12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849 |
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot
- {
- public enum Unit
- {
- Robot = 1,
- Aligner = 2,
- }
- public enum EventType
- {
- Error = 100,
- Aligner = 140,
- }
- public enum SpeedType
- {
- H, //No-wafer transfer speed,
- M, //With-wafer transfer speed
- L, //Low speed
- O, //Home speed
- B, //Speed in low-speed-area
- }
- public enum StateBit
- {
- LowBattery = 0x10, //1: Low battery voltage, 0: Normal state
- Ready = 0x20, //1: Ready, 0: Busy
- ServorOff = 0x40, //1: Servo OFF, 0: Servo ON
- Error = 0x80, //Error occurrence, 0: No error occurrence
- CtrlLowBattery =0x01, //1: Low battery voltage, 0: Normal state
- WaferOnBlade1 = 0x02, //(1: Has wafer, 0: No wafer)
- WaferOnBlade2 = 0x04, //(1: Has wafer, 0: No wafer)
- WaferOnBlade3 = 0x08, //(1: Has wafer, 0: No wafer)
- WaferOnBlade4 = 0x10, //(1: Has wafer, 0: No wafer)
- WaferOnGrip = 0x02, //
- WaferOnCCD = 0x04, //
- }
- }
|