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- using System;
- using System.Collections.Generic;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.Core.Applications;
- using MECF.Framework.RT.Core.IoProviders;
- using MECF.Framework.RT.ModuleLibrary.Commons;
- using MECF.Framework.RT.ModuleLibrary.SystemModules.Routines;
- namespace MECF.Framework.RT.ModuleLibrary.SystemModules
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Transfer,
- AutoRunning,
- AutoIdle,
- ReturnAllWafer,
- Error,
- }
- public class EquipmentManager : FsmDevice
- {
- public enum MSG
- {
- MoveWafer,
- ReturnAllWafer,
- Stop,
- HOME,
- RESET,
- ABORT,
- ERROR,
- ToInit,
- SetAutoMode,
- SetManualMode,
- CreateJob,
- PauseJob,
- ResumeJob,
- StartJob,
- StopJob,
- AbortJob,
- JobDone,
- ModuleError,
- Map,
- }
- public static Dictionary<ModuleName, ModuleFsmDevice> Modules { get; set; }
- public bool IsAutoMode
- {
- get
- {
- return FsmState == (int)RtState.AutoRunning || FsmState == (int)RtState.AutoIdle;
- }
- }
- public bool IsInit
- {
- get { return FsmState == (int)RtState.Init; }
- }
- public bool IsIdle
- {
- get { return FsmState == (int)RtState.Idle; }
- }
- public bool IsAlarm
- {
- get { return FsmState == (int)RtState.Error; }
- }
- public bool IsRunning
- {
- get
- {
- return !IsAlarm && !IsIdle && !IsInit && (FsmState != (int)RtState.AutoIdle);
- }
- }
- private bool _isInited;
- protected IRoutine _manualTransfer;
- protected IAutoTransfer _auto;
- protected IRoutine _homeAll;
- protected IRoutine _returnAll;
- private List<string> _modules;
- public EquipmentManager()
- {
- Module = "System";
- Name = "System";
- Modules = new Dictionary<ModuleName, ModuleFsmDevice>();
- _modules = new List<string>() { "System" };
- }
- public override bool Initialize()
- {
- InitDevices();
- InitModules();
- EnumLoop<RtState>.ForEach((item) =>
- {
- MapState((int)item, item.ToString());
- });
- EnumLoop<MSG>.ForEach((item) =>
- {
- MapMessage((int)item, item.ToString());
- });
- EnableFsm(100, RtState.Init);
- BuildTransitionTable();
- SubscribeDataVariable();
- SubscribeOperation();
- InitRoutine();
- Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
-
- return true;
- }
- protected void BuildModules(params ModuleFsmDevice[] modules)
- {
- if (modules != null && modules.Length > 0)
- {
- foreach (var moduleFsmDevice in modules)
- {
- Modules[ModuleHelper.Converter(moduleFsmDevice.Module)] = moduleFsmDevice;
- }
- foreach (var modulesKey in Modules.Keys)
- {
- _modules.Add(modulesKey.ToString());
- }
- foreach (var modulesValue in Modules.Values)
- {
- modulesValue.Initialize();
- }
- }
- }
- protected virtual void InitRoutine()
- {
-
- }
- protected virtual void InitModules()
- {
- }
- protected virtual void InitDevices()
- {
- }
- //private PeriodicJob _job1;
- //Stopwatch _sw = new Stopwatch();
- //private bool OnJob1()
- //{
- // _sw.Restart();
- // BufferModule buffer = Modules[ModuleName.Buffer] as BufferModule;
- // if (!buffer.CheckToPostMessage(BufferModule.MSG.InTransfer))
- // {
- // System.Diagnostics.Trace.Assert(false)
- // System.Diagnostics.Trace.WriteLine("fail to in transfer");
- // }
- // if (buffer.IsIdle)
- // {
- // System.Diagnostics.Trace.Assert(false);
- // System.Diagnostics.Trace.WriteLine("!!!==========>IsIdle");
- // }
- // //System.Diagnostics.Trace.Assert(buffer.IsIdle, $"in {buffer.StringFsmStatus}");
- // while (buffer.IsIdle)
- // {
- // Thread.Sleep(5);
- // }
- // //buffer.NoteTransferStop(ModuleName.EfemRobot, Hand.Blade1, 0, EnumTransferType.Place);
- // //Thread.Sleep(15);
- // if (!buffer.CheckToPostMessage(BufferModule.MSG.TransferComplete))
- // {
- // System.Diagnostics.Trace.Assert(false);
- // System.Diagnostics.Trace.WriteLine("fail to complete");
- // }
- // //if (!buffer.IsIdle)
- // //{
- // // System.Diagnostics.Trace.WriteLine("not idle");
- // //}
- // System.Diagnostics.Trace.WriteLine($" === {_sw.ElapsedMilliseconds}");
- // while (!buffer.IsIdle)
- // {
- // Thread.Sleep(5);
- // }
- // return true;
- //}
- private void BuildTransitionTable()
- {
- //Init sequence
- Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.ToInit, null, RtState.Init);
-
- Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle);
- Transition(RtState.Initializing, MSG.ERROR, fError, RtState.Error);
- Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init);
- //Reset
- AnyStateTransition(MSG.RESET, fStartReset, RtState.Idle);
- AnyStateTransition(MSG.ERROR, fError, RtState.Error);
- AnyStateTransition((int)FSM_MSG.ALARM, fError, (int)RtState.Error);
- //Auto/manual sequence
- Transition(RtState.Idle, MSG.SetAutoMode, fStartAutoTransfer, RtState.AutoIdle);
- Transition(RtState.AutoRunning, FSM_MSG.TIMER, fAutoTransfer, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ABORT, FsmAbort, RtState.AutoIdle);
- Transition(RtState.AutoRunning, MSG.JobDone, null, RtState.AutoIdle);
-
- Transition(RtState.AutoRunning, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.PauseJob, FsmPauseJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResumeJob, FsmResumeJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StopJob, FsmStopJob, RtState.AutoRunning);
-
- Transition(RtState.AutoRunning, MSG.AbortJob, FsmAbortJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ModuleError, FsmModuleError, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.Map, FsmMap, RtState.AutoRunning);
- EnterExitTransition<RtState, FSM_MSG>(RtState.AutoRunning, null, FSM_MSG.NONE, fExitAutoTransfer);
- Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);
- Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.ABORT, FsmAbort, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.AbortJob, FsmAbortJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.Map, FsmMap, RtState.AutoIdle);
- //return all wafer
- Transition(RtState.Idle, MSG.ReturnAllWafer, FsmStartReturnAllWafer, RtState.ReturnAllWafer);
- Transition(RtState.ReturnAllWafer, FSM_MSG.TIMER, FsmMonitorReturnAllWafer, RtState.Idle);
- Transition(RtState.ReturnAllWafer, MSG.ABORT, FsmAbortReturnAllWafer, RtState.Idle);
- //Transfer sequence
- Transition(RtState.Idle, MSG.MoveWafer, fStartTransfer, RtState.Transfer);
- Transition(RtState.Transfer, FSM_MSG.TIMER, fTransfer, RtState.Idle);
- EnterExitTransition<RtState, FSM_MSG>(RtState.Transfer, null, FSM_MSG.NONE, fExitTransfer);
- Transition(RtState.Transfer, MSG.ABORT, FsmAbort, RtState.Idle);
- }
- void SubscribeDataVariable()
- {
- DATA.Subscribe("Rt.Status", () => StringFsmStatus);
- DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit);
- DATA.Subscribe("System.IsAlarm", () => IsAlarm);
- DATA.Subscribe("System.IsBusy", () => IsRunning);
- DATA.Subscribe("System.IsAutoRunning", () => IsRunning);
- DATA.Subscribe("System.Modules", () => _modules);
- }
- void SubscribeOperation()
- {
- OP.Subscribe("Create8InchWafer", InvokeCreate8InchWafer);
- OP.Subscribe("Create12InchWafer", InvokeCreate12InchWafer);
- OP.Subscribe("DeleteWafer", InvokeDeleteWafer);
- OP.Subscribe("ReturnWafer", InvokeReturnWafer);
- OP.Subscribe("System.ReturnAllWafer", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ReturnAllWafer);
- });
- OP.Subscribe("System.MoveWafer", (string cmd, object[] args) =>
- {
- if (!Enum.TryParse((string)args[0], out ModuleName source))
- {
- EV.PostWarningLog(Name, $"Parameter source {(string)args[0]} not valid");
- return false;
- }
- if (!Enum.TryParse((string)args[2], out ModuleName destination))
- {
- EV.PostWarningLog(Name, $"Parameter destination {(string)args[1]} not valid");
- return false;
- }
- if (args.Length > 8)
- {
- return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3],
- (bool)args[4], (int)args[5], (bool)args[6], (int)args[7]);
- }
- else if (args.Length > 5)
- {
- return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3], (bool)args[4]);
- }
- return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3]);
- });
- OP.Subscribe("System.HomeAll", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.HOME);
- });
- OP.Subscribe("System.Abort", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ABORT);
- });
- OP.Subscribe("System.Reset", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.RESET);
- });
- OP.Subscribe("System.SetAutoMode", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.SetAutoMode);
- });
- OP.Subscribe("System.SetManualMode", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.SetManualMode);
- });
- OP.Subscribe("System.CreateJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.CreateJob, args[0]);
- });
- OP.Subscribe("System.StartJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.StartJob, args[0]);
- });
-
- OP.Subscribe("System.PauseJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.PauseJob, args[0]);
- });
- OP.Subscribe("System.ResumeJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ResumeJob, args[0]);
- });
- OP.Subscribe("System.StopJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.StopJob, args[0]);
- });
- OP.Subscribe("System.AbortJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.AbortJob, args[0]);
- });
- OP.Subscribe("System.ShutDown", InvokeShutDown);
- OP.Subscribe("System.MapWafer", InvokeEfemMap);
- }
- private void Instance_OnAlarmEvent(EventItem obj)
- {
- }
- #region Init
- private bool FsmStartHome(object[] objs)
- {
- _isInited = false;
- return _homeAll.Start() == Result.RUN;
- }
- private bool FsmMonitorHome(object[] objs)
- {
- Result ret = _homeAll.Monitor();
- if (ret == Result.DONE)
- {
- _isInited = true;
- return true;
- }
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- }
- return false;
- }
- private bool fError(object[] objs)
- {
- if (FsmState == (int)RtState.Transfer)
- {
- }
- return true;
- }
- #endregion
- #region AutoTransfer
- private bool FsmMonitorAutoIdle(object[] param)
- {
- Result ret = _auto.Monitor();
- if (!_auto.CheckAllJobDone())
- {
- return false;
- }
- return ret == Result.DONE;
- }
- private bool FsmStartSetManualMode(object[] objs)
- {
- if (_auto.HasJobRunning)
- {
- EV.PostWarningLog("System", "Can not change to manual mode, abort running job first");
- return false;
- }
- return true;
- }
- private bool fStartAutoTransfer(object[] objs)
- {
- Result ret = _auto.Start(objs);
- return ret == Result.RUN;
- }
- private bool fAutoTransfer(object[] objs)
- {
- Result ret = _auto.Monitor();
- if (_auto.CheckAllJobDone())
- {
- if (!CheckToPostMessage((int)MSG.JobDone))
- return false;
- }
- return ret == Result.DONE;
- }
- private bool fExitAutoTransfer(object[] objs)
- {
- return true;
- }
- private bool fAbortAutoTransfer(object[] objs)
- {
- return true;
- }
- #endregion
-
- #region return all wafer
- private bool FsmAbortReturnAllWafer(object[] param)
- {
- return true;
- }
- private bool FsmMonitorReturnAllWafer(object[] param)
- {
- return _returnAll.Monitor() == Result.DONE;
- }
- private bool FsmStartReturnAllWafer(object[] param)
- {
- return _returnAll.Start() == Result.RUN;
- }
- #endregion
- #region Transfer
- private bool fStartTransfer(object[] objs)
- {
- Result ret = _manualTransfer.Start(objs);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool fTransfer(object[] objs)
- {
- Result ret = _manualTransfer.Monitor();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == Result.DONE;
- }
- private bool fExitTransfer(object[] objs)
- {
-
- return true;
- }
- private bool fAbortTransfer(object[] objs)
- {
- return true;
- }
- #endregion
- #region reset
- private bool fStartReset(object[] objs)
- {
- EV.ClearAlarmEvent();
- //Singleton<DeviceEntity>.Instance.PostMsg(DeviceEntity.MSG.RESET);
- IoProviderManager.Instance.Reset();
- foreach (var modulesValue in Modules.Values)
- {
- modulesValue.Reset();
- }
- if (FsmState == (int)RtState.Error)
- {
- if (!_isInited)
- {
- PostMsg(MSG.ToInit);
- return false;
- }
- return true;
- }
- return false;
- }
- #endregion
- private bool FsmCreateJob(object[] param)
- {
- _auto.CreateJob((Dictionary<string, object>)param[0]);
- return true;
- }
- private bool FsmAbortJob(object[] param)
- {
- _auto.AbortJob((string)param[0]);
- return true;
- }
- private bool FsmStopJob(object[] param)
- {
- _auto.StopJob((string)param[0]);
- //CheckToPostMessage((int)MSG.StopJob);//
- return true;
- }
- private bool FsmResumeJob(object[] param)
- {
- _auto.ResumeJob((string)param[0]);
- return true;
- }
- private bool FsmPauseJob(object[] param)
- {
- _auto.PauseJob((string)param[0]);
- return true;
- }
- private bool FsmStartJob(object[] param)
- {
- return _auto.StartJob((string)param[0]);
- }
- private bool FsmAbort(object[] param)
- {
- if (FsmState == (int)RtState.Transfer)
- {
- // _manualTransfer.Clear();
- }
- if (FsmState == (int)RtState.AutoRunning)
- {
- _auto.Clear();
- }
- if (FsmState == (int)RtState.Initializing)
- {
- _homeAll.Abort();
- }
- return true;
- }
- private bool FsmModuleError(object[] param)
- {
- _auto.ModuleError((string)param[0]);
- return true;
- }
- private bool FsmMap(object[] param)
- {
- _auto.Map((string)param[0]);
- return true;
- }
- private bool InvokeReturnWafer(string arg1, object[] args)
- {
- ModuleName target = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (ModuleHelper.IsLoadPort(target))
- {
- EV.PostInfoLog("System", string.Format("Wafer already at LoadPort {0} {1}, return operation is not valid", target.ToString(), slot + 1));
- return false;
- }
- if (!WaferManager.Instance.IsWaferSlotLocationValid(target, slot))
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", target.ToString(), slot.ToString()));
- return false;
- }
- WaferInfo wafer = WaferManager.Instance.GetWafer(target, slot);
- if (wafer.IsEmpty)
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, return operation is not valid", target.ToString(), slot + 1));
- return false;
- }
- return CheckToPostMessage((int)MSG.MoveWafer,
- target, slot,
- (ModuleName)wafer.OriginStation, wafer.OriginSlot,
- false, 0, false, 0);
- }
- private bool InvokeDeleteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.DeleteWafer(chamber, slot);
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- private bool InvokeCreate8InchWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- WaferStatus state = WaferStatus.Normal;
- //if (ModuleHelper.IsLoadPort(chamber))
- //{
- // var lp = Modules[chamber] as LoadPortModule;
- // if (lp.LPDevice.CassetteState != LoadportCassetteState.Normal)
- // {
- // EV.PostWarningLog("System", $"Can not create wafer at {chamber}.{slot + 1}, Cassette not placed.");
- // return false;
- // }
- //}
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));
- }
- else if (WaferManager.Instance.CreateWafer(chamber, slot, state,WaferSize.WS8) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- private bool InvokeCreate12InchWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- WaferStatus state = WaferStatus.Normal;
- //if (ModuleHelper.IsLoadPort(chamber))
- //{
- // var lp = Modules[chamber] as LoadPortModule;
- // if (lp.LPDevice.CassetteState != LoadportCassetteState.Normal)
- // {
- // EV.PostWarningLog("System", $"Can not create wafer at {chamber}.{slot + 1}, Cassette not placed.");
- // return false;
- // }
- //}
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));
- }
- else if (WaferManager.Instance.CreateWafer(chamber, slot, state,WaferSize.WS12) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- private bool InvokeShutDown(string arg1, object[] arg2)
- {
- if (IsAlarm || IsIdle || IsInit)
- {
- EV.PostWarningLog(Module, $"System start shut down");
- EV.PostKickoutMessage("ShutDown");
- RtApplication.Instance.Terminate();
- return true;
- }
- EV.PostWarningLog(Module, $"System in {StringFsmStatus} mode, can not shut down");
- return false;
- }
- private bool InvokeEfemMap(string arg1, object[] arg2)
- {
- ModuleName target = ModuleHelper.Converter((string)arg2[0]);
- if (!ModuleHelper.IsLoadPort(target))
- {
- EV.PostWarningLog("System", $"Invalid map target {target}");
- return false;
- }
- for (int i = 0; i < 25; i++)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(target, i);
- if (wafer.IsEmpty)
- continue;
- if (wafer.ProcessState == EnumWaferProcessStatus.Completed ||
- wafer.ProcessState == EnumWaferProcessStatus.Failed)
- {
- EV.PostWarningLog("System", $"{target} wafer is processed, can not map again");
- return false;
- }
- }
- if (IsAutoMode)
- {
- _auto.Map((string)arg2[0]);
- return true;
- }
- //EfemModule efem = Modules[ModuleName.EfemRobot] as EfemModule;
- //if (!efem.Map(ModuleHelper.Converter((string) arg2[0]), out string reason))
- //{
- // EV.PostWarningLog(Module, reason);
- //}
- return true;
- }
- private void OnModuleError(string module)
- {
- if (FsmState == (int)RtState.AutoRunning)
- {
- ModuleName mod = ModuleHelper.Converter(module);
- PostMsg(MSG.ModuleError, module);
- }
- }
- public override void Monitor()
- {
- base.Monitor();
- try
- {
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- }
-
- }
- }
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