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							- using Aitex.Core.RT.Routine;
 
- using VirgoRT.Devices;
 
- namespace VirgoRT.Modules.PMs
 
- {
 
-     class PMAllMfcVerificationRoutine : PMRoutineBase
 
-     {
 
-         enum RoutineStep
 
-         {
 
-             MFC1,
 
-             MFC2,
 
-             MFC3,
 
-             MFC4
 
-         }
 
-         private PumpDownRoutine _pumpdownRoutine;
 
-         private string[] _normalMfc;
 
-         private bool[] _isCheckMfcs;
 
-         private float _normalMfcFlow;
 
-         private PMMfcVerificationRoutine mfc1;
 
-         private PMMfcVerificationRoutine mfc2;
 
-         private PMMfcVerificationRoutine mfc3;
 
-         private PMMfcVerificationRoutine mfc4;
 
-         public PMAllMfcVerificationRoutine(JetPM chamber, PumpDownRoutine pumpDownRoutine) : base(chamber)
 
-         {
 
-             Name = "All MFC Verification";
 
-             bUINotify = true;
 
-             _pumpdownRoutine = pumpDownRoutine;
 
-         }
 
-         internal void Init(string[] normalMfc, bool[] IsCheckMfc)
 
-         {
 
-             _normalMfc = normalMfc;
 
-             _normalMfcFlow = 200;
 
-             _isCheckMfcs = IsCheckMfc;
 
-         }
 
-         public Result Start(params object[] objs)
 
-         {
 
-             Reset();
 
-             mfc1 = null;
 
-             mfc2 = null;
 
-             mfc3 = null;
 
-             mfc4 = null;
 
-             if (_isCheckMfcs[0])
 
-             {
 
-                 mfc1 = new PMMfcVerificationRoutine(_chamber, _pumpdownRoutine);
 
-                 mfc1.Init(_normalMfc[0], _normalMfcFlow, 10);
 
-             }
 
-             if (_isCheckMfcs[1])
 
-             {
 
-                 mfc2 = new PMMfcVerificationRoutine(_chamber, _pumpdownRoutine);
 
-                 mfc2.Init(_normalMfc[1], _normalMfcFlow, 10);
 
-             }
 
-             if (_isCheckMfcs[2])
 
-             {
 
-                 mfc3 = new PMMfcVerificationRoutine(_chamber, _pumpdownRoutine);
 
-                 mfc3.Init(_normalMfc[2], _normalMfcFlow, 10);
 
-             }
 
-             if (_isCheckMfcs[3])
 
-             {
 
-                 mfc4 = new PMMfcVerificationRoutine(_chamber, _pumpdownRoutine);
 
-                 mfc4.Init(_normalMfc[3], _normalMfcFlow, 10);
 
-             }
 
-             return Result.RUN;
 
-         }
 
-         public Result Monitor()
 
-         {
 
-             try
 
-             {
 
-                 if (mfc1 != null)
 
-                     ExecuteRoutine((int)RoutineStep.MFC1, mfc1);
 
-                 if (mfc2 != null)
 
-                     ExecuteRoutine((int)RoutineStep.MFC2, mfc2);
 
-                 if (mfc3 != null)
 
-                     ExecuteRoutine((int)RoutineStep.MFC3, mfc3);
 
-                 if (mfc4 != null)
 
-                     ExecuteRoutine((int)RoutineStep.MFC4, mfc4);
 
-             }
 
-             catch (RoutineBreakException)
 
-             {
 
-                 return Result.RUN;
 
-             }
 
-             catch (RoutineFaildException)
 
-             {
 
-                 _chamber.StopAllGases();
 
-                 _chamber.SetValveOnOff(ValveType.PROCESS, false);
 
-                 return Result.FAIL;
 
-             }
 
-             return Result.DONE;
 
-         }
 
-         public new void Abort()
 
-         {
 
-             _chamber.StopAllGases();
 
-             _chamber.SetValveOnOff(ValveType.PROCESS, false);
 
-         }
 
-     }
 
- }
 
 
  |