LoadLock.cs 3.3 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.DataCenter;
  7. using Aitex.Core.RT.Device;
  8. using Aitex.Core.RT.Device.Unit;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks
  11. {
  12. public class LoadLock : BaseDevice, IDevice, ILoadLock
  13. {
  14. public virtual double ChamberPressure { get; }
  15. public virtual double ForelinePressure { get; }
  16. public const int SlotCount = 2;
  17. public LoadLock(string module, int slotCount) : base(module, module, module, module)
  18. {
  19. WaferManager.Instance.SubscribeLocation(module, slotCount);
  20. }
  21. public LoadLock(string module):this(module, SlotCount)
  22. {
  23. }
  24. public virtual bool Initialize()
  25. {
  26. DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
  27. DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
  28. DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
  29. DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
  30. return true;
  31. }
  32. public virtual bool CheckAtm()
  33. {
  34. return false;
  35. }
  36. public virtual bool CheckVacuum()
  37. {
  38. return false;
  39. }
  40. public virtual bool CheckIsPumping()
  41. {
  42. return false;
  43. }
  44. public virtual bool SetFastVentValve(bool isOpen, out string reason)
  45. {
  46. reason = string.Empty;
  47. return true;
  48. }
  49. public virtual bool SetSlowVentValve(bool isOpen, out string reason)
  50. {
  51. reason = string.Empty;
  52. return true;
  53. }
  54. public virtual bool SetFastPumpValve(bool isOpen, out string reason)
  55. {
  56. reason = string.Empty;
  57. return true;
  58. }
  59. public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
  60. {
  61. reason = string.Empty;
  62. return true;
  63. }
  64. public virtual bool SetEqualVentValve(bool isOpen, out string reason)
  65. {
  66. reason = string.Empty;
  67. return true;
  68. }
  69. public virtual void Monitor()
  70. {
  71. }
  72. public virtual void Terminate()
  73. {
  74. }
  75. public virtual void Reset()
  76. {
  77. }
  78. public virtual bool SetDoor(bool isOpen, out string reason)
  79. {
  80. reason = string.Empty;
  81. return true;
  82. }
  83. public virtual bool CheckDoorOpen()
  84. {
  85. return true;
  86. }
  87. public virtual bool CheckDoorClose()
  88. {
  89. return true;
  90. }
  91. public virtual bool SetLift(bool isUp, out string reason)
  92. {
  93. reason = string.Empty;
  94. return true;
  95. }
  96. public virtual bool SetLift(int slot, out string reason)
  97. {
  98. reason = string.Empty;
  99. return true;
  100. }
  101. public virtual bool CheckLiftUp()
  102. {
  103. return true;
  104. }
  105. public virtual bool CheckLiftDown()
  106. {
  107. return true;
  108. }
  109. public virtual bool CheckLift(int slot)
  110. {
  111. return true;
  112. }
  113. }
  114. }