Virgo_ST/VirgoRT/Devices/JetPM.cs

using System;
using System.Collections.Generic;
using Aitex.Core.Common;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using VirgoCommon;
using VirgoRT.Devices.IODevices;
using VirgoRT.Instances;
using VirgoRT.Module;
using VirgoRT.Modules;

namespace VirgoRT.Devices
{
    enum ValveType
    {
        PROCESS,
        FAST_PUMP,
        SOFT_PUMP,
        FAST_VENT,
        PURGE,
        Mfc1,
        Mfc2,
        Mfc3,
        Mfc4,
        Mfc5
    }

    class JetPM : PM
    {
        // ----------------------------Fields--------------------------
        //
        private readonly IoLid               _Lid;
        //private readonly IoCylinder        _LidLocker;
        private readonly IoMessage           _Messager;
        private readonly IoSensor            _ATM_sw;
        private readonly IoSensor            _VAC_sw;
        private readonly IoSensor            _WLK_sw;
        private readonly IoSensor            _CDAPressure;
        private readonly IoSensor            _CoolantInletTC;
        private readonly IoSensor            _CoolantOutletTC;
        private readonly IoSensor            _ArmNotExtend;
        private readonly IoSensor            _N2Pressure_sw;
        private readonly IoSensor            _RFG_Interlock;
        private readonly IoPressureControl   _pressureController;
        private readonly IoHeater            _SubstrateTC;
        private readonly IoHeater            _ForelineTC;
        private readonly IoValve             _SoftPumpValve;
        private readonly IoValve             _FastPumpValve;
        private readonly IoValve             _ProcessValve;
        private readonly IoValve             _PurgeValve;
        private readonly IoValve             _FastVentValve;
        private readonly IoValve             _Mfc1Valve;
        private readonly IoValve             _Mfc2Valve;
        private readonly IoValve             _Mfc3Valve;
        private readonly IoValve             _Mfc4Valve;
        private readonly IoValve             _Mfc5Valve;
        //private readonly IoValve           _N2SupplyValve;
        private readonly IoCylinder          _slitDoor;
        private readonly IoCylinder          _LiftPin;
        private readonly IoCylinder          _PinSmall;        // 3'
        private readonly IoCylinder          _PinMedium;        // 4'
        private readonly RfPowerBase         _Generator;
        private readonly RfPowerBase         _GeneratorBias;
        private readonly RfMatchBase         _Match;
        private readonly RfMatchBase         _BiasMatch;
        private readonly PumpBase            _MainPump;
        private readonly ChillerBase         _Chiller;
        private readonly IoGasStick[]        _gasLines;
        private readonly ChillerBase _gridChiller;
        private readonly IoHeater _gridHeater;

        private readonly R_TRIG _trigBasePressure = new R_TRIG();
        private readonly R_TRIG _trigBaseTemperature = new R_TRIG();
        private readonly R_TRIG _trigWaterFlowCloseChiller = new R_TRIG();
        private double BasePressure;
        private double BaseTemperature;

        private bool EnableBiasRF = false;
        private int _bigWafer = 0;
        private int _midWafer = 0;
        private int _smallWafer = 0;
        private int gasCount = 0;
        private bool _smallGuidePinEnable;
        private bool _mediumGuidePinEnable;
        private MovementPosition _smallGuidePinDummyPos = MovementPosition.Down;
        private MovementPosition _mediumGuidePinDummyPos = MovementPosition.Down;
        // --------------------------Properties------------------------
        //
        public new ModuleName Module { get; }

        // 门的状态
        public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;
        public bool IsArmNotExtend => _ArmNotExtend.Value;

        // 盖子的状态
        public bool IsLidClosed => _Lid.OFFFeedback;

        // 盖子的锁
        //public bool IsLidLocked => !_LidLocker.ONSetPoint && _LidLocker.OFFSetPoint;

        public MovementPosition LiftPinPosition
        {
            get
            {
                MovementPosition pos = MovementPosition.Unknown;
                if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Up;
                }
                else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Down;
                }
                return pos;
            }
        }

        public MovementPosition SmallPosition
        {
            get
            {
                if (!_smallGuidePinEnable) return _smallGuidePinDummyPos;
                if (_smallWafer == 0)
                    return MovementPosition.Down;
                MovementPosition res = MovementPosition.Unknown;
                if (_PinSmall.ONFeedback && !_PinSmall.OFFFeedback)
                {
                    res = MovementPosition.Up;
                }
                else if (_PinSmall.OFFFeedback && !_PinSmall.ONFeedback)
                {
                    res = MovementPosition.Down;
                }
                return res;
            }
        }

        public MovementPosition MediumPosition
        {
            get
            {
                if (!_mediumGuidePinEnable) return _mediumGuidePinDummyPos;
                if (_midWafer == 0)
                    return MovementPosition.Down;
                MovementPosition res = MovementPosition.Unknown;
                if (_PinMedium.ONFeedback && !_PinMedium.OFFFeedback)
                {
                    res = MovementPosition.Up;
                }
                else if (_PinMedium.OFFFeedback && !_PinMedium.ONFeedback)
                {
                    res = MovementPosition.Down;
                }
                return res;
            }
        }

        public override bool IsError
        {
            get
            {
                if (SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF"))
                {
                    return _MainPump.IsError || _Generator.IsError || _GeneratorBias.IsError;
                }
                else
                {
                    return _MainPump.IsError || _Generator.IsError;
                }
            }
        }
        public override bool IsIdle { get; }

        // 腔体压力
        public bool IsPressureToleranceEnabled
        {
            get => _pressureController.EnableTolerance;
            set => _pressureController.EnableTolerance = value;
        }

        public override double ChamberPressure => _pressureController.ProcessGauge.Value;
        public override double ChamberPressurePressure => _pressureController.PressureGauge.Value;
        public double ForelinePressure => _pressureController.ForelineGauge.Value;
        public PressureCtrlMode PressureMode => _pressureController.ThrottleValve.PressureMode;
        public double TargetPressure => _pressureController.TargetPressure;

        // 压力信号
        public bool IsATM => _ATM_sw.Value;
        public bool IsVAC => _VAC_sw.Value;
        public bool IsWLK => _WLK_sw.Value;
        public bool IsRFGInterlockOn => _RFG_Interlock.Value;

        // 温度
        public float SubstrateTempSP => _SubstrateTC.ControlTcSetPoint;
        public float SubstrateTempFB => _SubstrateTC.ControlTcFeedback;
        public float CoolantInletTempFB => _SubstrateTC.CoolantInletTcFeedback;
        public float CoolantOutletTempFB => _SubstrateTC.CoolantOutletTcFeedback;

        // Pump 状态
        public bool IsPumpRunning => _MainPump.IsRunning;
        public bool IsFastPumpOpened => _FastPumpValve.Status;
        public bool IsSoftPumpOpened => _SoftPumpValve.Status;
        public bool IsMfc1ValveOpened => _Mfc1Valve.Status;
        public bool IsMfc2ValveOpened => _Mfc2Valve.Status;
        public bool IsMfc3ValveOpened => _Mfc3Valve.Status;
        public bool IsMfc4ValveOpened => _Mfc4Valve.Status;
        public bool IsMfc5ValveOpened => _Mfc5Valve.Status;

        public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;

        public bool IsCDA_OK => _CDAPressure.Value;
        public bool IsCoolantInletTC_OK => _CoolantInletTC.Value;
        public bool IsCoolantOutletTC_OK => _CoolantOutletTC.Value;

        // 蝶阀位置
        public float TVPosition => _pressureController.ThrottleValve.PositionFeedback;

        // 腔体压力.end

        // 射频
        public float ForwardPower => _Generator.ForwardPower;
        public bool IsGeneratorON => _Generator.IsPowerOn;
        public float GeneratorSetpoint => _Generator.PowerSetPoint;

        // Bias射频
        public float ForwardPowerBias => _GeneratorBias.ForwardPower;
        public bool IsGeneratorONBias => _GeneratorBias.IsPowerOn;
        public float GeneratorSetpointBias => _GeneratorBias.PowerSetPoint;
        public float CTune => _GeneratorBias.CTune;
        public float CLoad => _GeneratorBias.CLoad;
        public int VPP => _GeneratorBias.VPP;

        // 流气
        public double TotalGasSetpoint
        {
            get
            {
                double sum = 0;
                foreach (var gas in _gasLines)
                {
                    sum += gas.FlowSP;
                }
                return sum;
            }
        }

        public bool HasGasOutOfRange
        {
            get
            {
                foreach (var gas in _gasLines)
                {
                    if (!gas.IsOutOfRange)
                        return false;
                }
                return true;
            }
        }

        // --------------------------Constructor-----------------------
        //
        public JetPM(ModuleName mod) : base(mod.ToString())
        {
            Module = mod;

            _smallGuidePinEnable = SC.GetValue<bool>($"System.SmallGuidePinEnable");
            _mediumGuidePinEnable = SC.GetValue<bool>($"System.MediumGuidePinEnable");
            BasePressure = SC.GetValue<double>($"{mod}.ChamberBasePressureThreshold");
            BaseTemperature = SC.GetValue<double>($"{mod}.ChamberBaseTemperatureThreshold");
            _smallWafer = SC.GetValue<int>($"System.SmallWafer");
            _midWafer = SC.GetValue<int>($"System.MidWafer");
            _bigWafer = SC.GetValue<int>($"System.BigWafer");
            EnableBiasRF = SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF");
            for (int i = 1; i <= 5; i++)
            {
                if (SC.GetValue<bool>($"{Module}.MfcGas{i}.Enable")) gasCount++;
            }
            //_gasLines = new IoGasStick[gasCount];
            _gasLines = new IoGasStick[5];

            //for (int index = 0; index < gasCount; index++)
            //{
            //    _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
            //}

            for (int index = 0; index < 5; index++)
            {
                _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
            }

            _Lid                    = DEVICE.GetDevice<IoLid>($"{Module}.{VirgoDevice.Lid}");
            //_LidLocker            = DEVICE.GetDevice<IoCylinder>($"{Module}.{VirgoDevice.LidLocker}");
            _Messager               = DEVICE.GetDevice<IoMessage>($"{Module}.Messager");
            _ATM_sw                 = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
            _N2Pressure_sw          = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
            _VAC_sw                 = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
            _WLK_sw                 = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
            _CDAPressure            = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _CoolantInletTC         = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCoolantInletTCOK");
            _CoolantOutletTC        = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCoolantOutletTCOK");
            _ArmNotExtend           = DEVICE.GetDevice<IoSensor>($"{Module}.SensorArmNotExtend");
            _RFG_Interlock          = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");
            _pressureController     = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VirgoDevice.PressureControl}");
            _SubstrateTC            = DEVICE.GetDevice<IoHeater>($"{Module}.HeaterChamber");
            _ForelineTC             = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
            _SoftPumpValve          = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveSoftPumping}");
            _FastPumpValve          = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveFastPumping}");
            _ProcessValve           = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveProcess}");
            _FastVentValve          = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveFastVent}");
            _PurgeValve             = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveChamberPurge}");
            _Mfc1Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveMfc1}");
            _Mfc2Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveMfc2}");
            _Mfc3Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveMfc3}");
            _Mfc4Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveMfc4}");
            _Mfc5Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{VirgoDevice.ValveMfc5}");
            _slitDoor               = DEVICE.GetDevice<IoCylinder>($"{Module}.{VirgoDevice.SlitDoor}");
            _LiftPin                = DEVICE.GetDevice<IoCylinder>($"{Module}.{VirgoDevice.LiftPin}");
            _PinSmall               = DEVICE.GetDevice<IoCylinder>($"{Module}.{VirgoDevice.SmallPin}");
            _PinMedium              = DEVICE.GetDevice<IoCylinder>($"{Module}.{VirgoDevice.MediumPin}");
            _Generator              = DEVICE.GetDevice<IoRf>($"{Module}.{VirgoDevice.Rf}");
            _GeneratorBias          = DEVICE.GetDevice<IoRf>($"{Module}.{VirgoDevice.BiasRf}");
            _MainPump               = DEVICE.GetDevice<PumpBase>($"{Module}.{VirgoDevice.MainPump}");
            _Chiller                = DEVICE.GetDevice<ChillerBase>($"{Module}.{VirgoDevice.Chiller}");
            _gridChiller = DEVICE.GetDevice<ChillerBase>($"{Module}.GridChiller");
            _gridHeater = DEVICE.GetDevice<IoHeater>($"{Module}.GridHeater");

            _gridHeater.Controller = (IoHeaterController)_gridChiller;

            // RS223 AdTec Generator
            if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
            {
                _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VirgoDevice.Rf}");
            }

            if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Kashiyama)
            {
                _MainPump = DEVICE.GetDevice<KashiyamaPump>($"{Module}.{VirgoDevice.MainPump}");
            }

            // Ethernet Comet Generator Bias
            if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF") && 
                SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
                SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
            {
                _GeneratorBias = DEVICE.GetDevice<CometRF>($"{Module}.{VirgoDevice.BiasRf}");
            }

            // RS223 AdTec Generator Bias
            if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF") &&
                SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
            {
                _GeneratorBias = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VirgoDevice.BiasRf}");
            }

            // RS232 AdTec match
            if (SC.GetValue<int>($"{mod}.match.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.match.MFG") == (int)MatchMFG.AdTec)
            {
                _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VirgoDevice.Match}");
            }

            if (SC.GetValue<bool>($"{mod}.match.EnableMatch") &&
               SC.GetValue<int>($"{mod}.match.MFG") == (int)MatchMFG.Revtech)
            {
                if (SC.GetValue<int>($"{mod}.match.CommunicationType") == (int)CommunicationType.RS232)
                {
                    _Match = DEVICE.GetDevice<ComRevtechMatch>($"{Module}.match");
                }
                else if (SC.GetValue<int>($"{mod}.match.CommunicationType") == (int)CommunicationType.Ethernet)
                {
                    _Match = DEVICE.GetDevice<EthernetRevtechMatch>($"{Module}.match");
                }
            }

            if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
               SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
            {
                if (SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232)
                {
                    _BiasMatch = DEVICE.GetDevice<RevtechMatch>($"{Module}.{VirgoDevice.BiasMatch}");
                }
                else if (SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.Ethernet)
                {
                    _BiasMatch = DEVICE.GetDevice<RevtechMatch>($"{Module}.{VirgoDevice.BiasMatch}");
                }
            }

            // RS232 Dry pump, SKY
            if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VirgoDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VirgoDevice.MainPump}");
                }
            }

            if (SC.GetValue<bool>($"{mod}.Chiller.EnableChiller") &&
                SC.GetValue<int>($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC)
            {
                _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VirgoDevice.Chiller}");
            }

            System.Diagnostics.Debug.Assert(null != _Generator);
            System.Diagnostics.Debug.Assert(null != _MainPump);
            if (SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF"))
            {
                System.Diagnostics.Debug.Assert(null != _GeneratorBias);
            }
            WaferManager.Instance.SubscribeLocation(Module, 1);
        }

        public override bool Initialize()
        {
            base.Initialize();
            DATA.Subscribe($"{Name}.IoTemperatureCtrl.TemperatureControl.SubstrateTemperature", () => SubstrateTempFB);
            DATA.Subscribe($"{Module}.WaferSize", () => WaferManager.Instance.GetWafer(Module, 0).Size.ToString());
            DATA.Subscribe($"{Module}.EnableBiasRF", () => EnableBiasRF);

            return true;
        }

        // -----------------------------Method-------------------------
        //
        public override void Home()
        {
            // 与yp讨论过，PM 初始化不需要

            SetLiftPin(MovementPosition.Down, out _);
            //SetSlitDoor(false, out _);

            if (WaferManager.Instance.CheckNoWafer(Module, 0))
            {
                SetGuidePinSmall(MovementPosition.Down);
                SetGuidePinMedium(MovementPosition.Down);
            }

            if (IsSlitDoorClosed)
            {
                SetSlitDoor(false, out _);
            }
            else if (!IsSlitDoorClosed)
            {
                SetSlitDoor(false, out _);
            }
            else if (_slitDoor.State == CylinderState.Error)
            {
                SetSlitDoor(true, out _);
            }

            if (SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF"))
            {
                _Messager.SetMessager(1);   //Virgo B
            }
            else
            {
                _Messager.SetMessager(0);   //Virgo A
            }
        }

        public void SetSlitDoor(bool open, out string reason)
        {
            reason = string.Empty;
            
            // [XIAHUAN]: 只在关门的时候检查arm not extend
            if (!open && !IsArmNotExtend)
            {
                EV.PostAlarmLog(Module.ToString(), "Arm Not Extend 信号不满足");
                return;
            }
            _slitDoor.SetCylinder(open, out reason);
        }

        public override bool CheckWaterLeak()
        {
            return _WLK_sw.Value;
        }

        public override bool CheckCDAOK()
        {
            return _CDAPressure.Value;
        }

        public override bool CheckCoolantInletTCOK()
        {
            return _CoolantInletTC.Value;
        }

        public override bool CheckCoolantOutletTCOK()
        {
            return _CoolantOutletTC.Value;
        }

        public override bool CheckArmExtendOK()
        {
            return _ArmNotExtend.Value;
        }

        public override bool CheckAtm()
        {
            return _ATM_sw.Value && ChamberPressure > 700000;
        }

        public override bool CheckVacuum()
        {
            return _VAC_sw.Value && ChamberPressure < 100;
        }

        public bool CheckSlitDoorOpen()
        {
            return _slitDoor.State == CylinderState.Open;
        }

        public bool CheckSlitDoorClose()
        {
            return _slitDoor.State == CylinderState.Close;
        }

        public bool CheckLiftUp()
        {
            return _LiftPin.State == CylinderState.Open;
        }

        public bool CheckLiftDown()
        {
            return _LiftPin.State == CylinderState.Close;
        }

        public void StartPump(bool on)
        {
            //_pressureController.StartPump(on);
            _MainPump?.SetPumpOnOff(on);
        }

        public void SetValveOnOff(ValveType vlvType, bool on)
        {
            switch (vlvType)
            {
            case ValveType.PROCESS:
                _ProcessValve.TurnValve(on, out _);
                break;
            case ValveType.FAST_PUMP:
                _FastPumpValve.TurnValve(on, out _);
                break;
            case ValveType.SOFT_PUMP:
                _SoftPumpValve.TurnValve(on, out _);
                break;
            case ValveType.FAST_VENT:
                _FastVentValve.TurnValve(on, out _);
                break;
            case ValveType.PURGE:
                _PurgeValve.TurnValve(on, out _);
                break;
            case ValveType.Mfc1:
                _Mfc1Valve.TurnValve(on, out _);
                break;
            case ValveType.Mfc2:
                _Mfc2Valve.TurnValve(on, out _);
                break;
            case ValveType.Mfc3:
                _Mfc3Valve.TurnValve(on, out _);
                break;
            case ValveType.Mfc4:
                _Mfc4Valve.TurnValve(on, out _);
                break;
            case ValveType.Mfc5:
                _Mfc5Valve.TurnValve(on, out _);
                break;
                default:
                throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
            }
        }

        public void CheckPressureStability()
        {
            IsPressureToleranceEnabled = true;
        }

        public override void Monitor()
        {
            foreach (var gas in _gasLines)
            {
                gas.Monitor();
            }
            _trigBasePressure.CLK = ChamberPressurePressure >= BasePressure;
            if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
            {
                _trigBaseTemperature.CLK = CoolantOutletTempFB >= BaseTemperature;
            }
            else
            {
                _trigBaseTemperature.CLK = SubstrateTempFB >= BaseTemperature;
            }
            if (_trigBasePressure.Q) EV.PostMessage(Module.ToString(), EventEnum.DefaultAlarm, "PM pressure out of tolerance");
            if (_trigBaseTemperature.Q) EV.PostMessage(Module.ToString(), EventEnum.DefaultAlarm, "PM temperature out of tolerance");
            _trigWaterFlowCloseChiller.CLK = SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") && !CheckWaterLeak() && _Chiller != null && _Chiller.IsRunning;
            if (_trigWaterFlowCloseChiller.Q)
            {
                Aitex.Core.RT.Log.LOG.Info("Turn off chiller by water leak");
                _Chiller.SetChillerOnOff(false);
            }
        }

        public void CloseValves()
        {
            _SoftPumpValve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);

            _ProcessValve.TurnValve(false, out _);
            _PurgeValve.TurnValve(false, out _);

            _FastVentValve.TurnValve(false, out _);
            _PurgeValve.TurnValve(false, out _);

            _Mfc1Valve.TurnValve(false, out _);
            _Mfc2Valve.TurnValve(false, out _);
            _Mfc3Valve.TurnValve(false, out _);
            _Mfc4Valve.TurnValve(false, out _);
            _Mfc5Valve.TurnValve(false, out _);

            foreach (var stick in _gasLines)
            {
                stick.Stop();
            }
        }

        public bool FlowGas(int gasNum, double val)
        {
            if (_gasLines.Length <= gasNum)
                return false;

            _gasLines[gasNum].Flow(val);
            return true;
        }

        public void StopAllGases()
        {
            foreach (var line in _gasLines)
            {
                line.Stop();
            }
        }

        public bool SetLiftPin(MovementPosition dirt, out string reason)
        {
            reason = string.Empty;

            switch (dirt)
            {
                case MovementPosition.Down:
                    return _LiftPin.SetCylinder(false, out reason);
                case MovementPosition.Up:
                    return _LiftPin.SetCylinder(true, out reason);
                case MovementPosition.Left:
                case MovementPosition.Right:
                case MovementPosition.Middle:
                    throw new ArgumentException("Movement argument error");
            }

            return true;
        }

        public void SetGuidePin(WaferSize ws, MovementPosition dirt)
        {
            if (ws == WaferSize.WS3)
                SetGuidePinSmall(dirt);
            else if (ws == WaferSize.WS4)
                SetGuidePinMedium(dirt);
        }

        public void PrepareGuidePinForPlace(WaferSize ws)
        {
            if (ws == WaferSize.WS3)
            {
                SetGuidePinSmall(MovementPosition.Up);
                SetGuidePinMedium(MovementPosition.Down);
            }
            else if (ws == WaferSize.WS4)
            {
                SetGuidePinSmall(MovementPosition.Down);
                SetGuidePinMedium(MovementPosition.Up);
            }
            else if (ws == WaferSize.WS6)
            {
                SetGuidePinSmall(MovementPosition.Down);
                SetGuidePinMedium(MovementPosition.Down);
            }
        }

        public bool CheckGuidePinIsReadyForTransfer(WaferSize ws)
        {
            if (ws == WaferSize.WS3)
            {
                return SmallPosition == MovementPosition.Up && MediumPosition == MovementPosition.Down;
            }
            else if (ws == WaferSize.WS4)
            {
                return SmallPosition == MovementPosition.Down && MediumPosition == MovementPosition.Up;

            }
            else if (ws == WaferSize.WS6)
            {
                return SmallPosition == MovementPosition.Down && MediumPosition == MovementPosition.Down;
            }
            //else if (ws == WaferSize.WS8)
            //{
            //    return SmallPosition == MovementPosition.Down && MediumPosition == MovementPosition.Down;
            //}
            else
                return false;
        }

        private void SetGuidePinSmall(MovementPosition dirt)
        {
            if (_smallGuidePinEnable)
            {
                EV.PostInfoLog(Module.ToString(), $"set small pin {dirt}, smallWafer={_smallWafer}");

                switch (dirt)
                {
                    case MovementPosition.Down:
                        if (_smallWafer != 0)
                            _PinSmall?.SetCylinder(false, out _);
                        break;
                    case MovementPosition.Up:
                        if (_smallWafer != 0)
                            _PinSmall?.SetCylinder(true, out _);
                        break;
                    default:
                        throw new ArgumentException("Movement argument error");
                }
            }
            else
            {
                _smallGuidePinDummyPos = dirt;
            }

        }

        private void SetGuidePinMedium(MovementPosition dirt)
        {
            if(_mediumGuidePinEnable)
            {
                EV.PostInfoLog(Module.ToString(), $"set medium pin {dirt}, midWafer={_midWafer}");
                switch (dirt)
                {
                    case MovementPosition.Down:
                        if (_midWafer != 0)
                            _PinMedium?.SetCylinder(false, out _);
                        break;
                    case MovementPosition.Up:
                        if (_midWafer != 0)
                            _PinMedium?.SetCylinder(true, out _);
                        break;
                    default:
                        throw new ArgumentException("Movement argument error");
                }
            }
            else
            {
                _mediumGuidePinDummyPos = dirt;
            }
        }

        public void SetGeneratorCommunicationMode(int mode)
        {
            _Generator?.SetCommunicationMode(mode);
        }

        public bool GeneratorPowerOn(bool on)
        {
            if (_Generator == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                EV.PostAlarmLog(Module.ToString(), "射频电源 Interlock条件不满足");
                return false;
            }

            return _Generator.SetPowerOnOff(on, out _);
        }

        public bool GeneratorSetpower(float val)
        {
            if (_Generator == null) return false;

            if (Math.Abs(val) > 0.01)
                _Generator.SetPower((ushort)val);
            return true;
        }

        public bool GeneratorBiasPowerOn(bool on)
        {
            if (_GeneratorBias == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                EV.PostAlarmLog(Module.ToString(), "Bias射频电源 Interlock条件不满足");
                return false;
            }

            return _GeneratorBias.SetPowerOnOff(on, out _);
        }

        public bool GeneratorBiasSetpower(float val)
        {
            if (_GeneratorBias == null) return false;

            if (Math.Abs(val) > 0.01)
                _GeneratorBias.SetPower((ushort)val);
            return true;
        }

        public bool GeneratorBiasSetMatchMode(bool val)
        {
            if (_BiasMatch != null)
            {
                _BiasMatch.SetMatchMode(true ? EnumRfMatchTuneMode.Auto.ToString() : EnumRfMatchTuneMode.Manual.ToString(), out _);
                return true;
            }

            if (_GeneratorBias == null) return false;
            string reason = string.Empty;
            _GeneratorBias.SetMatchingAutoMode(val, out reason);
            return true;
        }

        public bool SetMatchPosition(float c1, float c2)
        {
            if (_Match == null) return false;
            string reason = string.Empty;
            _Match.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public bool SetBiasMatchPosition(float c1, float c2)
        {
            if (_BiasMatch != null)
            {
                _BiasMatch.SetMatchPosition(c1, c2, out _);
                return true;
            }

            if (_GeneratorBias == null) return false;
            string reason = string.Empty;
            _GeneratorBias.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public void FullOpenTV()
        {
            _pressureController.FullOpenThrottleValve();
        }


        public void HeatSubstrate(double val)
        {
            _SubstrateTC?.RampTemp((float)val);
            _SubstrateTC?.TurnOnOff(true);
        }

        public void HeatChiller(double value, double offset)
        {
            _Chiller?.SetChillerTemp((float)value, (float)offset);
            _Chiller?.SetChillerOnOff(true);
        }

        public bool CheckChillerStatus()
        {
            return _Chiller != null && _Chiller.IsRunning && !_Chiller.IsError;
        }

        public void HeatForeline(double val)
        {
            _ForelineTC?.RampTemp((float)val);
        }

        public override bool CheckEnableTransfer(EnumTransferType type)
        {
            if (type == EnumTransferType.Pick)
            {
                return _slitDoor.State == CylinderState.Open && _LiftPin.State == CylinderState.Open;
            }

            if (type == EnumTransferType.Place)
            {
                return _slitDoor.State == CylinderState.Open && _LiftPin.State == CylinderState.Close;
            }

            return false;
        }

        public bool CheckEnableTransfer(EnumTransferType type, WaferSize waferSize)
        {
            bool guidePinIsOk = CheckGuidePinIsReadyForTransfer(waferSize);
            bool pressureIsOk = CheckSlitDoorOpen() || IsATM;
            if (type == EnumTransferType.Pick)
            {
                return  _LiftPin.State == CylinderState.Open && pressureIsOk
                    && CheckGuidePinIsReadyForTransfer(waferSize);
            }

            if (type == EnumTransferType.Place)
            {
                return _LiftPin.State == CylinderState.Close && pressureIsOk
                                                             && CheckGuidePinIsReadyForTransfer(waferSize);
            }

            return false;
        }

        public override void TransferHandoff(EnumTransferType type)
        {
            switch (type)
            {
            case EnumTransferType.Pick:
                SetLiftPin(MovementPosition.Up, out _);
                break;
            case EnumTransferType.Place:
                SetLiftPin(MovementPosition.Down, out _);
                break;
            case EnumTransferType.Extend:
                break;
            case EnumTransferType.Retract:
                break;
            default:
                break;
            }
        }

        public override void Reset()
        {
            _trigBasePressure.RST = true;
            _trigBaseTemperature.RST = true;
        }
    }

    /// <summary>
    /// PM Action
    /// </summary>
    abstract class PmActionBase : ActionBase
    {
        protected internal JetPM _chamber;

        protected PmActionBase(ModuleName mod, JetPM pm) : base(mod)
        {
            _chamber = pm;
        }
    }

    class PinAction : PmActionBase
    {
        public MovementPosition Pos { get; }
        public bool IsWaferTransfered { get; }
        public PMEntity PmEntity { get; set; }

        private Hand _blade;
        private bool _isPick;
        private bool _delay;

        public PinAction(ModuleName mod, JetPM pm, MovementPosition pos, bool isTransferWafer, Hand blade, bool isPick, bool isDelay) : base(mod, pm)
        {
            this.Pos = pos;
            IsWaferTransfered = isTransferWafer;

            _blade = blade;
            _isPick = isPick;
            _delay = isDelay;
        }

        public override void Execute()
        {
            if (Module == ModuleName.PMA)
                PmEntity = Singleton<RouteManager>.Instance.PMA;
            else if (Module == ModuleName.PMB)
                PmEntity = Singleton<RouteManager>.Instance.PMB;

            if (PmEntity != null)
            {
                EV.PostInfoLog(Module.ToString(), $"开始执行  Delayrecorder");
                PmEntity.PostMsg(PMEntity.MSG.MoveLiftPin, Pos, ID, _isPick, _delay);
            }
        }

        public override void OnPostWork(string data = null)
        {
            if (IsWaferTransfered)
            {
                if (Pos == MovementPosition.Up)
                {
                    WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, _blade==Hand.Blade1 ? 0 : 1, Module, 0);
                }
                else
                {
                    WaferManager.Instance.WaferMoved(Module, 0, ModuleName.EfemRobot, _blade == Hand.Blade1 ? 0 : 1);
                }
            }
        }
    }



    class SlitDoorAction : PmActionBase
    {
        public PMEntity PmEntity { get; set; }
 
        private bool _isOpen;

        public SlitDoorAction(ModuleName mod, JetPM pm, bool isOpen ) : base(mod, pm)
        {
            _isOpen = isOpen;
        }

        public override void Execute()
        {
            if (Module == ModuleName.PMA)
                PmEntity = Singleton<RouteManager>.Instance.PMA;
            else if (Module == ModuleName.PMB)
                PmEntity = Singleton<RouteManager>.Instance.PMB;

            if (PmEntity != null)
            {
                if (_isOpen)
                {
                    PmEntity.PostMsg(PMEntity.MSG.OpenSlitDoor, ID );
                }
                else
                {
                    PmEntity.PostMsg(PMEntity.MSG.CloseSlitDoor, ID);
                }
            }
        }

        public override void OnPostWork(string data = null)
        {

        }
    }
}