Handler.cs 33 KB

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  1. using System;
  2. using System.Text;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using System.Text.RegularExpressions;
  8. using Aitex.Core.RT.Log;
  9. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.SR100
  10. {
  11. public class handler<T> : IHandler where T : ITransferMsg, new()
  12. {
  13. public int ID { get; set; }
  14. public int Unit { get; set; }
  15. public bool IsBackground { get { return _imp.background; } }
  16. private static int retry_time = 3;
  17. private int retry_count = retry_time;
  18. private object[] _objs = null;
  19. private TokenGenerator _generator;
  20. private T _imp = new T();
  21. public handler(IDevice device)
  22. {
  23. _imp.Robot = device;
  24. }
  25. public handler(IDevice device, ref TokenGenerator gen, params object[] objs)
  26. {
  27. _imp.Robot = device;
  28. this._generator = gen;
  29. this._objs = objs;
  30. }
  31. public bool Execute<TPort>(ref TPort port) where TPort : ICommunication
  32. {
  33. retry_count = retry_time;
  34. ID = _generator.create();
  35. return port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, package(), ProtocolTag.tag_end));
  36. }
  37. /// <summary>
  38. /// return value: bhandle
  39. /// </summary>
  40. /// <typeparam name="TPort"></typeparam>
  41. /// <param name="port"></param>
  42. /// <param name="msg"></param>
  43. /// <param name="completed"></param>
  44. /// <returns></returns>
  45. ///
  46. public bool OnMessage<TPort>(ref TPort port, string message, out bool completed) where TPort : ICommunication
  47. {
  48. //message = ">,1,EVNT,100,2018/11/16 17:01:06,2BA0,A1";
  49. // >,1,EVNT,100,2019/10/11 17:27:32,1930,8B
  50. //message = " !,1,36,40,2BA0,MTRS,002200,-0011931,-0610171,00179995,00049818,00186336,57";
  51. //message = "!,1,16,40,0000,MTCH,000483,-0011862,00000000,00179516,00090369,00172882,0A";
  52. try
  53. {
  54. completed = false;
  55. string package = message;
  56. string[] words = Regex.Split(package, ProtocolTag.cmd_token);
  57. string type = words[0];
  58. int unit = int.Parse(words[1]);
  59. string sum = words[words.Length - 1];
  60. string check = Checksum(package);
  61. if (sum != check)
  62. {
  63. throw (new InvalidPackageException(string.Format("check sum error{0}", package)));
  64. }
  65. if (type != ProtocolTag.resp_tag_event && type != ProtocolTag.resp_tag_error)
  66. {
  67. int seq = int.Parse(words[2]);
  68. if (seq != ID)
  69. return false;
  70. if (unit != Unit)
  71. {
  72. throw (new InvalidPackageException(string.Format("invalid unit {0}", package)));
  73. }
  74. }
  75. if (type == ProtocolTag.resp_tag_error)
  76. {
  77. string error = words[1];
  78. //‘1’: Warning 1 (W1), ‘2’: Warning 2 (W2), ‘3’: Important alarm 1 (A1), ‘4’: Important alarm 2 (A2),
  79. //‘5’: Serious alarm (F)
  80. if (error[0] != '1' && error[0] != '2')
  81. {
  82. string warning = string.Format("can't execute retry, {0}", error);
  83. LOG.Warning(warning);
  84. throw (new ExcuteFailedException(warning));
  85. }
  86. if (retry_count-- <= 0)
  87. {
  88. string warning = string.Format("retry over {0} times", retry_time);
  89. LOG.Warning(warning);
  90. throw (new ExcuteFailedException(warning));
  91. }
  92. port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, this.package(), ProtocolTag.tag_end));
  93. return true;
  94. }
  95. else if (type == ProtocolTag.resp_tag_event)
  96. {
  97. string evtType = words[3];
  98. string evtInfo = words[5];
  99. if (_imp.evt)
  100. completed = _imp.unpackage(type, words);
  101. return _imp.evt;
  102. }
  103. else
  104. {
  105. completed = _imp.unpackage(type, words);
  106. if (completed)
  107. {
  108. _generator.release(ID);
  109. if (_imp.background)
  110. {
  111. ID = this._generator.create();
  112. port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, ackn(), ProtocolTag.tag_end));
  113. _generator.release(ID);
  114. }
  115. //wait 2ms
  116. return true;
  117. }
  118. return true;
  119. }
  120. }
  121. catch (ExcuteFailedException e)
  122. {
  123. throw (e);
  124. }
  125. catch (InvalidPackageException e)
  126. {
  127. throw e;
  128. }
  129. catch (Exception ex)
  130. {
  131. LOG.Write(ex);
  132. throw (new InvalidPackageException(message));
  133. }
  134. }
  135. private string Checksum(string package)
  136. {
  137. int start = package.IndexOf(ProtocolTag.cmd_token);
  138. int end = package.LastIndexOf(ProtocolTag.cmd_token);
  139. int len = end - start + 1;
  140. if (len > 1)
  141. {
  142. string data = package.Substring(start, len);
  143. return Checksum(Encoding.Default.GetBytes(data));
  144. }
  145. return "";
  146. }
  147. private string Checksum(byte[] bytes)
  148. {
  149. int sum = 0;
  150. foreach (byte code in bytes)
  151. {
  152. sum += code;
  153. }
  154. string hex = String.Format("{0:X2}", sum % 256);
  155. return hex;
  156. }
  157. private string package()
  158. {
  159. //$,<UNo>(,<SeqNo>),<Command>,<Parameter>(,<Sum>)<CR>
  160. string data = string.Empty;
  161. data = string.Format(",{0:D1},{1:D2}{2}", Unit, ID, _imp.package(this._objs));
  162. string sum = Checksum(Encoding.ASCII.GetBytes(data));
  163. return data + sum;
  164. }
  165. private string ackn()
  166. {
  167. //$,<UNo>(,<SeqNo>),ACKN(,<Sum>)<CR>
  168. string data = string.Empty;
  169. data = string.Format(",{0:D1},{1:D2},ACKN,", Unit, ID);
  170. string sum = Checksum(Encoding.ASCII.GetBytes(data));
  171. return data + sum;
  172. }
  173. }
  174. public class RobotMotionHandler : ITransferMsg
  175. {
  176. public bool background { get; protected set; }
  177. public bool evt { get { return false; } }
  178. public string deviceID { private get; set; }
  179. public string _cmd = string.Empty;
  180. public IDevice Robot { set { _device = (Robot)value; } }
  181. protected Robot _device;
  182. public RobotMotionHandler()
  183. {
  184. background = false;
  185. }
  186. public virtual string package(params object[] args)
  187. {
  188. return "";
  189. }
  190. public bool unpackage(string type, string[] items)
  191. {
  192. int value = Convert.ToInt32(items[3],16);
  193. _device.Status = value;
  194. int error = Convert.ToInt32(items[4], 16);
  195. _device.ErrorCode = error;
  196. if (error > 0)
  197. _device.LastErrorCode = error;
  198. if (type.Equals(ProtocolTag.resp_tag_excute))
  199. {
  200. _device.ElapseTime = int.Parse(items[6]);
  201. _device.Rotation = int.Parse(items[7]);
  202. _device.Extension = int.Parse(items[8]);
  203. _device.Wrist1= int.Parse(items[9]);
  204. _device.Wrist2= int.Parse(items[10]);
  205. _device.Evevation = int.Parse(items[11]);
  206. if (error == 0)
  207. {
  208. update(items);
  209. }
  210. return true;
  211. }
  212. return !background;
  213. }
  214. protected virtual void update(string[] data)
  215. {
  216. }
  217. }
  218. public class RbInitHandler : RobotMotionHandler
  219. {
  220. public RbInitHandler()
  221. {
  222. background = true;
  223. }
  224. //$,<UNo>(,<SeqNo>),CCLR,<CMode>(,<Sum>)<CR>
  225. public override string package(params object[] args)
  226. {
  227. return ",CCLR,E,";
  228. }
  229. }
  230. public class RbHomeHandler : RobotMotionHandler
  231. {
  232. public RbHomeHandler()
  233. {
  234. background = true;
  235. }
  236. public override string package(params object[] args)
  237. {
  238. updateBefore();
  239. return ",INIT,1,1,G,";
  240. }
  241. protected void updateBefore()
  242. {
  243. _device.Blade1Target = ModuleHelper.Converter(_device.Name);
  244. _device.Blade2Target = ModuleHelper.Converter(_device.Name);
  245. }
  246. protected override void update(string[] data)
  247. {
  248. _device.Initalized = true;
  249. _device.Swap = false;
  250. }
  251. }
  252. public class RbClearErrorHandler : RobotMotionHandler
  253. {
  254. public RbClearErrorHandler()
  255. {
  256. background = true;
  257. }
  258. //$,<UNo>(,<SeqNo>),CCLR,<CMode>(,<Sum>)<CR>
  259. public override string package(params object[] args)
  260. {
  261. return ",CCLR,E,";
  262. }
  263. }
  264. public class RbGripHandler : RobotMotionHandler
  265. {
  266. Hand _hand;
  267. public RbGripHandler()
  268. {
  269. background = true;
  270. }
  271. //$,<UNo>(,<SeqNo>),CSOL,<Sol>,<Sw>,<Wait>(,<Sum>)<CR>
  272. //sol Solenoid control specification (1 byte) • ‘1’ : Blade 1. • ‘2’ : Blade 2. • ‘F’ : Blade 1 + Blade 2.
  273. // Solenoid command (1 byte) • ‘0’ : Wafer release. / Lifter down. • ‘1’ : Wafer hold. / Lifter up.
  274. public override string package(params object[] args)
  275. {
  276. _hand = (Hand)args[0];
  277. bool bHold = (bool)args[1];
  278. if(bHold)
  279. return string.Format(",CSOL,{0},1,0,",RobotConvertor.hand2string(_hand));
  280. return string.Format(",CSOL,{0},0,0,", RobotConvertor.hand2string(_hand));
  281. }
  282. }
  283. public class RbStopHandler : RobotMotionHandler
  284. {
  285. public RbStopHandler()
  286. {
  287. background = true;
  288. }
  289. //$,<UNo>(,<SeqNo>),CSTP,<Sw>(,<Sum>)<CR>
  290. //• ‘H’ : Deceleration to a stop.
  291. //• ‘E’ : Emergency stop.
  292. public override string package(params object[] args)
  293. {
  294. return ",CSTP,H,";
  295. }
  296. }
  297. public class PickHandler : RobotMotionHandler
  298. {
  299. private ModuleName _chamber;
  300. private int _slot;
  301. private Hand _hand;
  302. public PickHandler()
  303. {
  304. background = true;
  305. }
  306. public override string package(params object[] args)
  307. {
  308. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  309. _chamber = (ModuleName)args[0];
  310. _slot = (int)args[1];
  311. _hand = (Hand)args[2];
  312. updateBefore();
  313. return string.Format(",MTRS,G,{0},{1:D2},A,{2},G4,",
  314. RobotConvertor.chamber2staion(_chamber),
  315. RobotConvertor.chamberSlot2Slot(_chamber, _slot),
  316. RobotConvertor.hand2string(_hand));
  317. }
  318. private void updateBefore()
  319. {
  320. _device.Blade1Target = _chamber;
  321. _device.Blade2Target = _chamber;
  322. string arm = _hand == Hand.Blade1 ? "A" : "B";
  323. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  324. _device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  325. _device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  326. }
  327. protected override void update(string[] data)
  328. {
  329. if (_hand == Hand.Both)
  330. {
  331. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
  332. WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
  333. }
  334. else
  335. {
  336. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)_hand);
  337. }
  338. string arm = _hand == Hand.Blade1 ? "A" : "B";
  339. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  340. _device.CmdBlade1Extend = "0";
  341. _device.CmdBlade2Extend = "0";
  342. _device.Blade1Target = ModuleHelper.Converter(_device.Name);
  343. _device.Blade2Target = ModuleHelper.Converter(_device.Name);
  344. }
  345. }
  346. public class PickExtendHandler : RobotMotionHandler
  347. {
  348. private ModuleName _chamber;
  349. private int _slot;
  350. private Hand _hand;
  351. public PickExtendHandler()
  352. {
  353. background = true;
  354. }
  355. public override string package(params object[] args)
  356. {
  357. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  358. _chamber = (ModuleName)args[0];
  359. _slot = (int)args[1];
  360. _hand = (Hand)args[2];
  361. updateBefore();
  362. return string.Format(",MTRS,G,{0},{1:D2},A,{2},Gb,",
  363. RobotConvertor.chamber2staion(_chamber),
  364. RobotConvertor.chamberSlot2Slot(_chamber, _slot),
  365. RobotConvertor.hand2string(_hand));
  366. }
  367. private void updateBefore()
  368. {
  369. _device.Blade1Target = _chamber;
  370. _device.Blade2Target = _chamber;
  371. string arm = _hand == Hand.Blade1 ? "A" : "B";
  372. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  373. _device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  374. _device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  375. }
  376. }
  377. public class PickRetractHandler : RobotMotionHandler
  378. {
  379. private ModuleName _chamber;
  380. private int _slot;
  381. private Hand _hand;
  382. public PickRetractHandler()
  383. {
  384. background = true;
  385. }
  386. public override string package(params object[] args)
  387. {
  388. //$,<UNo>(,<SeqNo>),MPNT,<TrsPnt>(,<Sum>)<CR>
  389. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  390. _chamber = (ModuleName)args[0];
  391. _slot = (int)args[1];
  392. _hand = (Hand)args[2];
  393. updateBefore();
  394. return ",MPNT,G4,";
  395. }
  396. private void updateBefore()
  397. {
  398. _device.Blade1Target = _chamber;
  399. _device.Blade2Target = _chamber;
  400. string arm = _hand == Hand.Blade1 ? "A" : "B";
  401. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  402. _device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  403. _device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  404. }
  405. protected override void update(string[] data)
  406. {
  407. if (_hand == Hand.Both)
  408. {
  409. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
  410. WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
  411. }
  412. else
  413. {
  414. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)_hand);
  415. }
  416. string arm = _hand == Hand.Blade1 ? "A" : "B";
  417. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  418. _device.CmdBlade1Extend = "0";
  419. _device.CmdBlade2Extend = "0";
  420. _device.Blade1Target = ModuleHelper.Converter(_device.Name);
  421. _device.Blade2Target = ModuleHelper.Converter(_device.Name);
  422. }
  423. }
  424. public class PlaceHandler : RobotMotionHandler
  425. {
  426. private ModuleName _chamber;
  427. private int _slot;
  428. private Hand _hand;
  429. public PlaceHandler()
  430. {
  431. background = true;
  432. }
  433. public override string package(params object[] args)
  434. {
  435. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  436. _chamber = (ModuleName)args[0];
  437. _slot = (int)args[1];
  438. _hand = (Hand)args[2];
  439. updateBefore();
  440. return string.Format(",MTRS,P,{0},{1:D2},A,{2},P4,",
  441. RobotConvertor.chamber2staion(_chamber),
  442. RobotConvertor.chamberSlot2Slot(_chamber, _slot),
  443. RobotConvertor.hand2string(_hand));
  444. }
  445. private void updateBefore()
  446. {
  447. _device.Blade1Target = _chamber;
  448. _device.Blade2Target = _chamber;
  449. string arm = _hand == Hand.Blade1 ? "A" : "B";
  450. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  451. _device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  452. _device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  453. }
  454. protected override void update(string[] data)
  455. {
  456. if (_hand == Hand.Both)
  457. {
  458. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
  459. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  460. }
  461. else
  462. {
  463. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)_hand, _chamber, _slot);
  464. }
  465. string arm = _hand == Hand.Blade1 ? "A" : "B";
  466. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  467. _device.CmdBlade1Extend = "0";
  468. _device.CmdBlade2Extend = "0";
  469. _device.Blade1Target = ModuleHelper.Converter(_device.Name);
  470. _device.Blade2Target = ModuleHelper.Converter(_device.Name);
  471. }
  472. }
  473. public class PlaceExtendHandler : RobotMotionHandler
  474. {
  475. private ModuleName _chamber;
  476. private int _slot;
  477. private Hand _hand;
  478. public PlaceExtendHandler()
  479. {
  480. background = true;
  481. }
  482. public override string package(params object[] args)
  483. {
  484. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  485. _chamber = (ModuleName)args[0];
  486. _slot = (int)args[1];
  487. _hand = (Hand)args[2];
  488. updateBefore();
  489. return string.Format(",MTRS,P,{0},{1:D2},A,{2},Pb,",
  490. RobotConvertor.chamber2staion(_chamber),
  491. RobotConvertor.chamberSlot2Slot(_chamber, _slot),
  492. RobotConvertor.hand2string(_hand));
  493. }
  494. private void updateBefore()
  495. {
  496. _device.Blade1Target = _chamber;
  497. _device.Blade2Target = _chamber;
  498. string arm = _hand == Hand.Blade1 ? "A" : "B";
  499. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  500. _device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  501. _device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  502. }
  503. }
  504. public class PlaceRetractHandler : RobotMotionHandler
  505. {
  506. private ModuleName _chamber;
  507. private int _slot;
  508. private Hand _hand;
  509. public PlaceRetractHandler()
  510. {
  511. background = true;
  512. }
  513. public override string package(params object[] args)
  514. {
  515. //$,<UNo>(,<SeqNo>),MPNT,<TrsPnt>(,<Sum>)<CR>
  516. // $,<UNo>(,<SeqNo>),MPNT,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  517. _chamber = (ModuleName)args[0];
  518. _slot = (int)args[1];
  519. _hand = (Hand)args[2];
  520. updateBefore();
  521. return ",MPNT,P4,";
  522. }
  523. private void updateBefore()
  524. {
  525. _device.Blade1Target = _chamber;
  526. _device.Blade2Target = _chamber;
  527. string arm = _hand == Hand.Blade1 ? "A" : "B";
  528. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  529. _device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
  530. _device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
  531. }
  532. protected override void update(string[] data)
  533. {
  534. if (_hand == Hand.Both)
  535. {
  536. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
  537. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot + 1);
  538. }
  539. else
  540. {
  541. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)_hand, _chamber, _slot);
  542. }
  543. string arm = _hand == Hand.Blade1 ? "A" : "B";
  544. _device.CmdBladeTarget = $"{_chamber}.{arm}";
  545. _device.CmdBlade1Extend = "0";
  546. _device.CmdBlade2Extend = "0";
  547. _device.Blade1Target = ModuleHelper.Converter(_device.Name);
  548. _device.Blade2Target = ModuleHelper.Converter(_device.Name);
  549. }
  550. }
  551. public class ExchangHandler : RobotMotionHandler
  552. {
  553. private ModuleName _chamber;
  554. private int _slot;
  555. private Hand _hand;
  556. public ExchangHandler()
  557. {
  558. background = true;
  559. }
  560. public override string package(params object[] args)
  561. {
  562. // $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
  563. _chamber = (ModuleName)args[0];
  564. _slot = (int)args[1];
  565. _hand = (Hand)args[2];
  566. if (_hand == Hand.Blade1)
  567. _hand = Hand.Blade2;
  568. else
  569. _hand = Hand.Blade1;
  570. updateBefore();
  571. return string.Format(",MTRS,E,{0},{1:D2},A,{2},P4,",
  572. RobotConvertor.chamber2staion(_chamber),
  573. RobotConvertor.chamberSlot2Slot(_chamber, _slot),
  574. RobotConvertor.hand2string(_hand));
  575. }
  576. private void updateBefore()
  577. {
  578. _device.Blade1Target = _chamber;
  579. _device.Blade2Target = _chamber;
  580. _device.Swap = true;
  581. _device.PlaceBalde = _hand;
  582. }
  583. protected override void update(string[] data)
  584. {
  585. if (_hand == Hand.Blade2)
  586. {
  587. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
  588. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
  589. }
  590. else
  591. {
  592. WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
  593. WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot);
  594. }
  595. _device.Swap = false;
  596. _device.Blade1Target = ModuleHelper.Converter(_device.Name);
  597. _device.Blade2Target = ModuleHelper.Converter(_device.Name);
  598. }
  599. }
  600. public class GotoHandler : RobotMotionHandler
  601. {
  602. private ModuleName _chamber;
  603. private int _slot;
  604. private Hand _hand;
  605. public GotoHandler()
  606. {
  607. background = true;
  608. }
  609. public override string package(params object[] args)
  610. {
  611. // $,<UNo>(,<SeqNo>),MTCH,<TrsSt>,<Slot>,<Posture>,<Hand>,<PMode> (,< OfstX >,< OfstY >,< OfstZ >)(,< Sum >)< CR >
  612. //• ‘M’ : Intermediate position (position with XYZ direction offset value applied).
  613. //• ‘R’ : Ready position (position with XYZ direction offset value applied).
  614. // • ‘O’ : Offset position (position with XYZ direction offset values applied).
  615. //// • ‘S’ : Registered position.
  616. /// • ‘B’ : Mapping start position.
  617. // • ‘E’ : Mapping finish position.
  618. _chamber = (ModuleName)args[0];
  619. _slot = (int)args[1];
  620. _hand = (Hand)args[2];
  621. updateBefore();
  622. return string.Format(",MTCH,{0},{1:D2},A,{2},R,",
  623. RobotConvertor.chamber2staion(_chamber),
  624. RobotConvertor.chamberSlot2Slot(_chamber, _slot),
  625. RobotConvertor.hand2string(_hand));
  626. }
  627. private void updateBefore()
  628. {
  629. _device.Blade1Target = _chamber;
  630. _device.Blade2Target = _chamber;
  631. }
  632. }
  633. public class RBWaferMappingHandler : RobotMotionHandler
  634. {
  635. private ModuleName _chamber;
  636. //private int _slot;
  637. //private Hand _hand;
  638. public RBWaferMappingHandler()
  639. {
  640. background = true;
  641. }
  642. public override string package(params object[] args)
  643. {
  644. //$,<UNo>(,<SeqNo>),MMAP,<TrsSt>,<Slot>(,<Safe>)(,<Sum>)<CR>
  645. //TrsSt : Transfer station (3 bytes)
  646. //“C01” - “C08” : Cassette stage.
  647. //“S01” - “S12” : Transfer stage.
  648. //“P01” : P/A stage.
  649. //• Slot : Slot number (2 bytes)
  650. //<Cassette stage>
  651. //• “01” - “30” : When specifying individual cassette stage slot.
  652. //• “00” : When specifying all slots.
  653. //<Transfer stage, P/A stage>
  654. //• “00” : Fixed value t(because this type of station does not have multiple slots.)
  655. //Note) If value is less than 2 digits, fill the higher digit with ‘0’ so that the field always has 8 digits.
  656. //Note) If <TrsST> is “S01”-“S12” or “P01”, the slot no. is ignored.
  657. //• Safe : Specifies wafer protrusion detection operation yes/no (1 byte)
  658. //• ‘0’ : No wafer protrusion detection operation.
  659. //• ‘1’ : Wafer protrusion detection operation performed.
  660. _chamber = (ModuleName)args[0];
  661. //_slot = (int)args[1];
  662. //_hand = (Hand)args[2];
  663. updateBefore();
  664. return string.Format(",MMAP,{0},00,1,",
  665. RobotConvertor.chamber2staion(_chamber));
  666. }
  667. private void updateBefore()
  668. {
  669. _device.Blade1Target = _chamber;
  670. _device.Blade2Target = _chamber;
  671. }
  672. }
  673. public class RBQueryWaferMapHandler : ITransferMsg
  674. {
  675. public bool background { get; protected set; }
  676. public bool evt { get { return false; } }
  677. public string deviceID { private get; set; }
  678. public string _cmd = string.Empty;
  679. private ModuleName _chamber;
  680. public IDevice Robot { set { _device = (Robot)value; } }
  681. protected Robot _device;
  682. public RBQueryWaferMapHandler()
  683. {
  684. background = false;
  685. }
  686. //$,<UNo>(,<SeqNo>),RMAP,<TrsSt>,<Slot>(,<Sum>)<CR>
  687. public string package(params object[] args)
  688. {
  689. _chamber = (ModuleName)args[0];
  690. return string.Format(",RMAP,{0},00,",
  691. RobotConvertor.chamber2staion(_chamber));
  692. }
  693. public bool unpackage(string type, string[] items)
  694. {
  695. //$,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RMAP,<TrsSt>,<Slot>,
  696. //01:<Result1>…,N:<ResultN>(,<Sum>)<CR>
  697. //• UNo : Unit number (1 byte)
  698. //• SeqNo : Sequence number (None / 2 bytes)
  699. //• Sts : Status (2 bytes)
  700. //• Ackcd : Response code (4 bytes)
  701. //• TrsSt : Transfer station (3 bytes)
  702. //• Slot : Slot number (2 bytes)
  703. //• Result* : Mapping result (2 bytes each)
  704. //• “--” : No wafer detected.
  705. //• “OK” : Wafer inserted correctly.
  706. //• “CW” : Wafer inserted incorrectly (inclined).
  707. //• “DW” : Wafer inserted incorrectly (duplicated).
  708. //Note) Responds with the number of slots of the specified transfer station.
  709. //$,1,00,0000,RMAP,C02,00,
  710. //01:OK,02:DW,03:OK,04:CW,05:CW,06:OK,07:OK,08:--,09:OK,10:OK
  711. // No wafer: "0", Wafer: "1", Crossed:"2", Undefined: "?", Overlapping wafers: "W"
  712. if (items.Length > 7)
  713. {
  714. StringBuilder sb = new StringBuilder();
  715. for (int i = 8; i < items.Length-1; i++)
  716. {
  717. string value = items[i].Substring(3);
  718. switch (value)
  719. {
  720. case "--":
  721. sb.Append("0");
  722. break;
  723. case "OK":
  724. sb.Append("1");
  725. break;
  726. case "CW":
  727. sb.Append("2");
  728. break;
  729. case "DW":
  730. sb.Append("W");
  731. break;
  732. }
  733. }
  734. _device.NotifySlotMapResult(_chamber, sb.ToString());
  735. return true;
  736. }
  737. return !background;
  738. }
  739. }
  740. public class RbSetSpeedHandler : RobotMotionHandler
  741. {
  742. private int _speed = 0;
  743. public RbSetSpeedHandler()
  744. {
  745. background = false;
  746. }
  747. public override string package(params object[] args)
  748. {
  749. _speed = (int)args[0];
  750. return string.Format(",SSLV,{0},", _speed);
  751. }
  752. }
  753. public class RBQueryStateHandler : ITransferMsg
  754. {
  755. public bool background { get; protected set; }
  756. public bool evt { get { return false; } }
  757. public string deviceID { private get; set; }
  758. public string _cmd = string.Empty;
  759. public IDevice Robot { set { _device = (Robot)value; } }
  760. protected Robot _device;
  761. public RBQueryStateHandler()
  762. {
  763. background = false;
  764. }
  765. //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
  766. public string package(params object[] args)
  767. {
  768. return ",RSTS,";
  769. }
  770. public bool unpackage(string type, string[] items)
  771. {
  772. return !background;
  773. }
  774. }
  775. public class RbEventHandler : ITransferMsg
  776. {
  777. public bool background { get { return false; } }
  778. public bool evt { get { return true; } }
  779. public string deviceID { private get; set; }
  780. public string _cmd = string.Empty;
  781. public IDevice Robot { set { _device = (Robot)value; } }
  782. protected Robot _device;
  783. public RbEventHandler()
  784. {
  785. }
  786. //$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
  787. public string package(params object[] args)
  788. {
  789. return "";
  790. }
  791. public bool unpackage(string type, string[] items)
  792. {
  793. string evtType = items[3];
  794. if (evtType.Equals(ProtocolTag.resp_evt_error))
  795. {
  796. int error = Convert.ToInt32(items[5], 16);
  797. _device.ErrorCode = error;
  798. if (error > 0)
  799. _device.LastErrorCode = error;
  800. return true;
  801. }
  802. return false;
  803. }
  804. }
  805. public class RBQueryPositionHandler : ITransferMsg
  806. {
  807. public bool background { get; protected set; }
  808. public bool evt { get { return false; } }
  809. public string deviceID { private get; set; }
  810. public string _cmd = string.Empty;
  811. public IDevice Robot { set { _device = (Robot)value; } }
  812. protected Robot _device;
  813. public RBQueryPositionHandler()
  814. {
  815. background = false;
  816. }
  817. //$,<UNo>(,<SeqNo>),RPOS,<PType>(,<Sum>)<CR>
  818. //• ‘R’ : Command position.• ‘F’ : Feedback position.
  819. public string package(params object[] args)
  820. {
  821. return ",RPOS,F,";
  822. }
  823. public bool unpackage(string type, string[] items)
  824. {
  825. //Positive $,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RPOS,<PType>,<Value1>…,<ValueN>(,<Sum>)<CR>
  826. //Negative $,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RPOS,<PType>(,<Sum>)<CR>
  827. if (items.Length > 7)
  828. {
  829. _device.Rotation = int.Parse(items[7]);
  830. _device.Extension = int.Parse(items[8]);
  831. _device.Wrist1 = int.Parse(items[9]);
  832. _device.Wrist2 = int.Parse(items[10]);
  833. _device.Evevation = int.Parse(items[11]);
  834. return true;
  835. }
  836. return !background;
  837. }
  838. }
  839. }