="" description=" " eventTrigger=" " />
    152. 

  152. 		<SVID id="430060" valueType="Ascii" logicalName="PMA.Rf.PowerSetPoint" value="" units="" description=" " eventTrigger=" " />
    153. 

  153. 		<SVID id="430061" valueType="Ascii" logicalName="PMA.Rf.PulsingDutyCycle" value="" units="" description=" " eventTrigger=" " />
    154. 

  154. 		<SVID id="430062" valueType="Ascii" logicalName="PMA.Rf.PulsingFrequency" value="" units="" description=" " eventTrigger=" " />
    155. 

  155. 		<SVID id="430063" valueType="Ascii" logicalName="PMA.Rf.ReflectPower" value="" units="" description=" " eventTrigger=" " />
    156. 

  156. 		<SVID id="430064" valueType="Ascii" logicalName="PMA.StepNo" value="" units="" description=" " eventTrigger=" " />
    157. 

  157. 		<SVID id="430065" valueType="Ascii" logicalName="PMA.RecipeProcessTime" value="" units="s" description=" " eventTrigger=" " />
    158. 

  158. 		<SVID id="430066" valueType="Ascii" logicalName="PMA.RecipeStepTimeElapsed" value="" units="s" description=" " eventTrigger=" " />
    159. 

  159. 		<SVID id="430067" valueType="Ascii" logicalName="PMA.RecipeStepTimeSetPoint" value="" units="s" description=" " eventTrigger=" " />
    160. 

  160. 		<SVID id="430068" valueType="Ascii" logicalName="PMA.ProcessedWaferCount" value="" units="" description=" " eventTrigger=" " />
    161. 

  161. 		<SVID id="430069" valueType="Ascii" logicalName="PMA.RfOnTime" value="" units="h" description=" " eventTrigger=" " />
    162. 

  162. 		<SVID id="430070" valueType="Ascii" logicalName="PMA.BiasRfOnTime" value="" units="h" description=" " eventTrigger=" " />
    163. 

  163. 		<SVID id="430071" valueType="Ascii" logicalName="PMA.PumpOnTime" value="" units="h" description=" " eventTrigger=" " />
    164. 

  164. 

  165. 

  166. 		<SVID id="440001" valueType="Ascii" logicalName="PMB.IoPressureMeter.PressureMeterChamber.Feedback" value="" units="" description=" " eventTrigger=" " />
    167. 

  167. 		<SVID id="440002" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPosition" value="" units="" description=" " eventTrigger=" " />
    168. 

  168. 		<SVID id="440003" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPositionSetPoint" value="" units="" description=" " eventTrigger=" " />
    169. 

  169. 		<SVID id="440004" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPressure" value="" units="" description=" " eventTrigger=" " />
    170. 

  170. 		<SVID id="440005" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPressureSetPoint" value="" units="" description=" " eventTrigger=" " />
    171. 

  171. 		<SVID id="440006" valueType="Ascii" logicalName="PMB.IoPump.MainPump.N2PressureValue" value="" units="" description=" " eventTrigger=" " />
    172. 

  172. 		<SVID id="440007" valueType="Ascii" logicalName="PMB.IoPump.MainPump.WaterFlowValue" value="" units="" description=" " eventTrigger=" " />
    173. 

  173. 		<SVID id="440008" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFSetPoint" value="" units="" description=" " eventTrigger=" " />
    174. 

  174. 		<SVID id="440009" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFForwardPower" value="" units="" description=" " eventTrigger=" " />
    175. 

  175. 		<SVID id="440010" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFReflectPower" value="" units="" description=" " eventTrigger=" " />
    176. 

  176. 		<SVID id="440011" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC1Feedback" value="" units="" description=" " eventTrigger=" " />
    177. 

  177. 		<SVID id="440012" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC2Feedback" value="" units="" description=" " eventTrigger=" " />
    178. 

  178. 		<SVID id="440013" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC1SetPoint" value="" units="" description=" " eventTrigger=" " />
    179. 

  179. 		<SVID id="440014" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC2SetPoint" value="" units="" description=" " eventTrigger=" " />
    180. 

  180. 		<SVID id="440015" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFFrequency" value="" units="" description=" " eventTrigger=" " />
    181. 

  181. 		<SVID id="440016" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFDuty" value="" units="" description=" " eventTrigger=" " />
    182. 

  182. 		<SVID id="440017" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas1.FeedBack" value="" units="" description=" " eventTrigger=" " />
    183. 

  183. 		<SVID id="440018" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas1.SetPoint" value="" units="" description=" " eventTrigger=" " />
    184. 

  184. 		<SVID id="440019" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas2.FeedBack" value="" units="" description=" " eventTrigger=" " />
    185. 

  185. 		<SVID id="440020" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas2.SetPoint" value="" units="" description=" " eventTrigger=" " />
    186. 

  186. 		<SVID id="440021" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas3.FeedBack" value="" units="" description=" " eventTrigger=" " />
    187. 

  187. 		<SVID id="440022" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas3.SetPoint" value="" units="" description=" " eventTrigger=" " />
    188. 

  188. 		<SVID id="440023" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas4.FeedBack" value="" units="" description=" " eventTrigger=" " />
    189. 

  189. 		<SVID id="440024" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas4.SetPoint" value="" units="" description=" " eventTrigger=" " />
    190. 

  190. 		<SVID id="440025" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas5.FeedBack" value="" units="" description=" " eventTrigger=" " />
    191. 

  191. 		<SVID id="440026" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas5.SetPoint" value="" units="" description=" " eventTrigger=" " />
    192. 

  192. 		<SVID id="440027" valueType="Ascii" logicalName="PMB.BiasMatch.C1" value="" units="" description=" " eventTrigger=" " />
    193. 

  193. 		<SVID id="440028" valueType="Ascii" logicalName="PMB.BiasMatch.C2" value="" units="" description=" " eventTrigger=" " />
    194. 

  194. 		<SVID id="440029" valueType="Ascii" logicalName="PMB.BiasMatch.MatchProcessMode" value="" units="" description=" " eventTrigger=" " />
    195. 

  195. 		<SVID id="440030" valueType="Ascii" logicalName="PMB.BiasMatch.VPP" value="" units="" description=" " eventTrigger=" " />
    196. 

  196. 		<SVID id="440031" valueType="Ascii" logicalName="PMB.BiasRf.ForwardPower" value="" units="" description=" " eventTrigger=" " />
    197. 

  197. 		<SVID id="440032" valueType="Ascii" logicalName="PMB.BiasRf.Frequency" value="" units="" description=" " eventTrigger=" " />
    198. 

  198. 		<SVID id="440033" valueType="Ascii" logicalName="PMB.BiasRf.PowerSetPoint" value="" units="" description=" " eventTrigger=" " />
    199. 

  199. 		<SVID id="440034" valueType="Ascii" logicalName="PMB.BiasRf.PulsingDutyCycle" value="" units="" description=" " eventTrigger=" " />
    200. 

  200. 		<SVID id="440035" valueType="Ascii" logicalName="PMB.BiasRf.PulsingFrequency" value="" units="" description=" " eventTrigger=" " />
    201. 

  201. 		<SVID id="440036" valueType="Ascii" logicalName="PMB.BiasRf.ReflectPower" value="" units="" description=" " eventTrigger=" " />
    202. 

  202. 		<SVID id="440037" valueType="Ascii" logicalName="PMB.ChamberPressure" value="" units="" description=" " eventTrigger=" " />
    203. 

  203. 		<SVID id="440038" valueType="Ascii" logicalName="PMB.Chiller.ControlTcFeedback" value="" units="" description=" " eventTrigger=" " />
    204. 

  204. 		<SVID id="440039" valueType="Ascii" logicalName="PMB.Chiller.ControlTcSetPoint" value="" units="" description=" " eventTrigger=" " />
    205. 

  205. 		<SVID id="440040" valueType="Ascii" logicalName="PMB.Chiller.CoolantInletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    206. 

  206. 		<SVID id="440041" valueType="Ascii" logicalName="PMB.Chiller.CoolantOutletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    207. 

  207. 		<SVID id="440042" valueType="Ascii" logicalName="PMB.Chiller.Temperature" value="" units="" description=" " eventTrigger=" " />
    208. 

  208. 		<SVID id="440043" valueType="Ascii" logicalName="PMB.ForelineGauge.Value" value="" units="" description=" " eventTrigger=" " />
    209. 

  209. 		<SVID id="440044" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.ControlTcFeedback" value="" units="" description=" " eventTrigger=" " />
    210. 

  210. 		<SVID id="440045" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.ControlTcSetPoint" value="" units="" description=" " eventTrigger=" " />
    211. 

  211. 		<SVID id="440046" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.ControlTcSetPointView" value="" units="" description=" " eventTrigger=" " />
    212. 

  212. 		<SVID id="440047" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.CoolantInletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    213. 

  213. 		<SVID id="440048" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.CoolantOutletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    214. 

  214. 		<SVID id="440049" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.MonitorTcFeedback" value="" units="" description=" " eventTrigger=" " />
    215. 

  215. 		<SVID id="440050" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.ControlTcFeedback" value="" units="" description=" " eventTrigger=" " />
    216. 

  216. 		<SVID id="440051" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.ControlTcSetPoint" value="" units="" description=" " eventTrigger=" " />
    217. 

  217. 		<SVID id="440052" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.ControlTcSetPointView" value="" units="" description=" " eventTrigger=" " />
    218. 

  218. 		<SVID id="440053" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.CoolantInletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    219. 

  219. 		<SVID id="440054" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.CoolantOutletTempFeedback" value="" units="" description=" " eventTrigger=" " />
    220. 

  220. 		<SVID id="440055" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.MonitorTcFeedback" value="" units="" description=" " eventTrigger=" " />
    221. 

  221. 		<SVID id="440056" valueType="Ascii" logicalName="PMB.PressureGauge.Value" value="" units="" description=" " eventTrigger=" " />
    222. 

  222. 		<SVID id="440057" valueType="Ascii" logicalName="PMB.ProcessGauge.Value" value="" units="" description=" " eventTrigger=" " />
    223. 

  223. 		<SVID id="440058" valueType="Ascii" logicalName="PMB.Rf.ForwardPower" value="" units="" description=" " eventTrigger=" " />
    224. 

  224. 		<SVID id="440059" valueType="Ascii" logicalName="PMB.Rf.Frequency" value="" units="" description=" " eventTrigger=" " />
    225. 

  225. 		<SVID id="440060" valueType="Ascii" logicalName="PMB.Rf.PowerSetPoint" value="" units="" description=" " eventTrigger=" " />
    226. 

  226. 		<SVID id="440061" valueType="Ascii" logicalName="PMB.Rf.PulsingDutyCycle" value="" units="" description=" " eventTrigger=" " />
    227. 

  227. 		<SVID id="440062" valueType="Ascii" logicalName="PMB.Rf.PulsingFrequency" value="" units="" description=" " eventTrigger=" " />
    228. 

  228. 		<SVID id="440063" valueType="Ascii" logicalName="PMB.Rf.ReflectPower" value="" units="" description=" " eventTrigger=" " />
    229. 

  229. 		<SVID id="440064" valueType="Ascii" logicalName="PMB.StepNo" value="" units="" description=" " eventTrigger=" " />
    230. 

  230. 		<SVID id="440065" valueType="Ascii" logicalName="PMB.RecipeProcessTime" value="" units="s" description=" " eventTrigger=" " />
    231. 

  231. 		<SVID id="440066" valueType="Ascii" logicalName="PMB.RecipeStepTimeElapsed" value="" units="s" description=" " eventTrigger=" " />
    232. 

  232. 		<SVID id="440067" valueType="Ascii" logicalName="PMB.RecipeStepTimeSetPoint" value="" units="s" description=" " eventTrigger=" " />
    233. 

  233. 		<SVID id="440068" valueType="Ascii" logicalName="PMB.ProcessedWaferCount" value="" units="" description=" " eventTrigger=" " />
    234. 

  234. 		<SVID id="440069" valueType="Ascii" logicalName="PMB.RfOnTime" value="" units="h" description=" " eventTrigger=" " />
    235. 

  235. 		<SVID id="440070" valueType="Ascii" logicalName="PMB.BiasRfOnTime" value="" units="h" description=" " eventTrigger=" " />
    236. 

  236. 		<SVID id="440071" valueType="Ascii" logicalName="PMB.PumpOnTime" value="" units="h" description=" " eventTrigger=" " />
    237. 

  237. 

  238. 

  239. 	</StatusVariables>
    240. 

  240. 	<EquipmentConstants suppressECMinMaxType="false">
    241. 

  241. 		<ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="2" units="" description="" eventTrigger=" " isArray="false" />
    242. 

  242. 		<ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
    243. 

  243. 		<ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
    244. 

  244. 		<ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
    245. 

  245. 		<ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
    246. 

  246. 		<ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="1" units="" description="" eventTrigger=" " isArray="false" />
    247. 

  247. 	</EquipmentConstants>
    248. 

  248. 	<DataVariables>
    249. 

  249. 		<DVID id="3001" valueType="U4" logicalName="EventLimit" value="0" eventTrigger="" description=" " isArray="false" />
    250. 

  250. 		<DVID id="3002" valueType="U4" logicalName="LimitVariable" value="0" eventTrigger="" description=" " isArray="false" />
    251. 

  251. 		<DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description=" " isArray="false" />
    252. 

  252. 		<DVID id="3004" valueType="U2" logicalName="PPChangeStatus" value="1" eventTrigger="" description=" " isArray="false" />
    253. 

  253. 		<DVID id="3005" valueType="Binary" logicalName="TransitionType" value="0" eventTrigger="" description=" " isArray="false" />
    254. 

  254. 		<DVID id="3006" valueType="U4" logicalName="AlarmID" eventTrigger="" description=" " isArray="false" />
    255. 

  255. 		<DVID id="3007" valueType="U4" logicalName="ECChangedID" value="" eventTrigger="" description=" " isArray="false" />
    256. 

  256. 

  257. 		<DVID id="3101" valueType="Ascii" logicalName="EventName" value="" eventTrigger="" description=" " isArray="false" />
    258. 

  258. 		<DVID id="3102" valueType="Ascii" logicalName="LotID" value="" eventTrigger="" description=" " isArray="false" />
    259. 

  259. 		<DVID id="3103" valueType="Ascii" logicalName="RecipeID" value="" eventTrigger="" description=" " isArray="false" />
    260. 

  260. 		<DVID id="3104" valueType="Ascii" logicalName="JobID" value="" eventTrigger="" description=" " isArray="false" />
    261. 

  261. 		<DVID id="3105" valueType="Ascii" logicalName="PortID" value="" eventTrigger="" description=" " isArray="false" />
    262. 

  262. 		<DVID id="3106" valueType="Ascii" logicalName="SlotMap" value="" eventTrigger="" description=" " isArray="false" />
    263. 

  263. 		<DVID id="3107" valueType="Ascii" logicalName="SequenceID" value="" eventTrigger="" description=" " isArray="false" />
    264. 

  264. 		<DVID id="3108" valueType="Ascii" logicalName="StationName" value="" eventTrigger="" description=" " isArray="false" />
    265. 

  265. 		<DVID id="3109" valueType="Ascii" logicalName="RecipeStepNumber" value="" eventTrigger="" description=" " isArray="false" />
    266. 

  266. 		<DVID id="3110" valueType="Ascii" logicalName="SlotID" value="" eventTrigger="" description=" " isArray="false" />
    267. 

  267. 		<DVID id="3111" valueType="Ascii" logicalName="ProcessedWaferCount" value="0" eventTrigger="" description=" " isArray="false" />
    268. 

  268. 		<DVID id="3112" valueType="Ascii" logicalName="CarrierID" value="0" eventTrigger="" description=" " isArray="false" />
    269. 

  269. 		<DVID id="3113" valueType="Ascii" logicalName="TagData" value="0" eventTrigger="" description=" " isArray="false" />
    270. 

  270. 		<DVID id="3114" valueType="List" logicalName="RecipeStepEndDataSummary" value="" eventTrigger="" description=" " isArray="false" />
    271. 

  271. 		<DVID id="3115" valueType="U4" logicalName="WaferProcessResult" value="" eventTrigger="" description=" " isArray="false" />
    272. 

  272. 	</DataVariables>
    273. 

  273. 	<DataCollections useAnnotatedEvent="false">
    274. 

  274. 		<RPTIDs>
    275. 

  275. 			<RPTID id="1" logicalName="ControlReport">
    276. 

  276. 				<ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
    277. 

  277. 				<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    278. 

  278. 			</RPTID>
    279. 

  279. 			<RPTID id="2" logicalName="ProcessingReport">
    280. 

  280. 				<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    281. 

  281. 				<ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
    282. 

  282. 			</RPTID>
    283. 

  283. 			<RPTID id="4" logicalName="ProcessingStateChangedReport">
    284. 

  284. 				<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    285. 

  285. 				<ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
    286. 

  286. 				<ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
    287. 

  287. 			</RPTID>
    288. 

  288. 			<RPTID id="5" logicalName="ECChangedReport">
    289. 

  289. 				<ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
    290. 

  290. 			</RPTID>
    291. 

  291. 			<RPTID id="6" logicalName="PPChangedReport">
    292. 

  292. 				<ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
    293. 

  293. 				<ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
    294. 

  294. 			</RPTID>
    295. 

  295. 			<RPTID id="7" logicalName="PPSelectedReport">
    296. 

  296. 				<ReportVariable id="6" varType="StatusVariable" logicalName="PPExecName" />
    297. 

  297. 			</RPTID>
    298. 

  298. 			<RPTID id="8" logicalName="AlarmEventReport">
    299. 

  299. 				<ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
    300. 

  300. 				<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    301. 

  301. 				<ReportVariable id="2" varType="StatusVariable" logicalName="AlarmsSet" />
    302. 

  302. 			</RPTID>
    303. 

  303. 		</RPTIDs>
    304. 

  304. 		<CEIDs>
    305. 

  305. 			<CEID id="1" logicalName="EquipmentOFFLINE" description=" " enabled="false">
    306. 

  306. 				<RPTID id="1" logicalName="ControlReport" />
    307. 

  307. 			</CEID>
    308. 

  308. 			<CEID id="2" logicalName="ControlStateLOCAL" description=" " enabled="false">
    309. 

  309. 				<RPTID id="1" logicalName="ControlReport" />
    310. 

  310. 			</CEID>
    311. 

  311. 			<CEID id="3" logicalName="ControlStateREMOTE" description=" " enabled="false">
    312. 

  312. 				<RPTID id="1" logicalName="ControlReport" />
    313. 

  313. 			</CEID>
    314. 

  314. 			<CEID id="4" logicalName="ProcessingStarted" description=" " enabled="false">
    315. 

  315. 				<RPTID id="2" logicalName="ProcessingReport" />
    316. 

  316. 			</CEID>
    317. 

  317. 			<CEID id="5" logicalName="ProcessingCompleted" description=" " enabled="false">
    318. 

  318. 				<RPTID id="2" logicalName="ProcessingReport" />
    319. 

  319. 			</CEID>
    320. 

  320. 			<CEID id="6" logicalName="ProcessingStopped" description=" " enabled="false">
    321. 

  321. 				<RPTID id="2" logicalName="ProcessingReport" />
    322. 

  322. 			</CEID>
    323. 

  323. 			<CEID id="7" logicalName="ProcessingStateChanged" description=" " enabled="false">
    324. 

  324. 				<RPTID id="4" logicalName="ProcessingStateChangedReport" />
    325. 

  325. 			</CEID>
    326. 

  326. 			<CEID id="8" logicalName="EquipmentConstantChanged" description=" " enabled="false">
    327. 

  327. 				<RPTID id="5" logicalName="ECChangedReport" />
    328. 

  328. 			</CEID>
    329. 

  329. 			<CEID id="9" logicalName="ProcessProgramChanged" description=" " enabled="false">
    330. 

  330. 				<RPTID id="6" logicalName="PPChangedReport" />
    331. 

  331. 			</CEID>
    332. 

  332. 			<CEID id="10" logicalName="ProcessProgramSelected" description=" " enabled="false">
    333. 

  333. 				<RPTID id="7" logicalName="PPSelectedReport" />
    334. 

  334. 			</CEID>
    335. 

  335. 			<CEID id="11" logicalName="SpoolingActivated" description=" " enabled="false" />
    336. 

  336. 			<CEID id="12" logicalName="SpoolingDeactivated" description=" " enabled="false" />
    337. 

  337. 			<CEID id="13" logicalName="SpoolingFailed" description=" " enabled="false" />
    338. 

  338. 			<CEID id="1001" logicalName="WaferLeftPosition" description=" " enabled="false" />
    339. 

  339. 			<CEID id="1002" logicalName="WaferArrivePosition" description=" " enabled="false" />
    340. 

  340. 			<CEID id="1101" logicalName="Port1LoadComplete" description=" " enabled="false" />
    341. 

  341. 			<CEID id="1102" logicalName="Port1LoadFailed" description=" " enabled="false" />
    342. 

  342. 			<CEID id="1103" logicalName="Port1UnloadComplete" description=" " enabled="false" />
    343. 

  343. 			<CEID id="1104" logicalName="Port1UnloadFailed" description=" " enabled="false" />
    344. 

  344. 			<CEID id="1105" logicalName="Port1CassetteArrive" description=" " enabled="false" />
    345. 

  345. 			<CEID id="1106" logicalName="Port1CassetteRemoved" description=" " enabled="false" />
    346. 

  346. 			<CEID id="1107" logicalName="Port1JobStarted" description=" " enabled="false" />
    347. 

  347. 			<CEID id="1108" logicalName="Port1JobStopped" description=" " enabled="false" />
    348. 

  348. 			<CEID id="1109" logicalName="Port1JobPaused" description=" " enabled="false" />
    349. 

  349. 			<CEID id="1110" logicalName="Port1JobResumed" description=" " enabled="false" />
    350. 

  350. 			<CEID id="1111" logicalName="Port1JobAborted" description=" " enabled="false" />
    351. 

  351. 			<CEID id="1112" logicalName="Port1JobFinished" description=" " enabled="false" />
    352. 

  352. 			<CEID id="1113" logicalName="Port1JobFailed" description=" " enabled="false" />
    353. 

  353. 			<CEID id="1114" logicalName="Port1MappingComplete" description=" " enabled="false" />
    354. 

  354. 			<CEID id="1115" logicalName="Port1MappingFailed" description=" " enabled="false" />
    355. 

  355. 			<CEID id="1116" logicalName="Port1SequenceSelected" description=" " enabled="false" />
    356. 

  356. 			<CEID id="1117" logicalName="Port1SequenceSelectFailed" description=" " enabled="false" />
    357. 

  357. 			<CEID id="1118" logicalName="Port1JobWaferStart" description=" " enabled="false" />
    358. 

  358. 			<CEID id="1119" logicalName="Port1JobWaferEnd" description=" " enabled="false" />
    359. 

  359. 			<CEID id="1120" logicalName="Port1Clamped" description=" " enabled="false" />
    360. 

  360. 			<CEID id="1121" logicalName="Port1Unclamped" description=" " enabled="false" />
    361. 

  361. 			<CEID id="1122" logicalName="Port1IDRead" description=" " enabled="false" />
    362. 

  362. 			<CEID id="1123" logicalName="Port1ReadIDFailed" description=" " enabled="false" />
    363. 

  363. 			<CEID id="1124" logicalName="Port1IDWrite" description=" " enabled="false" />
    364. 

  364. 			<CEID id="1125" logicalName="Port1WriteIDFailed" description=" " enabled="false" />
    365. 

  365. 			<CEID id="1126" logicalName="Port1TagDataRead" description=" " enabled="false" />
    366. 

  366. 			<CEID id="1127" logicalName="Port1ReadTagDataFailed" description=" " enabled="false" />
    367. 

  367. 			<CEID id="1128" logicalName="Port1TagDataWrite" description=" " enabled="false" />
    368. 

  368. 			<CEID id="1129" logicalName="Port1WriteTagDataFailed" description=" " enabled="false" />
    369. 

  369. 			<CEID id="1201" logicalName="Port2LoadComplete" description=" " enabled="false" />
    370. 

  370. 			<CEID id="1202" logicalName="Port2LoadFailed" description=" " enabled="false" />
    371. 

  371. 			<CEID id="1203" logicalName="Port2UnloadComplete" description=" " enabled="false" />
    372. 

  372. 			<CEID id="1204" logicalName="Port2UnloadFailed" description=" " enabled="false" />
    373. 

  373. 			<CEID id="1205" logicalName="Port2CassetteArrive" description=" " enabled="false" />
    374. 

  374. 			<CEID id="1206" logicalName="Port2CassetteRemoved" description=" " enabled="false" />
    375. 

  375. 			<CEID id="1207" logicalName="Port2JobStarted" description=" " enabled="false" />
    376. 

  376. 			<CEID id="1208" logicalName="Port2JobStopped" description=" " enabled="false" />
    377. 

  377. 			<CEID id="1209" logicalName="Port2JobPaused" description=" " enabled="false" />
    378. 

  378. 			<CEID id="1210" logicalName="Port2JobResumed" description=" " enabled="false" />
    379. 

  379. 			<CEID id="1211" logicalName="Port2JobAborted" description=" " enabled="false" />
    380. 

  380. 			<CEID id="1212" logicalName="Port2JobFinished" description=" " enabled="false" />
    381. 

  381. 			<CEID id="1213" logicalName="Port2JobFailed" description=" " enabled="false" />
    382. 

  382. 			<CEID id="1214" logicalName="Port2MappingComplete" description=" " enabled="false" />
    383. 

  383. 			<CEID id="1215" logicalName="Port2MappingFailed" description=" " enabled="false" />
    384. 

  384. 			<CEID id="1216" logicalName="Port2SequenceSelected" description=" " enabled="false" />
    385. 

  385. 			<CEID id="1217" logicalName="Port2SequenceSelectFailed" description=" " enabled="false" />
    386. 

  386. 			<CEID id="1218" logicalName="Port2JobWaferStart" description=" " enabled="false" />
    387. 

  387. 			<CEID id="1219" logicalName="Port2JobWaferEnd" description=" " enabled="false" />
    388. 

  388. 			<CEID id="1220" logicalName="Port2Clamped" description=" " enabled="false" />
    389. 

  389. 			<CEID id="1221" logicalName="Port2Unclamped" description=" " enabled="false" />
    390. 

  390. 			<CEID id="1222" logicalName="Port2IDRead" description=" " enabled="false" />
    391. 

  391. 			<CEID id="1223" logicalName="Port2ReadIDFailed" description=" " enabled="false" />
    392. 

  392. 			<CEID id="1224" logicalName="Port2IDWrite" description=" " enabled="false" />
    393. 

  393. 			<CEID id="1225" logicalName="Port2WriteIDFailed" description=" " enabled="false" />
    394. 

  394. 			<CEID id="1226" logicalName="Port2TagDataRead" description=" " enabled="false" />
    395. 

  395. 			<CEID id="1227" logicalName="Port2ReadTagDataFailed" description=" " enabled="false" />
    396. 

  396. 			<CEID id="1228" logicalName="Port2TagDataWrite" description=" " enabled="false" />
    397. 

  397. 			<CEID id="1229" logicalName="Port2WriteTagDataFailed" description=" " enabled="false" />
    398. 

  398. 			<CEID id="2101" logicalName="PM1RecipeStart" description=" " enabled="false" />
    399. 

  399. 			<CEID id="2102" logicalName="PM1RecipeComplete" description=" " enabled="false" />
    400. 

  400. 			<CEID id="2103" logicalName="PM1RecipeStepStart" description=" " enabled="false" />
    401. 

  401. 			<CEID id="2104" logicalName="PM1RecipeStepEnd" description=" " enabled="false" />
    402. 

  402. 			<CEID id="2105" logicalName="PM1RecipeFailed" description=" " enabled="false" />
    403. 

  403. 			<CEID id="2106" logicalName="PM1WaferArrivedPosition" description=" " enabled="false" />
    404. 

  404. 			<CEID id="2107" logicalName="PM1WaferLeftPosition" description=" " enabled="false" />
    405. 

  405. 			<CEID id="2201" logicalName="PM2RecipeStart" description=" " enabled="false" />
    406. 

  406. 			<CEID id="2202" logicalName="PM2RecipeComplete" description=" " enabled="false" />
    407. 

  407. 			<CEID id="2203" logicalName="PM2RecipeStepStart" description=" " enabled="false" />
    408. 

  408. 			<CEID id="2204" logicalName="PM2RecipeStepEnd" description=" " enabled="false" />
    409. 

  409. 			<CEID id="2205" logicalName="PM2RecipeFailed" description=" " enabled="false" />
    410. 

  410. 			<CEID id="2206" logicalName="PM2WaferArrivedPosition" description=" " enabled="false" />
    411. 

  411. 			<CEID id="2207" logicalName="PM2WaferLeftPosition" description=" " enabled="false" />
    412. 

  412. 			<CEID id="3101" logicalName="Aligner1WaferArrivedPosition" description=" " enabled="false" />
    413. 

  413. 			<CEID id="3102" logicalName="Aligner1WaferLeftPosition" description=" " enabled="false" />
    414. 

  414. 			<CEID id="3201" logicalName="Aligner2WaferArrivedPosition" description=" " enabled="false" />
    415. 

  415. 			<CEID id="3202" logicalName="Aligner2WaferLeftPosition" description=" " enabled="false" />
    416. 

  416. 			<CEID id="3301" logicalName="Cooling1WaferArrivedPosition" description=" " enabled="false" />
    417. 

  417. 			<CEID id="3302" logicalName="Cooling1WaferLeftPosition" description=" " enabled="false" />
    418. 

  418. 			<CEID id="3401" logicalName="Cooling2WaferArrivedPosition" description=" " enabled="false" />
    419. 

  419. 			<CEID id="3402" logicalName="Cooling2WaferLeftPosition" description=" " enabled="false" />
    420. 

  420. 			<CEID id="4001" logicalName="CassetteDoorOpen" description=" " enabled="false" />
    421. 

  421. 			<CEID id="4002" logicalName="CassetteDoorClose" description=" " enabled="false" />
    422. 

  422. 			<CEID id="100001" logicalName="__SYSTEM__100001__ALARMSET" description="Alarm Set: EMOPressed">
    423. 

  423. 				<RPTID id="8" logicalName="AlarmEventReport" />
    424. 

  424. 			</CEID>
    425. 

  425. 			<CEID id="200001" logicalName="__SYSTEM__200001__ALARMCLEAR" description="Alarm Clear: EMOPressed">
    426. 

  426. 				<RPTID id="8" logicalName="AlarmEventReport" />
    427. 

  427. 			</CEID>
    428. 

  428. 			<CEID id="100002" logicalName="__SYSTEM__100002__ALARMSET" description="Alarm Set: LidError">
    429. 

  429. 				<RPTID id="8" logicalName="AlarmEventReport" />
    430. 

  430. 			</CEID>
    431. 

  431. 			<CEID id="200002" logicalName="__SYSTEM__200002__ALARMCLEAR" description="Alarm Clear: LidError">
    432. 

  432. 				<RPTID id="8" logicalName="AlarmEventReport" />
    433. 

  433. 			</CEID>
    434. 

  434. 			<CEID id="100003" logicalName="__SYSTEM__100003__ALARMSET" description="Alarm Set: MFCOffline">
    435. 

  435. 				<RPTID id="8" logicalName="AlarmEventReport" />
    436. 

  436. 			</CEID>
    437. 

  437. 			<CEID id="200003" logicalName="__SYSTEM__200003__ALARMCLEAR" description="Alarm Clear: MFCOffline">
    438. 

  438. 				<RPTID id="8" logicalName="AlarmEventReport" />
    439. 

  439. 			</CEID>
    440. 

  440. 			<CEID id="100004" logicalName="__SYSTEM__100004__ALARMSET" description="Alarm Set: VacuumGaugeError">
    441. 

  441. 				<RPTID id="8" logicalName="AlarmEventReport" />
    442. 

  442. 			</CEID>
    443. 

  443. 			<CEID id="200004" logicalName="__SYSTEM__200004__ALARMCLEAR" description="Alarm Clear: VacuumGaugeError">
    444. 

  444. 				<RPTID id="8" logicalName="AlarmEventReport" />
    445. 

  445. 			</CEID>
    446. 

  446. 			<CEID id="100005" logicalName="__SYSTEM__100005__ALARMSET" description="Alarm Set: PressureOutOfTolerance">
    447. 

  447. 				<RPTID id="8" logicalName="AlarmEventReport" />
    448. 

  448. 			</CEID>
    449. 

  449. 			<CEID id="200005" logicalName="__SYSTEM__200005__ALARMCLEAR" description="Alarm Clear: PressureOutOfTolerance">
    450. 

  450. 				<RPTID id="8" logicalName="AlarmEventReport" />
    451. 

  451. 			</CEID>
    452. 

  452. 			<CEID id="100006" logicalName="__SYSTEM__100006__ALARMSET" description="Alarm Set: PumpError">
    453. 

  453. 				<RPTID id="8" logicalName="AlarmEventReport" />
    454. 

  454. 			</CEID>
    455. 

  455. 			<CEID id="200006" logicalName="__SYSTEM__200006__ALARMCLEAR" description="Alarm Clear: PumpError">
    456. 

  456. 				<RPTID id="8" logicalName="AlarmEventReport" />
    457. 

  457. 			</CEID>
    458. 

  458. 			<CEID id="100007" logicalName="__SYSTEM__100007__ALARMSET" description="Alarm Set: RFGeneratorOffline">
    459. 

  459. 				<RPTID id="8" logicalName="AlarmEventReport" />
    460. 

  460. 			</CEID>
    461. 

  461. 			<CEID id="200007" logicalName="__SYSTEM__200007__ALARMCLEAR" description="Alarm Clear: RFGeneratorOffline">
    462. 

  462. 				<RPTID id="8" logicalName="AlarmEventReport" />
    463. 

  463. 			</CEID>
    464. 

  464. 			<CEID id="100008" logicalName="__SYSTEM__100008__ALARMSET" description="Alarm Set: RFHighReflect">
    465. 

  465. 				<RPTID id="8" logicalName="AlarmEventReport" />
    466. 

  466. 			</CEID>
    467. 

  467. 			<CEID id="200008" logicalName="__SYSTEM__200008__ALARMCLEAR" description="Alarm Clear: RFHighReflect">
    468. 

  468. 				<RPTID id="8" logicalName="AlarmEventReport" />
    469. 

  469. 			</CEID>
    470. 

  470. 			<CEID id="100009" logicalName="__SYSTEM__100009__ALARMSET" description="Alarm Set: RFHardwareInterlock">
    471. 

  471. 				<RPTID id="8" logicalName="AlarmEventReport" />
    472. 

  472. 			</CEID>
    473. 

  473. 			<CEID id="200009" logicalName="__SYSTEM__200009__ALARMCLEAR" description="Alarm Clear: RFHardwareInterlock">
    474. 

  474. 				<RPTID id="8" logicalName="AlarmEventReport" />
    475. 

  475. 			</CEID>
    476. 

  476. 			<CEID id="100010" logicalName="__SYSTEM__100010__ALARMSET" description="Alarm Set: GasFlowOutOfTolerance">
    477. 

  477. 				<RPTID id="8" logicalName="AlarmEventReport" />
    478. 

  478. 			</CEID>
    479. 

  479. 			<CEID id="200010" logicalName="__SYSTEM__200010__ALARMCLEAR" description="Alarm Clear: GasFlowOutOfTolerance">
    480. 

  480. 				<RPTID id="8" logicalName="AlarmEventReport" />
    481. 

  481. 			</CEID>
    482. 

  482. 			<CEID id="100011" logicalName="__SYSTEM__100011__ALARMSET" description="Alarm Set: RFOutOfTolerance">
    483. 

  483. 				<RPTID id="8" logicalName="AlarmEventReport" />
    484. 

  484. 			</CEID>
    485. 

  485. 			<CEID id="200011" logicalName="__SYSTEM__200011__ALARMCLEAR" description="Alarm Clear: RFOutOfTolerance">
    486. 

  486. 				<RPTID id="8" logicalName="AlarmEventReport" />
    487. 

  487. 			</CEID>
    488. 

  488. 			<CEID id="100012" logicalName="__SYSTEM__100012__ALARMSET" description="Alarm Set: WaferProtrude">
    489. 

  489. 				<RPTID id="8" logicalName="AlarmEventReport" />
    490. 

  490. 			</CEID>
    491. 

  491. 			<CEID id="200012" logicalName="__SYSTEM__200012__ALARMCLEAR" description="Alarm Clear: WaferProtrude">
    492. 

  492. 				<RPTID id="8" logicalName="AlarmEventReport" />
    493. 

  493. 			</CEID>
    494. 

  494. 			<CEID id="100013" logicalName="__SYSTEM__100013__ALARMSET" description="Alarm Set: EFEMSideDoorOpen">
    495. 

  495. 				<RPTID id="8" logicalName="AlarmEventReport" />
    496. 

  496. 			</CEID>
    497. 

  497. 			<CEID id="200013" logicalName="__SYSTEM__200013__ALARMCLEAR" description="Alarm Clear: EFEMSideDoorOpen">
    498. 

  498. 				<RPTID id="8" logicalName="AlarmEventReport" />
    499. 

  499. 			</CEID>
    500. 

  500. 			<CEID id="100014" logicalName="__SYSTEM__100014__ALARMSET" description="Alarm Set: EFEMVacuumPressureError">
    501. 

  501. 				<RPTID id="8" logicalName="AlarmEventReport" />
    502. 

  502. 			</CEID>
    503. 

  503. 			<CEID id="200014" logicalName="__SYSTEM__200014__ALARMCLEAR" description="Alarm Clear: EFEMVacuumPressureError">
    504. 

  504. 				<RPTID id="8" logicalName="AlarmEventReport" />
    505. 

  505. 			</CEID>
    506. 

  506. 			<CEID id="100015" logicalName="__SYSTEM__100015__ALARMSET" description="Alarm Set: EFEMCDAError">
    507. 

  507. 				<RPTID id="8" logicalName="AlarmEventReport" />
    508. 

  508. 			</CEID>
    509. 

  509. 			<CEID id="200015" logicalName="__SYSTEM__200015__ALARMCLEAR" description="Alarm Clear: EFEMCDAError">
    510. 

  510. 				<RPTID id="8" logicalName="AlarmEventReport" />
    511. 

  511. 			</CEID>
    512. 

  512. 			<CEID id="100016" logicalName="__SYSTEM__100016__ALARMSET" description="Alarm Set: EFEMFlowGaugeSensorError">
    513. 

  513. 				<RPTID id="8" logicalName="AlarmEventReport" />
    514. 

  514. 			</CEID>
    515. 

  515. 			<CEID id="200016" logicalName="__SYSTEM__200016__ALARMCLEAR" description="Alarm Clear: EFEMFlowGaugeSensorError">
    516. 

  516. 				<RPTID id="8" logicalName="AlarmEventReport" />
    517. 

  517. 			</CEID>
    518. 

  518. 			<CEID id="100017" logicalName="__SYSTEM__100017__ALARMSET" description="Alarm Set: EFEMLeakageAlarm">
    519. 

  519. 				<RPTID id="8" logicalName="AlarmEventReport" />
    520. 

  520. 			</CEID>
    521. 

  521. 			<CEID id="200017" logicalName="__SYSTEM__200017__ALARMCLEAR" description="Alarm Clear: EFEMLeakageAlarm">
    522. 

  522. 				<RPTID id="8" logicalName="AlarmEventReport" />
    523. 

  523. 			</CEID>
    524. 

  524. 			<CEID id="100018" logicalName="__SYSTEM__100018__ALARMSET" description="Alarm Set: EFEMIonizerAlarm">
    525. 

  525. 				<RPTID id="8" logicalName="AlarmEventReport" />
    526. 

  526. 			</CEID>
    527. 

  527. 			<CEID id="200018" logicalName="__SYSTEM__200018__ALARMCLEAR" description="Alarm Clear: EFEMIonizerAlarm">
    528. 

  528. 				<RPTID id="8" logicalName="AlarmEventReport" />
    529. 

  529. 			</CEID>
    530. 

  530. 			<CEID id="100019" logicalName="__SYSTEM__100019__ALARMSET" description="Alarm Set: EFEMFFUAlarm">
    531. 

  531. 				<RPTID id="8" logicalName="AlarmEventReport" />
    532. 

  532. 			</CEID>
    533. 

  533. 			<CEID id="200019" logicalName="__SYSTEM__200019__ALARMCLEAR" description="Alarm Clear: EFEMFFUAlarm">
    534. 

  534. 				<RPTID id="8" logicalName="AlarmEventReport" />
    535. 

  535. 			</CEID>
    536. 

  536. 			<CEID id="100020" logicalName="__SYSTEM__100020__ALARMSET" description="Alarm Set: EFEMOffline">
    537. 

  537. 				<RPTID id="8" logicalName="AlarmEventReport" />
    538. 

  538. 			</CEID>
    539. 

  539. 			<CEID id="200020" logicalName="__SYSTEM__200020__ALARMCLEAR" description="Alarm Clear: EFEMOffline">
    540. 

  540. 				<RPTID id="8" logicalName="AlarmEventReport" />
    541. 

  541. 			</CEID>
    542. 

  542. 			<CEID id="100021" logicalName="__SYSTEM__100021__ALARMSET" description="Alarm Set: EFEMCommunicationError">
    543. 

  543. 				<RPTID id="8" logicalName="AlarmEventReport" />
    544. 

  544. 			</CEID>
    545. 

  545. 			<CEID id="200021" logicalName="__SYSTEM__200021__ALARMCLEAR" description="Alarm Clear: EFEMCommunicationError">
    546. 

  546. 				<RPTID id="8" logicalName="AlarmEventReport" />
    547. 

  547. 			</CEID>
    548. 

  548. 			<CEID id="100022" logicalName="__SYSTEM__100022__ALARMSET" description="Alarm Set: WaferTransferFailed">
    549. 

  549. 				<RPTID id="8" logicalName="AlarmEventReport" />
    550. 

  550. 			</CEID>
    551. 

  551. 			<CEID id="200022" logicalName="__SYSTEM__200022__ALARMCLEAR" description="Alarm Clear: WaferTransferFailed">
    552. 

  552. 				<RPTID id="8" logicalName="AlarmEventReport" />
    553. 

  553. 			</CEID>
    554. 

  554. 			<CEID id="100023" logicalName="__SYSTEM__100023__ALARMSET" description="Alarm Set: EFEMError">
    555. 

  555. 				<RPTID id="8" logicalName="AlarmEventReport" />
    556. 

  556. 			</CEID>
    557. 

  557. 			<CEID id="200023" logicalName="__SYSTEM__200023__ALARMCLEAR" description="Alarm Clear: EFEMError">
    558. 

  558. 				<RPTID id="8" logicalName="AlarmEventReport" />
    559. 

  559. 			</CEID>
    560. 

  560. 

  561. 			<CEID id="100024" logicalName="__SYSTEM__100024__ALARMSET" description="Alarm Set: RecipeFileInvalid">
    562. 

  562. 				<RPTID id="8" logicalName="AlarmEventReport" />
    563. 

  563. 			</CEID>
    564. 

  564. 			<CEID id="200024" logicalName="__SYSTEM__200024__ALARMCLEAR" description="Alarm Clear: RecipeFileInvalid">
    565. 

  565. 				<RPTID id="8" logicalName="AlarmEventReport" />
    566. 

  566. 			</CEID>
    567. 

  567. 

  568. 

  569. 			<CEID id="100025" logicalName="__SYSTEM__100025__ALARMSET" description="Alarm Set: ALARM_EVENT">
    570. 

  570. 				<RPTID id="8" logicalName="AlarmEventReport" />
    571. 

  571. 			</CEID>
    572. 

  572. 			<CEID id="200025" logicalName="__SYSTEM__200025__ALARMCLEAR" description="Alarm Clear: ALARM_EVENT">
    573. 

  573. 				<RPTID id="8" logicalName="AlarmEventReport" />
    574. 

  574. 			</CEID>
    575. 

  575. 		</CEIDs>
    576. 

  576. 	</DataCollections>
    577. 

  577. 	<Alarms>
    578. 

  578. 		<ALID id="1" logicalName="EMOPressed" description="EMO Pressed" category="PersonalSafety" enabled="true" eventSet="100001" eventClear="200001" />
    579. 

  579. 		<ALID id="2" logicalName="LidError" description="Lid Error" category="PersonalSafety" enabled="true" eventSet="100002" eventClear="200002" />
    580. 

  580. 		<ALID id="3" logicalName="MFCOffline" description="MFC Offline" category="PersonalSafety" enabled="true" eventSet="100003" eventClear="200003" />
    581. 

  581. 		<ALID id="4" logicalName="VacuumGaugeError" description="Vacuum Gauge Error" category="PersonalSafety" enabled="true" eventSet="100004" eventClear="200004" />
    582. 

  582. 		<ALID id="5" logicalName="PressureOutOfTolerance" description="Pressure Out Of Tolerance" category="PersonalSafety" enabled="true" eventSet="100005" eventClear="200005" />
    583. 

  583. 		<ALID id="6" logicalName="PumpError" description="Pump Error" category="PersonalSafety" enabled="true" eventSet="100006" eventClear="200006" />
    584. 

  584. 		<ALID id="7" logicalName="RFGeneratorOffline" description="RF Generator Offline" category="PersonalSafety" enabled="true" eventSet="100007" eventClear="200007" />
    585. 

  585. 		<ALID id="8" logicalName="RFHighReflect" description="RF High Reflect" category="PersonalSafety" enabled="true" eventSet="100008" eventClear="200008" />
    586. 

  586. 		<ALID id="9" logicalName="RFHardwareInterlock" description="R FHardware Interlock" category="PersonalSafety" enabled="true" eventSet="100009" eventClear="200009" />
    587. 

  587. 		<ALID id="10" logicalName="GasFlowOutOfTolerance" description="Gas Flow Out Of Tolerance" category="PersonalSafety" enabled="true" eventSet="100010" eventClear="200010" />
    588. 

  588. 		<ALID id="11" logicalName="RFOutOfTolerance" description="RF Out Of Tolerance" category="PersonalSafety" enabled="true" eventSet="100011" eventClear="200011" />
    589. 

  589. 		<ALID id="12" logicalName="WaferProtrude" description="WaferProtrude" category="PersonalSafety" enabled="true" eventSet="100012" eventClear="200012" />
    590. 

  590. 

  591. 		<ALID id="13" logicalName="EFEMSideDoorOpen" description="EFEM Side Door Open" category="PersonalSafety" enabled="true" eventSet="100013" eventClear="200013" />
    592. 

  592. 		<ALID id="14" logicalName="EFEMVacuumPressureError" description="EFEM Vacuum Pressure Error" category="PersonalSafety" enabled="true" eventSet="100014" eventClear="200014" />
    593. 

  593. 		<ALID id="15" logicalName="EFEMCDAError" description="EFEM CDA Error" category="PersonalSafety" enabled="true" eventSet="100015" eventClear="200015" />
    594. 

  594. 		<ALID id="16" logicalName="EFEMFlowGaugeSensorError" description="EFEM Flow Gauge Sensor Error" category="PersonalSafety" enabled="true" eventSet="100016" eventClear="200016" />
    595. 

  595. 		<ALID id="17" logicalName="EFEMLeakageAlarm" description="EFEM Leakage Alarm" category="PersonalSafety" enabled="true" eventSet="100017" eventClear="200017" />
    596. 

  596. 		<ALID id="18" logicalName="EFEMIonizerAlarm" description="EFEM Ionizer Alarm" category="PersonalSafety" enabled="true" eventSet="100018" eventClear="200018" />
    597. 

  597. 		<ALID id="19" logicalName="EFEMFFUAlarm" description="EFEM FFU Alarm" category="PersonalSafety" enabled="true" eventSet="100019" eventClear="200019" />
    598. 

  598. 		<ALID id="20" logicalName="EFEMOffline" description="EFEM Offline" category="PersonalSafety" enabled="true" eventSet="100020" eventClear="200020" />
    599. 

  599. 		<ALID id="21" logicalName="EFEMCommunicationError" description="EFEM Communication Error" category="PersonalSafety" enabled="true" eventSet="100021" eventClear="200021" />
    600. 

  600. 		<ALID id="22" logicalName="WaferTransferFailed" description="Wafer Transfer Failed" category="PersonalSafety" enabled="true" eventSet="100022" eventClear="200022" />
    601. 

  601. 		<ALID id="23" logicalName="EFEMError" description="EFEM Operation failed" category="PersonalSafety" enabled="true" eventSet="100023" eventClear="200023" />
    602. 

  602. 

  603. 		<ALID id="24" logicalName="RecipeFileInvalid" description="Recipe File Invalid" category="PersonalSafety" enabled="true" eventSet="100024" eventClear="200024" />
    604. 

  604. 

  605. 		<ALID id="25" logicalName="ALARM_EVENT" description="System Error" category="PersonalSafety" enabled="true" eventSet="100025" eventClear="200025" />
    606. 

  606. 

  607. 	</Alarms>
    608. 

  608. </Equipment>
    609.