TM.cs 2.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.DataCenter;
  7. using Aitex.Core.RT.Device;
  8. using Aitex.Core.RT.Device.Unit;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
  12. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs
  13. {
  14. public class TM : BaseDevice, IDevice, ITM
  15. {
  16. public virtual double ChamberPressure { get; }
  17. public virtual double ForelinePressure { get; }
  18. public TM(string module ) : base(module, module, module, module)
  19. {
  20. }
  21. public virtual bool Initialize()
  22. {
  23. DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
  24. DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
  25. DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
  26. DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
  27. return true;
  28. }
  29. public virtual bool CheckAtm()
  30. {
  31. return false;
  32. }
  33. public virtual bool CheckVacuum()
  34. {
  35. return false;
  36. }
  37. public virtual bool CheckIsPumping()
  38. {
  39. return false;
  40. }
  41. public virtual bool SetFastVentValve(bool isOpen, out string reason)
  42. {
  43. reason = string.Empty;
  44. return true;
  45. }
  46. public virtual bool SetSlowVentValve(bool isOpen, out string reason)
  47. {
  48. reason = string.Empty;
  49. return true;
  50. }
  51. public virtual bool SetFastPumpValve(bool isOpen, out string reason)
  52. {
  53. reason = string.Empty;
  54. return true;
  55. }
  56. public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
  57. {
  58. reason = string.Empty;
  59. return true;
  60. }
  61. public virtual IoSlitValve GetSlitValve(ModuleName module)
  62. {
  63. return null;
  64. }
  65. public virtual bool SetSlitValve(ModuleName module, bool isOpen, out string reason)
  66. {
  67. reason = string.Empty;
  68. return true;
  69. }
  70. public virtual bool CheckSlitValveOpen(ModuleName module)
  71. {
  72. return true;
  73. }
  74. public virtual bool CheckSlitValveClose(ModuleName module)
  75. {
  76. return true;
  77. }
  78. public virtual void Monitor()
  79. {
  80. }
  81. public virtual void Terminate()
  82. {
  83. }
  84. public virtual void Reset()
  85. {
  86. }
  87. }
  88. }